CN112323048B - 用于化学源容器的液位传感器 - Google Patents

用于化学源容器的液位传感器 Download PDF

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CN112323048B
CN112323048B CN202010716291.XA CN202010716291A CN112323048B CN 112323048 B CN112323048 B CN 112323048B CN 202010716291 A CN202010716291 A CN 202010716291A CN 112323048 B CN112323048 B CN 112323048B
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level sensor
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CN112323048A (zh
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A.M.耶德纳克三世
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C16/45523—Pulsed gas flow or change of composition over time
    • C23C16/45525—Atomic layer deposition [ALD]
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    • G01F23/24—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of resistance of resistors due to contact with conductor fluid
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    • G01F23/263—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of capacity or inductance of capacitors or inductors arising from the presence of liquid or fluent solid material in the electric or electromagnetic fields by measuring variations in capacitance of capacitors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
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Abstract

本发明公开了一种用于容纳液体化学前体的化学容器，所述化学容器包括液位传感器管。液位传感器管被构造成在液体化学前体被加热到沸点或蒸发点的环境中操作。液位传感器管包括具有内置的槽的壳体，以防止设置在所述液位传感器管内的传感器的任何错误读数。

Description

用于化学源容器的液位传感器
技术领域
本公开大体上涉及一种用于处理半导体晶片的设备。更具体地，本公开涉及一种用于设备中的容器的液位传感器，所述设备用于从液体源提供汽化的气体前体，该液体源用在用于在例如原子层沉积(ALD)工艺、化学气相沉积(CVD)工艺或外延沉积工艺中将膜沉积在半导体晶片上的系统中。液位传感器将用于高温环境或将液体煮沸或汽化成气体的环境。
背景技术
在膜沉积系统中，气体在半导体晶片上流动，由此气体可与其它气态前体反应以便形成特定膜。气体可以通过煮沸或汽化容器中的液体产生。
了解容器中的前体的量以便监测产生的蒸汽的量以及剩余的液体量可能是重要的。监测可以通过使用液位传感器，例如，授予Birtcher等人的名称为“Ultrasonic LiquidLevel Sensing Systems(超声液位感测系统)”的美国专利号10,151,618中描述的液位传感器来实现。通过对容器的适当监测，可以根据需要对容器进行再填充。
然而，使容器中的液体沸腾或汽化的过程可能导致现有技术的液位传感器管中的气泡上升，从而导致现有技术的液位传感器的错误读数。错误读数可能由随机湿信号和干信号引起，从而导致在化学容器和用于沉积半导体膜的系统中触发安全措施。
因此，需要一种用于高温环境或化学源容器内的沸腾环境的准确液位传感器。
发明内容
公开了一种用于提供化学前体的化学容器，所述化学前体用于将半导体膜沉积在衬底上。所述化学容器包括：容器壳体；以及从所述容器壳体的顶部延伸的液位传感器管，所述液位传感器管包括：液位传感器管壳；内置到所述液位传感器管壳中的槽；以及设置在所述液位传感器管壳内的多个传感器，所述多个传感器被配置成指示所述容器壳体内的液体化学前体的液位。
提供本概述是为了以简化的形式引入一系列概念。下文在本公开的实例实施例的详细描述中更详细地描述这些概念。本概述并非旨在标识所要求保护的主题的关键特征或必要特征，也并非旨在用于限制所要求保护的主题的范围。
附图说明
下文将参照某些实施例的图式来描述本文中所公开的本发明的这些和其它特征、方面和优势，所述实施例意图说明而不是限制本发明。
图1是根据本发明的至少一个实施例的化学容器的透视图。
图2是根据本发明的至少一个实施例的化学容器的横截面图。
图3A是根据本发明的至少一个实施例的液位传感器的透视图。
图3B是根据本发明的至少一个实施例的液位传感器的横截面图。
图4A是根据本发明的至少一个实施例的液位传感器的透视图。
图4B是根据本发明的至少一个实施例的液位传感器的横截面图。
图5A是根据本发明的至少一个实施例的液位传感器的透视图。
图5B是根据本发明的至少一个实施例的液位传感器的横截面图。
图6是根据本发明的至少一个实施例的反应系统的示意图。
应理解，图中的元件仅为简单和清晰起见示意而不一定按比例绘制。举例来说，图中的一些元件的尺寸可能相对于其它元件放大，以有助于改进对本公开的所说明的实施例的理解。
具体实施方式
尽管下文公开了某些实施例和示例，但所属领域的技术人员将理解，本发明延伸超出了本发明具体公开的实施例和/或用途以及显而易见的修改和其等效物。因此，希望本发明所公开的范围不应受下文所描述特定公开实施例的限制。
本文中呈现的图示并不意味着是任何特定材料、结构或装置的实际视图，而仅仅是用于描述本公开的实施例的理想化表示。
如本文中所使用，术语“原子层沉积(ALD)”可以指在处理室中进行沉积循环，优选地多个连续沉积循环的气相沉积工艺。通常，在每个循环期间，将前体用化学方法吸附到沉积表面(例如衬底表面或先前沉积的底层表面，如来自先前ALD循环的材料)，由此形成不易与额外前体反应(即，自限性反应)的单层或亚单层。此后，必要时，可以随后将反应物(例如，另一种前体或反应气体)引入到处理室中，以用于将化学吸附的前体转换成沉积表面上的所需材料。通常，此反应物能够与前体进一步反应。此外，在每个循环期间，还可以利用吹扫步骤以在转化被化学吸附的前体之后从处理室中移除过量前体和/或从处理室中移除过量反应物和/或反应副产物。此外，当使用前体组合物、反应气体和吹扫气体(例如，惰性载气)的交替脉冲执行时，如本文中所使用的术语“原子层沉积”还意图包含通过例如“化学气相原子层沉积”、“原子层外延法(ALE)”、分子束外延法(MBE)、气体源MBE或有机金属MBE和化学束外延法等相关术语指定的工艺。
如本文中所使用，术语“化学气相沉积(CVD)”可以指其中衬底暴露于一种或多种挥发性前体的任何工艺，该前体在衬底表面上反应和/或分解以产生所需沉积。
化学容器可用于容纳随后在用于形成半导体膜时汽化的液体前体。图1示出了根据本发明的至少一个实施例的化学容器100。化学容器100包括容器壳体110、第一阀120A、第二阀120B、第三阀120C和液位传感器端口130。
第一阀120A可连接到气体源(未示出)。第二阀120B可连接到真空源或液体源(未示出)。第三阀120C可连接到反应室(未示出)，其中可发生膜的沉积。阀120A-120C可以包括手动或气动阀。液位传感器端口130可允许与控制器、与处理器、与热电偶或与加热元件(未示出)电连接。这些电连接可以位于化学容器100上的其它地方。
化学容器100可以包括图2中所示的附加部件。化学容器100还可以包括液位传感器管140和多个传感器150A-150D。液位传感器管140可连接到液位传感器管端口130。
多个传感器150A-150D可位于沿着液位传感器管140的特定点处，以指示容器壳体110内部的液体处于特定液位。例如，传感器150A的读数可以指示容器壳体110内的液体处于75％液位，传感器150B的读数可以指示容器壳体110内的液体处于65％液位，传感器150C的读数可以指示容器壳体110内的液体处于5％液位，并且传感器150D的读数可以指示容器壳体110内的液体处于1％液位。传感器150A-150D可以位于其它液位以显示容器壳体110内的液位处于其它数值水平。液位传感器管140可具有槽160，其允许在容器壳体110内的液体沸腾时准确测量液体。
先前方法已使用呈圆形形状无槽的液位传感器管，其形状类似于吸管。先前方法的液位传感器管可在中间具有流体室。根据本发明的至少一个实施例的液位传感器管可以不同形状制成，但槽160的存在将允许准确测量液位而无任何错误读数。
图3A示出了根据本发明的至少一个实施例的液位传感器管300。液位传感器管300包括U形壳体310，其中槽/通道320内置在液位传感器管300中。U-形壳体310可包括金属(例如，不锈钢)、塑料(例如，特氟龙(Teflon))、陶瓷或其任何组合，只要材料能够经受可能有腐蚀性的化学品的沸腾环境即可。
槽/通道320示出为矩形形状。槽/通道320可以贯穿液位传感器管300连续地开放，或者可以沿着该液位传感器管以规则的间隔闭合。槽/通道320的存在允许在化学容器中的液体被煮沸或汽化时形成的气泡的表面张力扩散。通过减少形成的气泡的表面张力，这将防止液位传感器管300中的传感器的任何错误读数。另外，完全开放的通道/槽320将允许在槽/通道320内部测得的压力等于围绕液位传感器管300或大体上在化学容器100内的液体的压力。
用于液位传感器管的现有技术方法可以使用具有几个排气孔的完全封闭管；这会导致液位传感器管内部的压力与容器中管外部的压力之间的差异，从而导致液位传感器的较高液位读数。根据本发明的至少一个实施例的设计将使液位传感器管内部和外部的压力相等，从而在快速脉冲操作期间产生较少错误液位读数。
图3B示出了在放置传感器的位置处的液位传感器管300的横截面。液位传感器管300的U形壳体310包括两个部分：外壳体部分310A和内壳体部分310B。液位传感器管300还包括第一传感器330A和第二传感器330B。第一传感器330A和第二传感器330B可包括：超声波传感器；压电传感器；电容传感器；电导传感器；或光电传感器。有可能，第一传感器330A可以是信号发射器，而第二传感器330B可以是信号接收器。还有可能，第一传感器330A可以既是信号发射器又是信号接收器，而第二传感器330B可以是信号反射器。此外，还有可能，第一传感器330A和第二传感器330B可以既是信号发射器又是信号接收器。
外壳体部分310A用位于液位传感器管300的顶部和底部处的盖密封到内壳体部分310B，以便在U形壳体310内提供密封和干燥的环境。密封和干燥的环境将允许保护第一传感器330A和第二传感器330B不受化学容器中的液体的影响。
图4A示出了根据本发明的至少一个实施例的液位传感器管400。液位传感器管400包括圆形壳体410，其中槽/通道420内置在液位传感器管400中。圆形壳体410可包括金属(例如，不锈钢)、塑料(例如，特氟龙)、陶瓷或其任何组合，只要材料能够经受可能有腐蚀性的化学品的沸腾环境即可。
槽/通道示出为矩形形状。槽/通道420的存在允许在化学容器中的液体被煮沸或汽化时形成的气泡的表面张力扩散。通过减少形成的气泡的表面张力，这将防止液位传感器管400中的传感器的任何错误读数。另外，完全开放的通道/槽420将允许在槽/通道420内部测得的压力等于围绕液位传感器管400或大体上在化学容器100内的液体的压力。
用于液位传感器管的现有技术方法可以使用具有几个排气孔的完全封闭管；这会导致液位传感器管内部的压力与容器中管外部的压力之间的差异，从而导致液位传感器的较高液位读数。根据本发明的至少一个实施例的设计将使液位传感器管内部和外部的压力相等，从而在快速脉冲操作期间产生较少错误液位读数。
图4B示出了在放置传感器的位置处的液位传感器管400的横截面。液位传感器管400的圆形壳体410包括两个部分：外壳体部分410A和内壳体部分410B。液位传感器管400还包括第一传感器430A和第二传感器430B。第一传感器430A和第二传感器430B可包括：超声波传感器，例如由超声波传感器制造的传感器；压电传感器；电容传感器；电导传感器；或光电传感器。有可能，第一传感器430A可以是信号发射器，而第二传感器430B可以是信号接收器。还有可能，第一传感器430A可以既是信号发射器又是信号接收器，而第二传感器430B可以是信号反射器。此外，还有可能，第一传感器430A和第二传感器430B可以既是信号发射器又是信号接收器。
外壳体部分410A用位于液位传感器管400的顶部和底部处的盖密封到内壳体部分410B，以便在圆形壳体410内提供密封和干燥的环境。密封和干燥的环境将允许保护第一传感器430A和第二传感器430B不受化学容器中的液体的影响。
图5A示出了根据本发明的至少一个实施例的液位传感器管500。液位传感器管500包括圆形壳体510，其中圆形槽520内置在液位传感器管500中。圆形壳体510可包括金属(例如，不锈钢)、塑料(例如，特氟龙)、陶瓷或其任何组合，只要材料能够经受可能有腐蚀性的化学品的沸腾环境即可。
圆形槽/通道520示出为具有至少一个圆形表面。圆形槽520的存在允许在化学容器中的液体被煮沸或汽化时形成的气泡的表面张力扩散。通过减少形成的气泡的表面张力，这将防止液位传感器管500中的传感器的任何错误读数。另外，完全开放的通道/槽520将允许在槽/通道520内部测得的压力等于围绕液位传感器管500或大体上在化学容器100内的液体的压力。
用于液位传感器管的现有技术方法可以使用具有几个排气孔的完全封闭管；这会导致液位传感器管内部的压力与容器中管外部的压力之间的差异，从而导致液位传感器的较高液位读数。根据本发明的至少一个实施例的设计将使液位传感器管内部和外部的压力相等，从而在快速脉冲操作期间产生较少错误液位读数。
图5B示出了在放置传感器的位置处的液位传感器管500的横截面。液位传感器管500的圆形壳体510包括两个部分：外壳体部分510A和内壳体部分510B。液位传感器管500还包括第一传感器530A和第二传感器530B。第一传感器530A和第二传感器530B可包括：超声波传感器；压电传感器；电容传感器；电导传感器；或光电传感器。有可能，第一传感器530A可以是信号发射器，而第二传感器530B可以是信号接收器。还有可能，第一传感器530A可以既是信号发射器又是信号接收器，而第二传感器530B可以是信号反射器。此外，还有可能，第一传感器530A和第二传感器530B可以既是信号发射器又是信号接收器。
外壳体部分510A用位于液位传感器管500的顶部和底部处的盖密封到内壳体部分510B，以便在圆形壳体510内提供密封和干燥的环境。密封和干燥的环境将允许保护第一传感器530A和第二传感器530B不受化学容器中的液体的影响。
图6示出了根据本发明的至少一个实施例的反应系统600。反应系统600可包括：前体容器610、载气源620、液体再填充源630，以及反应室640。前体容器610包括如先前所描述的容器和液位传感器。载气源620(其可为任选的)可向前体容器610提供载气(例如，氮气或其它惰性气体)，所述载气容器将携带汽化的前体离开前体容器610并进入反应室640，在此其可在设置于反应室640内的半导体晶片上反应。液体再填充源630可以被构造成在液位传感器确定前体容器610内的液体前体的液位太低时向前体容器610提供额外的液体前体。
关于本发明的多个实施例，液位传感器管的槽/通道可具有另外的实施方式。例如，槽/通道可以利用三角形形状。槽/通道可仅沿液位传感器管向下部分延伸，使得其测量化学容器中的特定深度子集的液位。此外，液位传感器管内的传感器可包括沿着液位传感器管的多个传感器，或沿着液位传感器管延伸的单个传感器。
所示和所描述的特定实施方式是对本发明和其最佳模式的说明，并且无意以任何方式限制各方面和实施方式的范围。实际上，为了简洁起见，可能未详细描述系统的常规制造、连接、准备和其它功能方面。此外，各种图中所示的连接线旨在表示各种元件之间的示范性功能关系和/或物理联接。许多替代的或附加的功能关系或物理连接可能存在于实际的系统中，和/或在一些实施方案中可能不存在。
应理解，本文描述的构造和/或方法本质上是示范性的，并且这些具体实施例或实例不应在限制意义上予以考虑，因为许多变化是可能的。本文所描述的具体例程或方法可表示任何数目的处理策略中的一个或多个。因此，所示的各种动作可以以所示的顺序执行、以其他顺序执行或者在一些情况下可以省略。
本公开的主题包括本文所公开的各种过程、系统和构造以及其它特征、功能、动作和/或特性以及其任何和所有等效物的所有新颖并且非显而易见的组合和子组合。

Claims (20)

1.一种用于提供化学前体的化学容器，所述化学前体用于将半导体膜沉积在衬底上，所述化学容器包括：
容器壳体，所述容器壳体包括液位传感器端口；以及
从所述容器壳体的顶部竖直延伸所述容器壳体内固定深度的液位传感器管，所述液位传感器管包括：
液位传感器管壳，所述液位传感器管壳包括与设置在所述容器壳体内的液体化学前体直接接触的外表面，并在所述管壳内侧具有密封和干燥的环境，保护所述环境免受化学前体影响，所述液位传感器管壳包括槽，所述槽设置在所述液位传感器管壳的外表面上并延伸所述液位传感器管壳的整个长度并构造成在其中适应液体化学前体的放置；以及
设置在所述液位传感器管壳内在所述密封和干燥的环境内的多个传感器，所述多个传感器沿着所述液位传感器管定位在竖直位置处，与所述容器壳体内的液体化学前体的液位相关联，其中所述多个传感器中的至少一个与所述液位传感器管壳的内侧壁表面接触。
2.根据权利要求1所述的化学容器，其中所述传感器管壳包括与内壳体部分连接的外壳体部分，且其中所述多个传感器中的至少一个与所述液位传感器管壳的内壳体部分的内侧壁表面接触。
3.根据权利要求1所述的化学容器，其中所述槽具有圆形横截面形状。
4.根据权利要求1所述的化学容器，其中所述槽具有矩形横截面形状。
5.根据权利要求1所述的化学容器，其中所述槽具有三角形横截面形状。
6.根据权利要求1所述的化学容器，其中所述多个传感器包括以下各项中的至少一者：超声波传感器；压电传感器；电导传感器；电容传感器；或光电传感器。
7.根据权利要求1所述的化学容器，其中所述液位传感器管壳包括以下各项中的至少一者：金属；陶瓷；或塑料。
8.根据权利要求1所述的化学容器，其中，所述多个传感器中的至少一个与形成槽的所述管壳的内壁表面的一部分接触。
9.根据权利要求1所述的化学容器，其中，所述多个传感器中的两个在相对于槽相对的位置处与所述管壳的内壁表面接触。
10.一种用于将半导体膜沉积在衬底上的反应系统，所述反应系统包括：
化学容器，所述化学容器包括：
容器壳体，所述容器壳体包括液位传感器端口；以及
从所述容器壳体的顶部竖直延伸所述容器壳体内固定深度的液位传感器管，所述液位传感器管包括：
液位传感器管壳，所述液位传感器管壳包括与设置在所述容器壳体内的液体化学前体直接接触的外表面，并在所述管壳内侧具有密封和干燥的环境，保护所述环境免受化学前体影响，所述液位传感器管壳包括槽，所述槽设置在所述液位传感器管壳的外表面上并延伸所述液位传感器管壳的整个长度并构造成在其中适应液体化学前体的放置；以及
设置在所述液位传感器管壳内在所述密封和干燥的环境内的多个传感器，所述多个传感器沿着所述液位传感器管定位在竖直位置处，与所述容器壳体内的液体化学前体的液位相关联，其中所述多个传感器中的至少一个与所述液位传感器管壳的内侧壁表面接触；
反应室，所述反应室被构造成保持衬底并且被构造成从所述化学容器接收气态前体；以及
液体再填充源，所述液体再填充源被构造成向所述化学容器提供额外的液体前体。
11.根据权利要求10所述的反应系统，还包括载气源，所述载气源被构造成向所述化学容器提供载气。
12.一种用于确定液体化学前体在化学容器中的液位的液位传感器管，所述液位传感器管包括：
管壳，所述管壳被构造成设置在所述化学容器中并延伸到化学容器中一定深度，所述管壳具有与所述液体化学前体直接接触的外表面，并具有管壳内侧的密封和干燥环境，所述密封和干燥环境被保护免受液体化学前体影响，所述管壳外侧表面包括开放通道，所述开放通道径向向内突出到管壳内并延伸所述管壳的整个长度，用于适应其中的液体化学前体的放置；以及
设置在管壳内侧的密封和干燥环境中的至少一个传感器，其中，所述至少一个传感器的仅一个表面在与化学容器内的液体化学前体的液位相关联的液位传感器管的竖直位置处与管壳接触，其中至少一个传感器被构造成从所述管壳内侧的密封和干燥环境之内确定液体化学前体的液位，而不接触该液体化学前体。
13.根据权利要求12所述的液位传感器管，其中，所述管壳包括连接到内壳体部分的外壳体部分，且其中，至少一个传感器仅与所述内壳体部分的内侧壁表面接触。
14.根据权利要求12所述的液位传感器管，包括至少两个传感器，所述至少两个传感器沿着所述液位传感器管定位在不同竖直位置处，所述竖直位置与所述化学容器内的化学前体的不同确定液位相关联。
15.根据权利要求12所述的液位传感器管，其中，至少一个传感器定位在所述通道附近。
16.根据权利要求12所述的液位传感器管，包括至少两个传感器，所述至少两个传感器各自邻近所述通道与所述管壳的内侧壁表面接触。
17.根据权利要求16所述的液位传感器管，其中，所述至少两个传感器定位在所述通道的相对侧。
18.根据权利要求12所述的液位传感器管，其中，所述管壳是中空的内侧且由内壳体部分限定，该内壳体部分与外壳体部分密封，且其中，所述密封和干燥的环境在所述内壳体部分和外壳体部分之间延伸。
19.根据权利要求18所述的液位传感器管，其中，所述至少一个传感器包括保留表面，所述保留表面在所述管壳中空内侧中并且不与所述管壳接触。
20.根据权利要求12所述的液位传感器管，其中，所述管壳开放通道沿着管壳的长度连续延伸，而没有设置在其中的侵入元件。
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液—气联动差压连通管式桥梁竖向位移监测方法研究;朱世峰;中国优秀硕士学位论文全文数据库工程科技Ⅱ辑;全文 *

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KR20210018759A (ko) 2021-02-18

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