JPH1050800A - 処理装置 - Google Patents
処理装置Info
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- JPH1050800A JPH1050800A JP22171696A JP22171696A JPH1050800A JP H1050800 A JPH1050800 A JP H1050800A JP 22171696 A JP22171696 A JP 22171696A JP 22171696 A JP22171696 A JP 22171696A JP H1050800 A JPH1050800 A JP H1050800A
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Abstract
(57)【要約】
【目的】 メインテナンススペースを含む装置設置面積
をコンパクト化し、全体を無理なくメインテナンス可能
とする。 【構成】 処理手段１７のメインテナンス作業を行う場
合には、先ず搬送手段１３、１８が動作しない状態であ
ることを確認し、作業員は入口１６ａから装置本体１１
内に入り、隔壁２０を外して矢印R1方向からメインテナ
ンス作業を行う。このとき、処理手段１７の動作チェッ
ク等は、搬送手段１８の接続口１８ａに接続した操作部
２１により行う。また、R1方向からメインテナンス作業
ができない場合には、装置本体１１の外側のR2方向から
メインテナンス作業を行う。
をコンパクト化し、全体を無理なくメインテナンス可能
とする。 【構成】 処理手段１７のメインテナンス作業を行う場
合には、先ず搬送手段１３、１８が動作しない状態であ
ることを確認し、作業員は入口１６ａから装置本体１１
内に入り、隔壁２０を外して矢印R1方向からメインテナ
ンス作業を行う。このとき、処理手段１７の動作チェッ
ク等は、搬送手段１８の接続口１８ａに接続した操作部
２１により行う。また、R1方向からメインテナンス作業
ができない場合には、装置本体１１の外側のR2方向から
メインテナンス作業を行う。
Description
【０００１】
【発明の属する技術分野】本発明は、半導体製造工程に
おいて内部においてメインテナンス作業を行うことを可
能とした処理装置に関するものである。
おいて内部においてメインテナンス作業を行うことを可
能とした処理装置に関するものである。
【０００２】
【従来の技術】従来、半導体製造工程においては、図６
〜図８の第１〜第３の従来例に示すように、基板に所定
の処理を施こす複数の処理手段１と、これらの処理手段
１に基板を搬送するための搬送手段２、３とから構成さ
れる処理装置が、特開平５−１３５５１号公報又は特開
平７−８６３７５号公報に開示されており、作業員は装
置本体４の外部の斜線で示したメインテナンススペース
５から処理手段１のメインテナンス作業を行っている。
〜図８の第１〜第３の従来例に示すように、基板に所定
の処理を施こす複数の処理手段１と、これらの処理手段
１に基板を搬送するための搬送手段２、３とから構成さ
れる処理装置が、特開平５−１３５５１号公報又は特開
平７−８６３７５号公報に開示されており、作業員は装
置本体４の外部の斜線で示したメインテナンススペース
５から処理手段１のメインテナンス作業を行っている。
【０００３】
【発明が解決しようとする課題】しかしながら上述の従
来例においては、装置本体４の外部にメインテナンスス
ペース５が確保されているために、このメインテナンス
スペース５を含む装置全体の設置面積が大きくなり、装
置本体４を部屋の壁に直接取り付けて設置することがで
きず、また装置本体４の内部で処理する基板の大口径化
に伴って処理手段１が大きくなり、装置本体４の外部か
ら処理手段１のメインテナンス作業を行うことができな
いという問題が生ずる。
来例においては、装置本体４の外部にメインテナンスス
ペース５が確保されているために、このメインテナンス
スペース５を含む装置全体の設置面積が大きくなり、装
置本体４を部屋の壁に直接取り付けて設置することがで
きず、また装置本体４の内部で処理する基板の大口径化
に伴って処理手段１が大きくなり、装置本体４の外部か
ら処理手段１のメインテナンス作業を行うことができな
いという問題が生ずる。
【０００４】本発明の目的は、上述の問題点を解消し、
メインテナンススペースを含む装置の設置面積をコンパ
クト化し、全体を無理なくメインテナンスを可能とする
処理装置を提供することにある。
メインテナンススペースを含む装置の設置面積をコンパ
クト化し、全体を無理なくメインテナンスを可能とする
処理装置を提供することにある。
【０００５】
【課題を解決するための手段】上記目的を達成するため
の本発明に係る処理装置は、半導体製造工程において基
板に所定の処理を施こす複数の処理手段と、これらの処
理手段に前記基板を搬送するための搬送手段とを備えた
処理装置において、内部スペースにおいて作業員がメイ
ンテナンス作業を行うことができる筐体構造としたこと
を特徴とする。
の本発明に係る処理装置は、半導体製造工程において基
板に所定の処理を施こす複数の処理手段と、これらの処
理手段に前記基板を搬送するための搬送手段とを備えた
処理装置において、内部スペースにおいて作業員がメイ
ンテナンス作業を行うことができる筐体構造としたこと
を特徴とする。
【０００６】
【発明の実施の形態】本発明を図１〜図５に図示の実施
例に基づいて詳細に説明する。図１は第１の実施例の平
面図を示し、部屋の上側及び左側に斜線で示すようにス
ペース１０を設けてその内側に装置本体１１が配置され
ている。装置本体１１には、基板を収納する複数のカセ
ット載置台１２が縦方向に配列され、その横にカセット
の基板を搬送する搬送手段１３が設けられている。な
お、スペース１４内をこの搬送手段１３が移動できるよ
うになっている。
例に基づいて詳細に説明する。図１は第１の実施例の平
面図を示し、部屋の上側及び左側に斜線で示すようにス
ペース１０を設けてその内側に装置本体１１が配置され
ている。装置本体１１には、基板を収納する複数のカセ
ット載置台１２が縦方向に配列され、その横にカセット
の基板を搬送する搬送手段１３が設けられている。な
お、スペース１４内をこの搬送手段１３が移動できるよ
うになっている。
【０００７】また、装置本体１１内のカセット載置台１
２を背にした左側には、奥行きの深い処理手段１５が横
方向にに配列され、途中の１個所にメインテナンススペ
ース１６が設けられている。そして、右側には通常の処
理手段１７が横方向に配列されており、処理手段１５と
１７の間には基板Ａの搬送手段１８が設けられ、この搬
送手段１８がスペース１９内を移動できるようにされて
いる。また、処理手段１５、１７にはそれぞれ隔壁２０
が設けられている。
２を背にした左側には、奥行きの深い処理手段１５が横
方向にに配列され、途中の１個所にメインテナンススペ
ース１６が設けられている。そして、右側には通常の処
理手段１７が横方向に配列されており、処理手段１５と
１７の間には基板Ａの搬送手段１８が設けられ、この搬
送手段１８がスペース１９内を移動できるようにされて
いる。また、処理手段１５、１７にはそれぞれ隔壁２０
が設けられている。
【０００８】搬送手段１３、１８には、装置本体１１内
で動作チェックなどのメインテナンス作業を行うための
操作部２１が設けられ、操作部２１の出力は搬送手段１
３、１８の接続口１３ａ、１８ａに接続されている。ま
た、メインテナンス作業を行うために、スペース１４、
１６内に通ずる入口１４ａ、１６ａが設けられており、
作業員が出入りできるようになっている。
で動作チェックなどのメインテナンス作業を行うための
操作部２１が設けられ、操作部２１の出力は搬送手段１
３、１８の接続口１３ａ、１８ａに接続されている。ま
た、メインテナンス作業を行うために、スペース１４、
１６内に通ずる入口１４ａ、１６ａが設けられており、
作業員が出入りできるようになっている。
【０００９】処理手段１７のメインテナンス作業を行う
場合には、先ず搬送手段１３、１８が動作しない状態で
あることを確認し、作業員は入口１６ａから装置本体１
１内に入り、隔壁２０を外して矢印R1方向からメインテ
ナンス作業を行う。このとき、処理手段１７の動作チェ
ック等は搬送手段１８の接続口１８ａに接続した操作部
２１によって行う。また、R1方向からメインテナンス作
業ができない場合には、装置本体１１の外側のR2方向か
らメインテナンス作業を行う。
場合には、先ず搬送手段１３、１８が動作しない状態で
あることを確認し、作業員は入口１６ａから装置本体１
１内に入り、隔壁２０を外して矢印R1方向からメインテ
ナンス作業を行う。このとき、処理手段１７の動作チェ
ック等は搬送手段１８の接続口１８ａに接続した操作部
２１によって行う。また、R1方向からメインテナンス作
業ができない場合には、装置本体１１の外側のR2方向か
らメインテナンス作業を行う。
【００１０】図２は安全手段の斜視図を示し、搬送手段
１３、１８の移動スペース１４、１９内に作業員が入っ
てメインテナンス作業を行っている間は、作業員の安全
を確保するために、搬送手段１３、１８が動作しないよ
うにする安全手段を設けることがが好ましい。つまり、
搬送手段１３、１８の移動スペース１４、１９の床面２
２から所定の高さに、光センサ２３の投光部２３ａ及び
受光部２３ｂが配置され、移動スペース１４、１９内に
作業員が入った場合には、その足によって光束Ｌが遮ぎ
られて、これを検知するようになっている。
１３、１８の移動スペース１４、１９内に作業員が入っ
てメインテナンス作業を行っている間は、作業員の安全
を確保するために、搬送手段１３、１８が動作しないよ
うにする安全手段を設けることがが好ましい。つまり、
搬送手段１３、１８の移動スペース１４、１９の床面２
２から所定の高さに、光センサ２３の投光部２３ａ及び
受光部２３ｂが配置され、移動スペース１４、１９内に
作業員が入った場合には、その足によって光束Ｌが遮ぎ
られて、これを検知するようになっている。
【００１１】仮に、搬送手段１３、１８が動作可能な状
態で、光センサ２３が作業員などを検知した場合には、
図示されない搬送手段の制御部に信号が送られて、直ち
に搬送手段１３、１８を動作しない状態にする。
態で、光センサ２３が作業員などを検知した場合には、
図示されない搬送手段の制御部に信号が送られて、直ち
に搬送手段１３、１８を動作しない状態にする。
【００１２】図３〜図５は第１〜第３の従来例の図６〜
図８にそれぞれ対応した第２〜第４の実施例である。図
１と同様に、搬送手段１３、１８及び処理手段１５、１
７の装置内レイアウトを変更し、装置本体１１内におい
てメインテナンス作業を行うことができるようにされて
いる。
図８にそれぞれ対応した第２〜第４の実施例である。図
１と同様に、搬送手段１３、１８及び処理手段１５、１
７の装置内レイアウトを変更し、装置本体１１内におい
てメインテナンス作業を行うことができるようにされて
いる。
【００１３】このときの単位長さをｘとして、それぞれ
のメインテナンススペースを含む装置本体１１の設置ス
ペースを比較すると、第２、第３、第４の実施例では、
順次に第１、第２、第３の従来例に対して２８／３５、
１８／２８、２１／２８となり、従来例の８０％以下の
設置面積で十分となり、省スペース化が可能となる。
のメインテナンススペースを含む装置本体１１の設置ス
ペースを比較すると、第２、第３、第４の実施例では、
順次に第１、第２、第３の従来例に対して２８／３５、
１８／２８、２１／２８となり、従来例の８０％以下の
設置面積で十分となり、省スペース化が可能となる。
【００１４】
【発明の効果】以上説明したように本発明に係る処理手
段は、作業員が処理手段内のスペースで作業可能な筐体
構造としたことにより、装置内部からメインテナンス作
業を行うことができ、メインテナンススペースを含む装
置設置面積を小さくし、例えば装置の一部を部屋の壁に
直接取り付けることを可能にしている。また、装置内部
及び装置外部の双方から作業を行うことができるので、
無理のないメインテナンス作業を行うことができる。
段は、作業員が処理手段内のスペースで作業可能な筐体
構造としたことにより、装置内部からメインテナンス作
業を行うことができ、メインテナンススペースを含む装
置設置面積を小さくし、例えば装置の一部を部屋の壁に
直接取り付けることを可能にしている。また、装置内部
及び装置外部の双方から作業を行うことができるので、
無理のないメインテナンス作業を行うことができる。
【図１】第１の実施例の平面図である。
【図２】安全手段の斜視図である。
【図３】第２の実施例の平面図である。
【図４】第３の実施例の平面図である。
【図５】第４の実施例の平面図である。
【図６】第１の従来例の平面図である。
【図７】第２の従来例の平面図である。
【図８】第３の従来例の平面図である。
１０、１４、１６、１９ スペース １１ 装置本体 １２ 基板収納カセット載置台 １３、１８ 搬送手段 １５、１７ 処理手段 ２０ 隔壁 ２１ 操作部 ２３ 光センサ
Claims (6)
- 【請求項１】 半導体製造工程において基板に所定の処
理を施こす複数の処理手段と、これらの処理手段に前記
基板を搬送するための搬送手段とを備えた処理装置にお
いて、内部スペースにおいて作業員がメインテナンス作
業を行うことができる筐体構造としたことを特徴とする
処理装置。 - 【請求項２】 前記の内部スペースと前記処理手段とが
接する隔壁を作業員が前記内部スペース側から取り外し
可能とした請求項１に記載の処理装置。 - 【請求項３】 メインテナンス作業を行う操作部を前記
内部スペースから操作可能とした請求項１又は２に記載
の処理装置。 - 【請求項４】 前記搬送手段の移動スペース内に作業員
が作業できる空間を設けた請求項１又は２に記載の処理
装置。 - 【請求項５】 前記搬送手段の移動スペース内に作業員
が居る間は前記搬送手段が動作しないようにする安全手
段を設けた請求項４に記載の処理装置。 - 【請求項６】 メインテナンス作業を行う操作部を前記
搬送手段の移動スペースから操作可能とした請求項４に
記載の処理装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22171696A JPH1050800A (ja) | 1996-08-05 | 1996-08-05 | 処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22171696A JPH1050800A (ja) | 1996-08-05 | 1996-08-05 | 処理装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1050800A true JPH1050800A (ja) | 1998-02-20 |
Family
ID=16771153
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22171696A Withdrawn JPH1050800A (ja) | 1996-08-05 | 1996-08-05 | 処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1050800A (ja) |
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| JP2013171983A (ja) * | 2012-02-21 | 2013-09-02 | Tokyo Electron Ltd | 基板処理装置 |
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