USD583394S1 - Cover for a heater stage of a plasma processing apparatus - Google Patents

Cover for a heater stage of a plasma processing apparatus Download PDF

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Publication number
USD583394S1
USD583394S1 US29/281,064 US28106407F USD583394S US D583394 S1 USD583394 S1 US D583394S1 US 28106407 F US28106407 F US 28106407F US D583394 S USD583394 S US D583394S
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US
United States
Prior art keywords
cover
processing apparatus
plasma processing
heater stage
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/281,064
Inventor
Kinya Ota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
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Filing date
Publication date
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Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OTA, KINYA
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Publication of USD583394S1 publication Critical patent/USD583394S1/en
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Expired - Lifetime legal-status Critical Current

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FIG. 1 is a front view of a cover for a heater stage of a plasma processing apparatus showing my new design:
FIG. 2 is a rear view thereof;
FIG. 3 is a right side view thereof;
FIG. 4 is a top plan view thereof,
FIG. 5 is a sectional view taken along line 5—5 of FIG. 1 thereof;
FIG. 6 is an enlarged view taken along line 6—6 of FIG. 5 thereof; and,
FIG. 7 is a perspective view thereof.

Claims (1)

  1. The ornamental design for a cover for a heater stage of a plasma processing apparatus, as shown and described.
US29/281,064 2006-12-15 2007-06-14 Cover for a heater stage of a plasma processing apparatus Expired - Lifetime USD583394S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006034518 2006-12-15

Publications (1)

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USD583394S1 true USD583394S1 (en) 2008-12-23

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US29/281,064 Expired - Lifetime USD583394S1 (en) 2006-12-15 2007-06-14 Cover for a heater stage of a plasma processing apparatus

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD732094S1 (en) * 2012-07-20 2015-06-16 Ivoclar Vivadent Ag Firing plate for a dental furnace
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD840540S1 (en) * 2016-11-23 2019-02-12 General Electric Company Connector for a medical imaging device
USD884855S1 (en) * 2019-10-30 2020-05-19 Applied Materials, Inc. Heater pedestal
USD932844S1 (en) * 2018-10-17 2021-10-12 Kyle Falkenberg Coaster
USD981970S1 (en) * 2021-03-04 2023-03-28 Kokusai Electric Corporation Substrate mounting plate for substrate processing apparatus
USD982638S1 (en) * 2021-12-30 2023-04-04 Cloudminds Robotics Co., Ltd. Harmonic actuator

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD732094S1 (en) * 2012-07-20 2015-06-16 Ivoclar Vivadent Ag Firing plate for a dental furnace
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD840540S1 (en) * 2016-11-23 2019-02-12 General Electric Company Connector for a medical imaging device
USD862700S1 (en) * 2016-11-23 2019-10-08 General Electric Company Connector for a medical imaging device
USD932844S1 (en) * 2018-10-17 2021-10-12 Kyle Falkenberg Coaster
USD884855S1 (en) * 2019-10-30 2020-05-19 Applied Materials, Inc. Heater pedestal
USD981970S1 (en) * 2021-03-04 2023-03-28 Kokusai Electric Corporation Substrate mounting plate for substrate processing apparatus
USD982638S1 (en) * 2021-12-30 2023-04-04 Cloudminds Robotics Co., Ltd. Harmonic actuator

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