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(en)
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2011-07-20 |
2023-08-15 |
Asm Ip Holding B.V. |
Pressure transmitter for a semiconductor processing environment
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USD892958S1
(en)
*
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2012-05-15 |
2020-08-11 |
Aend Industries |
Bushing
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(en)
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2012-10-12 |
2022-11-15 |
Asm Ip Holding B.V. |
Semiconductor reaction chamber showerhead
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(en)
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2013-02-01 |
2024-04-23 |
Asm Ip Holding B.V. |
Method for treatment of deposition reactor
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(en)
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2014-10-07 |
2023-10-24 |
Asm Ip Holding B.V. |
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same
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(en)
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2015-03-12 |
2023-08-29 |
Asm Ip Holding B.V. |
Multi-zone reactor, system including the reactor, and method of using the same
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(en)
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2015-06-26 |
2022-02-08 |
Asm Ip Holding B.V. |
Structures including metal carbide material, devices including the structures, and methods of forming same
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(en)
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2015-10-21 |
2022-01-25 |
Asm Ip Holding B.V. |
NbMC layers
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USD795606S1
(en)
*
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2015-12-21 |
2017-08-29 |
Sangenic International Limited |
Cassette for a waste storage device
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(en)
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2015-12-29 |
2024-04-09 |
Asm Ip Holding B.V. |
Atomic layer deposition of III-V compounds to form V-NAND devices
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(en)
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2015-12-29 |
2021-10-05 |
Asm Ip Holding B.V. |
Atomic layer deposition of III-V compounds to form V-NAND devices
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USD780558S1
(en)
*
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2016-01-11 |
2017-03-07 |
Supplier Of Solutions, Llc |
Tool support sleeve
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(en)
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2016-02-19 |
2023-06-13 |
Asm Ip Holding B.V. |
Method for forming silicon nitride film selectively on top/bottom portions
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(en)
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2016-05-02 |
2021-08-24 |
Asm Ip Holding B.V. |
Method of forming a germanium oxynitride film
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(en)
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2016-07-08 |
2021-08-17 |
Asm Ip Holding B.V. |
Selective deposition method to form air gaps
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(en)
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2016-07-08 |
2023-09-05 |
Asm Ip Holding B.V. |
Selective deposition method to form air gaps
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(en)
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2016-07-08 |
2023-05-16 |
Asm Ip Holding B.V. |
Organic reactants for atomic layer deposition
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(en)
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2016-07-28 |
2023-07-04 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
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2016-07-28 |
2023-03-21 |
Asm Ip Holding B.V. |
Method and apparatus for filling a gap
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2016-07-28 |
2021-12-21 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method of operating the same
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2016-10-27 |
2022-12-20 |
Asm Ip Holding B.V. |
Deposition of charge trapping layers
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2016-11-01 |
2023-11-07 |
Asm Ip Holding B.V. |
Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures
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2016-11-15 |
2022-07-26 |
Asm Ip Holding B.V. |
Gas supply unit and substrate processing apparatus including the gas supply unit
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2016-12-14 |
2022-01-11 |
Asm Ip Holding B.V. |
Substrate processing apparatus
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2016-12-15 |
2023-12-26 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
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2016-12-15 |
2024-06-04 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
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2016-12-15 |
2024-04-30 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus
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2016-12-15 |
2022-09-20 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus and a method of forming a patterned structure
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2016-12-15 |
2023-02-14 |
Asm Ip Holding B.V. |
Sequential infiltration synthesis apparatus
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2016-12-22 |
2022-02-15 |
Asm Ip Holding B.V. |
Method of forming a structure on a substrate
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2017-01-10 |
2024-07-23 |
Asm Ip Holding B.V. |
Reactor system and method to reduce residue buildup during a film deposition process
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2017-01-10 |
2022-07-19 |
Asm Ip Holding B.V. |
Reactor system and method to reduce residue buildup during a film deposition process
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2017-02-15 |
2022-08-09 |
Asm Ip Holding B.V. |
Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures
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2017-05-08 |
2023-12-19 |
Asm Ip Holding B.V. |
Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
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2017-06-20 |
2024-07-16 |
Asm Ip Holding B.V. |
Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus
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2017-06-28 |
2022-04-19 |
Asm Ip Holding B.V. |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
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2017-06-28 |
2024-05-07 |
Asm Ip Holding B.V. |
Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus
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2017-07-18 |
2021-11-02 |
Asm Ip Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures
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2017-07-18 |
2023-07-04 |
Asm Ip Holding B.V. |
Methods for forming a semiconductor device structure and related semiconductor device structures
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2017-07-19 |
2022-06-28 |
Asm Ip Holding B.V. |
Method for depositing a group IV semiconductor and related semiconductor device structures
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2017-07-26 |
2023-10-31 |
Asm Ip Holding B.V. |
Chemical treatment, deposition and/or infiltration apparatus and method for using the same
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2017-08-08 |
2022-08-16 |
Asm Ip Holding B.V. |
Radiation shield
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2017-08-08 |
2023-02-21 |
Asm Ip Holding B.V. |
Substrate lift mechanism and reactor including same
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2017-08-09 |
2023-09-26 |
Asm Ip Holding B.V. |
Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith
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2017-08-29 |
2023-11-28 |
Asm Ip Holding B.V. |
Layer forming method and apparatus
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2017-08-30 |
2023-02-14 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
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2017-08-30 |
2021-07-06 |
Asm Ip Holding B.V. |
Layer forming method
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2017-08-30 |
2021-07-20 |
Asm Ip Holding B.V. |
Substrate processing apparatus
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2017-08-30 |
2022-04-05 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures
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2017-09-28 |
2022-07-12 |
Asm Ip Holding B.V. |
Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber
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2017-10-05 |
2024-07-09 |
Asm Ip Holding B.V. |
Method for selectively depositing a metallic film on a substrate
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2017-10-05 |
2021-08-17 |
Asm Ip Holding B.V. |
Method for selectively depositing a metallic film on a substrate
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2017-10-30 |
2024-07-16 |
Asm Ip Holding B.V. |
Methods for forming a semiconductor structure and related semiconductor structures
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2017-11-27 |
2023-05-02 |
Asm Ip Holding B.V. |
Apparatus including a clean mini environment
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2017-11-27 |
2023-06-20 |
Asm Ip Holdings B.V. |
Storage device for storing wafer cassettes for use with a batch furnace
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2017-11-27 |
2021-09-21 |
Asm Ip Holding B.V. |
Storage device for storing wafer cassettes for use with a batch furnace
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2018-01-16 |
2022-11-15 |
Asm Ip Holding B.V. |
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
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2018-01-19 |
2022-10-25 |
Asm Ip Holding B.V. |
Method for depositing a gap-fill layer by plasma-assisted deposition
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2018-01-19 |
2024-04-30 |
Asm Ip Holding B.V. |
Method for depositing a gap-fill layer by plasma-assisted deposition
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2018-01-19 |
2022-07-19 |
Asm Ip Holding B.V. |
Deposition method
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(en)
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2018-02-06 |
2023-08-22 |
Asm Ip Holding B.V. |
Method of post-deposition treatment for silicon oxide film
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2018-02-14 |
2022-07-12 |
Asm Ip Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
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2018-02-14 |
2023-06-27 |
Asm Ip Holding B.V. |
Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process
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2018-02-20 |
2022-10-25 |
Asm Ip Holding B.V. |
Substrate processing method and apparatus
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2018-02-23 |
2024-03-26 |
Asm Ip Holding B.V. |
Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment
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2018-03-01 |
2022-10-18 |
Asm Ip Holding B.V. |
Semiconductor processing apparatus and a method for processing a substrate
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2018-03-09 |
2023-04-18 |
Asm Ip Holding B.V. |
Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate
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2018-03-16 |
2021-09-07 |
Asm Ip Holding B.V. |
Reactor, system including the reactor, and methods of manufacturing and using same
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2018-03-27 |
2024-06-25 |
Asm Ip Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
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2018-03-27 |
2022-07-26 |
Asm Ip Holding B.V. |
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
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2018-03-29 |
2022-01-25 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method
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2018-05-08 |
2022-10-11 |
Asm Ip Holding B.V. |
Methods for depositing an oxide film on a substrate by a cyclical deposition process and related device structures
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2018-05-08 |
2024-07-02 |
Asm Ip Holding B.V. |
Thin film forming method
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2018-05-28 |
2022-06-14 |
Asm Ip Holding B.V. |
Substrate processing method and device manufactured by using the same
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2018-05-28 |
2024-02-20 |
Asm Ip Holding B.V. |
Substrate processing method and device manufactured by using the same
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(en)
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2018-06-04 |
2022-03-08 |
Asm Ip Holding B.V. |
Wafer handling chamber with moisture reduction
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2018-06-04 |
2023-08-08 |
Asm Ip Holding B.V. |
Gas distribution system and reactor system including same
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2018-06-04 |
2023-12-05 |
Asm Ip Holding B.V. |
Wafer handling chamber with moisture reduction
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2018-06-08 |
2022-03-29 |
Asm Ip Holding B.V. |
Gas-phase chemical reactor and method of using same
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(en)
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2018-06-21 |
2022-04-05 |
Asm Ip Holding B.V. |
Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures
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(en)
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2018-06-21 |
2022-12-20 |
Asm Ip Holding B.V. |
Substrate processing system
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2018-06-27 |
2022-11-15 |
Asm Ip Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
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2018-06-27 |
2023-11-14 |
Asm Ip Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
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2018-06-27 |
2024-04-09 |
Asm Ip Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
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2018-06-27 |
2022-11-08 |
Asm Ip Holding B.V. |
Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing material
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2018-06-29 |
2021-11-09 |
Asm Ip Holding B.V. |
Temperature-controlled flange and reactor system including same
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(en)
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2018-07-03 |
2023-05-09 |
Asm Ip Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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2018-07-03 |
2024-03-05 |
Asm Ip Holding B.V. |
Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition
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2018-08-22 |
2022-08-30 |
Asm Ip Holding B.V. |
Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods
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2018-09-11 |
2023-10-31 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method
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2018-09-11 |
2022-03-15 |
Asm Ip Holding B.V. |
Thin film deposition method
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2018-10-01 |
2024-01-30 |
Asm Ip Holding B.V. |
Substrate retaining apparatus, system including the apparatus, and method of using same
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2018-10-03 |
2022-01-25 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method
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2018-10-08 |
2022-08-16 |
Asm Ip Holding B.V. |
Substrate support unit, thin film deposition apparatus including the same, and substrate processing apparatus including the same
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2018-10-19 |
2022-02-15 |
Asm Ip Holding B.V. |
Substrate processing apparatus and substrate processing method
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2018-10-19 |
2023-05-30 |
Asm Ip Holding B.V. |
Substrate processing apparatus and substrate processing method
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2018-10-31 |
2023-08-22 |
Asm Ip Holding B.V. |
Substrate processing apparatus for processing substrates
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2018-10-31 |
2021-08-10 |
Asm Ip Holding B.V. |
Substrate processing apparatus for processing substrates
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2018-11-02 |
2022-11-15 |
Asm Ip Holding B.V. |
Substrate supporting unit and a substrate processing device including the same
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2018-11-02 |
2024-01-09 |
Asm Ip Holding B.V. |
Substrate supporting unit and a substrate processing device including the same
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2018-11-06 |
2023-02-07 |
Asm Ip Holding B.V. |
Methods for selectively depositing an amorphous silicon film on a substrate
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2018-11-16 |
2023-10-24 |
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Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
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2018-11-16 |
2022-02-08 |
Asm Ip Holding B.V. |
Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process
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2018-11-16 |
2022-08-09 |
Asm Ip Holding B.V. |
Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
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2018-11-28 |
2024-07-16 |
Asm Ip Holding B.V. |
Substrate processing apparatus for processing substrates
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(en)
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2018-11-30 |
2022-01-04 |
Asm Ip Holding B.V. |
Method for forming an ultraviolet radiation responsive metal oxide-containing film
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(en)
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2018-12-04 |
2022-11-01 |
Asm Ip Holding B.V. |
Method of cleaning substrate processing apparatus
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2018-12-13 |
2021-10-26 |
Asm Ip Holding B.V. |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
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2018-12-13 |
2023-09-26 |
Asm Ip Holding B.V. |
Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures
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2018-12-14 |
2023-05-23 |
Asm Ip Holding B.V. |
Method of forming a device structure using selective deposition of gallium nitride and system for same
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2019-01-17 |
2024-04-16 |
Asm Ip Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
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2019-01-17 |
2022-07-19 |
Asm Ip Holding B.V. |
Methods of forming a transition metal containing film on a substrate by a cyclical deposition process
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2019-01-22 |
2021-11-09 |
Asm Ip Holding B.V. |
Substrate processing device
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2019-02-01 |
2021-09-21 |
Asm Ip Holding B.V. |
Method of topology-selective film formation of silicon oxide
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2019-02-20 |
2023-03-28 |
Asm Ip Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface
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2019-02-20 |
2022-05-24 |
Asm Ip Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
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2019-02-20 |
2022-10-25 |
Asm Ip Holding B.V. |
Apparatus and methods for plug fill deposition in 3-D NAND applications
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2019-02-20 |
2022-02-15 |
Asm Ip Holding B.V. |
Cyclical deposition method including treatment step and apparatus for same
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2019-02-20 |
2023-10-24 |
Asm Ip Holding B.V. |
Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
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2019-02-20 |
2022-01-18 |
Asm Ip Holding B.V. |
Method and apparatus for filling a recess formed within a substrate surface
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2019-02-22 |
2023-04-18 |
Asm Ip Holding B.V. |
Substrate processing apparatus and method for processing substrates
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(en)
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2019-03-08 |
2024-02-13 |
Asm Ip Holding B.V. |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
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2019-03-08 |
2021-09-07 |
Asm Ip Holding B.V. |
Structure including SiOC layer and method of forming same
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2019-03-08 |
2023-08-29 |
Asm Ip Holding B.V. |
Structure including SiOCN layer and method of forming same
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2019-03-08 |
2022-08-23 |
Asm Ip Holding B.V. |
Method for selective deposition of silicon nitride layer and structure including selectively-deposited silicon nitride layer
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2019-03-28 |
2022-07-05 |
Asm Ip Holding B.V. |
Door opener and substrate processing apparatus provided therewith
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2019-04-01 |
2023-01-10 |
Asm Ip Holding B.V. |
Method for manufacturing a semiconductor device
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2019-04-19 |
2022-09-20 |
Asm Ip Holding B.V. |
Layer forming method and apparatus
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(en)
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2019-04-24 |
2023-11-14 |
Asm Ip Holding B.V. |
Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly
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(en)
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2019-05-07 |
2022-03-29 |
Asm Ip Holding B.V. |
Method for reforming amorphous carbon polymer film
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US11781221B2
(en)
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2019-05-07 |
2023-10-10 |
Asm Ip Holding B.V. |
Chemical source vessel with dip tube
|
US11355338B2
(en)
|
2019-05-10 |
2022-06-07 |
Asm Ip Holding B.V. |
Method of depositing material onto a surface and structure formed according to the method
|
US11996309B2
(en)
|
2019-05-16 |
2024-05-28 |
Asm Ip Holding B.V. |
Wafer boat handling device, vertical batch furnace and method
|
US11515188B2
(en)
|
2019-05-16 |
2022-11-29 |
Asm Ip Holding B.V. |
Wafer boat handling device, vertical batch furnace and method
|
USD947913S1
(en)
|
2019-05-17 |
2022-04-05 |
Asm Ip Holding B.V. |
Susceptor shaft
|
USD975665S1
(en)
|
2019-05-17 |
2023-01-17 |
Asm Ip Holding B.V. |
Susceptor shaft
|
USD935572S1
(en)
|
2019-05-24 |
2021-11-09 |
Asm Ip Holding B.V. |
Gas channel plate
|
US11345999B2
(en)
|
2019-06-06 |
2022-05-31 |
Asm Ip Holding B.V. |
Method of using a gas-phase reactor system including analyzing exhausted gas
|
US11453946B2
(en)
|
2019-06-06 |
2022-09-27 |
Asm Ip Holding B.V. |
Gas-phase reactor system including a gas detector
|
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(en)
|
2019-06-11 |
2024-02-20 |
Asm Ip Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method
|
US11476109B2
(en)
|
2019-06-11 |
2022-10-18 |
Asm Ip Holding B.V. |
Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method
|
USD944946S1
(en)
|
2019-06-14 |
2022-03-01 |
Asm Ip Holding B.V. |
Shower plate
|
USD931978S1
(en)
|
2019-06-27 |
2021-09-28 |
Asm Ip Holding B.V. |
Showerhead vacuum transport
|
US11746414B2
(en)
|
2019-07-03 |
2023-09-05 |
Asm Ip Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same
|
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(en)
|
2019-07-03 |
2022-07-19 |
Asm Ip Holding B.V. |
Temperature control assembly for substrate processing apparatus and method of using same
|
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(en)
|
2019-07-09 |
2023-03-14 |
Asm Ip Holding B.V. |
Plasma device using coaxial waveguide, and substrate treatment method
|
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(en)
|
2019-07-10 |
2023-05-30 |
Asm Ip Holding B.V. |
Substrate support assembly and substrate processing device including the same
|
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(en)
|
2019-07-16 |
2023-05-30 |
Asm Ip Holding B.V. |
Substrate processing device
|
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(en)
|
2019-07-16 |
2024-05-28 |
Asm Ip Holding B.V. |
Substrate processing device
|
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(en)
|
2019-07-17 |
2023-03-28 |
Asm Ip Holding B.V. |
Radical assist ignition plasma system and method
|
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(en)
|
2019-07-17 |
2023-06-27 |
Asm Ip Holding B.V. |
Methods of forming silicon germanium structures
|
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(en)
|
2019-07-18 |
2023-05-09 |
Asm Ip Holding B.V. |
Method of forming structures using a neutral beam
|
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(en)
|
2019-07-19 |
2022-03-22 |
Asm Ip Holding B.V. |
Method of forming topology-controlled amorphous carbon polymer film
|
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(en)
|
2019-07-29 |
2023-01-17 |
Asm Ip Holding B.V. |
Methods for selective deposition utilizing n-type dopants and/or alternative dopants to achieve high dopant incorporation
|
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(en)
|
2019-07-30 |
2022-09-13 |
Asm Ip Holding B.V. |
Substrate processing apparatus
|
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(en)
|
2019-07-30 |
2022-08-30 |
Asm Ip Holding B.V. |
Substrate processing apparatus
|
US11227782B2
(en)
|
2019-07-31 |
2022-01-18 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11587814B2
(en)
|
2019-07-31 |
2023-02-21 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11587815B2
(en)
|
2019-07-31 |
2023-02-21 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11876008B2
(en)
|
2019-07-31 |
2024-01-16 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly
|
US11680839B2
(en)
|
2019-08-05 |
2023-06-20 |
Asm Ip Holding B.V. |
Liquid level sensor for a chemical source vessel
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USD965524S1
(en)
|
2019-08-19 |
2022-10-04 |
Asm Ip Holding B.V. |
Susceptor support
|
USD965044S1
(en)
|
2019-08-19 |
2022-09-27 |
Asm Ip Holding B.V. |
Susceptor shaft
|
US11639548B2
(en)
|
2019-08-21 |
2023-05-02 |
Asm Ip Holding B.V. |
Film-forming material mixed-gas forming device and film forming device
|
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(en)
|
2019-08-22 |
2024-07-16 |
Asm Ip Holding B.V. |
Method for forming a structure with a hole
|
USD979506S1
(en)
|
2019-08-22 |
2023-02-28 |
Asm Ip Holding B.V. |
Insulator
|
TWD211226S
(en)
|
2019-08-22 |
2021-05-01 |
荷蘭商Asm Ip私人控股有限公司 |
Insulator for semiconductor processing apparatus
|
USD949319S1
(en)
|
2019-08-22 |
2022-04-19 |
Asm Ip Holding B.V. |
Exhaust duct
|
USD930782S1
(en)
|
2019-08-22 |
2021-09-14 |
Asm Ip Holding B.V. |
Gas distributor
|
US11594450B2
(en)
|
2019-08-22 |
2023-02-28 |
Asm Ip Holding B.V. |
Method for forming a structure with a hole
|
USD940837S1
(en)
|
2019-08-22 |
2022-01-11 |
Asm Ip Holding B.V. |
Electrode
|
US11827978B2
(en)
|
2019-08-23 |
2023-11-28 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
|
US12033849B2
(en)
|
2019-08-23 |
2024-07-09 |
Asm Ip Holding B.V. |
Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane
|
US11898242B2
(en)
|
2019-08-23 |
2024-02-13 |
Asm Ip Holding B.V. |
Methods for forming a polycrystalline molybdenum film over a surface of a substrate and related structures including a polycrystalline molybdenum film
|
US11527400B2
(en)
|
2019-08-23 |
2022-12-13 |
Asm Ip Holding B.V. |
Method for depositing silicon oxide film having improved quality by peald using bis(diethylamino)silane
|
US11286558B2
(en)
|
2019-08-23 |
2022-03-29 |
Asm Ip Holding B.V. |
Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film
|
US11495459B2
(en)
|
2019-09-04 |
2022-11-08 |
Asm Ip Holding B.V. |
Methods for selective deposition using a sacrificial capping layer
|
US11823876B2
(en)
|
2019-09-05 |
2023-11-21 |
Asm Ip Holding B.V. |
Substrate processing apparatus
|
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(en)
|
2019-09-25 |
2023-01-24 |
Asm Ip Holding B.V. |
Substrate processing method
|
US11610774B2
(en)
|
2019-10-02 |
2023-03-21 |
Asm Ip Holding B.V. |
Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process
|
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(en)
|
2019-10-08 |
2024-06-11 |
Asm Ip Holding B.V. |
Reactor system including a gas distribution assembly for use with activated species and method of using same
|
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(en)
|
2019-10-08 |
2022-05-24 |
Asm Ip Holding B.V. |
Substrate processing device having connection plates, substrate processing method
|
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(en)
|
2019-10-10 |
2023-08-22 |
Asm Ip Holding B.V. |
Method of forming a photoresist underlayer and structure including same
|
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(en)
|
2019-10-14 |
2024-06-11 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly with detector to detect cassette
|
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(en)
|
2019-10-16 |
2023-04-25 |
Asm Ip Holding B.V. |
Method of topology-selective film formation of silicon oxide
|
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(en)
|
2019-10-17 |
2023-04-25 |
Asm Ip Holding B.V. |
Methods for selective deposition of doped semiconductor material
|
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(en)
|
2019-10-21 |
2022-04-26 |
Asm Ip Holding B.V. |
Apparatus and methods for selectively etching films
|
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(en)
|
2019-10-25 |
2024-05-28 |
Asm Ip Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures
|
US11646205B2
(en)
|
2019-10-29 |
2023-05-09 |
Asm Ip Holding B.V. |
Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same
|
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(en)
|
2019-11-05 |
2023-02-28 |
Asm Ip Holding B.V. |
Structures with doped semiconductor layers and methods and systems for forming same
|
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(en)
|
2019-11-15 |
2022-11-15 |
Asm Ip Holding B.V. |
Method for providing a semiconductor device with silicon filled gaps
|
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(en)
|
2019-11-20 |
2023-04-11 |
Asm Ip Holding B.V. |
Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure
|
US11450529B2
(en)
|
2019-11-26 |
2022-09-20 |
Asm Ip Holding B.V. |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
|
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(en)
|
2019-11-26 |
2022-08-02 |
Asm Ip Holding B.V. |
Substrate processing apparatus
|
US11915929B2
(en)
|
2019-11-26 |
2024-02-27 |
Asm Ip Holding B.V. |
Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
|
US11646184B2
(en)
|
2019-11-29 |
2023-05-09 |
Asm Ip Holding B.V. |
Substrate processing apparatus
|
US11923181B2
(en)
|
2019-11-29 |
2024-03-05 |
Asm Ip Holding B.V. |
Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing
|
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(en)
|
2019-12-02 |
2024-03-12 |
Asm Ip Holding B.V. |
Substrate processing apparatus having electrostatic chuck and substrate processing method
|
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(en)
|
2019-12-04 |
2023-12-12 |
Asm Ip Holding B.V. |
Substrate processing apparatus
|
US11885013B2
(en)
|
2019-12-17 |
2024-01-30 |
Asm Ip Holding B.V. |
Method of forming vanadium nitride layer and structure including the vanadium nitride layer
|
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(en)
|
2019-12-19 |
2022-12-13 |
Asm Ip Holding B.V. |
Methods for filling a gap feature on a substrate surface and related semiconductor structures
|
US12033885B2
(en)
|
2020-01-06 |
2024-07-09 |
Asm Ip Holding B.V. |
Channeled lift pin
|
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(en)
|
2020-01-06 |
2024-05-07 |
Asm Ip Holding B.V. |
Gas supply assembly, components thereof, and reactor system including same
|
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(en)
|
2020-01-08 |
2024-05-28 |
Asm Ip Holding B.V. |
Injector
|
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(en)
|
2020-01-20 |
2023-01-10 |
Asm Ip Holding B.V. |
Method of forming thin film and method of modifying surface of thin film
|
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(en)
|
2020-02-03 |
2022-12-06 |
Asm Ip Holding B.V. |
Method of forming structures including a vanadium or indium layer
|
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(en)
|
2020-02-04 |
2023-11-28 |
Asm Ip Holding B.V. |
Method and apparatus for transmittance measurements of large articles
|
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(en)
|
2020-02-07 |
2023-10-03 |
Asm Ip Holding B.V. |
Methods for depositing gap filling fluids and related systems and devices
|
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(en)
|
2020-02-17 |
2023-10-10 |
Asm Ip Holding B.V. |
Method for depositing low temperature phosphorous-doped silicon
|
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(en)
|
2020-02-28 |
2024-05-21 |
Asm Ip Holding B.V. |
System dedicated for parts cleaning
|
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(en)
|
2020-03-11 |
2024-01-16 |
Asm Ip Holding B.V. |
Lockout tagout assembly and system and method of using same
|
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(en)
|
2020-03-11 |
2023-12-05 |
Asm Ip Holding B.V. |
Substrate handling device with adjustable joints
|
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(en)
|
2020-03-11 |
2022-11-01 |
Asm Ip Holding B.V. |
Substrate handling device with adjustable joints
|
US11961741B2
(en)
|
2020-03-12 |
2024-04-16 |
Asm Ip Holding B.V. |
Method for fabricating layer structure having target topological profile
|
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(en)
|
2020-04-02 |
2023-11-21 |
Asm Ip Holding B.V. |
Thin film forming method
|
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(en)
|
2020-04-03 |
2023-11-28 |
Asm Ip Holding B.V. |
Method for forming barrier layer and method for manufacturing semiconductor device
|
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(en)
|
2020-04-08 |
2022-09-06 |
Asm Ip Holding B.V. |
Apparatus and methods for selectively etching silicon oxide films
|
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(en)
|
2020-04-15 |
2023-11-21 |
Asm Ip Holding B.V. |
Method for forming precoat film and method for forming silicon-containing film
|
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(en)
|
2020-04-16 |
2024-05-28 |
Asm Ip Holding B.V. |
Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods
|
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(en)
|
2020-04-24 |
2024-01-30 |
Asm Ip Holding B.V. |
Methods and systems for depositing a layer comprising vanadium, nitrogen, and a further element
|
US11530876B2
(en)
|
2020-04-24 |
2022-12-20 |
Asm Ip Holding B.V. |
Vertical batch furnace assembly comprising a cooling gas supply
|
US11898243B2
(en)
|
2020-04-24 |
2024-02-13 |
Asm Ip Holding B.V. |
Method of forming vanadium nitride-containing layer
|
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(en)
|
2020-04-29 |
2024-04-16 |
Asm Ip Holding B.V. |
Solid source precursor vessel
|
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(en)
|
2020-05-01 |
2023-10-24 |
Asm Ip Holding B.V. |
Fast FOUP swapping with a FOUP handler
|
US11515187B2
(en)
|
2020-05-01 |
2022-11-29 |
Asm Ip Holding B.V. |
Fast FOUP swapping with a FOUP handler
|
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(en)
|
2020-05-13 |
2023-04-11 |
Asm Ip Holding B.V. |
Laser alignment fixture for a reactor system
|
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(en)
|
2020-05-19 |
2023-10-31 |
Asm Ip Holding B.V. |
Substrate processing apparatus
|
US11705333B2
(en)
|
2020-05-21 |
2023-07-18 |
Asm Ip Holding B.V. |
Structures including multiple carbon layers and methods of forming and using same
|
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(en)
|
2020-05-22 |
2024-05-21 |
Asm Ip Holding B.V. |
Apparatus for depositing thin films using hydrogen peroxide
|
US11767589B2
(en)
|
2020-05-29 |
2023-09-26 |
Asm Ip Holding B.V. |
Substrate processing device
|
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(en)
|
2020-06-24 |
2023-05-09 |
Asm Ip Holding B.V. |
Method for forming a layer provided with silicon
|
US11658035B2
(en)
|
2020-06-30 |
2023-05-23 |
Asm Ip Holding B.V. |
Substrate processing method
|
US12020934B2
(en)
|
2020-07-08 |
2024-06-25 |
Asm Ip Holding B.V. |
Substrate processing method
|
US11644758B2
(en)
|
2020-07-17 |
2023-05-09 |
Asm Ip Holding B.V. |
Structures and methods for use in photolithography
|
US11674220B2
(en)
|
2020-07-20 |
2023-06-13 |
Asm Ip Holding B.V. |
Method for depositing molybdenum layers using an underlayer
|
US12040177B2
(en)
|
2020-08-18 |
2024-07-16 |
Asm Ip Holding B.V. |
Methods for forming a laminate film by cyclical plasma-enhanced deposition processes
|
US11725280B2
(en)
|
2020-08-26 |
2023-08-15 |
Asm Ip Holding B.V. |
Method for forming metal silicon oxide and metal silicon oxynitride layers
|
USD990534S1
(en)
|
2020-09-11 |
2023-06-27 |
Asm Ip Holding B.V. |
Weighted lift pin
|
USD1012873S1
(en)
|
2020-09-24 |
2024-01-30 |
Asm Ip Holding B.V. |
Electrode for semiconductor processing apparatus
|
US12009224B2
(en)
|
2020-09-29 |
2024-06-11 |
Asm Ip Holding B.V. |
Apparatus and method for etching metal nitrides
|
US11827981B2
(en)
|
2020-10-14 |
2023-11-28 |
Asm Ip Holding B.V. |
Method of depositing material on stepped structure
|
US11873557B2
(en)
|
2020-10-22 |
2024-01-16 |
Asm Ip Holding B.V. |
Method of depositing vanadium metal
|
US11901179B2
(en)
|
2020-10-28 |
2024-02-13 |
Asm Ip Holding B.V. |
Method and device for depositing silicon onto substrates
|
US12027365B2
(en)
|
2020-11-24 |
2024-07-02 |
Asm Ip Holding B.V. |
Methods for filling a gap and related systems and devices
|
US11891696B2
(en)
|
2020-11-30 |
2024-02-06 |
Asm Ip Holding B.V. |
Injector configured for arrangement within a reaction chamber of a substrate processing apparatus
|
US11946137B2
(en)
|
2020-12-16 |
2024-04-02 |
Asm Ip Holding B.V. |
Runout and wobble measurement fixtures
|
US11885020B2
(en)
|
2020-12-22 |
2024-01-30 |
Asm Ip Holding B.V. |
Transition metal deposition method
|
US12051602B2
(en)
|
2021-04-29 |
2024-07-30 |
Asm Ip Holding B.V. |
Substrate processing system for processing substrates with an electronics module located behind a door in a front wall of the substrate processing system
|
USD1023959S1
(en)
|
2021-05-11 |
2024-04-23 |
Asm Ip Holding B.V. |
Electrode for substrate processing apparatus
|
USD981973S1
(en)
|
2021-05-11 |
2023-03-28 |
Asm Ip Holding B.V. |
Reactor wall for substrate processing apparatus
|
USD980814S1
(en)
|
2021-05-11 |
2023-03-14 |
Asm Ip Holding B.V. |
Gas distributor for substrate processing apparatus
|
USD980813S1
(en)
|
2021-05-11 |
2023-03-14 |
Asm Ip Holding B.V. |
Gas flow control plate for substrate processing apparatus
|
USD990441S1
(en)
|
2021-09-07 |
2023-06-27 |
Asm Ip Holding B.V. |
Gas flow control plate
|
US12051567B2
(en)
|
2021-10-04 |
2024-07-30 |
Asm Ip Holding B.V. |
Gas supply unit and substrate processing apparatus including gas supply unit
|