TW538327B - System and method for a mass flow controller - Google Patents

Abstract

A system and method for controlling a mass flow controller to have a constant control loop gain under a variety of different types of fluids and operating conditions, and for configuring the mass flow controller for operation with a fluid and/or operating conditions different from that used during a production of the mass flow controller. Further, the system and method includes providing control by reducing the effects of hysteresis in solenoid actuated devices by providing a non-operational signal to the solenoid actuated device.

Description

A7 538327 V. Description of the Invention (ί) This application claims priority according to 35U.SC§119 (e) in accordance with US Provisional Patent Application No. 6 0 / 285,801. "SYSTEM AND METHOD FOR A MASS FLOW CONTROLLER" was filed on April 24, 2001, and is hereby incorporated by reference in its entirety. FIELD OF THE INVENTION The present invention relates to methods and systems for controlling the flow rate of fluids, and more particularly to a mass flow controller that can be assembled for any process fluid and / or process operating conditions, and such processes The fluid and / or process operating conditions may be different from the process fluid and / or process operating conditions used in the production process of the mass flow controller. BACKGROUND OF THE INVENTION Many industrial processes require precise control of a wide variety of process fluids. For example, in the pharmaceutical and semiconductor industries, mass flow controllers are used to accurately measure and control the amount of process fluid introduced into a process chamber. The term fluid in It refers to any substance that can flow in any state. I should be aware that the term fluid applies to liquids, gases, and plasmas, and includes any substance or combination of materials that may need to control its flow rate. Conventional mass flow controllers typically include four main components: a flow rate, a control valve, a valve actuator, and a controller. Flowmeter ------ --- ^ _ This paper size is applicable to China National Standard (CNS) A4 (210 x 297mm t)-------------------- --Order --------- line (please read the precautions on the back before filling this page) A7 538327 __B7 V. Description of the invention (>) The mass flow rate of wine in the circulation path And provide a signal indicating the flow rate. The flow meter may include a mass flow sensor and a bypass pipe. A mass flu reactor measures the mass flow rate of the fluid in a sensor tube, which is fluidly coupled to the bypass tube. The mass flow rate of the fluid in the sensor tube is approximately proportional to the mass flow rate of the fluid in the bypass tube, and the sum of the two flow rates is the total flow rate through the flow path controlled by the mass flow controller. However, it should be understood that some mass flow controllers may not use bypass tubes; for this reason, all fluids can pass through the sensor conduit. Thermal mass flow sensors with a pair of resistors are used in many mass flow controllers, where the pair of resistors are wound around the inductor conduit at spaced locations, and the resistance of each resistor changes with temperature . As the fluid passes through the sensor conduit, heat is carried from the resistor located upstream to the resistor located downstream, and the temperature difference is directly proportional to the mass flow rate of the fluid through the sensor conduit and the bypass. The control valve is located in the main flow path (usually downstream of the bypass pipe and the mass flow sensor) and can be controlled by the mass flow controller (for example, opening or closing) to change the flow of fluid through the main flow path. Mass flow rate. The above valves are usually controlled by valve actuators, and examples J include: solenoid actuators, piezoelectric actuators, step actuators, and the like. The control electronic device controls the position of the control valve according to the set point indicating the mass flow rate of the fluid, and I hope that the set point is provided by the mass flow control device, and the flow signal from the mass flow sensor will indicate that the The actual mass flow rate of the fluid in the catheter. The conventional feedback control method can then be used to control the flow rate of the fluid in the mass flow controller. The feedback -------------- install --- (Please read the precautions on the back before filling (This page) .. Line · This paper size is applicable to China National Standard (CNS) A4 (21〇X 297 mm) A7 538327 _B7_____ V. Description of the Invention (Clever) ---- I ---- I --- -· II (Please read the notes on the back before filling this page) Examples of control methods include: proportional control, integral control, proportional-integral (PI) control, differential control, proportional-derivative (PD) control, integral-derivative (ID) control, and proportional-integral-derivative (PID) control. In any of the above-mentioned feedback control methods, a control signal (for example, a control valve driving signal) is generated based on an error signal, which is a set-point signal and feedback representing the desired mass flow rate of the fluid. The difference between the signals, and the feedback signal is related to the actual mass flow rate sensed by the mass flow sensor. Many conventional mass flow controllers are susceptible to external factors due to component performance. These external factors depend on a number of operating conditions, including: fluid type, flow rate, inlet and / or outlet pressure, temperature, etc. In addition, the conventional mass flow controller may exhibit some irregular characteristics, especially in the component combination used in the production of the mass flow controller, which may cause inconsistent and unstable performance of the mass flow controller. . i-line · To solve some of the above problems, the mass flow controller can be adjusted and / or calibrated during the production process. The production process generally includes operating the mass flow controller under a set of operating conditions, and adjusting and / or calibrating the mass flow controller so that it can exhibit satisfactory performance. As known to those skilled in the art, adjusting and / or calibrating a mass flow controller is an expensive and labor-intensive procedure, which often requires one or more skilled operators and specialized equipment. For example, 'in a typical production process, the mass flow sensor component of a mass flow controller is adjusted by passing a known amount of a known fluid through the sensor component and adjusting certain filters or components to provide appropriate the response to. The size of the bypass pipe is in accordance with Chinese National Standard (CNS) A4 (210 x 297 mm) 538327 A7. 5. Description of the invention (7) The bypass pipe is installed on the sensor, and the bypass pipe is filled with a known fluid. An adjustment to reflect the appropriate ratio of fluids that pass through the main flow path at different known flow rates. The mass flow sensor component and the bypass tube are then fitted to the control valve and control electronics, and then adjusted in a known state. When the type of fluid used by the direct user is different from the type of fluid used for adjustment and / or calibration, or when the operating conditions used by the direct user are such as: inlet and outlet pressure, temperature, flow rate range, etc. When adjusting and / or calibrating the operating conditions used, the operation of the mass flow controller is bound to deteriorate. For this reason, additional fluids (called “alternative fluids”) and / or operating conditions are often adjusted or calibrated, and necessary changes must be made to provide a satisfactory response stored in the look-up table. Although the use of additional and / or calibration with different fluids under different operating conditions can improve the performance of the mass flow controller, this alternative 1 adjustment and / or calibration is very time consuming and expensive because the adjustment and / or calibration procedure must be at least Various alternative fluids are repeated and may have to be repeated for each alternative fluid under different operating conditions. Furthermore, since the replacement fluid is only approximate to the characteristics of various fluids used by the direct user, the actual operation of the mass flow controller at the location of the direct user may be substantially different from the adjustment and / or calibration process. Operation. When I consider a wide range of industries and applications when using mass flow controllers, although a number of different alternative fluids and operating conditions are used to adjust and / or calibrate the mass flow controller, direct users apply it to mass flow control The process fluid and operating conditions of the device may still differ from the test fluid and operating conditions used when adjusting and / or calibrating the mass flow controller. _______ ______6_ — ____ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------- M -------- ti ---- --- line (please read the precautions on the back before filling this page) 538327 A7 ----------- 2Z___ __ V. Description of the Invention (ζ) In addition to the above, it will affect the performance of the mass flow controller and Response to external factors (such as: fluid type, flow rate, inlet and / or outlet pressure, temperature, etc.). The factors that accompany the physical operation of the mass flow controller will also affect the external flow of the mass flow controller. Factors and overall sensitivity to state changes. Example 1g. Many of the valves used to control fluids in mass flow controllers are solenoid actuated devices. Although some manufacturers of mass flow controllers use piezo actuators, the simplicity, fast response, and low cost of solenoid actuators have made them popular. However, the solenoid actuated control valve does have some shortcomings. Among them, the hysteresis phenomenon exhibited by the solenoid actuated control valve (and the general solenoid actuated device) is its biggest disadvantage. Hysteresis is a well-known phenomenon that is commonly found in devices that use magnetic principles, electromagnetic principles, or magnetic materials. In general, hysteresis is used to delay or hinder the degree of magnetization by using changes in the magnetizing force. In many solenoid actuated devices, this creates a situation where the device operation depends not only on the state of the device at the time, but also on its previous state. It is well known that solenoid actuated control valves exhibit hysteresis. It is also well known that such hysteresis can adversely affect the transition between the absence of fluid and the state of the control fluid within the mass flow controller. However, in conventional mass flow controller designs, this disadvantage is generally accepted as a necessary disadvantage of using solenoid-actuated control valves; for many manufacturers, the solenoid-actuated control valve's The advantages are more important than the disadvantages mentioned above. The advantages include simplicity, low cost, and reliability. _____ Z -----— Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) -------------- install --- (Please read the precautions on the back before (Fill this page) ·; line · 538327 A7 ------B7______ V. Description of the invention (k) Summary of invention ---------------- (Please read the note on the back first Please fill in this page again) According to an embodiment of the present invention, a method for setting a mass flow control device is provided so that the mass flow controller and the process operating conditions are operated together. At least part of it is different from the test operating conditions used by the mass flow controller during production. The above method includes the following [J action: establishing a response of the mass flow controller based on the test operating conditions; and changing at least one control parameter of the mass flow controller according to the process operating conditions, such that There is no substantial change in the response of the mass flow controller operating under process operating conditions. ; Line-another embodiment of the present invention includes a computer-readable medium, the medium is encoded by a program executing on a processor, and when the program is executed on the processor, the program will execute the set mass flow controller The method is to make the mass flow controller and the process operating conditions work together. At least a part of the process operation fl conditions is different from the test operating conditions used by the mass flow controller in the production process. The above method includes the following actions: receiving at least one process fluid species information and process operating conditions as an input; and changing at least one control parameter of the mass flow controller according to the process operating conditions so as to operate with the process operating conditions The response of the mass flow controller does not change substantially. According to another embodiment of the present invention, it provides a method for setting a mass flow controller, the mass flow controller having a first response when a first set of operating conditions is applied, and a second set when a setting is applied. A second response to an operating condition, and the second response is substantially different from the first response. The above method includes the following actions: Operate the _____8_______ with the first set of operating conditions. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) A7 538327. 5. Description of the invention (') Mass flow Controller; during the operation, obtaining setting data from the mass flow controller; setting at least one control parameter of the mass flow controller according to the setting data to use the first set of operating conditions to provide the first response And changing the at least one control parameter according to at least a part of the setting data to provide the second response by using the second set of operating conditions. According to another embodiment of the present invention, a method for setting a mass flow controller is provided. The mass flow controller has a control loop including a flow meter that monitors the actual fluid provided by the mass flow controller. And provides an adjusted output signal, the flow meter has a first gain term and a control unit, the control unit receives a second input signal indicating the desired fluid provided by the mass flow controller, and provides A control signal having a second gain term, a valve, and a valve actuator. The second gain term is a function of at least one variable operating condition. The valve is based on one or more components of the valve. Displacement to allow fluid to pass through, and the valve has a third gain term, the valve actuator receives the control signal, and adjusts the displacement of one or more components of the valve, and the valve actuator has a fourth gain term So that it has a substantially fixed control loop gain. The above method includes the following actions: using the first fluid to determine the first, third, and fourth gain terms using the first set of operating conditions; using at least one second fluid and the second set of operating conditions to estimate the first, third, and third gain terms; And how the fourth gain term will change; and changing the second gain term to the inverse of a constant multiplied by the product of the first, third, and fourth gain terms to provide the substance of the at least one variable operating condition Is a fixed control loop gain. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ------------- Installation -------- Order -------- -Line (please read the notes on the back before filling this page) A7 538327 __B7____ V. Description of the Invention (Name) According to another embodiment of the present invention, it provides a method for controlling a mass flow controller, the mass flow The controller has several elements that define the control loop of the mass flow controller. The above method includes the following actions: forming at least one control loop control parameter, the control parameter being a function of at least one variable operating condition; and by applying the at least one control loop control parameter to a control loop of the mass flow controller, The loop gain of the control loop with respect to the at least one variable operating condition is kept fixed. Another embodiment of the present invention includes a mass flow controller. The mass flow controller includes: a flow meter adapted to sense a fluid in a flow path, and provide a label indicating a mass flow rate in the flow path. Flow signal; a controller coupled to the flow meter to provide a drive signal based at least in part on the flow signal; a valve actuator to receive a drive signal from the controller; and a valve from the controller A valve actuator is controlled and coupled to the flow path. The above-mentioned mass flow controller further includes a control loop of the mass flow controller, and the control loop has a fixed closed loop gain. Another embodiment of the present invention includes a mass flow controller with a control loop. The mass flow controller includes: a flow meter adapted to sense a fluid in a flow path, and provide a marking in the flow path. A mass flow rate flow signal; a controller coupled to the flow meter and adapted to provide a drive signal based at least in part on the flow signal; a valve actuator adapted to receive a signal from the controller Drive signal; a valve 'which is controlled by a Yanhai valve actuator and coupled to the flow path; where the control loop of the mass flow controller includes the flow meter, the controller, and the valve --- 1Q____________ this paper Dimensions are applicable to China National Standard (CNS) A4 specifications (210 x 297 mm) -------------- installation-(Please read the precautions on the back before filling this page) · Line · 538327 A7 _____B7____ 5. Description of the invention (1) The actuator and the valve, and wherein the control loop is adapted to a control loop gain term having a relatively fixed, variable operating condition during operation. According to another embodiment of the present invention, a mass flow controller is provided. The mass flow controller includes: a flow meter having a first gain term, by which a mass flow rate of a fluid in a flow path in the mass flow controller is sensed, and a label indicating the fluid in the mass flow controller is provided. A mass flow rate flow signal in a flow path; a valve having a second gain term for receiving a control signal that controls the flow rate of the fluid in the flow path; a valve actuator having a third gain Item for receiving a driving signal 'and providing the driving signal to the valve; and a controller. The controller has a first input terminal for receiving the flow signal, a second input terminal for receiving a setpoint signal indicating a desired flow rate of the fluid, and an output that provides the driving signal to The valve actuator. The controller is adapted to provide a reciprocal gain term generated by obtaining an inverse of a product of at least one of the first gain term, the second gain term, and the third gain term. According to another embodiment of the present invention, a method for determining a valve displacement is provided. The valve has a valve inlet and a valve outlet. The valve inlet is used to receive a fluid under an inlet pressure, and the valve outlet is at -The fluid is supplied at outlet pressure. The above method includes the following actions: selecting an intermediate pressure between the inlet pressure and the outlet pressure; determining a first displacement of the valve according to a viscous pressure falling from the population pressure to the intermediate pressure; and according to the pressure from the intermediate pressure Non-viscous pressure falling to the outlet pressure ---- U_____ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) I--I--I--I ------ II — I 1 Order ---- IIII (Please read the notes on the back before filling out this page) 538327 B7 Five N Invention Description (V〇) -------------- Install- -(Please read the precautions on the back before filling this page) to determine the second displacement of the valve; determine whether the first displacement is approximately equal to the second displacement; and when the first displacement is approximately equal to the second displacement, One of the first displacement and the second displacement is selected as the displacement of the valve. According to another aspect of the present invention, it provides a method for reducing the hysteresis effect in a solenoid-actuated device. In one embodiment, the above method includes an action that applies a predetermined non-operational signal to the solenoid actuated device 'to place the device in a predetermined state. According to another embodiment, a method of operating a solenoid actuating device includes the following actions: (a) providing a first amount of energy to the solenoid actuating device to cause the solenoid actuating device to move from the first Moving a position to a second position; (b) providing a second amount of energy to the solenoid actuating device to return the solenoid actuating device to the first position; and (C) when the first When a quantity of energy exceeds a predetermined quantity of energy, the solenoid actuating device is set to a predetermined state after completing the action (b). --Wire. According to another embodiment of the present invention, it provides a device comprising: a solenoid actuating device and a solenoid actuator, the solenoid actuator is coupled to the solenoid Bobbin actuating device. The above actuator is adapted to provide a non-operational signal to the solenoid actuating device 'to set the device to a predetermined state. According to another embodiment of the present invention, a method for setting a mass flow control device is provided, so that the mass flow controller works with a set of process operating conditions, and at least a part of the process operating conditions is different from the mass flow controller. Used to establish the first response of the mass flow controller during the production process and test the operating conditions. The above method includes the following actions: · Operate in the first group ________________ This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 538327 A7 __________ Β7 _____ V. Description of the condition (ύ) conditions to depict the mass flow Characteristics of the controller; obtaining setting data during the drawing operation; and changing at least one control parameter according to the setting data and the process operating conditions, so that the response of the mass flow controller does not substantially change. With reference to the following detailed description of the present invention and reference to the drawings, the various advantages, novel features, and purposes of the present invention can be clearly understood, wherein the drawings are only essential drawings and are not intentionally added in a proportional manner. draw. In the drawings, each identical or similar element shown in a different drawing is represented by a single number. For the sake of brevity, not all elements are marked in all drawings, and if there are elements that are not necessary for those skilled in the art to understand the present invention, the drawings do not illustrate the various embodiments of the present invention. Of these components. The drawings are briefly explained in the drawings: FIG. 1 is a schematic block diagram of an embodiment of a mass flow controller according to the present invention. The mass flow controller can be used with different fluids and different operating conditions; 2 is a more detailed schematic block diagram of the flow meter shown in FIG. 1; FIG. 3 is a diagram illustrating various output signals of the mass flow sensor responding to the flow j step changes according to an embodiment of the present invention; FIG. 4 is the gain shown in FIG. / Guide / Delay controller circuit diagram is more complete; Figure 5 is a more detailed schematic block diagram of the valve actuator shown in Figure 1; ______13 ___ This paper rule is applicable to China National Standard (CNS) A4 Specifications (21〇χ 297mm) --- I ----------------- Order --------- Line (Please read the precautions on the back first Fill in this page) 538327 A7 _____ Β7 _ 5. Description of the invention (Figure 6 is the signal waveforms of several signals shown in Figure 4; Figures 7 a-7 f are diagrams illustrating the method for setting the mass sulfur sensor according to the embodiment of the present invention To work with process fluids and / or process operating conditions; Figure 8 illustrates mass flow control according to the prior art The hysteresis principle in the closed solenoid-actuated control valve in the normal condition of the actuator; FIG. 9 is a sinusoidal signal illustrating reduced amplitude according to the embodiment of the present invention, which can be provided to the solenoid-actuated control valve, thereby Decrease the hysteresis effect; FIG. 10 is a sine-shaped signal illustrating amplitude reduction according to another embodiment of the present invention, which can be provided to a solenoid actuated control valve to reduce the hysteresis effect; Another embodiment illustrates another sinusoidal signal with reduced amplitude, which can be provided to a solenoid to actuate a control valve to reduce the hysteresis effect; FIG. 12 is a diagram illustrating a fixed amplitude sawtooth according to another embodiment of the invention Shape signal, which can be provided to the solenoid-actuated control valve, thereby reducing the hysteresis effect; FIG. In order to reduce the hysteresis effect; FIG. 14 is a diagram illustrating an embodiment of the present invention including a computer and a mass flow controller, wherein the mass flow controller can be automatically set by a computer; Example, which shows a 7-mass flow controller that can be set automatically; and Figure 16 is a sectional view of a valve. _______14___ This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) ---- ----------------- Order --------- line (please read the notes on the back before filling this page) 538327 A7 _B7_ V. Description of the invention (0 ) Component symbol description ----------------- (Please read the notes on the back before filling this page) 100 Mass flow controller 103 Flow path 110 Flow meter 120 Filter 130 Rise Rate limiter or filter

140 Gain item G 150 Gain / Guide / Delay controller 160 Valve actuator 170 Control valve 210 Bypass 220 Sensor circuit 230 Sensor and induction electronics 240 Normalization circuit-1 line 250 Response compensation circuit 260 Linear Chemical circuit 4 10 D —term circuit 420 subtraction circuit 440 proportional gain term 450 integral gain term 460 integrator 470 addition circuit 510 valve drive electronic circuit 520 electromechanical actuator This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 538327 A7 _ — _ B7 V. Description of invention (A) 7 10 Production 7 12 Setting data 8 0 0 Computer 8 0 2 Memory 8 0 4 Processor 8 0 8 Input device 8 10 Program 10 0 0 Mass flow controller 10 0 2 Memory 10 0 4 Processor 10 0 6 Mass flow controller 10 0 8 Input device 10 12 Setting data 16 4 0 Orifice 16 5 0 Flat top ---------- ---- Install --- (Please read the notes on the back before filling this page) · Line · Detailed description of the good-looking embodiment 昍 Due to the non-linearity and / or mass flow of the various components of the mass flow controller Controllers are different Relevance of such factors as the condition of the mass flow controllers are often adversely affected by instability. The term operating conditions refers to any condition that can be controlled and affects mass flow control. [J device operating conditions. Examples of operating conditions include, but are not limited to, the type of fluid, set black ratio or flow rate, inlet and / or outlet pressure, and temperature valve supply / discharge pressure. ------------- 16___ __ This paper size applies to Chinese National Standard (q \ JS) A4 (210 x 297 mm) 538327 A7 ---------- B7______ 5 Explanation of the invention (θ) However, it should be understood that other states may also occur during the operation of the mass flow controller, such as: system noise and / or states that cannot be controlled such as operating frequency. Unless otherwise stated, such states are not included in the states referred to in the operating conditions described in the disclosure. The terms 'mass flow rate, fluid flow rate, and flow rate' will be used interchangeably here to describe the flow rate of a unit volume per unit time through a certain flow path (such as the flow path 1 0 3 in Figure 1) or part of the flow path. (That is, the flux of fluid mass). The term species refers to the nature of a particular fluid. Changes in species can include changes in the type of fluid (such as from nitrogen to hydrogen), changes in the composition of the fluid (such as a combination of a gas or a liquid, etc.), and / or a change in the state of a fluid or a combination of fluids. In particular, a change in species applies to at least one change in the properties of the fluid, and this change may alter or affect the performance of the mass flow controller. The term species information is intended to apply to any number that defines the nature of a particular fluid species. For example, species information may include: fluid type (such as hydrogen or nitrogen, etc.), fluid composition (such as hydrogen and nitrogen), molecular weight, ratio: heat, phase C (such as liquid, gas, etc.), viscosity, etc. The above is limited. Mass flow controllers usually have several different components (eg flow meters, feedback controllers, valves, etc.) connected in a closed loop. Each component of the control loop has its associated gain. In general, the term gain refers to the relationship between the input and output of a particular component or group of components. For example, 'gain may represent the ratio of output change to input change. The gain can be a function of one or more variables; for example, one of the mass flow controllers is sized to the Chinese National Standard (CNS) A4 (210 X 297 mm) ----------- ---------- Order --------- line (please read the unintentional matter on the back before filling this page) 538327 A7 __B7__ V. Description of the invention (A) or several operating conditions And / or characteristics (eg flow rate, inlet and / or outlet pressure, temperature, valve displacement, etc.). In general, such gain functions are called gain terms. The gain term 1 and especially the expression 1 of the gain term may be a curve, a sample of a function, discrete data points, point pairs, and constants. Various components or groups of components of a mass flow controller will have their associated gain terms (a component that has no measurable gain term can treat its gain term as a unit gain term). The relationship between the related gain terms of various components in a mass flow controller is often complex. For example, different gain terms may be functions of different variables (such as the operating conditions and / or characteristics of the component), and may be partially non-linear and may not be proportional to each other. Therefore, in the control loop of the mass flow controller, the contribution of the relevant gain term of each element is itself the gain term. The compound gain term itself can be a function of one or more variables, and at least part of it is the cause of instability. The mass flow control unit [] is often adversely affected during operation and can cause mass flow control锒 [1 device is very susceptible to changes in the operating conditions and / or characteristics of various elements of the mass flow controller. According to the aspect of the present invention, it provides a mass flow controller having a control loop having a fixed loop gain. According to an embodiment of the present invention, the fixed loop gain is provided by forming a product of related gain terms of one or several elements on a control loop of a mass flow controller, and determining the inverse of the gain term, while providing the The reciprocal gain term is applied to the control loop. The fixed loop gain term describes the gain of the control loop of the mass flow controller ′, and its operating condition relative to the mass flow controller is fixed. Specifically .............. --- 18 National Standard (CNS) A4 size (210 x 297 mm factory one I ------- I --- -------- " Order ----— I! (Please read the notes on the back before filling in this page) A7 538327 _______B7_____ 5. Description of the invention (V \), the fixed loop gain will not follow The function of the relevant specific operating state of the mass flow controller changes, or as a function of the relevant individual gain terms of the control loop. What I should know is that the gain of certain elements of the mass flow controller will vary with the operating frequency ( (Ie, the frequency components of various signals of the mass flow controller). However, the frequency is not considered as an operating condition, and therefore will not be considered as a condition for maintaining the fixed loop gain constant. The following will explain in more detail with Various concepts and embodiments related to the method and equipment of the present invention for controlling and setting a mass flow controller. I should understand that the various aspects of the present invention described above and further below can be implemented in any way, because The invention is not limited to any particular embodiment. The examples are only for illustration. This article will explain the various forms and characteristics of the present invention. For the sake of brevity, the various forms and characteristics are discussed separately. Those skilled in the art will understand the techniques described here. Features can be selected and combined in the mass flow controller according to specific applications. A. Control of the mass flow controller Figure 1 is a schematic block diagram illustrating a mass flow controller according to the present invention. The mass flow controller shown in Figure 1 It includes a flow meter 1 1 0, a gain / guidance / delay (GLL) controller 150, a valve actuator 16 0, and a valve 1 7 0. The flow meter 1 1 0 is coupled to the flow path 1 0 3. The flow meter 1 1 〇 can sense the flow rate of the fluid in the flow path or part of the flow path, and provide a flow signal FS indicating the sensed flow rate 2. The flow signal FS 2 is _ ___19______ This paper is applicable? National standards (CNS) A4 specification (210 X 297 mm) --I --- I-I ---- 111111 I --------- (Please read the precautions on the back before filling this page) A7 538327 _ B7___ V. Description of the invention () is provided to gain / guide / delay control The first input terminal of 150. In addition, the gain / guide / delay controller 150 includes a second input terminal for receiving a setpoint signal s 12 °. The setpoint refers to the mass flow controller 1 ο 〇 Provide an indicator of the desired flow. As shown in Figure 1, the set point signal s I 2 will first pass through the rise rate limiter or filter 130 before being provided to the gain / guide / delay controller 150. The filter 1 30 is used to limit the instantaneous change of the set point of the signal SI1 and is directly provided to the gain / guide / delay controller 150, so that the flow change occurs at a certain time. It should be understood that when implementing the present invention, it is not necessary to use a rise rate limiter or filter 130, and it may be omitted in some embodiments of the present invention, and any signal that can provide the desired flow index is Deemed an appropriate setpoint signal. The term set point is not relative to a specific signal, it describes the number that represents the desired flow. Based in part on the flow signal F S 2 and the setpoint signal S I 2, the gain / guide / delay controller 1 50 provides a drive signal D S to a valve actuator 160 that controls the valve 170. The valve 170 is usually positioned downstream of the flow meter 110 and depends at least in part on the valve's controlled components to allow a specific mass flow rate. The controlled part of the valve may be a movable piston provided at the cross section of the flow path. A more detailed description is shown in FIG. 16. These valves control the flow rate in the flow path by increasing or decreasing the area that allows fluid to pass through the cross-sectional opening. In typical cases, the mass flow rate is controlled by mechanically displacing the controlled components of the valve to the desired level. The term displacement refers to valves that are at least partially associated with mass flow rate. ______20_ This paper is far from the Chinese National Standard (CNS) A4 (210 X 297 mm) III I --- II ---- · IIIIIII order · --- 1! _ * 5 ^ (Please read the notes on the back before filling this page) A7 538327 ________B7________ V. Description of the invention (θ) The valve displacement is usually controlled by the valve actuator. For example: Spiral spring actuator, piezoelectric actuator, stepper actuator, etc. In Fig. 1, the valve rg actuator 16 is a solenoid type actuator '. However, the present invention is not limited to this type of actuator, and other types of actuators may be used. The valve actuator 160 receives the driving signal d s ′ from the controller and converts the signal D s into a current; when the current is applied to the valve, it will cause the controlled part of the valve to produce the desired mechanical displacement. As mentioned above, the different components of the mass flow controller each have their associated gain terms. For example, FIG. 1 illustrates the gain terms A, B, C, and D attached to the flowmeter 110, the gain / guidance / delay controller 150, the valve actuator 160, and the valve 170, respectively. These components and their related input and output T signals—especially the flow signal FS 2, the drive signal DS, the valve signal AD, and the fluid flowing through the flow path 103—form the control loop of the mass flow controller. . The gains A, B, C, and D sequentially combine these input and output relationships. It should be understood that the gain term on this control loop contributes to the resultant control loop gain. Typically, this control loop gain term is the product of the gain terms on the control loop (that is, the control loop gain term is equal to the product of A * B * C * D). The synthetic gain term is used here to describe any gain term that consists of the contributions of several separate gain terms. The synthetic gain term symbol used herein will be presented as a chain symbol used to represent the individual gain terms that make up the synthetic gain term. For example, the above control loop gain term will be expressed as a gain term A B C D. Unless otherwise noted, the markers for the aforementioned synthetic gain terms are preset to the product of their constituent gain terms. ^ ______ 21___ The size of wood and paper is applicable to China National Standard (CNS) A4 (210 x 297 mm) --- I --- · I ----- Order --- — — — —-- (Please read first Note on the back, please fill out this page again) 538327 A7 ___ B7_ V. Description of the Invention (Production) The separate gain terms attached to the control loop of the mass flow controller may have different characteristics and correlations, resulting in a composite with multiple correlations. Gain term. Such correlations or variables may include set points or flow rates, fluid species, temperature, inlet and / or outlet pressure, valve displacement, and the like. The applicant of this case has confirmed and understood that mass flow controllers with any control loop gain term are susceptible to instability, and are very sensitive to some or all of the aforementioned changes in earness. An example of each gain term shown in Fig. 1 will be described below. The gain term A is accompanied by the flow meter, which represents the relationship between the actual flow through the mass flow controller and the flow rate (for example, FS 2) marked by the flow meter (for example, the change in the indicated flow rate divided by the change in the actual flow rate) the amount) . The gain term A is calibrated as a constant function of the lowest flow rate. However, this constant is at least related to the species of fluid being operated by the mass flow controller. The gain term B is accompanied by a gain / guide / delay controller, which represents the relationship between receiving the marked flow signal F S 2 from the flow meter and the drive signal DS provided to the valve actuator. The gain term B is related to various gains and constants used in the feedback control of the gain / guide / delay controller. The gain term C is accompanied by the valve actuator, which represents the relationship between the driving signal and the valve rg displacement. The gain term c may include a combination of two separate gains, including the gain associated with the conversion of a drive signal into a current or voltage control signal, and the gain associated with the control signal and mechanical displacement of a valve-controlled component. The gain term D is accompanied by the valve, which represents the flow rate of the mass flow controller. ___________ 22 ___— ___ This paper size uses the Chinese National Standard (CNS) A4 specification (210 x 297 mm) I--I ----- --- — Order II --------- line (please read the precautions on the back before filling this page) 538327 A7 ______B7_ 5. The relationship between the description of the invention (〆 丨) and the valve displacement (for example: The amount of change in flow rate divided by the amount of change in valve displacement). The gain term D is related to a variety of operating conditions, including flow: species, population and outlet pressure, temperature, valve displacement, and so on. In accordance with the aspect of the present invention, which will be described in detail below, a physical model of a valve is provided to help determine the gain terms that accompany a valve with any fluid and operating conditions. The gain term G is the inverse of the product of the gain terms A, C, and D. As can be further understood from this specification, the gain term G allows the mass flow controller to operate in a fixed manner and is independent of the operating conditions derived from the fixed loop gain of the control loop provided to the mass flow controller. According to the state of the present invention, the system gain term of a specific mass flow controller is determined by determining the synthetic gain terms of various components on the control loop of the mass flow controller. The reciprocal gain term is taken from the inverse of the system gain term. The It reciprocal gain term is then applied to the control loop, causing the control loop to operate with a fixed loop gain. Therefore, as each gain term on the control loop changes, the reciprocal gain term changes in order to maintain a fixed loop gain. Because the loop gain of the mass flow controller remains unchanged, it is independent of the type of fluid used by the mass flow controller, and has nothing to do with the operating bar of the mass flow controller. Therefore: the mass flow controller is different for different fluids and / Or stable response to operating conditions' and presents the same performance as observed by the mass flow controller during the production of the test fluid and test operating conditions. Unless otherwise noted, the system gain term is one of the gain terms on the control loop And the gain terms will change as a function of one or more operating conditions. For example, the system gain term in Figure 1 is the synthetic gain term ACD. _23_______ This paper size applies Chinese National Standard (CNS) A4 Specifications (210 X 297 mm) ~ installed -------- order --------- line (please read the precautions on the back before filling this page) A7

538327 V. Description of the invention (In block 140 of Figure 1, the formation of the reciprocal gain term G is taken from the inverse of the system gain term ACD, and the inverse is provided as one of the inputs of the gain / guide / delay controller It should be understood that the above-mentioned reciprocal spillover term may be less than the reciprocal of all gain terms accompanied by various elements on the control loop of the mass flow controller. For example, the synthetic gain terms AC, AD, and CD may be formed To improve control and stability. However, in the preferred embodiment, the formation of the gain term G is such that the loop gain is kept constant (that is, the gain G is the inverse of the system gain term). Figure 2 illustrates the flow meter 1 1 〇 A more detailed schematic block diagram. A flow meter refers to any element that can sense the flow rate through a flow path or part of a flow path and provide a signal indicating the flow rate. The flow meter 1 1 0 in Figure 2 includes a bypass Tube 2 1 0;-sensor and inductive electronic device 2 3 0;-normalizing circuit 2 4 0 for receiving the sensor signal FS 1 from the sensor and the inductive electronic device 2 3 0;-response compensation circuit 2 5 0, Coupled to the normalization circuit 24 0; and a linearization circuit 26 0, which is coupled to the response compensation circuit 250. The mass flow controller shown in FIG. 1 and the output of the linearization circuit 26 0 It is the traffic signal FS 2. Although not shown in Figure 2, in some embodiments, we can use the analog-to-digital (A / D) converter to convert the sensor signal FS 1 into a digital signal; Therefore, all other processes of the mass flow controller 100 can be performed by a digital computer or a digital signal processor (DSP) plus [to execute. Although in the embodiment, all the processes performed by the mass flow controller Signal processing is performed digitally, but the present invention is not limited to this ________24 _ This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) --------- I-- --i I (Please read the notes on the back before filling this page) · -—line- 538327 A7 ___B7 _ V. Description of the invention (> this), I can also choose the analog processing technology. In Figure 2 In the sensor circuit 2 2 0, part of the collar flowing through the flow path is turned, Pass most of the remaining fluid through the bypass tube. The sensor and the sensing electronics 230 are coupled to the sensor tube, which measures the flow rate through the tube. The flow through the tube is proportional to the flow through the bypass tube. However, within the flow rate range preset for the operation of the mass flow controller, there may be a non-linear relationship between the flow rate in the duct and the flow rate in the bypass. In addition, the thermal sensor detects the duct by The temperature change in a certain interval leads to the flow rate of J. Therefore, in some embodiments, especially the embodiment applied to the thermal sensor, there may be temperature correlation-especially in the flow of the mass flow controller operation. Two extreme temperature ranges (referred to herein as zero flow and full flow, respectively). The normalizing circuit 24 0 receives the sensor signal F S 1 and corrects the potential temperature correlation at zero flow and full flow. In particular, 'when no fluid is flowing through the duct and / or the bypass (ie at zero flow)' the sensor may produce a non-zero sensor signal. Furthermore, this false flow indication may be temperature dependent. Similarly, the sensor signal F S 1 may experience temperature-related changes at full flow. We can measure the number of the sensor signal F S 1 at zero flow at several different temperatures, and then use the correction factor to correct the temperature-related changes in the signal F S 1 at zero flow based on the temperature of the sensor. The temperature-related change in the correction signal F S 1 at full flow can also be performed in a similar manner ′, which measures 値 based on the sensor signal at different temperatures and applies an appropriate correction factor based on the temperature. _______ ι ___ This paper size is applicable to China National Standard (CNS) A4 (210x 297 mm) ------------- Installation -------- Order -------- -Line (please read the notes on the back before filling this page) 538327 A7 _B7_ V. Description of the invention (AT) In addition, for the entire range of the mass flow controller to operate, you can measure the characteristic points in the range in a similar way Temperature dependence. Therefore, the calibration curves of the flow rate and temperature functions can be fitted to each other with the measured values obtained at zero flow, full flow, and any number of characteristic points in between. This calibration curve provides temperature correction for the flow rate range in which the mass flow controller is designed to operate. In addition, an understanding of the fluid used and the properties of known sensors as a function of temperature can provide or improve correction factors and / or correction curves for the normalization circuit 240. The normalization circuit 2 4 0 can also provide a fixed normalization gain to the signal FS 1, so that when the sensor tube is passed at full flow, a specific number of normalization signals FS 1 'can be obtained, and at zero At the time of flow, another specific number (for example, zero) can be obtained. For example, in a certain embodiment, when the normalization circuit 24 0 has no fluid passing through the sensor duct, the number 归 of the normalization signal FS1 ′ is 0.0, and when passing through the duct at full flow, the normalization circuit The number of the first chemical signal FS 1 'is 1.0. It should be understood that, at zero flow and full flow, any number can be selected for the normalized signal F S 1 ′; the numbers used here are for illustration only. It should be understood that the normalized signal FS1 ′ may have poor dynamic characteristics, so that when responding to a step change in the fluid, the signal FS1 ′ may cause a time delay and be smoother than the actual flow through the flow sensor. This is because the response time of the heat flow sensor is usually slow, because thermal changes take a long time to occur. Figure 3 illustrates the above characteristics, where time is plotted on the horizontal axis, that is, the X axis _____ ^ ------This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) --- I ---- · II I ---- Order-----— II (Please read the notes on the back before filling this page) 538327 A7 ____B7__ 5. Description of the invention (), 3 flow rate is plotted on the vertical One axis is the γ axis. As shown in Fig. 3, in response to a change in unit steps in the actual fluid passing through the thermal mass flow sensor, the signal F S 1 provided by the sensor user / ΐ will cause a time delay and be smoother. In order to correct the effect of the above-mentioned sensors and provide a better dynamic response for the change in flow, the normalized signal FS1 'is provided to the response compensation circuit 250. The operation of the response compensation circuit 250 is like a filter. This filter approximates the inverse function of the transfer function of the inductor and the inductive electronic device 230. The response compensation circuit 2 50 can be corrected or adjusted so that the adjustment signal FS 1 "provided by the response compensation circuit 2 50 has a predetermined rise time, a predetermined maximum of positive spikes and / or negative spikes, and a predetermined time frame. Make it tend to be stable, and / or adjust other desired characteristics under the specific operating conditions of the mass flow controller. As shown in Figure 3, the outline of the compensation signal FS 1 "is more closely reflected by the figure shown in the figure The profile of the sensor's flow ladder. The mass flow controller's flowmeter can be adjusted to provide this compensation signal during the mass flow controller's production process. In particular, we can use the sensor calibration procedure that will be explained in detail below to adjust the dynamic response. As explained briefly above, the ratio of the flow rate through the sensor tube to the flow rate through the bypass tube is related to the flow rate of the fluid. In addition, the non-linearity in the sensor and sensor electronics makes the relationship between the actual flow and the sensed flow signal provided by the sensor at different flow rates more complicated. This result may result in a curve representing the induced flow versus fluid flow that may not be a linear curve. It should be understood that ... many of these non-linearities will be passed to the normalization circuit 2 4 ______ -----—_ This paper size _ applies the Chinese National Standard (CNS) A4 specifications (210x297 male f) ---- ------------ I ---- Order --------- line (please read the notes on the back before filling this page) 538327 A7 _______B7 _ 5. Description of the invention ( > 4) -------------- install --- (please read the note W on the back before filling out this page) 0 and response compensation circuit 2 5 0. Therefore, the closely related sensor signal F S1, FS1 'or FS1 "is explained immediately below. The term sensor output is used here to describe the linearization process (such as the pre-linearization circuit 2 6 0). Sensor signal. In particular, unless otherwise noted, the sensor output describes the signal generated by the sensor (such as F S '), and the signal has been normalized and compensated-for example by normalization, respectively The processing circuit 2 40 and the response compensation circuit 2 50 process it, but the signal 尙 is not linearized. It should also be understood that the order of application of the normalization and compensation steps in Figure 2 need not be considered; in fact It can be interchanged with a variety of eyes. The linearization circuit 260 is used to correct the non-linearity of the sensor output (such as FS 1 "-line ·). For example, the linearization circuit 260 can provide a flow signal. This flow signal is 0 at zero flow; 0.25 at 25% of full flow; 0.5 at 50% of full flow. It is 1.0 at full flow. The linearization circuit 26 0 provides a flow signal F S 2, and this signal is provided to the input Γ of the gain / guide / delay controller 150 as shown in FIG. 1. Here, the term flow rate is used to describe the linearized flow signal provided by the flow meter (such as the flow signal FS 2) ° Although there are many ways to linearize the sensor output, such as polynomial linearization, Fragment linear approximation, etc., but the embodiment of the present invention uses a spline ine-especially a cubic spline one to make this signal linear. Si 1 ve rman B. W., "S omeme spects of the Spline Sm〇〇 _______ 28_— _______ This paper standard applies to Chinese papers. (CNS) A4 specification (210 x 297 mm) 538327 A7 _____B7 _ — ___ V. Description of the invention (/ 1) thing Approach to Non — Par a metric regression Curve F itting ”has been discussed for the three splines; the The work is published in the journal of the Royal Statistical Society, and the full content is incorporated herein by reference. According to the above aspect of the present invention, we will measure the test liquid or gas at several different (and known) flow rates from the sensor and The actual output signal FS 1 of the inductive electronic device 230 is to plot all measured points for the known flow rate. The graph of the measured flow rate relative to the known flow rate defines the transfer function of the sensor and the sensing electronic device 230, and then the cubic spline is fitted to the conversion function of the sensor and the sensing electronic device 2 30 Inverse function. The measurement of the sensor output is then used as the input of the three splines to provide a normalized, compensated and linearized standard flow signal (eg F S 2). As will be described in detail below, the linearization circuit 2 60 may include a bud-spring sexualization list (not shown) in order to help the biochemistry of line 1 of the sensor output. In another embodiment of the invention, the cubic spline is fitted to the transfer function 'of the sensor and the sensing electronic device 230 itself rather than to its inverse function. After the non-linearity in the sensor and the sensing electronic device 2 3 0 and the flow rate change rate through the sensor tube 2 2 0 are compensated, the adjusted flow signal FS 2 will be provided to the gain / guide / delay controller 1 50, and can be provided to the filter 12 (Figure 1) for display. The adjusted traffic signal FS2 is shown in Figure 3, "Already adjusted _______29_____ This paper size applies to the Chinese National Standard (CNS) A4 specification (210 x 297 male ------------- Install -------- order --------- line (please read the precautions on the back before filling this page) 538327

5. Description of the invention (>) Inductive flow (F S 2) ". As shown in Fig. 1, the gain term A is accompanied by the flow meter 1 1 0. This gain represents the relationship between the fluid passing through the flow path 103 and the indicated flow rate (ie, the flow signal FS2). Specifically, the gain term A indicates the ratio between the change in flow and the change in actual flow. As can be understood from the above description of the flow meter 110, this relationship (that is, the flow rate of the fluid relative to the marked curve) has become a linear relationship. Therefore, the ratio between the change in the marked flow rate and the change in the actual flow rate (that is, the derivative of the curve of the fluid flow rate with respect to the marked flow rate) is a constant function of the flow rate. Therefore, the gain term A is constant for a particular fluid species. Because the gain term A is constant, and because the indicated flow rate has been defined as a specific number at full flow rate, the gain of a specific fluid can be determined according to the full flow rate accompanying the fluid used by the mass flow controller in the production process. Term A ° In the example of a flowmeter indicating that the flow rate has been adjusted, the gain term a is the inverse of the full flow rate. It should be understood that full flow through the mass flow controller is related to fluid species. Therefore, although the gain term A is a constant function at the lowest flow rate, when the mass flow controller is operated with different fluid species, this constant will still be under-changed. However, the applicant of this case has learned how the gain (eg, gain term A) accompanying the flowmeter varies with the fluid species. As mentioned above, the gain of the flow meter can be obtained directly by calculating the full flow range. Therefore, by determining the full flow range of any fluid, the gain of the flowmeter can be directly determined. As will be explained in detail below, the applicant of this case has developed a paper according to any fluid _______30__ This paper size applies Chinese National Standard (CNS) A4 specifications (210 x 297 mm) (Please read the precautions on the back before filling (This page) Install ιδ] ·-line. 538327 A7 _______B7 ___ V. Description of the invention (&f; f) and the species information that accompanies the full flow of the test fluid to determine the total sparseness level of any fluid Therefore, by storing the full flow rate that accompanies a test fluid, the gain term associated with the flow meter can be determined for any fluid. Here, the term full flow rate is used to describe the total flow rate determined when operating a mass flow controller with any fluid. Fig. 4 illustrates details of an embodiment of the gain / guide / delay controller 150. Although the controller 150 is described herein as a gain / guide / delay controller, it should be understood that the present invention is not limited to such a controller. For example, the different forms of the present invention can be used with other feedback controllers, such as: proportional integral derivative (PI D) controller, integral (PI) controller, integral differential (ID) controller, and so on. It should be understood that: various controllers shown in FIG. 4 which are equivalent to the gain / guide / delay controller 15 5 may be used instead, because the present invention is not limited to the controller with a specific structure shown in the figure. The gain / guide / delay controller 150 receives three input signals: a flow signal F S 2 (also known as a labeled flow); a set point signal S I 2; and a reciprocal gain term G. As described above, the setpoint signal S I 2 can be first passed to a rise rate limiter or filter 130 to avoid transient changes in the setpoint signal when supplied to the gain / guide / delay controller. As mentioned above, the gain term G 1 40 is a reciprocal gain term, which is formed by taking the inverse of the product of the gain terms accompanying various elements on the control loop of the mass flow controller (that is, the inverse of the system gain term); This details the female mouth. The gain G can be applied anywhere along the control loop of the follower, and does not comply with the 31 China National Standard (CNS) A4 specification (210 X 297 mm) --- I ------ II ------- -II Order * 111 I 111 · * 5 ^ (Please read the notes on the back before filling out this page) 538327 B7 V. Description of the invention (and) It is limited to the input of the controller of the mass flow controller. However, the reciprocal gain term G can be conveniently applied to the input of the gain / guide / delay controller 150 as shown in Figs. According to an embodiment of the present invention, the gain term G may be determined by a microprocessor or a digital signal processor accompanying the mass flow controller. As explained below, this processor can be integrated into the mass flow controller or externally. As shown in Fig. 4, the flow signal F S 2 is supplied to a differential or D-term circuit 4 1 0. Since the circuit 4 10 is not equivalent to a differentiator, it is referred to herein as a "D-term" circuit. More precisely, in the D-term circuit 4 10, the flow signal F S 2 is differentiated and multiplied by a constant, and then added to the adjusted flow signal F S 2. It should be understood that the present invention is not limited to the specific embodiment of the D-term circuit 410 described herein, and another [] differentiator circuit may be used. Functionally, the D-term circuit 4 1 0 provides a modified flow signal FS 3, which is “accelerated” relative to the adjusted signal FS 2 and thus constitutes a gain / guide / delay controller within 150 "Guide". The D-term circuit 4 1 0 can also provide damping. Those skilled in the art will know that the D-term circuit 4 1 0 can provide a functionally changed flow signal F S 3, which indicates how the flow signal changes and how to change it quickly. The modified flow signal F S 3 and the setpoint signal can then be provided to a subtraction circuit 4 2 0. This circuit obtains the modified flow signal F S 3 and the setpoint signal S I 2 and generates an error signal E according to its rate. The error signal E is then multiplied by the gain term G (ie, the term "gain" in the gain / guide / delay controller), and is provided to the proportional gain term 4 _— _32__ This paper size applies to the Chinese National Standard (CNS) A4 specification (210 x 297 mm) --------------------- Order --------- line (Please read the notes on the back before filling in this (Page) 538327 Λ7 ___ ΚΙ _______ 5. Description of the invention (Μ) ---- I ------ II ------- (Please read the notes on the back before filling this page) 4 0 and integral gain term 4 5 0. The proportional gain term is multiplied by the signal E G by a fixed constant Kp, and then the output signal E GKP is provided to the addition circuit 4 7 0 after ifi. The proportional gain term 4 4 0 is used to functionally provide the component of the driving signal in order to move the control valve by a certain distance according to the signal E G, so that the control valve can stop quickly when the error signal E changes. The proportional gain term 4 4 0 also provides damping, which helps prevent damped oscillations in the drive signal DS and the fluid formed. For example, when the error signal E decreases and the output signal from the integrator 460 increases, the number of times the error signal E multiplied by Kp increases; since the constant Kp is preferably less than 1 unit, the amount of positive spikes occurring is reduced. The integral gain term 4 50 is multiplied by the signal E G by another fixed constant K i, and then the output signal E GKi is provided to the input of the integrator 4 6 0. The integrator 460 integrates the signal E G K i and provides the integrated output to the second input terminal of the adding circuit 470. Functionally, the output of the integrator 460 provides a signal that indicates the error signal E over time, and represents how the error signal has changed over time (ie, the term "delay" in the gain / guide / delay controller) . Given an error signal E, the integrator 4 60 starts at a specific slope; when the indicated flow (eg f S 2) increases (assuming a new and higher set point has been entered), the error signal will decrease 'making the integrator 460 stops integration (that is, slows down its rate of change), and the driving signal component output by the integrator 460 stops increasing. It should be understood that although FIG. 4 illustrates that the output of the integral gain term 4 50 is provided to the input of the integrator 4 6 0, these circuits can be configured in reverse so that the output of the integrator 4 6 0 is provided to Input for proportional gain term 4 50. Product ---_ 33 ___ ^^ This paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297 mm) 538327 Λ7 ............... ........—__ /, H is called: Duming (;) >,) κ (; κ!; ΊΜΑ and the proportional gain term in the addition circuit 4 7 〇: h 丨 \ 广Input UI 丨 丨 II, Ifn ▲, the output signal c > s is provided as the driving signal of disaster 1Γ h々㈣; '丨〉; 1㈠ϋ. As shown by _ ^, the output of the addition circuit is provided to the valve Actuator 1 Π (), which includes a valve drive electronics circuit 5 1 0 coupled to an electromechanical actuator 5 2 U. Any suitable valve drive electronics circuit 5 1 0 may be used to receive a drive signal d S, and convert the driving signal d S into a voltage, current or other signal that can move the valve 170 to a desired position to provide a desired flow rate. In addition, the valve driving electronic circuit 5 1 〇 may include any suitable and A conventional valve drive actuation circuit is used to drive a solenoid actuated control valve, a piezoelectric actuated control valve, etc. According to an embodiment of the present invention using a solenoid actuated control valve, the valve drives The moving electronic circuit 5 10 includes a circuit system that can reduce the effect of hysteresis in the solenoid-actuated control valve; it will be further explained below. Fig. 6 is a diagram illustrating a number of signals described in Fig. 4, where the horizontal axis is The X axis represents time, and the vertical axis represents the detected signal strength. As shown in FIG. 6A, at time TO, there is a step change in the set point within the signal SI 2 (change to intensity F.). At this time, because the error signal E is equal to the difference between the adjusted flow signal FS2 (which is still in the previous state) and the set point number 値 in the signal SI 2 whose number is F0 at this time, the error The signal E will rise to the intensity F. The error signal multiplied by the gain term G (ie the signal EG) therefore jumps to a higher number and then decreases over time. The process is shown in Figure 6B. Figure 6C As shown, the output of the proportional gain term 4 4 0 is the signal EG multiplied by the constant Kp (which is less than 1) _ 34____ This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love> ---- ---- ------------------ 1 Ordering -------- Line (Please read the notes on the back before filling (Write this page)

538327 B7 V. Description of the invention U)), so the signal EGKP has a similar pattern-although the amplitude is slightly reduced. As shown in Figure 6D, at time T ◦, the integral output signal E G K i is zero, but due to the error signal E, it starts to climb up quickly. The output of the addition circuit 470, which represents the sum of the output signal EGKP and the integral output signal E G Ki, is labeled D S and is shown in FIG. 6E. Based on the drive signal DS provided by the 妾 α valve drive and the valve drive electronics 160, the opening of the valve 170 is controlled to increase, and the flow signal (eg, flow signal FS 2) is added to the new set point in SI 2 grade. As time progresses, the error signal E decreases, the output signal of the proportional gain term 4 40 decreases, and the integral output signal E G κ decreases, and the flow rate is established at the new setpoint level. Ideally, I would like to get a step response in the actual fluid in response to the hierarchical input applied to the setpoint of the mass flow controller. Although this is not practically possible, embodiments of the present invention can be used to provide a consistent response in response to hierarchical input within a setpoint, regardless of whether the hierarchical input represents a 2% hierarchy or 100% hierarchy relative to full traffic , And has nothing to do with the fluid used and the inlet or outlet pressure. To achieve this consistency, an embodiment of the present invention provides a mass flow: controller with a fixed loop gain. From the above description, it should be known that although the various gains associated with the components on the control loop of the mass flow controller will change as a function of different variables and are related to various different operating conditions, but by providing a fixed The control loop of the mass flow controller with loop gain can still obtain stable and consistent mass flow controller operation under a set of operating conditions. --—- _35_ A paper size is applicable to the Chinese National Standard (CNS) A4 specification (21〇χ 297 mm) -I ---- — — — — —------- (Please read the notes on the back first Please fill in this page again for the matters)) SJ_ -line · A7 538327 _B7_____ V. Description of the invention (> v) It should be understood that we can use the microprocessor to implement various control modes of the mass flow controller. For example, the gain / guide / delay controller 150 can be implemented using a microprocessor, a digital signal processor, and the like. Similarly, the microprocessor can determine various parameters, such as a reciprocal gain term (such as gain term G). We can use conventional techniques to implement various control modes of mass flow controllers in software, firmware or hardware. Β.Π Flow controller settings It should be understood: In many cases, in order for the mass flow controller to operate consistently in a steady state, the mass flow controller must be adjusted and / or calibrated. Manual adjustment and / or calibration is often a time-consuming, labor-intensive and expensive process. In addition, when a processing process requires that the mass flow controller must be set to operate with different fluid species and / or operating conditions than those used in the production process, the performance of the mass flow controller rarely shows the performance of the process. The same characteristics are observed, even if the mass flow saver has been adjusted and calibrated on several process fluids. In other words, the mass flow controller may respond differently when operating with different fluid species and / or operating conditions than those used when adjusting and / or calibrating the mass flow controller. According to the aspect of the present invention, it provides a method for setting a mass flow controller. This method allows a mass flow response obtained by a process fluid and / or a process operating condition to be substantially equivalent to adjusting with a test fluid and a test operating condition. And / or the response obtained by calibrating the mass flow controller. In one embodiment of the present invention, the setting data is from a single test _ one-_ 36____ This paper ruler money towel @ 0 杂 准 (CNS) A4 specification (210 X 297 male f) " " ---- ------------- (Please read the precautions on the back before filling out this page) · Line-538327 A7 B7 ---- --- 5. Instructions for issuing the month (>? ≪ ) Flow meter and a set of operating conditions to adjust and / or calibrate the mass flow controller. This setting data can be used to set the mass flow controller so that it can work with any kind of process fluid and / or operating conditions, and thereby mitigate the use of fluids and / or operating conditions different from those used in the production process. Performance degradation issues, while eliminating expensive and time-consuming adjustments and / or calibrations for mass flow controllers on multiple alternative fluids. Providing a mass flow controller that can work with any type of fluid and operating condition and present a satisfactory response to Λ often includes several steps, including the initial production of the mass flow controller and subsequent settings of the mass flow controller. Figure 7a illustrates the steps of production and set-up according to an embodiment of the present invention. When the term production is applied to a mass flow controller, the description here includes preparing a mass flow controller for use in a particular fluid species and Various tasks involved in the process of operating under the operating conditions group. The production process may include: constructing a mass flow controller from various components; under test operating conditions, as a mass flow controller on the test fluid; and adjusting and / or calibrating various components and / or mass flow controllers Control parameters so that the mass flow controller can exhibit satisfactory quality and performance (ie, satisfactory response) when using the test fluid and test operating conditions. Mass flow controllers are usually produced manually. The hand = or manual method used here refers to the procedures and / or steps that are required to involve a large number of operators, and in many cases requires technically skilled workers, and often requires a lot of time and Manpower. When Tian uses the mass flow controller, set or perform the setting here + s S ^ i ^ NS) A4 4Τ210 X 2973lt)--------------- install --- (Please read the precautions on the back before filling out this page) · --line-A7 538327 ___B7_____ V. Description of the invention () Includes a description of 'making the mass flow controller suitable for any kind of fluid under any operating conditions' The various steps involved in the operation. In particular, settings describe a facility that makes a mass flow controller suitable for operating with a fluid (herein referred to as a "process fluid" and a "test fluid") that is different from the fluid used in the production of the mass flow controller. The steps involved 'and the conditions can be different from the operating conditions used in the production process of the mass flow controller (herein referred to as "process operating conditions" and "test operating conditions"), so that the mass flow controller's The response is essentially equivalent to the response to j observed during production. It should be understood that the setting of the mass flow controller can be performed at any time and place after the production is completed. This includes manufacturing sites (such as setting a mass flow controller for a specific known application) or a factory (such as located in direct use (The operator's place of operation) 'but not limited to the above. In general, a satisfactory response is the response of a mass flow controller within a given set of tolerances in a particular mass flow control process or job. In particular, I would like the dynamic and static response of the mass flow controller to be within the tolerances of the expected operation. Within any set of tolerances, the mass flow controller can be adjusted and / or calibrated during production to obtain a satisfactory response. Therefore, unless otherwise noted, a mass flow controller adjusted and / or calibrated under a test fluid and a set of test operating conditions should be considered to have a satisfactory response under that test fluid and operating conditions. However, when the mass flow control curtain is operated with different fluids and / or operating conditions, the response of the mass flow control instrument may change substantially, so the response is no longer satisfactory. ___________38__ Degree Applicable to China National Standard (CNS) A4 (210 x 297 mm) --- I ----------------- Order · ---- I — I _ ( Please read the notes on the back before filling in this page) A7 538327 _B7______ V. Description of the invention u ') Generally speaking, when both responses are satisfactory (ie both responses are in the mass flow controller) Operating within the tolerances expected to operate), the mass flow controller will be considered to have the same response under the test fluid and test operating conditions and under the process fluid and / or process operating conditions. As shown in Figure 7a, during the production of 710, the mass flow controller is operated with a test fluid under a set of test operating conditions. The operating characteristics of the mass flow controller are acquired and stored as setting data 7 1 2. The setting data 712 can be obtained during various adjustments and / or calibration steps of the production 710; the following will be further described with reference to Figs. 7b-7f. The term adjustment describes the steps involved in providing a satisfactory dynamic response and properties to the flow, and providing a satisfactory dynamic response and properties in response to changes in flow and / or changes in the desired fluid (ie, changes in set points). . The term calibration refers to the steps involved in referring to a mass flow controller to provide a satisfactory steady state or static response. The term setup data refers to data obtained during the process of adjusting and / or calibrating the mass flow controller. In particular, the profile describes the characteristics and / or measurements obtained during the operation of the mass flow controller with the test fluid and test operating conditions. The setting data obtained during the production of the mass flow controller can then be used to set the mass flow controller under the process fluid and / or process operating conditions. As explained briefly above, the terms test fluid and test operating conditions are used to describe the fluids and operating conditions used in the production process of the mass flow controller. The terms such as process fluid and process operating conditions are described in _______39___ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) ----— II--I ---- · I — (Please Read the precautions on the back first and then fill out this page) · Thread · 538327 A7 ___B7____ V. Instruction (3¾) -------------- Install-(Please read the notes on the back first Please fill out this page again.) Typically, the fluid and operating conditions desired by the direct user of the specific application of the mass flow controller. --Line- It should be understood that the same type of fluid and operating conditions can be used for both testing and process purposes. However, since the mass flow controller cannot be adjusted for each fluid and / or under all operating conditions, certain aspects of the present invention and a mass flow controller; during the production process, the mass flow controller is Under a specific set of operating conditions, adjustments and / or calibrations are performed on a specific test fluid so that the mass flow controller is set to work with different fluids and / or operating conditions in the future. Therefore, it should be understood that the term "process fluid" is not used to describe different types of fluids, but rather to indicate that the fluid can be different from the fluid used when adjusting and / or calibrating the mass flow control 芾 α. Similarly, "process operating conditions" describes a set of test operating conditions that may differ from those used when adjusting and / or calibrating the mass flow controller. One, some or all of a set of process operating conditions may differ from the test operating conditions. In the setting step 7 2 0, the setting data 7 12 obtained in the production process can be used to facilitate the setting of the mass flow controller in the process fluid and / or process operating conditions. According to an embodiment, the setting data 7 1 2 is used in setting 7 2 0 to determine the control parameters accompanying the mass flow controller; these control parameters allow the mass flow controller to work with process fluids and / or process operating conditions. Operation. In particular, the setting data 7 1 2 obtained in the production step 7 1 0 is used to determine the control parameters, and these control parameters help the mass flow controller to set the process fluid and process operating conditions to 'make quality The flow controller can produce a satisfactory response (that is, --------- 40__ This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) 538327 A7 ____ _B7_ V. DESCRIPTION OF THE INVENTION The (V /) mass flow controller is configured to have substantially the same response as observed during production using test fluids and / or test operating conditions when using process fluids and / or process operating conditions). The term control parameters is used herein to refer to the parameters that accompany the mass flow controller ' These parameters assist the operation of the mass flow controller. The control parameters may include: filter coefficients, gain terms, controller constants, linearization curves, etc. ′ 伹 is not limited to the above. In particular, the control parameters are required when the mass flow control [J device is set to work with any process fluid and / or process operating conditions (that is, set to present a satisfactory response). Change, change or increase parameters. The phrase "set for operation" used here specifically describes a way to set the mass flow controller; when the mass flow controller is operated, the mass flow controller will present a satisfactory response (that is, if the mass flow control Controller does not have a satisfactory response, the mass flow controller is generally not considered to be operational). It should be understood that, in general, production of 7 丄 〇 need only be performed with a single type of [J test fluid and a set of test operating conditions—times. However, the setting can be repeated any number of times during the life of the mass flow controller. In particular, whenever we want to operate the mass flow controller with different process fluids and / or operating conditions, we want to re-execute the setting 7 2 0 with a new process fluid and / or process operating conditions to Allows the mass flow controller to exhibit a satisfactory response when using new process fluids and / or process operating conditions. Fig. 7b is a diagram illustrating a mass flow controller according to an embodiment of the present invention ________: _ 41 _ This paper size · Common Chinese National Standard (CNS) A4 Specification (21 ^ 297 Gongchu) " ' --------- Order --------- (Please read the notes on the back before filling out this page) 538327 A7 _ B7____ V. Production and setting of invention description (/ v〇) ( That is, a block diagram of each detailed step performed by the householder during steps 7 1 0 and 7 2 0) in FIG. 7a. Production 7 1 0 may include a sensor adjustment step 10, a valve setting step 20, a feedback controller adjustment step 30, and a correction step 40. It should be understood that production 7 1 0 may include other steps not shown in production 7 1 0; for example, the conventional steps involved in constructing a mass flow controller are the same as the bypass matching step. In the sensor adjustment step 10, the flowmeter of the mass flow controller is adjusted so that it exhibits a satisfactory dynamic response. In particular, various elements of the flow meter are adjusted so that the output of the sensor (such as FS ") can satisfactorily respond to changes in the fluid passing through the flow meter. For example, as described above with respect to Figure 2, The sensor adjustment step may include providing normalized and response-compensated filter coefficients, calibration curves, and / or gains so that the flowmeter responds to the fluid step with a response very similar to a flow step change in the flow path. In adjustment step 1 The information obtained in 0, for example, can be stored as the setting data 7 1 2. In the valve setting step 20, the mass flow controller is set to operate in a consistent and stable manner in response to various differences Changes in operating conditions and / or characteristics. According to an embodiment, the system gain term of the mass flow controller control loop can be determined, and the inverse of the system gain term can be determined and applied to the control loop to provide a fixed loop gain In addition, the measurement data obtained in the process of determining the system gain term can be stored as setting data and then used in the setting; Further explanation according to Figure 7c. __42_ This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) II ------------III I --- order- -— — — — — — (Please read the precautions on the back before filling this page) 538327 A7 ^ ______ B7_ V. Be sure to explain Uv) In the loop controller adjustment step 30, the control and control attached to the loop controller The electronic device can be adjusted so that the mass flow controller responds satisfactorily to the change in setting the black occupation. According to an embodiment, the PID parameters discussed above with reference to FIG. 4 can be set so that the gain / guide / delay control The device can display the desired dynamic characteristics, such as the stabilization time, the maximum positive peak value, the negative peak value, etc. In the calibration step 40, the mass flow controller is calibrated so that it presents a stable steady state response. According to an embodiment, the mass flow controller is adjusted to provide a linear relationship between the actual flow through the mass flow controller and the flow indicated by the flow meter (ie, the signal FS 2, also known as the labeled flow). It covers the flow rate range that the mass flow controller wants to operate. As shown in FIG. 7b, the setting of the mass flow controller (such as step 7 2 0) may include a system gain decomposition step 50 and a system setting step 60. In the system gain In step 50, the system gain term is obtained, and then at least 咅 [3 points, according to the setting data obtained in the process of mass flow controller production 7 1 0, the system gain term is decomposed into its constituent gain terms. In the system setting step 60, the mass flow controller is determined by the parameters of the set process fluid and / or operating conditions so that when the mass flow control device and the process fluid and / or operating conditions work together, it can display Satisfactory and consistent response. In one embodiment, some or all of the individual gain terms decomposed from the system gain terms may be changed based on the process fluid species information and / or process operating conditions. The reciprocal gain term can be taken from the inverse of the product of each gain term and applied to the control loop of the mass flow controller 'to provide a fixed loop gain. __—-_— 43 _____— This paper size applies to the Chinese National Standard (CNS) A4 specification (210 x 297 mm) ----- 1 --- II --- · !! ί1 Order ------- -(Please read the precautions on the back before filling this page) 538327 A7 _____B7__ 5. Explanation of the meeting (4 > 0 Now we will refer to Figures 7c ~ 7f to further explain the production steps and setting examples. Figure 7c And 7 d are examples of procedures used to obtain setting data during mass flow controller adjustment and X or calibration during production. Figures 7 e and 7 f are diagrams τρ; another is used to set the mass flow controller. As an example of a procedure, a mass flow controller is set to operate under a process fluid and / or process operating conditions different from the mass flow controller being adjusted and / or calibrated. The production and setting procedures shown in Figures 7e and 7f It can be applied to mass flow controllers similar to those shown in Figure 1. However, it should be understood that the aspects of the present invention are not limited to this, but can be applied to mass flow with various components and operating characteristics. Controller In Figures 7c-7f, the mass flow control is shown under the heading "Setting Data" The controller is stored as an example of the setting data during the production process, and is located in the box of figure 7 12. It should be understood that the data shown in the figure is not limited to such data and should not be considered necessary Conditions. Various implementations of mass flow control benefits can have different sets of configuration data, which can help set the mass flow controller to work with process fluids and / or process operating conditions. Figure 7 c is based on this An embodiment of the invention further illustrates the details of the sensor adjustment step 10 and the valve setting step 20. In the sensor adjustment step 10, the flowmeter of the mass flow controller is adjusted so that it exhibits a satisfactory dynamic response. , Such as responding to the fluid ladder. The fluid ladder refers to a flow with a step function type flow change, which includes the positive _______— 44__________ in this flow. (%) --- I--III I --- · IIIIIII Order ----— — — — — * 5 ^ (Please read the notes on the back before filling in this page) 538327 A7 B7 V. Invention Description ) Ladder and Negative Ladder. In step 12 a fluid ladder is supplied to the flow meter. The flow meter contains any of the various components used to implement a mass flow controller, which can sense the flow and provide a flow signal that indicates the flow. The flowmeter is then adjusted in step 14 to provide a stepped flow signal in response to the fluid step. Desired characteristics of this step-shaped flow signal may include rise time, settling time, maximum positive spike 値 and negative spike 値. For example, referring back to the mass flow controller shown in FIG. 1 and FIG. 2, the steps of adjusting the flow meter may include adjusting the sensor and the sensor electronic device 2 3 0, the normalization circuit 2 4 0, and the response compensation circuit 2 5 0. For example, the t wave filter coefficient of the response compensation circuit 250 can be adjusted to reshape the signal as shown in FIG. 3. It should be understood that, in general, various embodiments of the mass flow controller may have different sets of parameters that can be adjusted. However, the purpose of the sensor adjustment step 10 is to ensure that the flowmeter exhibits satisfactory dynamic characteristics. As shown in Fig. 7c, the normalized gain accompanying the induction & output 1.0 through the sensor duct at full flow can be recorded as setting data. In the valve setting step 20, at the known inlet and outlet Under pressure '湏 [J test fluid is supplied to the mass flow controller at different set points selected from a set of set points. The resulting drive level is recorded at each set point. The term drive degree describes the number of drive signals provided to the valve actuator. For example, the degree of drive may be a measurement of current or potential. The horse movement degree can also be the number of digital control signals, and the actuator can convert them into electronic signals to control the displacement of the valve. The signal DS in FIG. 1 is an example of a driving signal, and the number of the driving signals is the driving degree. _______45______ This paper size uses Chinese National Standard (CNS) A4 (210 x 297 mm) ---------------- (Please read the precautions on the back before filling this page) · 538327 A7 ___B7______ 5. Description of the Invention (M) In one embodiment, an unadjusted but known gain / guide / delay controller can be used in this step. Therefore, each setpoint in the selected setpoint set will converge to the output of the sensor. In some embodiments, the sensor output and drive level information stored at this step is used to calculate the composite gain term of the mass flow controller. For example, in the valve setting step 20 shown in FIG. 7c, the composite gain term CD Α ′ corresponding to the product of the gain terms associated with the valve actuator 16 0, the valve 17 0, and the flow meter 1 1 0 It is calculated from the information obtained when adjusting the valve. At step 21, a series of set points from the selected set of set points are provided to the mass flow controller. The selected set of points can be selected by adding I in any suitable manner. For example, in one embodiment, the set of selected points is the ratio of the total flow; to a certain extent, it covers the range that the mass flow controller user wants to operate. The selected setpoints do not have to be evenly spaced within the range covered by the son-in-law. In addition, we can choose any number of settings. In general, the number of setpoints selected should be sufficient to represent the desired range of operation of the mass flow controller. The selected set of setpoints shown in Figures 7c-7f need not necessarily be the same as each other. In order to illustrate that the set points in the selected set point set do not have to be the same as each other, subordinates such as v t, c b, and c f have been used to indicate points. [J is the set point selected in the valve setting, calibration, and setting steps. However, it should be understood that these groups may be partly or completely different. In step 21, the first set point vt s 〇 is selected from the selected set point set {" S 〇, v t S i, v t S 2, ...}. The small error η is selected as the offset of the set point. Then, ν t S 〇 + η is used to control _ _ 46 This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 male f) ~ one by one " '' --- 1 ---- ------------ 1 Order --------- (Please read the notes on the back before filling this page) 538327 A7 ____— B7___ V. Description of the invention) Allowed to converge. When the controller converges, the sensor output will be equal to the setpoint used. In step 22, the final driving degree is recorded for the set point S i. In step 2 3, v t S. A η is used for the controller and allows convergence. The resulting drive level is recorded again as in step 24. In step 25, the composite gain term CDA 'is determined. For example, the synthetic gain term can be determined by taking the amount of change at two set points (ie, 2 η) and dividing the amount of change by the amount of change recorded in steps 22 and 24. This ratio represents the set point vt S. The resultant gain term C D Α '. As described above, the gain terms C and D are associated with the valve actuator and the valve, respectively. The gain term A 'is accompanied by the flow meter, and represents the gain of the flow meter when there is no contribution from the linearization circuit 260 (that is, the gain accompanying the sensor output). The sensor output 收敛 to which the mass flow controller converges to each set point S i and the combined gain term CDA ′ determined at the set point can be stored as set data. Steps 2 1-2 5 are repeated for each set point v t S i in the selected set point set, and the result is a set of one-point pairs {sensor output, C DA ′}. In one embodiment, the pair of sets {sensor output, CDA ′} is used to store manual adjustment setting data of the mass flow controller. In addition, the reciprocal gain term G = 1 / CDA 'may be formed for each CDA' recorded in step 20. This reciprocal gain term G may be provided to the controller in a subsequent controller adjustment step to provide the stability of the controller. In other embodiments, the composite gain term CD A 'can be changed by an approximate linearization curve to make it more similar to the system gain term CD A. Therefore _____—-_ 47____ Use Chinese National Standard (CNS) A4 specification (210 X 297 mm) " ------------- install -------- order-- ------- line (please read the precautions on the back before filling this page) 538327 A7 _ B7 ..._ V. ^ Instructions (eight w) will be changed by changing the gain term c DA. The formed gain term G can be more similar to the fixed loop gain in subsequent steps. In the feedback controller adjustment step 30, various parameters accompanying the mass flow control curtain are adjusted 'to provide a satisfactory dynamic response of a series of fluid ladders supplied to the mass flow controller. . It should be understood that the various embodiments of the mass flow controller can utilize different control methods (eg, PI D, P D, etc.). A program example for adjusting the feedback controller of the mass flow controller will now be described with reference to the gain / lead-in delay controller depicted in FIG. In step 32, the reciprocal gain term G formed by the measurement 値 in step 20 is applied to the gain / guide / delay controller. In step 34, the fluid ladder is provided to the mass flow controller by jumping the set point. For example, S I 2 in Fig. 1 is changed by a set of different changes in the set point Δ S i:. We can choose different ΔS i, so that the controller can adjust for large step changes (such as △ S: 75% of full flow) and small step changes (such as ASi of 2% of full flow) . For various implementations, the number and size of each different ΔS i are different, and will be different according to the different operation requirements of the specific implementation of the mass flow controller. In step 36, different parameters of the gain / guide / delay controller are set so that the gain / guide / delay controller can respond in a satisfactory manner to different changes in the defined set points. The parameters including PID equivalent KP, K i and so on can be adjusted to provide the desired response to the change within the set point. The different special factors that can be adjusted in the controller include: time for juice, maximum positive spike 値 / negative spike 値, settling time ____48_______ This paper rule f applies Chinese National Standard (CNS) A4 (210 X 297 mm) --- II — — — — — --- 1111111 ^ — — — — — (Please read the notes on the back before filling out this page) 538327 A7 B7 V. Description of the invention, etc., but not limited to the above . In calibration step 40, the mass flow controller performs calibration steps such as adjusting the sensor and the controller to have a desired dynamic response and obtaining a synthetic overflow CD A 'of different set points to ensure that the mass flow controller has a command Satisfactory steady state response. The mass flow controller is partially corrected so that there is a linear relationship between the actual flow and the nominal flow. In addition, it is possible to obtain the setting data needed to facilitate the setting of the mass flow controller in the process fluid and / or process operating conditions, namely the calibration step 40 shown in Fig. 7b. In step 41 of the correction step 40, it defines a full flow range 1 for the mass flow controller. According to an embodiment, the actual flow is measured, which corresponds to a sensor output of 1 · 0. An approximate linearization curve is provided so that at the defined full flow, the number of marked flows 値 is equal to or close to 1.0. The approximate linearization curve is then applied to the flowmeter 1 1 0. It should be understood that the large sensor output and labeled flow rate represented by the number · 1 · 0 is only an example, and can be replaced by any number desired. In step 43, the first set point vt S. Is selected from the set of selected setpoints {"S °," S "S 2, ... 丨 and applied to the mass flow controller. Then the flow path originating from the setpoint (eg flow path 1 0 3) is measured Fluid. Corresponding to each set point, the sensor output and actual flow are recorded. It should be understood that the marked flow can also be recorded. However, the mouth can use the full flow to calculate the marked flow from the actual flow at any point. Steps 4 1 and 4 3, and then for each set point in the selected set point set. B S i is repeated, and finally generates a point pair set 丨 sensor output, the actual flow rate} 1, and this point pair set can be as in step 4 4 And 4 --------------— (Please read the notes on the back before filling this page) Order: Line ·

538327 A7 B7 --- 1---------- 5. Description of the invention (ridge) 5 is stored as setting data. The set of point pairs {sensor output, actual flow} i The relationship between {describes the non-linearity accompanying the sensor, and describes the ratio of the flow through the sensor duct to the flow through the mass flow controller at different flow rates The relationship between. Therefore, the linearization curve can be determined by these pairs of points to ensure a linear relationship between the actual flow rate and the marked flow rate. In one embodiment, it determines a set of corrections that accompany the number of pairs {sensor output, actual flow} i; ^ a linear set of points. The cubic spline is fitted to this set of points in order to provide a continuous and linearized curve passing through the point (0,0) (that is, flow = 0 and sensor output = 0). In step 46, the linearization curve is applied to the mass flow controller. It should be understood that other curve fitting methods can also be used, including fragment linear approximation and polynomial linearization, but not limited to the above. In steps 10-40, the setting data has been recorded in green from the different production steps of the mass flow controller operating under the test fluid and the 操作 rj trial operating conditions. This setup data contains information that helps set up the mass flow controller to work with process fluids and / or process operating conditions. It should be understood that the set of set data recorded when manually adjusting the mass flow controller may be different, depending on the specific implementation of the mass flow controller, and may be different from that shown in FIGS. 7c and 7d By. Therefore, the setting data for a specific embodiment of any mass flow controller is only describing the data obtained during the production process of the mass flow controller, and this information helps to set the mass flow controller so that it can interact with the process fluid. And / or process operating conditions work together. ___50_______ This paper size complies with China National Standard (CNS) A4 specification (210 x 297 public love) -------------- install --- f Please read the precautions on the back before filling in this Page} Order: Line · 538327 A7 _B7_ Five, t clearly explain () For example, in the embodiment shown in Figure 7c and Figure 7d, the setting data recorded in steps 1 0-4 0 contains from A single gain term for the sensor adjustment step, a set of point pairs {sensor output, CD A '}:, a set of point pairs {sensor output, actual flow rate}: the full flow of the test fluid, and a linearization curve. In the valve setting step 20, the number of points to {Sensor output, C D A ′}: is recorded. As discussed above, the composite gain term CDA 'is the product of the gain terms that accompany the valve actuator, valve, and flow meter, respectively. However, the contribution of gain terms C, D, and A 'to the individual J of the synthesized gain term CDA' is unknown. In addition, it should be noted that A 'is only a part of the total gain term A accompanying the flow meter. In the system gain decomposition 50, the individual gain terms that contribute to the synthetic gain term CD A 'are isolated from the synthetic gain term, making it possible to determine the process fluid and / or process operation in the subsequent system charge setting step 60. condition. In step 51, a gain term A is determined. In the previously described embodiment J, the flow meter has been adjusted and / or calibrated such that 25% of the full flow yields a 0.25 labeled flow; 50% of the full flow yields a 0.5 labeled flow; 7 5 of the full flow % Produces 0.7 5 marked flow rate, etc. Because there is a linear relationship between the flow in the flow path and the marked flow, the gain term (such as gain A) accompanying the flow meter is a constant. It can be known from the above that the gain A can be directly determined in step 51 by dividing the marked flow by the flow at any point, and the minimum is the full flow, and the line 1 biochemical curve guarantees that the accompanying marked flow is 1. Therefore, in the embodiment where the maximum flow rate is 1 unit, the gain A is equal to the reciprocal of the full flow rate (that is, the specific flow ___51_ This paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) I ---- II --- · II I ---- Order .-------- (Please read the notes on the back before filling this page) 538327 A7 ---____ B7_ V. Description of the invention (0) The total flow rate through the mass flow controller ()). In general, the gain term A is equal to the maximum labeled flow divided by the total flow associated with a particular fluid species. In step 52, it generates a composite gain term CDA. The gain term A is the gain that accompanies the flow meter without the contribution of the linearization curve, and the gain term A is the gain that accompanies the flow meter when it has the contribution of the linearization curve. Therefore, the relationship between 'A' and A is defined by the linearization curve. In view of this, the synthetic gain term CDA can be directly determined by adding the contribution of the linearization curve, that is, the CDA is multiplied by the gain term accompanying the linearization curve (for example, CD A, multiplied by the derivative of the linearization curve). In step 53, the contribution of the gain term A is removed. Because both the combined gain term CDA and the individual gain term a (the inverse of full flow) are currently known, the contribution of gain term A can be removed from the combined gain term, leaving the valve actuator and Valve's synthetic gain term CD. As mentioned above, the gain C is the change in valve displacement divided by the corresponding change in the drive signal (such as the DS provided by the gain / guide / delay controller). The gain D is the change in flow rate divided by the corresponding change in valve displacement. In step 54, the contribution of the gain D is removed. In order to further differentiate the synthetic gain term CD, we use the physical model of the valve to determine the required valve displacement (that is, determine the gain D) in order to achieve a specific flow rate under specific operating conditions. One of the physical valve models that can be used to determine the gain D is illustrated and described in paragraph D, titled "Solid Valve Model" below. It should be understood that: different valves and valve types ______S9__ This paper size applies to China National Standard (CNS) A4 specification (21〇x 297 public love) ----------------- ---- Order --------- line (please read the notes on the back before filling this page) 538327 A7 ___B7_____ V. Description of the invention ( < |) will have different entity models. Furthermore, the existence of more than one solid model will not be sufficient to simulate the characteristics of any particular valve. Therefore, the invention is not limited to any particular valve model. In one embodiment, the gain D is determined by calculating the valve displacement required to reach each flow represented by the selected set point set {d S ϋ, d S 1, d S 2, ...}. Therefore, we can calculate the amount of change in flow divided by the amount of change in displacement calculated from the physical model (ie, the gain term D). In step 55, the gain term D is removed from the synthesized gain term CD and separated from the gain term C. It should be understood that the gain term c (the gain associated with the valve actuator) can be effectively independent of the process fluid and / or process operating conditions. Therefore, when the mass flow controller is set to work with a specific process fluid and / or process operating conditions, the gain term C can be maintained. In the system setting step 60, the process fluid and / or process operating conditions are used for the same. The control parameters are determined. When the gain term D is separated from the gain term C, it is also noted that the solid model has taken into account the fluid species, inlet and outlet pressure, temperature, etc. At this time, the fluid species information and process operating conditions can be provided to the solid model and calculated. In order to achieve the required displacement at different flow rates, we can calculate the gain term D corresponding to the process gas and / or process operating conditions. Then, the gain A can be calculated by determining the full flow rate of the process fluid. Therefore, we can determine the system gain term C D A corresponding to the process fluid and / or process operating conditions. The reciprocal of this synthetic gain term can be formed and applied to the gain / guide / delay controller, so that the control loop of the mass flow controller has a fixed return ___53______ This paper size applies to China National Standard (CNS) A4 specification (210 x 297 mm) -------------- install --- (Please read the precautions on the back before filling this page) Order: -1 line · 538327 A7 _B7_ V. Description of the invention (P ) ----------------- (Please read the notes on the back before filling this page). In view of this, the mass flow controller has been set to operate on the process fluid and / or process operating conditions, as described in detail below. In step 61, the full flow range accompanying the process fluid on which the mass flow controller relies is set is determined. One method to determine the full flow range is to calculate a conversion factor based on the specific heat of the process fluid and the test fluid multiplied by the full flow range that the test fluid is accompanied by. It should be understood that there are other methods that can be used to calculate the full flow range that accompanies a particular process fluid. For example, where appropriate, the full flow range that accompanies a particular fluid can be measured directly. In one embodiment, we obtain the full flow range accompanying the test fluid used in the production process and stored as the setting data, and substitute it with Equation 6 with the process fluid species information to determine the full flow accompanying the process fluid. range. • Line • Gain C is formed in step 62. It should be understood that each time the mass flow controller is set to work with the new process fluid and / or process operating conditions, the gain term C can be calculated from the setting data discussed in step 50; or, if the previous calculation result has been For storage, it is retrieved from the storage location, for example, from the memory of the mass flow controller. In step 63, the gain term D corresponding to the process fluid and / or process operating conditions is determined by the physical model of the valve, which is performed by applying process fluid species information and / or process operating conditions to the physical model and calculating The amount of displacement required to reach a set of indicated flow rates. In step 63, the set {of the flow rate {is selected. f S. . f S 丄, cf S 2,…} together with process fluid species information and / or process operation bar _: _ 54_ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 538327 A7 _ — _ B7_____ 5. The invention description (^) is provided separately to the solid model, and the corresponding valve displacement is calculated. This information can be the selected collection {. f S 〇 ,. f S if S 2, ...}. Calculate the gain D, which is obtained by dividing the flow rate (eg female mouth-. F S i-i) by the corresponding valve displacement change. In step 64, the gain term D is multiplied by the gain term C to produce a composite gain term CD. Since the gain term A is the reciprocal of the full flow rate, the composite gain term CD can be divided by the process full flow range accompanying the process fluid determined in step 61 to form the composite gain term CDA shown in steps 65. 〇 In step 66, the inverse of the composite gain term CDA is calculated to form a reciprocal gain term G. In step 67, the reciprocal gain term G is applied to the control loop of the mass flow controller to provide a fixed loop gain. It should be understood that: the system gain of the mass flow controller is determined according to the information used in the process fluid and / or process operating conditions, and the reciprocal gain term of the system gain is applied to the control loop of the mass flow controller. The mass flow controller is It has been set to work with process fluids and / or process operating conditions. In other words, when the mass flow controller operates with process fluids and process operating conditions, the mass flow controller will present the same response observed after production with test fluids and test operating conditions; that is, when the mass flow controller When operating under process fluids and / or process operating conditions, it will exhibit a satisfactory response. It should be understood that through the use of a computer, the process of setting up a mass flow controller can be automated. For example, steps 50 and 60 can be completely controlled by the programs stored in the memory, and on the computer as a personal computer _______—___ 55____ This paper size conforms to the CNS A4 specification (21Qx 297 Gongchu) ~ ------------- install -------- order --------- line (please read the precautions on the back before filling this page) A7 538327 __B7____ 5. Description of the Invention (y //) A processor is executed. As a result, mass flow controllers can be set up automatically to work with any process fluid and / or process operating conditions. The term "automated or automated" here refers to a state where a computer is controlled mainly by or under computer control. In particular, automated dagger operations, steps, processes, and / or procedures do not require the involvement or supervision of a large number of operators. Therefore, the automatic setting of the mass flow controller means that the setting of the mass flow controller for the process fluid and / or process operating conditions does not require manual intervention. The setting of the mass flow controller under computer control is performed by Think of it as an automated setup. It should be understood that routine tasks such as connecting the mass flow controller to a computer or processor and launching a program are generally done manually. However, this type of work that is considered routine can be part of the automation setup of a mass flow controller. Figure 14 illustrates a system that facilitates the automated setting of a mass flow controller on any process fluid and / or process operating conditions. This system includes a mass flow controller 1000 and a computer 800. The mass flow controller 100 includes a memory 100, a processor 1004, and various different components of the mass flow controller 10006 referred to and described with reference to FIG. The processor is coupled to the memory and can be connected to at least some elements of the mass flow controller. As mentioned above, the operation of the mass flow controller can be performed under computer control, so that the gain / guide / delay controller is operated by the processor 104. The mass flow controller 1 0 0 also contains the production data obtained from the mass flow controller and stored in the memory 1 ◦ 0 2 1 2 0. _____56_____ This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) --------- I ----___ (Please read the precautions on the back before filling this page) ·- 1-line · 538327 A7 factory _____B7 __ V. Instructions () Computer 8 0 0 contains a memory 8 0 2, a processor 8 0 4, —input device, and programs stored in memory 8 02 8 1 0. Program 8 10 contains instructions that, when executed on processor 804, can perform various steps involved in setting a mass flow controller in order to work with process fluids and / or process operating conditions (for example: Step 7 1 2 in 7 a and step 70 in Figs. 7 b, 7 e, and 7 f, etc.). It should be understood that the computer 800 can be any conventional computing device. For example, the computer 800 may be a personal computer, a laptop computer, a sheep holding device, or any computing device capable of executing a program. In addition, the computer 800 can be connected to and communicates with the mass flow controller in any conventional manner. For example, the computer 800 can be connected by cables using any standard communication method, including standard parallel port communication, serial port communication, universal serial bus (U S B), etc., but not limited to the above. In other alternatives, wireless communication can be established between the computer 800 and the mass flow controller. Therefore, it should be understood that the present invention is not limited to a specific type of computing device, input device, connection type, or communication method, and so on. In fact, a variety of computing devices, connection types, and communication methods are applicable. According to an embodiment of the present invention, the computer 800 may be connected to the mass flow controller to facilitate setting the mass flow controller on the process fluid and / or process operating conditions. Program 8 1 0 can then be executed on processor 8 0 4. The set input can be provided to the input device 8 0 8. Setting inputs include: process fluid species information, process operating conditions, and / or other information related to the mass flow controller settings, but not limited to the above. The input device can be any type of device capable of receiving information, such as a keyboard or a small keyboard, which is used to connect _____57_ This paper size applies to China National Standard (CNS) A4 (210 x 297 public love) --- I --- -I I --- · III I --- order --------- line (please read the precautions on the back before filling this page) 538327 A7 __B7____ V. Description of the invention (0) Accept the mole input Interface software, pointing devices, etc., but not limited to the above. Then, the program 8 10 can obtain the setting data stored in the memory 100 2 of the mass flow controller. The program 8 10 can determine the control parameters used by the mass flow controller by setting data and setting inputs. These parameters can promote the operation of the mass flow controller using process fluid and / or process operating conditions. By changing existing control parameters or adding additional control parameters to the mass flow controller, the program 8 10 can then apply the above parameters to the mass flow controller. In this case, the mass flow controller can be automatically set to operate using the process fluid and / or process operating conditions. In another embodiment shown in FIG. 15, the program 8 10 may be stored in the memory 1 0 2 of the mass flow controller and may be executed on the processor 10 0 4; the processor 1 0 0 4 can be used to operate the gain / guide / delay controller 1 50. The input device 1 0 0 8 can be attached to the mass flow controller, allowing the mass flow controller to receive setting inputs. Therefore, the mass flow controller 100 shown in FIG. 15 can be set automatically. C. Reduction of hysteresis It is often the case that the mass flow controller will experience instability associated with the operation of its individual components. For example, a mass flow controller using a solenoid-actuated valve is susceptible to the uncertainty caused by the hysteresis accompanying the solenoid's magnetism. One embodiment of the present invention provides a method for reducing the hysteresis of a solenoid device, by applying a non-operational signal to the solenoid actuating device. ___ 58 .__ _ A paper size is applicable to Chinese national standards (CNS) A4 specifications (210 x 297 mm) ------------- installation-(Please read the precautions on the back before filling out this page)-• Line-538327 A7 __B7____ V. Description of the invention (fp ----------------- (Please read the precautions on the back before filling out this page) When applied to a solenoid actuating device, the non-operational signal is Refers to a signal applied to a device that cannot actuate a device. For example, in a solenoid-actuated valve, a non-operational signal may refer to a signal whose size cannot control a controlled component of a valve (ie, a piston). It should be understood Yes: The non-operational signal can be the control or drive signal of the device, but its signal strength is not enough to start the device. Figure 8 shows the hysteresis in the solenoid-actuated control valve of the mass flow controller. The valve is in the normally closed position (that is, the preset closed position of the valve is referred to herein as Normally closed position). In Figure 8, the drive current of the control valve is plotted on the horizontal axis, and the flow through the control valve is marked on the vertical axis. Although Figure 8 is specifically for the solenoid in the mass flow controller The control valve is actuated, but it should be understood that it only represents a general solenoid device; the horizontal axis usually corresponds to the energy supplied to the solenoid actuation device, and the vertical axis usually corresponds to the solenoid actuation The displacement of the device. As shown in Figure 8, when the valve driving current increases, the actual flow of the valve is controlled until the amount of driving current provided is sufficient to overcome the spring force of the spring and the control valve deviates from its closed position. Beginning to increase. In Figure 8, the amount of driving current required to overcome this spring force is marked as point Xι. Under normal operating conditions, the actual flow rate through the control valve starts to increase at a point after point Xι. Such as the curve (: As shown in i, when the valve current increases beyond the point X 2, the actual flow through the control valve will increase proportionally-but it increases non-linearly. Where the curve C 1 is marked as R i量 流 控 芾 [J device's normal closing control valve's typical operating range. Although Figure 8 is not depicted in a fully proportional way, but the quality ______ 59_____ This paper size applies Chinese National Standard (CNS) A4 specifications (210 x 297 公 餐) 538327 κι Ξί ----- 5. Description of the invention (θ) The normal operating range of the flow controller is the control valve's operating range, which usually represents the displacement of the control valve [J valve from its closed position by a few microns. The valve drive current above point X 3 represents operation beyond the operating range of the mass flow controller (eg, the mass flow rate range where the mass flow controller is designed and / or calibrated for operation); the fully open position of the control valve ( The point above X5) represents the eradication mode of the mass flow controller, in which the displacement of the control valve (from its closed position) is on the order of about 250 microns. It should be understood that although the fully open position of the control valve is the operating position where the mass flow controller is designed, it is not a position that can accurately control and / or monitor the mass flow rate flowing therethrough. Therefore, when applied to a mass flow controller, the term operating range is defined herein as the range of displacement at which the flow rate of a fluid through a control valve can be accurately controlled and / or monitored. As shown in Fig. 8, when the control valve is pulled to its fully open position and the valve drive current is subsequently reduced, the curve of the flow through the control valve versus the drive current is no longer the curve C i but tends to a different curve C 2. Therefore, when the valve current drops from point X5, the flow through the control valve will not decrease until it approaches point X6. At this time, the actual flow will decrease proportionally to the valve drive current with curve C2. After operating the control valve in this way (that is, first operating the control valve along curve C: and then returning to its closed position along curve C2), if we want to resume normal operation, the actual flow through the control valve is no longer Along the curve Ci, but another curve C 3 located between the curve Ci and the curve C2. In fact, when the curve < 3 i represents the graph of the driving current versus actual flow of the previously unmagnetized solenoid-controlled valve, and the curve 〇2 represents the magnetic ___ _ _60____ — this paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) installed --- (please read the precautions on the back before filling out this page) 0 --- line-538327 A7 ------- B7_______ V. Description of the invention (^) The graph of the drive current versus actual flow of the control valve (for example, after returning the control valve to its closed position along C2), curve C3 will be closer to curve c2 as shown. Therefore, the actual flow does not start at point X2, but starts near point χ7. If the control valve is operated along Qu Maoquan C 3 within its normal operating range and returned to the closed position, the next time the valve is opened, the actual flow of the valve through the control valve's actual flow will follow A different curve (such as curve 04) is one of a family of curves between the curve C1 and the curve C2. Is curve C 4 close to the curve? < 3 i or curve C 2, depending on the highest point on curve C 3, and the control valve operates at this highest point in the operating cycle. The above-mentioned operation of the control valve is called hysteresis, in which the current operating state depends on its previous operating state. Figure 9-13 shows several different waveforms. These waveforms can be used as non-operational signals to reduce the hysteresis in the solenoid actuating device. Each non-operational signal can drive the signal to the solenoid actuating device. For example, in the mass flow controller shown in FIG. 1, these non-operational signals can be provided to the valve actuator 16 by the gain / guide / delay controller 150 to reduce the hysteresis phenomenon. Referring to FIG. 9, a time-varying sinusoidal signal may be provided to a solenoid-actuated valve or other device, thereby mitigating a hysteresis effect. As shown in Figure 9, within a period of time T :, we can provide a sine waveform with reduced amplitude. In the case where the solenoid actuating device is a control valve of a mass flow controller, the amplitude of the sine signal should be smaller than the amount of current required to open the solenoid actuating device. For example, the mass flow of a solenoid-actuated valve in a normally closed position _____61______ This paper size applies the Chinese National Standard (CNS) A4 specification (21 × x297 mm) --- I --- I- I — I— II (Please read the precautions on the back before filling this page) ^ -r * »J · -1 line · 538327 A7 ________ B7______ 5. Invention 4 (" ο) -------- ------ Installation—— (Please read the precautions on the back before filling this page) In the controller, the maximum non-operational signal should be less than the minimum current required to overcome the spring force and open the valve. Therefore, return Referring to FIG. 8 'the maximum value of the above signal will be less than Xi to ensure that no fluid will pass through the valve when the waveform is provided. As shown in Figure 9, the time-varying waveform will reduce the amplitude within time T i. The result of I 佥Obviously, a frequency of about 10 Hz in 1 second is sufficient to pre-adjust the solenoid-actuated valve to a predetermined state, regardless of its previous state * (that is, regardless of whether the solenoid-actuated valve is in its normal operation Range operation, or operation outside the normal operating range, as in the erasure mode) In the case that the solenoid-actuated control valve is in the open position during normal times, the waveform should be such that the valve is in the closed position throughout the process to prevent fluid from passing through the valve. Although I think the waveform shown in Figure 7 is the most suitable for reducing The hysteresis effect in the solenoid actuating device, but empirical results have been determined, and various other waveforms can also be used to set the solenoid actuating device to a preset state. In a nutshell, various waveforms provide A time-varying signal to a solenoid-actuated device, and this signal can reduce the amplitude over time. However, empirical results also show that we do not have to use a time-varying waveform to reduce the amplitude, because a time-varying signal with a fixed amplitude can also be used. Figure 10 is another time-varying current waveform. This waveform can be used to reduce or eliminate the magnetically induced hysteresis effect in a solenoid-actuated control valve or other solenoid-actuated device. See Figure 9 The time-varying waveform reduces its amplitude at time T i and its maximum amplitude is less than the strength of the control signal required to allow fluid to pass through the valve. For the time-varying waveform shown in Figure 9, time Ding 1 —_______ 62______ This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210x 297 mm) 538327 A7 ___ _ B7___ V. The description of the invention (") is about 1 second to avoid interference with normal operation. However At this time, Wu Lu provides sinusoidal waveforms, but provides square waveforms. Based on empirical tests, we can also provide other time-varying waveforms, such as sawtooth waveforms. It should be understood that Figures 9 and 10 show Various waveforms can provide positive 値 and negative 値 to the worm accumulator actuating device. Generally, when the solenoid actuating device is set to a predetermined state, a waveform that can provide both positive and negative 値 is used. For the better, ® this kind of wave can effectively release the residual magnetism caused by the magnetic core of the solenoid actuating device during the operation. Figures 11 and 12 illustrate other waveforms that can be used to reduce or eliminate the effects of hysteresis in a solenoid-controlled gravity control valve. The waveform shown in Fig. 11 also has a reduced amplitude in time Ti. However, in contrast to the waveforms shown in Figures 9 and 10, the time-varying waveform depicted in Figure 11 contains only positive chirp. We may not be able to provide a signal that guarantees both positive and negative signals, and it depends on the circuit that uses the solenoid to control the valve. Figure 12 illustrates a time-varying waveform that can be used to reduce or eliminate the effects of hysteresis in a solenoid-actuated control valve. Although the triangle wave pattern is shown in the figure, it should be understood that a sine waveform, a square waveform, or any other I-shaped waveform can also be used. It should be understood that in each of Figures 9-12, the maximum amplitude of the time-varying waveform is the amplitude that prevents it from activating the solenoid-actuated control valve because the maximum amplitude is less than that required to overcome spring force and open the valve Control or drive signal strength. The applicant of this case has found that the time-varying current waveform shown in Figure 12 can be easily provided to the components currently used in the mass flow controller without the need for an additional circuit system. In addition, other time-varying waveforms can also be provided ____ 63 _------ This paper size applies to China National Standard (CNS) A4 (210 x 297 mm). ----- line (please read the notes on the back before filling this page) 538327 B7 V. Description of the invention), for example: square waveform or zigzag waveform. It should be understood that the square waveform can be provided with few or no additional circuitry because the square wave can be generated by the clock signal used by the microprocessor of the mass flow controller. The applicant of this case has empirically judged that a frequency of about 10 Hz is more suitable for a time of about 1 second; a time of 1 second is selected to avoid interference with normal operation. It should be understood that different lengths of time 'may also be provided as the invention is not limited to any particular length of time. Figure 13 shows another waveform that can be used to set the ¢ 1 spool actuator to a predetermined state after each operation cycle. As shown in Figure 13, a negative tritium pulse is applied to the core of the solenoid actuating device. When used with a mass flow controller, the sign of this pulse should generally be the opposite of the sign capable of opening a solenoid-actuated control valve. For example 'for actuating a control valve with a normally closed solenoid, this symbol should correspond to a negative pulse. It should be understood that the current pulse applied should be a pulse of the opposite polarity to that required by the mass flow controller. In a general solenoid actuating device, the above-mentioned pulses should be generated so that the solenoid actuating device cannot be started, and the polarity is opposite to that of the normal driving signal. It should be understood that the non-operational signals may be current, voltage or other. Therefore, the waveforms shown in Figure 9-13 and described here are considered to be specific types of time-varying waveforms that can be used in any implementation (such as: Risi current waveform, time-varying Voltage waveform, etc.). The above-mentioned various drive-requiring signal waveforms can set a solenoid-actuated device, such as a female port control valve, to a predetermined state. In view of this, referring back to FIG. 8, we can know on which curve C the actuation device will operate. Therefore, the device ___________64__ This paper size applies to the Chinese National Standard (CNS) A4 specification (210 x 297 mm) ---------------- I I --- Order ---- -I ---- line (please read the notes on the back before filling this page) 538327 A7 ______ Β7 —_____ V. Description of the invention u;) The inaccuracy caused by operation on any of the curves of the ci family can be Reduced or eliminated. It should be understood that although it is not necessary to set the solenoid actuating device to a predetermined state after each operation cycle, it is better to do so. For example, if the solenoid actuating device normally operates within its normal operating range, the solenoid spring actuating device only needs to be set to a predetermined bark state when it operates outside its normal operating range. If the solenoid actuating device typically operates within its normal operating range, the next cycle operation will generally operate on the same curve, or on a curve that is substantially close to following the previous operating state (for example J: Curve C 4 in FIG. 8). However, since detecting when the solenoid-actuated device operates outside its operating range requires additional circuitry, itb, it is better to have the solenoid-actuated device better after each operating cycle Set to a predetermined state regardless of whether the previous state is within or outside the operating range. In this case, the solenoid actuating device will be considered to follow a certain curve in operation, regardless of its previous operating state. It should be understood that non-operational signals may be provided in a variety of ways, and the present invention is not limited to any particular implementation. For example, various waveforms (such as the waveforms shown in Figure 9-13) can be generated by the control and control electronics of the mass flow controller (such as the gain / guidance / delay controller 1 50) and generated by the valve The actuator is converted into a non-operational signal and then supplied to the valve to reduce the hysteresis effect. In the alternative, a function generator can be coupled to the valve or valve actuator to provide a non-operational signal to reduce the hysteresis effect. The waveforms generated by any kind of device can be in digital or analog form, and can be implemented according to specific implementation. _ —_ 65 This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) '^ (Please read first Note on the back, please fill in this page again.) Installation · i-line. 538327 A7 B7 V. Description of invention (M) needs to be appropriately converted. Many techniques are known in the art for generating suitable signals without departing from the scope of the present invention. D. Solid valve model According to another aspect of the present invention, the fluid flow situation has been physically modeled at different inlet and outlet pressures, which mainly includes two components: viscous pressure drop and non-viscous (dynamic) pressure drop . By calculating the sum of the contributions of these components-the effective displacement of the valve of each component is equal, the effective displacement of the valve can be determined empirically using the following method. As mentioned above, determining the effective displacement of a specific fluid at a specific flow rate will be sufficient to determine the gain term (such as gain term D) accompanying the valve, and then determine the gain term (such as gain) accompanying the valve actuator. Item C). Referring to Figure 16, let P 1 be the upstream or inlet pressure, and P 2 be the downstream or outlet pressure. When the mass flow rate is Q, the valve rises to Η, and the viscosity effect itself makes the pressure drop from 卩 i to a certain value. Intermediate QP χ. The non-viscous compressible fluid further reduces the pressure from P X to P 2. According to the solid model of the viscous fluid between two parallel plates (such as between the valve seat and the nozzle surface) to mold the viscous pressure drop through the valve 170, the distance between the two parallel plates Η can be provided by the following equation: Equation 1 66 This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) — — — — — — — — — — — — II ί 1 II Order — — — — — — — — (( (Please read the notes on the back before filling this page) 538327 A7 B7 V. Description of the invention (W <) where: pi, p X: pressure upstream and downstream of the viscous surface (P si QL Η w mass flow rate (standard cubic centimeter / minute, sc cm); length of flow path (ft); two parallel plates Distance (ft); the width of the flow path, W is equal to ττ · 0, where is the average diameter of the flat top 6 50 0, according to the test valve, 0 equals 0.0 4 0: the dynamic viscosity of the gas (ce η

Poise T: absolute temperature (degrees Ra n k i n e); R: ideal gas constant, 1545.33 (ft — lbf 1 b-mol e-deg. R); R: gas constant (f t — 1 b f

b m — de e. R Based on a non-viscous flow model of a fluid passing through a hole or nozzle to simulate a non-viscous pressure drop, the following equations can be provided for obstructed flows: = 1 · 2686 × 106 corpse. jc, 0 2 Ϊ --- I ---- II ---- III I --- order --------- * 5 ^ (Please read the notes on the back before filling this page) γ + \ 67 Equation 2 This paper size applies to Chinese National Standard (CNS) A4 (210 x 297 mm) 538327 A7 B7 V. Description of the invention (where) For non-blocking flow: _ _ (宁) ^ = 1.2686 xl06Po P, 2γ A 1 2 /

-ι) μγ (r -P-vl ^ (—) r < jc, 0 —1 > V Η J Equation 3 where, if the following formula holds, the flow is a blocking flow; otherwise it is a blocking flow A. ρχ , 〇 < 2 γ + \ Equation 4 where: Q = flow rate through the valve (sccm); A 2 7Γ · (/) · H = effective area of the valve (square inches) 0 2 orifice 1 6 4 0 of Diameter; Mw = molecular weight of the gas (g / mole); χ,. = Total upstream pressure (t 〇rr); P2 = downstream static pressure (t ◦ rr); 1 ^, 0 = gas temperature (K); r Specific heat rate. 68 -------- Order --------- line (Please read the precautions on the back before filling this page) This paper uses China National Standard (CNS) A4 specifications (210 x 297 mm) 538327 A7 ^ ----------- B7___ 1 X $ Explanation (Bat) From the above equations of viscosity and non-viscosity, we can know that the effective displacement of valve 1 7 0 The quantity (ie, Η) can be easily determined. Although the units used in the above non-viscous equations are different from the units used in the viscosity equations', there is no category difference between these equations, And the unit conversion factor has been established Within the constants of each equation. To determine the effective displacement of the valve, it is assumed that the measured flow rate is Q, and the upstream and downstream pressures measured by r are ρ 1 and 卩 2 respectively, while ignoring the velocity versus total pressure. Contribution, we can carry out a method of calculating the displacement of the valve 170. One method of calculating the effective displacement is to use trial and error to estimate the intermediate pressure PX, in which we are based on the viscous flow theory (H v, Equation 1 ) And non-viscous flow theory (Hi, Equation 2 or 3) to calculate Η 値, which theory to choose depends on whether the fluid is an obstructed flow. Therefore, if the intermediate pressure of about two atmospheres is greater than the outlet pressure, then It can be assumed to be an obstructed flow, and Equation 2 can be used to calculate the non-viscous component; however, if the inlet pressure is less than about two atmospheres and greater than the outlet pressure, use Equation 3 to calculate the non-viscous component. Given Q , P dDP 2, when Η ν and H i are equal to each other, you can get the correct P χ. Therefore, the calculation scheme 渉 and the continuous recursive calculation to obtain P χ. Then calculate the viscosity valve rise Η ν) and non-viscous rise (H i). If it is determined that Hv is greater than Hi, this means that there is not enough pressure difference to make the viscous flow richer than that required for non-viscous flow transfer. Fluid, and in the next recursive calculation, a lower pressure Pχ 'will be selected, which is between the downstream pressure P2 and the previous pressure PX. The recursive calculation will continue until Ην and Ηi differ from each other. · Up to 1%. According to another aspect of the present invention, this ^ _ 69 ___ Chinese National Standard (CNS) A4 specification (210 X 297 mm) ----- I--I -------- I --- Order --------- line (please read the precautions on the back before filling this page) 538327 A7 ___B7___ V. Description of the invention (>? ≫) The return process can be implemented in software. The software that performs this recursive calculation can be easily operated by a person skilled in the art and executed on a computer. In view of this, according to the above method, the effective displacement of the valve 170 at various flow rates can be determined. As previously discussed, according to the stolon test performed on various liquids or gases, the applicant of this case has learned how the contribution ratio of the gain term A of the mass flow meter varies with the gas, because it is mainly caused by The specific heat of the liquid or gas used is determined. For this reason, once the mass flow controller 100 is calibrated with a known liquid or gas, it is known how this gain term changes with other types of gases. In addition, for the mass flow control 芾 [J device 100, the contribution of the gain / guide / delay controller 1 5 〇 I: The example is known, because various constants that determine this gain term can be stored in the mass flow control The memory 100 of the controller 100 and the contribution ratio of the gain term C of the valve actuator 160 are actually constant or known. In view of this, how the remaining 1C operation determines the proportion of the gain term of the valve 170, and how the gas path changes under different gases and different operating conditions, and how the female mouth compensates the mass flow controller 1 〇〇 The amount of change from the range of liquid or gas used when initially calibrated. According to another aspect of the present invention, a method for calibrating a mass flow controller is provided. The mass flow controller is adjusted with a known liquid or gas under known conditions; the method can be used to calibrate the mass flow controller so that It has nearly the same response on different liquids or gases, or with a different operating range than when used for adjustment. As discussed above, the mass flow controller 1000 was initially based on a known gas (such as nitrogen) at a known inlet pressure and outlet ----—? 〇_ This paper size applies to the Chinese National Standard (CNS) A4 specification (21〇X 297mm) ---------------- I ---- Order --------- Line (Please read the precautions on the back first Fill out this page again) 538327 B7 V. Description of the invention () ^) The mouth pressure is adjusted. For the sake of simplicity, 'an embodiment of the present invention selects an inlet pressure greater than two atmospheres' and an outlet pressure in the surrounding environment. There are two reasons for choosing the above inlet pressure and outlet pressure. First, using the inlet and outlet pressures of the obstructed flow helps the physical modeling of the valve and the valve's gas path 'because only the obstructed flow condition can be used for the non-viscous, band pressure drop equation. The second 'operation (i.e., a pressure drop of about two atmospheres) is a typical operation used by the direct user. Under these conditions, the gain of the gas path can be defined as follows: (change of gas flow) / {full scale flow range) gain = --- {change of valve drive) / (Max valve drive) Equation 5 In order to use the new Full flow on gas "operates the same mass flow controller. The closed loop gain of the mass flow controller 100 is expected to change as follows: -------------- install- -(Please read the precautions on the back before filling this page) --Line _ new gain on gas x 1 _ 0.4 Mw 丄 N2 0.2 old N2 range old gain on N2 [Cfc] Mw L ^ '' new N2 range moderate size Standard on paper

Specification 4) A equation 6 71_ public 538327 A7 ____B7 ___ V. clarification (1.) where C f Cx = conversion factor “C” of gas X; molecular weight of gas. The above equation is only approximate 値, because another term is a function of inlet pressure, temperature, and specific heat rate. However, the power of this extra term is 0 · 4, which can generally be ignored. For example, suppose that the mass flow controller 100 was initially calibrated with nitrogen as a liquid or gas, and the number of this additional term will increase from 0.6 8 4 of nitrogen and other diatomic gases to single. 0.7 2 6 of the atomic gas, and decreased to 0.6 2 8 of the polyatomic gas, and then rose to 0 · 4. Therefore, the difference in nitrogen is at most about 3.5%, which can usually be ignored. In order to compensate for changes in gain caused by the use of different gases and / or different operating conditions during calibration, the gain term G can be changed by the inverse of the above ratio to provide a fixed closed loop gain for the mass flow controller, and The set point, operating conditions and the liquid or gas used are independent. In other words, if the closed loop gain of the mass flow controller is A * B * C * D, the gain term G is set to a constant multiplied by 1 ^ (A * C * D) to provide the same Fixed closed ^ loop gain. Several embodiments of the present invention have been described in detail here. Those skilled in the art can easily understand various changes and improvements. These changes and modifications do not depart from the scope of the present invention. Therefore, the above description is only an example and is not considered as a limiting condition. The present invention is defined only by the scope of patent application and its equivalent. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) I ----------- ^ --------- ^ (Please read the notes on the back first (Fill in this page again)

Claims (1)

538327 A8 8s8 D8 6. The scope of patent application 1 · A method for setting the mass flow controller so that the mass flow controller and the process conditions work together. At least some of the operating conditions of these processes are different from the quality Predictive operating conditions used by the flow controller in the production process, the method includes: establishing a response of the mass flow controller with the test operating conditions; and changing the mass flow control according to the process operating conditions At least-control parameters, so that the response of the mass flow controller operating under these process operating conditions will not cause substantial changes. 2. The method according to item 1 of the scope of patent application, wherein the process conditions include a process fluid, the process fluid is different from the test fluid, and the action of changing at least one control parameter of the mass flow controller includes Feng Gen acts to change at least one control parameter according to at least part of the process fluid species information. 3. The method according to item 1 of the scope of patent application, wherein the change action includes an action of determining at least one gain term accompanying at least one of the plurality of separate elements of the mass flow control device according to the process operating conditions. . 4. The method of claim 3 in the scope of patent application, wherein the action of determining the at least one gain term includes an action of determining a reciprocal gain term, and the gain term is formed by obtaining the inverse of the product of the at least one gain term . 5. The method of claim 4 in the scope of patent application, wherein the plurality of individual components include a valve, and wherein the action of determining the at least one gain term includes determining the action of the at least one gain term by a physical model of the valve. 6 · If you apply for the method in item 4 of the patent scope, where the change to this paper is only applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) ------------ ------------ Install --------------- Order ---------------- Line (Please read first (Notes on the reverse side are reproduced on this page) 538327 A8 B8 C8 D8 VI. The scope of patent application is less. The action of a control parameter includes changing at least one control parameter to make it equal to the swallow: inverse gain term. 7. The method according to item 1 of the scope of patent application, wherein the action of changing the at least one control parameter includes determining the gravity of the process gain terms of the plurality of elements accompanying the mass flow controller according to the process operating conditions. The plurality of components constitute a control loop of the mass flow controller. 8. If the method of claim 7 of the scope of patent application, wherein the action of determining the plurality of process gain terms includes determining a process reciprocal gain term, the process reciprocal gain term is obtained by obtaining the complex numbers The inverse of the product of the process gain terms is formed as a function of at least one variable operating condition. 9 · The method according to item 8 of the scope of patent application, wherein the action of changing the at least one control parameter includes an action of changing at least one control parameter to be equal to the process reciprocal gain term, so that the control loop is relative to at least the at least one Variable operating conditions have a fixed loop gain. 1 0. The method according to item 7 of the scope of patent application, wherein at least one of the plurality of solid-state components includes a valve, and wherein the action for determining the plurality of process gain terms includes being determined by a physical model of the valve The actions of at least one of the plurality of gain terms. 1 1 · If the method of the 7th scope of the patent application ', wherein the action of determining the plurality of process gain terms includes determining the plurality of gains by a process full flow range accompanied by a process fluid of one of the process operating conditions And at least one of the gain terms, and the process fluid is different from the test flow JH * volume. __—- 2 __----— This paper is octave compatible with Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before writing this page) 538327 A8 B8 C8 D8, request patent scope 1 2 · If the method of applying for patent scope item 1 further includes the action of obtaining setting data in the process of establishing the response. 13 · The method of item 12 in the scope of patent application, wherein the action of establishing a response includes establishing a dynamic response with the test fluid under the test operating conditions: one of the mass flow controllers. 14 · The method of item 13 in the scope of patent application, wherein the action of establishing a response is further included under the test operation conditions to establish a steady state response of one of the mass flow controllers. action. 1 5 · The method according to item 14 of the scope of patent application, where the quality is 済! The controller includes a flow meter, a valve, and a valve actuator, the method _ one step includes the action of obtaining setting data in the process of establishing the dynamic and steady state response of the mass flow controller; and wherein the obtaining of setting data The actions include obtaining at least one sensor adjustment data about the flow meter's dynamic response, valve characteristics data about the response of the valve and valve S: actuator, and about the mass flow controller's operating conditions in the first group The following operation is based on the correction data of the steady state response obtained by the test fluid. 16 · If the method according to item 12 of the patent application scope, wherein the action of obtaining the specified data includes the action of determining at least one test gain term, the predictive gain term is accompanied by the test operation conditions. The test fluid operates at least one of a plurality of elements of the mass flow controller. 17 · If the method according to item 16 of the scope of patent application, wherein the action of obtaining the specified data includes the action of determining a test reciprocal gain term 'The 1-verb reciprocal gain term is obtained by obtaining the at least one The product of the test gain term is reversed. Please read the notes on the back before writing this page.} The binding paper & degree applies to China National Standard (CNS) A4 (210 X 297 mm) 538327 A8 B8 C8 D8 Six 2. Number of patent applications: formed. 18. The method of claim 17 in the scope of patent application, wherein the action of changing at least one parameter of controlling J includes the action of determining at least one process gain term. The process gain term is accompanied by operation according to these processes. Multiple components of a conditional mass flow controller. 19 · If the method according to item 18 of the scope of patent application, wherein the action of determining at least one process gain term includes the action of determining ~ process reciprocal gain term, the process reciprocal gain term is obtained by obtaining the at least one It is formed by the inverse of the product of the process gain terms. 20 · The method according to item 19 of the scope of patent application, wherein the action of changing at least one control parameter of Zhenhai includes changing the test reciprocal gain term to be equal to the process reciprocal gain term. 21. The method of claim 19 in the scope of patent application, wherein the plurality of components include a flow meter, a valve, and a valve actuator, and the action of determining the at least one process gain term includes determining a plurality of processes The action of the gain terms, these process gain terms are accompanied by flowmeters, valves and valve actuators of the mass flow controller according to the operating conditions of these processes. 2 2 · If the method according to item 21 of the scope of patent application, wherein the action of obtaining the setting data includes an action of determining a full flow range of a process, the full flow range of the process is a process fluid accompanying one of the process operating conditions, and The process fluid is different from the test fluid. 2 3 · If the method according to item 22 of the scope of patent application, wherein the action of determining the plurality of process gain terms includes the action of determining at least one process valve gain term, the process valve gain term is accompanied by the physical cost of the valve. Paper manpower applies CNS A4 specification (21 × 2971 male I) '--- ------------------------- -------------- Order ...... line (Please read the precautions on the back before filling this page) 538327 A8 B8 C8 D8 6. The valve of the patent application range model, and the physical model of the valve is suitable for selecting the process operation f conditions as parameters. 24. The method of claim 23 in the patent application scope, wherein the action of determining the gain of the valve of the Haihe process includes determining the gain of a process valve actuator, which is accompanied by a physical model from the valve. Valve actuator. 25. If the method according to item 22 of the scope of patent application, the action of determining a plurality of process gain items, such as Yan Hai, includes the action of determining the gain of a process flow meter according to the full flow range of these processes. 2 6 · —A kind of computer-readable medium, which is encoded by a program executed on a processor. When the program is executed on the processor, the Yanhai program will execute the method of setting the mass flow controller so that The mass flow controller operates in conjunction with a set of process operating conditions. At least some of the process operating conditions are different from the test operating conditions used to establish a response to the mass flow controller during production. The method includes the following actions: receiving At least one process fluid species information and process operating conditions are used as input; and at least one control parameter of the mass flow controller is changed according to the input; a response of the mass flow controller that can be operated by the process operating conditions No substantial change will occur. 2 7 · If the computer-readable medium of item 26 of the patent application scope, wherein the process operating conditions include a process fluid 'the process fluid is different from a test fluid, the test flow system is used to establish the response, and changes therein The action of the at least one control parameter includes at least part of the process fluid species __________5 ----------- This paper applies the Chinese National Standard (CNS) A4 specification (210x 297 mm) (Please read the (Notes are reproduced on this page): Installation line '538327 A8 B8 C8 D8' Patent application scope information to change at least one control parameter. Equipment ------ (Please read the precautions on the back before copying this page) 2 8 · Female-readable computer-readable media for item 26 of the patent scope, where the change action includes determining at least according to the input An action that accompanies the gain term of at least one of the plurality of individual components of the mass flow controller. The computer-readable medium of item 29 of the scope of patent application for 29, $ □, the action of determining the at least one gain term includes determining the gravity action of a reciprocal gain term, which is obtained by obtaining the at least one The inverse of the product of the gain terms. 3. The computer-readable medium of item 29 of the scope of patent application, wherein the mass flow controller includes a valve, and wherein the action determining the at least one booster item includes determining at least the physical model of the valve. A gain term action. Line 31. The computer-readable medium of item 29 of the scope of patent application 'wherein the action of changing the at least one control parameter includes changing at least one control parameter to be equal to the reciprocal gain term. 3 2 · If the computer-readable medium of item 26 of the patent application 'wherein the action of changing the at least one control parameter includes determining a plurality of elements of the mass flow controller accompanying & operating under the operating conditions of the process The action of the process gain term, the plurality of elements constitute a control loop of the mass flow control. 3 3 · If the computer-readable medium of item 32 of the scope of patent application 'wherein the action of determining the plurality of process gain terms includes the action of determining a stomach S inverse gain term, the process reciprocal gain term is determined by Formed by obtaining the reciprocal of the product of these ten solid gain terms, the process reciprocal gain term is up to the paper standard applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) 538327 A8 B8 C8 D8 Patent Application Scope A function with at least one variable operating condition. 3 4 · δα The computer-readable medium of item 33 of the patent application scope, wherein the action of changing the at least one control parameter includes an action of changing at least one control parameter to be equal to the process reciprocal gain term, so that the control loop is relatively Has a fixed loop gain under at least the at least one variable operating condition. 3 5 · The computer-readable medium of item 32 of the scope of patent application, in which the plurality of components include a valve, and in which the weight of the plurality of armor-making gain items is determined to include the entity consisting of the valve The model determines the action of at least one process gain term. 36. If the computer-readable medium of item 26 of the patent application scope further includes an action of obtaining setting data from the mass flow controller, when the response of the mass flow controller is established with the test operating conditions, the The setting data is obtained. 37. If the computer-readable medium of item 36 of the scope of patent application, the action of obtaining setting data includes the action of obtaining at least one of sensor adjustment data, valve characteristic data, and correction data. 38. If the computer-readable medium of item 36 of the scope of patent application, wherein the action of obtaining setting data includes an action of determining at least one test gain term, the test gain term is accompanied by the test under the test operating conditions. At least one of a plurality of elements of a fluid-operated mass flow controller. If the computer-readable medium of item 38 of the scope of patent application, the action of obtaining setting data includes an action of determining a test reciprocal gain term, the test reciprocal gain term is obtained by obtaining the Is formed by the inverse of the product. (Please read the notes on the back before transcribing this page) 538327 A8 B8 C8 D8 VI. Patent application scope 4 0 · $ □ Computer-readable media for item 39 of the patent scope, where 1 the action of changing the at least one control parameter includes the action of determining at least one process gain term, the The process gain term is accompanied by a plurality of components of the mass flow control device according to the process operating conditions. 4 1 · $ □ The computer-readable medium for which the scope of patent application is No. 40, wherein the action of determining at least one process gain term includes an action of determining a process reciprocal gain term. The process reciprocal gain term is obtained by obtaining the The inverse of the product of at least one Process® benefit. 4 2 The computer-readable medium of item 41 in the scope of patent application, wherein the action of changing the at least one control parameter includes an action of changing the test reciprocal gain term to be equal to the process reciprocal gain term. 4 3 If the computer-readable medium of item 41 of the scope of patent application, wherein the action to determine the at least one process gain term includes an action to determine a plurality of process $ Zeng Yi terms, these process gain terms are accompanied by Flowmeters, valves and valve actuators for mass flow controllers under conditions such as manufacturing processes. 4 4 · If the computer-readable medium of item 43 of the scope of patent application, the action of determining the setting data includes determining the range of the full flow range of a process, which is accompanied by the operating conditions of these processes. ~ Process fluid, and the process fluid is different from the test fluid. 4 5 · If the computer-readable medium of item 44 of the scope of patent application, wherein the action of determining the plurality of process gain terms includes the action of determining at least ~ process valve gain term, the process valve gain term is accompanied by the valve And the physical model of the valve is suitable for selecting these process operating conditions as parameters. This paper size is applicable to China National Standard (CNS) A4 specifications (210x 297 public love) (Please read the precautions on the back before filling out this page) Installation,-mouth line 538327 A8 B8 C8 D8 VI, Chinese patent scope 4 6 · For example, the computer-readable medium of item 45 of the scope of patent application, wherein the action of determining the gain of the process valve includes determining the gain of a process valve actuator. The gain of the process valve actuator is accompanied by a valve from a physical model of the valve Actuator. 47. If the computer-readable medium of item 44 of the scope of patent application, the action of determining the plurality of process gain items includes the action of determining the gain of a process flow meter according to the full flow range of the processes. 4 8 · If the computer-readable medium of item 26 of the patent application is combined with the mass flow controller, the processor is included in the mass flow controller, and the program is stored in the mass flow control. A memory of the processor, the memory system is coupled to the processor, wherein the input is an input of the mass flow controller, the input is coupled to the processor, and when the When the program is executed on the processor, the mass flow controller is set to work in conjunction with the process operating conditions received at the input. 4 9 · If the computer-readable medium of item 36 of the scope of patent application, its and The mass flow controller is combined, wherein the processor is included in the mass flow controller, wherein the program is stored in a memory of the mass flow controller, the memory system is coupled to the processor, and the input is An input of the mass flow controller, the input being coupled to the processor, wherein when the program is executed on the processor, the mass flow controller is set in common with process operating conditions received at the input Operation, and wherein the setting data is stored in the memory of the mass flow controller. 5． · If the computer-readable medium of item 36 of the patent application scope is integrated with a computer, the computer includes the processor, and The program should be handled in this way (please read the precautions on the back before copying this page). The paper size of the first-line paper applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm). 538327 C8 D8 6. The patent application scope is executed. The computer contains a memory, and the setting data obtained from the mass flow control benefits are stored in the memory. 5 1 · —A kind of setting a mass flow controller Method, when applied with a first set of operating conditions, the mass flow controller has a first response, and when applied with a second, set of operating conditions before being set, the mass flow controller has a second response, the The method includes the following actions: operating the mass flow controller under the first set of operating conditions; during the operation, obtaining setting data from the mass flow controller; setting at least the mass flow controller according to the setting data A control woman is provided to provide a first response obtained by using the first set of operating conditions; and the at least one control parameter is changed according to at least part of the setting data to provide a second response obtained by using the second set of operating conditions. . 5 2 The method of item 51 of the patent application scope further includes an action of determining a plurality of gain terms, which are the elements of the mass flow controller accompanying the operation under the first set of operating conditions. 5 3 · The method of applying for item 52 of the patent scope 'where the action of determining the plural gain terms includes determining the flow associated with a flow § ten ® 3 ten ^ benefit term, the valve caused by a valve actuator Actuation of at least one of an actuator gain term and a valve gain term accompanying a valve. 5 4 · $ □ Method of applying for the scope of the patent No. 5 2 'where the action of determining gain terms such as language includes the action of determining a reciprocal gain term' The 5 inverse gain term is obtained by obtaining the plurality of gain terms The reciprocal gain term is formed as a function of at least one variable operating condition. This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before writing this page) Loading line 538327 A8 B8 C8 D8 VI. Patent scope 5 5 The method of claim 54 in the scope of patent application, wherein the action of setting at least one control parameter includes setting at least one control parameter such that the other party makes the reciprocal gain term. 5 6 · If the method according to item 51 of the scope of patent application, wherein the action of obtaining the set data includes the action of obtaining the first synthetic gain term, the first synthetic gain term is accompanied by at least a flow meter, a valve and a The valve actuator, the flow meter, the valve, and the valve actuator form at least part of a control loop of the mass flow controller, and the mass flow controller operates with the first set of operation bars. 5 7 · If the method of item 56 of the scope of patent application, wherein the action of obtaining the setting data of the language includes the action of determining a test full flow range, the [J test full flow range is accompanied by the first set of process operating conditions . 5 8 · The method according to item 57 of the scope of patent application, wherein the action of setting the at least one control parameter includes setting a control loop control parameter to be equal to the inverse of the first synthetic gain term. The control loop control parameter is A function of at least one variable operating condition, so that a control loop of the control loop, the J loop gain, does not change with at least one function of at least one variable operating condition. 5 9 · The method according to item 58 of the scope of patent application, wherein the action of changing the at least one control parameter includes an action of determining a second synthetic gain term, the second synthetic gain term accompanying the flow of at least the mass flow controller Gauges, valves and valve actuators, and a second set of operating conditions based on at least one physical model of the valve with parameters of the operating conditions, and a full flow range of processes accompanying the second set of operating conditions. ___--- u______ This paper is again applicable to the Chinese National Standard (CNS) A4 specification (210 X 297) ^-binding ... ......- I-line (Please read the precautions on the back before writing this page) $ 'Please request a patent range of 6 ◦ · $ □ The method of applying for patent scope item 5 9, wherein the action of changing at least one control parameter includes changing the control loop control parameter so that & equals the inverse of the second synthetic gain term The action is such that when operating under the second operating condition, the control loop gain remains unchanged at least for the at least one θτ variable operating condition. 6 1 · A mass flow controller with a control loop, which includes a flow meter that monitors the actual flow% provided by the mass flow controller and provides an adjusted output signal. The flow meter has a first gain. A control audio file that receives a second input signal indicating the% flow provided by the mass flow controller, and provides a control signal, the control component ~ a second gain term, the second gain term is A function of at least one variable operating condition; a valve that permits the passage of the body in accordance with the displacement of one or more elements of the valve, the valve having a third gain term; and a valve actuator that receives the control Signal and adjust the displacement of one of the valve's several components, the valve actuates the fourth gain term of the appliance; a method of setting the mass flow controller, which enables the mass flow controller to have substantially no control loop gain The method includes the following actions: using the first set of operating conditions to determine the first, third, and fourth gain terms with the first fluid; using at least one of the second fluid and the second set of operating conditions to predict How the first, third, and fourth gain terms will change; and change the second gain term to a constant multiplied by the first, third, and first (please read the precautions on the back before filling this page): The paper is only suitable for the Chinese National Standard (CNS) A4 (210 X 297) 4. Patent claim range The reciprocal of the product of the four I gain terms to provide a control loop gain that is substantially fixed relative to at least a variable operating condition of the old and young. 6 2-A method for controlling a mass flow controller, the mass flow completion device having a plurality of elements defining a control loop of the mass flow controller, the method including the following actions: forming at least one control loop control parameter, The control loop control parameter writes a function of at least one variable operating condition; and by applying the at least one control loop control parameter to a control loop of the mass flow control alpha device, so that the at least one variable operating condition is related The loop gain of the control loop remains fixed. 6 3 · The method according to item 62 of the scope of patent application, wherein the action of forming at least one control loop control parameter includes forming the control loop control by obtaining the inverse of the product of at least one gain term of each of the control loops. Parameter: action, the gain term is accompanied by at least one element of the mass flow controller. 64. The method of claim 63, wherein the at least ^ variable operating conditions include a set point. 65. The method of claim 63, wherein the at least -variable operating conditions include valve inlet pressure. 6 6 · The method according to item 63 of the scope of patent application, wherein the action of keeping the gain of the control loop fixed is achieved by multiplying the at least one gain term with the control loop control parameters in the control loop. 67. The method according to item 62 of the scope of patent application, wherein the action of forming at least one control loop control parameter includes the action of forming a reciprocal gain term, which is the inverse of a composite gain term Formed, (Please read the precautions on the back before copying this page). Packing, 1T: The thread paper is also applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 538327 A8 B8 C8 D8 VI. Application Scope of patent (please read the notes on the back before filling this page) Yanhai Synthetic Gain item is accompanied by at least one flow meter, a valve actuator, and a valve of the mass flow controller. The method of item 67 in the scope of patent application of 688, wherein the action of keeping the gain of the control loop fixed includes the action of applying the reciprocal gain term to the control loop of the Yan Hai mass flow control device. 6 9-A mass flow controller with a control loop, the mass flow controller includes a flow meter that senses the liquid flow in a liquid flow path and provides an indication of: A mass flow rate flow signal; a controller coupled to the flow meter to provide a drive signal based at least in part on the flow: volume signal; a valve actuator to receive a drive signal from the controller 9 a valve controlled by the valve actuator and coupled to the flow path; wherein the control loop of the mass flow controller includes the flow meter, the controller, the valve actuator, and the valve; and The control loop is used to have a control loop gain term that is substantially fixed with respect to at least one variable operating condition during operation. 70. The mass flow controller according to item 69 of the patent application scope, wherein the substantially fixed control loop gain term includes at least one gain term, and the gain term is accompanied by the flow meter, the valve actuator, and The valve is at least one of them. 7 1 · $ 卩 The mass flow controller of the 70th in the scope of patent application, its _u- This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 5 places 27 A8 B8 C8 __ϋ __— 4 The patent claim 1 in the scope of the patent is a substantially fixed control loop gain term including at least one reciprocal gain 1 true, the reciprocal gain term is formed by reversing the product of the at least one gain term. 7 2 · If the mass flow controller of item 71 in the scope of patent application ', the reciprocal gain term is a function of at least one of the set points. 7 3 · If the mass flow controller of item 71 of the scope of patent application ', wherein 1 the reciprocal gain term is a function of at least the valve inlet pressure. 7 4 · If the mass flow controller of item No. 6 and 9 of the scope of application for patent, its book, the substantially fixed control loop gain term includes at least one synthetic gain 1 true, the synthetic gain term is accompanied by at least the flow meter, the valve Actuators and valves. 7 5 · The mass flow controller according to item 74 of the scope of the patent application, wherein the substantially fixed control loop gain term includes at least a reciprocal gain r, the reciprocal gain term is a product of the synthetic gain term And the dad: inverse gain term is a function of at least one variable operating condition. 7 6 · The mass flow controller of item 75 of the scope of patent application, wherein the product of the reciprocal gain term and the composite gain term provides the substantially fixed control loop gain term. 7 7 · The mass flow controller according to item 69 of the patent application scope, wherein the flow meter includes at least one of a normalization circuit, a response compensation circuit, and a linearization curve. 7 8 · The mass flow controller according to item 7 of the patent application scope, wherein the flow meter includes a linearization curve. 7 9 · If you apply for mass flow controller in the scope of patent application No. 78, which ----- 15______ this paper and applicable Chinese National Standard (CNS) A4 specification (210 x 297 mm) (Please read the back Note: Please fill in this page again.) Installation, 1T " line 538327 as C8 D8 6. The linearization curve in the patent application range is a quadratic spline fitted to a set of control points. 8 0 · If the mass flow controller in item 7 of the scope of the patent application 'wherein the set of control points is a part of the setting data, the setting data is taken from the characteristics of the temporary flow controller in a test fluid and test operating conditions During the transformation process, the mass flow controller of the female patent application scope No. 80 is used. The control points are a point pair indicating the sensor output and actual flow of a selected set point. 8 2 · The mass flow controller of item 75 of the scope of patent application ', wherein the controller is a gain / guide / delay (G L L) controller. 83. The mass flow controller of item 82 in the scope of patent application ', wherein the reciprocal gain term is provided to the-^ input terminal of the gain / guide / delay controller. 8 4 · The mass flow controller in the scope of patent application No. 83, in which a flow signal and a set point from the flow meter are provided to the measurement and control; ^ And brother II enter Lang. 8 5 · The mass flow controller of item 84 of the patent application scope ', wherein the gain / guide / delay controller provides an error signal according to the difference between the signal and the setpoint signal. 86. The mass flow controller of item 85 of the scope of patent application ', wherein the gain / guide / delay controller multiplies the reciprocal gain term by the error signal. 8 7 · —A mass flow controller comprising: a flow meter with a first gain term for sensing the mass flow control --------- This paper size is applicable to the Chinese National Standard (CNS ) A4 size (210 X 297 mm) -------------------------- install ------------- --- 1T …… ........... $ (Please read the precautions on the back before filling this page) 538327 A8 B8 C8 D8 VI. The scope of patents (please read the precautions on the back first) Rewrite this page) Mass flow rate in one of the flow paths and provide a flow signal indicating the mass flow rate in the flow path; a valve having a second gain term for receiving a control signal, The @ 制 signal controls the mass flow rate in the flow path; a valve actuator having a third gain term for receiving a driving signal tiger and providing the control signal to the valve; and a control A device having a first input terminal for receiving the traffic signal, a second input terminal for receiving a setpoint signal indicating a desired mass flow rate, and an output terminal that provides the driving signal to the The gate actuator y wherein the controller is used to provide a reciprocal gain term, and the reciprocal gain page is obtained by obtaining the inverse of at least one of the first gain term, the second gain term, and the third gain term. And formed. 8 8 · $ □ The mass flow controller of item 87 in the patent application range, wherein the reciprocal gain term is obtained by obtaining the inverse of at least two of the first gain term, the second gain term, and the third gain term. form. 89. The mass flow controller of item 87 in the scope of patent application, wherein the reciprocal gain term is formed by obtaining the inverse of the product of the first gain term, the second gain term, and the third gain term. The mass flow controller of item 97 in the scope of patent application, wherein the reciprocal gain term is formed by obtaining the reciprocal of the system gain term of the mass flow controller. 9 1 · The mass flow controller of item 8 of the scope of patent application, wherein the reciprocal gain term is a function of at least one variable operating condition. This paper conforms to Chinese National Standard (CNS) A4 (210 X 297 mm) A 'Applicable patent scope 9 2 · If the mass flow controller of item 91 of the patent application scope, wherein 1 the control circuit of the mass flow controller includes the flow meter, the valve actuation, the valve and the controller, And the reciprocal gain term maintains at least a fixed loop gain of the control loop relative to at least one variable operating condition. 9 3-A method for determining valve displacement, the valve has a valve > ^ 口 and a Valve outlet, the valve inlet is used to receive a fluid at an inlet pressure, and the valve outlet is to provide the fluid at an outlet pressure, the method includes the following actions: (Α) select between the inlet pressure and the outlet pressure The intermediate im force between (B) the first displacement of the valve is determined according to the viscous pressure gauge 7 that drops from the inlet pressure to the intermediate pressure; (C) the non-positive pressure that decreases from the intermediate pressure to the outlet pressure Viscous hall force to determine the second displacement of the valve; (D) determine whether the first displacement is approximately equal to the second displacement, and (E) when the first displacement is approximately equal to the second displacement, select the first displacement ^ One of the displacement and the second displacement as the displacement of the valve wherein the. 9 4 · The method according to item 93 of the scope of patent application, further comprising the following actions: When it is determined in the action (D) that the first displacement is not approximately equal to the second displacement, a new intermediate pressure is selected. 9 5 · If the method of item 94 of the scope of patent application, further includes the following actions: ----------- L8_____ This paper is again applicable to the Chinese National Standard (CNS) A4 specification (21〇x 297) (Mm) (Please read the precautions on the reverse side before writing this page) Loading, \ Line 538327 A8 B8 C8 D8 6. Repeat the action (B)-(D) in the patent range until the action (D) It is determined that the first displacement is approximately equal to the second displacement. 9 6 · The method of female patent application scope No. 93, wherein the action CC) includes the following actions: When the intermediate pressure is approximately equal to two atmospheres greater than the outlet pressure, Gen Shou Kang will remove the intermediate pressure from the intermediate pressure under the condition of blocked flow. The non-viscous pressure drop to the outlet pressure is determined using the first calculation to determine the second displacement; and when the intermediate pressure is less than about two atmospheres greater than the outlet pressure, the pressure is removed from the intermediate under non-blocking flow conditions The non-viscous ten-day pressure drop from the pressure to the outlet pressure is determined using a second calculation to determine the second displacement. 97. The method of item 96 in the scope of patent application, wherein the first and second calculations are based on a non-viscous flow entity model that passes through an orifice. 9 8 .. The method according to item 93 of the scope of patent application, wherein the action CC) includes the following actions: The first calculation is used to determine the second displacement, and the first calculation is based on the non-viscous passing through an orifice Sexual flow entity model. 9 9 · The method according to item 93 of the scope of patent application, wherein the action (B) includes the following actions: · The first calculation is used to determine the first displacement of the valve, the first calculation. ≪ Solid model of viscous flow between plates. 100 · A method for reducing the hysteresis effect in a solenoid-actuated device, the method comprising the following actions: A predetermined non-operational signal is applied to the solenoid-actuated device, and 9 places the device at a predetermined status. This paper heart> 1 Applies to China National Standard (CNS) A4 specification (210 X 297 mm) --------------------------- ............... Order ..............-- line (please read the precautions on the back before writing this page) 538327 A8 B8 C8 __ D8 VI. Application scope of patent 101. For the method of applying patent scope No. 100, in which the party's refusal to add the non-operational signal occurs after each cycle of the solenoid actuating device. . 102. The method according to item 100 of the patent application range, wherein the party's refusal to add the non-operational signal occurs only after the operation of the device has exceeded a predetermined operation range. 1 0 · The method according to item 100 of the patent application range, wherein the action of the party refusing to add the non-operational signal includes the action of applying a non-operational current signal. 104. The method of claim 100, wherein the party's action of refusing the non-operational signal includes applying a non-operational voltage signal / action. 1 0 5 • The method according to item 100 of the patent application scope, wherein the action of applying the non-operational signal includes an action of applying a time-varying sinusoidal waveform. 1 06. The method according to item 105 of the scope of patent application, wherein the action of applying the time-varying sinusoidal waveform includes the action of applying a positive bow-shaped waveform that decreases in amplitude over time. 1 0 7 · The method according to item 106 of the patent application range, wherein the action of the party applying the time-varying sinusoidal waveform includes the action of applying the sinusoidal waveform with an amplitude offset so that the waveform has only Non-negative number 値. 1 0 8 · If the method of claim 100 of the scope of patent application, wherein the action of applying the non-operational signal includes the action of applying a time-varying square waveform. _____20____ This paper is again applicable to China National Standard (CNS) A4 specifications ( 210 χ 297 public love) " (Please read the notes on the back before writing this page) Binding Thread 538327 A8 B8 C8 D8 VI. Patent application scope (please read the notes on the back before writing this page) 1 0 9 · The method according to item 108 of the scope of patent application, wherein the action of the party carrying the time-varying square waveform includes the action of applying a square waveform that reduces amplitude over time. 1 1 0 · The method of item 108 of the scope of patent application, wherein the action of the party refusing to add the time-varying square waveform includes the action of applying the square waveform with an amplitude offset so that the waveform has only a non-negative number value. 1 1 1 · The method according to item 100 of the patent application range, wherein the party's action of refusing to add the non-operational signal includes the action of applying a time-varying triangular waveform. 1 1 2 · The method according to item 11 of the scope of patent application, wherein the action of adding the time-varying triangle waveform to the party includes the action of applying a triangle waveform with decreasing amplitude over time. 1 1 3. · The method according to item 112 of the scope of patent application, wherein the action of the party but adding the time-varying triangle waveform includes the action of applying the triangle waveform with an amplitude offset so that the waveform has only a non- Negative numbers 値. 1 1 4 · If the method of applying for item 100 in the scope of patent application, wherein the party's action of adding the non-operational signal includes the action of applying a pulse-shaped signal. The method, wherein the action of the party carrying the pulse-shaped signal includes an action of applying a pulse in a sign opposite to a sign applied to the operation signal of the spiral spring actuating device. 1 1 6 · —A method for operating a solenoid actuating device, which includes the following Li action: (a) The first amount of energy is provided to the solenoid actuating device, ___ 24- This paper standard is applicable to the country of China Standard (CNS) A4 size (210 X 297 mm) The patent claims the scope to move the solenoid actuating device from the first position to the second position; (b) provides a second amount of energy to the solenoid actuating device, and ^ causes the solenoid to actuate The device returns to the first position; and (c) when the first amount of energy exceeds a predetermined amount of energy, 'after completing the action (b), set the solenoid actuating device to a steady state. 1 1 7 · The method of item 116 of the scope of patent application, wherein the% operation (C) includes the action of providing a time-varying signal to the solenoid actuating device 1 1 8 · The method of scope of patent application 1 1 7 Method, wherein the action of providing a time-varying signal includes the action of providing a time-varying signal with at least one of a sine waveform, a square waveform, a $ angle waveform, and a sawtooth waveform. 1 1 9 • The method according to item 118 of the scope of patent application, wherein the action of _ for a time-varying signal includes providing the stomach force of the time-varying signal with an offset so that the waveform has only a non-negative number. 1 2 0 · The method according to item 118 of the scope of patent application, wherein the action of _ for a time-varying signal includes the action of providing the time-varying β signal whose amplitude decreases with time. 1 2 1 · The method according to item 116 of the scope of patent application, wherein the line pipe device is a control valve with a controlled part. 1 2 2 · The method according to item 121 of the scope of patent application, wherein the action of supplying the first amount of energy includes providing a driving signal to control the controlled part of the 8¾ valve, and the driving signal has a ~ sign. 1 2 3 · If you apply for the method of item No. 1 2 in the scope of patent application, where _____;-22 ---- This paper rule applies to China National Standard (CNS) A4 specification (210 χ 297 public variable) (Please read first Note on the back, please fill out this page again), \ 二 口 线 538327 A8 B8 C8 D8 VI. The patent claim (C) contains the action of providing a pulse to the valve. (Please read the precautions on the back before writing this page) 1 2 4 · If the method of applying for the patent No. 1 2 3, the action of raising a pulse includes providing a sign whose sign is opposite to the first sign Pulse action. 1 2 5 · The method according to item 122 of the patent application range, wherein the predetermined amount of energy exceeds the driving signal energy required to open the controlled portion of the valve. 1 2 6 · The method according to item 116 of the scope of patent application, wherein the solenoid actuating device is a solenoid actuating control valve of a mass flow controller. 1 2 7 · The method according to item 126 of the patent application range, wherein the mass flow controller has an operating range, and wherein the predetermined amount of energy is moved from the position of the solenoid-actuated control valve to the mass flow The amount of energy required for a position outside the normal operating range of the controller. 1 2 8 · A device comprising: a solenoid actuating device; and a solenoid actuator, the solenoid actuator being coupled to the solenoid actuating device, the actuator It is used to provide a non-operational signal to the spiral spring actuating device to set the device to a predetermined state. 1 2 9 · The device according to item 128 of the scope of patent application, wherein the operational signal is a current signal. 1 3 0 · If the device of the scope of patent application No. 128 is applied, the operational signal of Dulu is a voltage signal. 1 3 1 · If the device in the scope of patent application No. 128 is applied, the size of this paper is applicable to China National Standard (CNS) A4 (210 X 297 mm) 538327 A8 B8 C8 D8 It is used to provide the non-operational signal to the solenoid actuating device after each operation cycle. 1 3 2 · The device according to item 128 of the patent application scope, wherein the actuator is used to provide the non-operational signal only after the solenoid actuating device is operated outside a predetermined operating range. 1 3 3 · The device according to item 128 of the scope of patent application, wherein the operational signal is one of a time-varying sine waveform, a time-varying square waveform, and a time-varying triangular waveform. 1 3 4 · If the device of the scope of patent application No. 133, the amplitude of the multi-operational signal decreases with time. 1 3 5 · The device according to item 133 of the patent application range, wherein the multi-operational signal has an offset so that the waveform has only a non-negative chirp. 1 3 6. · If the device of the scope of patent application No. 133, the multi-operation signal is a pulse. 1 3 7 · The device according to item 128 of the scope of patent application, wherein the solenoid actuating device is a solenoid actuating valve. 1 38 · The device according to item 137 of the scope of patent application, wherein when the valve moves from a built-in position by more than a predetermined amount of displacement, the actuator only provides the non-operational signal. 1 3 9 • The device according to item 137 of the patent application scope, wherein the actuator provides the non-operational signal to the wide door after each operation cycle of the valve is completed. 1 4 0 · If the device in the scope of patent application No. 137, the multi-P operational signal is a time-varying sine waveform, a time-varying square waveform and a time-varying sawtooth wave_2Δ ----— This paper scale applies to China Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before writing this page) Order: Line Qin A8B8C8D8 538327 Six, one of the scope of patent application. 1 4 1 · The device according to item 139 of the scope of patent application, which is combined with a mass flow controller. The mass flow controller includes: a flow meter for sensing the flow in the flow path and providing a Aiming to indicate the flow signal of the flow; a controller for receiving the flow signal and providing a driving signal according to at least a part of the flow signal; wherein the actuator receives the driving signal provided by the controller , And Feng Gen moves the controlled part of the valve according to the driving signal. 1 42 The device according to item 141 of the scope of patent application, wherein the curtain control device J is further used to provide a non-operational signal to the actuator after each operation cycle. 1 4 3 · If the device of the scope of patent application No. 141, the air controller is further used to provide a non-operational signal only when the controlled part of the valve has been moved more than a predetermined amount . 1 4 4 · The device according to item 141 of the scope of patent application, wherein the multi-Mussan signal is at least one of a sine waveform, a square waveform, a triangular waveform and a sawtooth waveform. 1 4 5 ·-A method of setting a mass flow controller to make the mass flow controller work with a set of process operating conditions, which are at least partially different from those used to create the mass flow controller in the production process A set of test operating conditions for a first response, the method includes the following actions: characterizing the mass flow controller with the first set of operating conditions; obtaining setting data during the characterizing action; and 25 paper sizes applicable China National Standard (CNS) A4 (210 x 297 mm) ............... ..... Order! ...........- line (please read the notes on the back before copying this page) 538327 A8 B8 C8 D8 VI. The scope of patent application should be changed according to the setting data and operating conditions of these processes. A control parameter [J parameter, so that the response of the mass flow controller does not change substantially. 14 6 · The method according to item 145 of the patent application scope, wherein characterizing the mass flow controller action includes the following actions: adjusting the mass flow controller on the set of test operating conditions; and on the set of test operating conditions The mass flow controller is calibrated; wherein the set of test operating conditions includes a single test fluid. 1 4 7 · The method according to item 145 of the scope of patent application, wherein the set of test operating conditions includes a process fluid that is different from a single test fluid used in adjusting and calibrating the mass flow controller, And the action of changing the at least one control parameter includes an action of changing the at least one control parameter based at least in part on the process fluid species information of the process fluid. (Please read the precautions on the back before filling out this page): Installation Line 26-This paper size is applicable to China National Standard (CNS) A4 (210 x 297 mm)