USD571831S1 - Top panel for microwave introduction window of a plasma processing apparatus - Google Patents

Top panel for microwave introduction window of a plasma processing apparatus Download PDF

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Publication number
USD571831S1
USD571831S1 US29/252,832 US25283206F USD571831S US D571831 S1 USD571831 S1 US D571831S1 US 25283206 F US25283206 F US 25283206F US D571831 S USD571831 S US D571831S
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Prior art keywords
processing apparatus
plasma processing
top panel
microwave introduction
introduction window
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US29/252,832
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Kinya Ota
Cai zhong Tian
Junichi Kitagawa
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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FIG. 1 is a front view of a top panel for microwave introduction window of a plasma processing apparatus showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a right side view thereof;
FIG. 4 is a left side view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a sectional view taken along line 77 of FIG. 5;
FIG. 8 is an enlarged view taken along line 88 of FIG. 7;
FIG. 9 is an enlarged view taken along line 99 of FIG. 7; and,
FIG. 10 is a perspective view thereof.

Claims (1)

  1. The ornamental design for a top panel for microwave introduction window of a plasma processing apparatus, as shown and described.
US29/252,832 2005-07-29 2006-01-30 Top panel for microwave introduction window of a plasma processing apparatus Expired - Lifetime USD571831S1 (en)

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