USD582949S1 - Cover for a heater stage of a plasma processing apparatus - Google Patents

Cover for a heater stage of a plasma processing apparatus Download PDF

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Publication number
USD582949S1
USD582949S1 US29/281,069 US28106907F USD582949S US D582949 S1 USD582949 S1 US D582949S1 US 28106907 F US28106907 F US 28106907F US D582949 S USD582949 S US D582949S
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US
United States
Prior art keywords
cover
processing apparatus
plasma processing
heater stage
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/281,069
Inventor
Jun Yamashita
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Publication date
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Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: YAMASHITA, JUN
Application granted granted Critical
Publication of USD582949S1 publication Critical patent/USD582949S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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FIG. 1 is a front view of a cover for a heater stage of a plasma processing apparatus showing my new design:
FIG. 2 is a rear view thereof;
FIG. 3 is a right side view thereof;
FIG. 4 is a top plan view thereof;
FIG. 5 is a sectional view taken along line 5—5 of FIG. 1 thereof;
FIG. 6 is an enlarged view taken along line 6—6 of FIG. 5 thereof,
FIG. 7 is an enlarged view taken along line 7—7 of FIG. 5 thereof; and,
FIG. 8 is a perspective view thereof.

Claims (1)

  1. The ornamental design for a cover for a heater stage of a plasma processing apparatus, as shown.
US29/281,069 2006-12-15 2007-06-14 Cover for a heater stage of a plasma processing apparatus Expired - Lifetime USD582949S1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006034519 2006-12-15

Publications (1)

Publication Number Publication Date
USD582949S1 true USD582949S1 (en) 2008-12-16

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US29/281,069 Expired - Lifetime USD582949S1 (en) 2006-12-15 2007-06-14 Cover for a heater stage of a plasma processing apparatus

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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD802546S1 (en) * 2016-01-08 2017-11-14 Asm Ip Holding B.V. Outer wall of reactor for semiconductor manufacturing apparatus
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD840540S1 (en) * 2016-11-23 2019-02-12 General Electric Company Connector for a medical imaging device
USD851144S1 (en) * 2017-12-04 2019-06-11 Liqua-Tech Corporation Register gear adapter plate
USD851693S1 (en) * 2017-12-04 2019-06-18 Liqua-Tech Corporation Register gear adapter plate
USD857131S1 (en) * 2017-05-30 2019-08-20 Hyper Ice, Inc. Endplate for vibrating exercise roller
USD862539S1 (en) * 2017-12-04 2019-10-08 Liqua-Tech Corporation Register gear adapter plate
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD894137S1 (en) 2017-10-05 2020-08-25 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD902165S1 (en) 2018-03-09 2020-11-17 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD908645S1 (en) 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD940765S1 (en) 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD970566S1 (en) 2020-03-23 2022-11-22 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD982638S1 (en) * 2021-12-30 2023-04-04 Cloudminds Robotics Co., Ltd. Harmonic actuator
USD1001749S1 (en) * 2020-05-13 2023-10-17 University Of South Florida Base plate for a foot pedal
USD1007449S1 (en) 2021-05-07 2023-12-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD802546S1 (en) * 2016-01-08 2017-11-14 Asm Ip Holding B.V. Outer wall of reactor for semiconductor manufacturing apparatus
USD826300S1 (en) * 2016-09-30 2018-08-21 Oerlikon Metco Ag, Wohlen Rotably mounted thermal plasma burner for thermalspraying
USD840540S1 (en) * 2016-11-23 2019-02-12 General Electric Company Connector for a medical imaging device
USD862700S1 (en) * 2016-11-23 2019-10-08 General Electric Company Connector for a medical imaging device
USD857131S1 (en) * 2017-05-30 2019-08-20 Hyper Ice, Inc. Endplate for vibrating exercise roller
USD894137S1 (en) 2017-10-05 2020-08-25 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD851144S1 (en) * 2017-12-04 2019-06-11 Liqua-Tech Corporation Register gear adapter plate
USD851693S1 (en) * 2017-12-04 2019-06-18 Liqua-Tech Corporation Register gear adapter plate
USD862539S1 (en) * 2017-12-04 2019-10-08 Liqua-Tech Corporation Register gear adapter plate
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD946638S1 (en) 2017-12-11 2022-03-22 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD902165S1 (en) 2018-03-09 2020-11-17 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD908645S1 (en) 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD970566S1 (en) 2020-03-23 2022-11-22 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD1001749S1 (en) * 2020-05-13 2023-10-17 University Of South Florida Base plate for a foot pedal
USD940765S1 (en) 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD966357S1 (en) 2020-12-02 2022-10-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD1007449S1 (en) 2021-05-07 2023-12-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD982638S1 (en) * 2021-12-30 2023-04-04 Cloudminds Robotics Co., Ltd. Harmonic actuator

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