JP6398761B2 - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- JP6398761B2 JP6398761B2 JP2015020536A JP2015020536A JP6398761B2 JP 6398761 B2 JP6398761 B2 JP 6398761B2 JP 2015020536 A JP2015020536 A JP 2015020536A JP 2015020536 A JP2015020536 A JP 2015020536A JP 6398761 B2 JP6398761 B2 JP 6398761B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
- C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
- C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
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- Chemical & Material Sciences (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Crystallography & Structural Chemistry (AREA)
Description
前記真空容器の底部を含む部分を構成する容器本体と、
前記真空容器を開閉するために前記容器本体に対して分離自在に構成された、当該真空容器の天井部を含む部分を構成する蓋体と、
前記蓋体を容器本体に装着したときに前記回転テーブルの回転中心部を貫くように前記蓋体及び容器本体のうちの一方に設けられ、前記真空容器内を真空引きしたときに前記容器本体に対して蓋体を支持する支柱と、
を備え、
前記支柱には、前記蓋体及び容器本体のうちの他方に接する接触面を囲む環状の段差部が設けられ、
前記蓋体を前記容器本体に装着したときに前記蓋体及び容器本体のうちの他方に密着する弾性体からなるシール部材が前記段差部に設けられることを特徴とする。
本発明の他の基板処理装置は、真空容器内にて回転テーブル上に載置した基板を公転させながら、当該基板に対して処理ガスを供給して処理を行う基板処理装置において、
前記真空容器の底部を含む部分を構成する容器本体と、
前記真空容器を開閉するために前記容器本体に対して分離自在に構成された、当該真空容器の天井部を含む部分を構成する蓋体と、
前記蓋体を容器本体に装着したときに前記回転テーブルの回転中心部を貫くように前記蓋体及び容器本体のうちの一方に設けられ、前記真空容器内を真空引きしたときに前記容器本体に対して蓋体を支持する支柱と、
を備え、
前記支柱には、前記真空容器内を排気するための排気口が形成されていることを特徴とする。
本発明の基板処理装置の一実施形態であり、例えば基板であるウエハWにALDを行い、SiO2(酸化シリコン)膜を形成する成膜装置1について、図1の縦断側面図と、図2の横断平面図とを参照しながら説明する。図2は、図1のA−A矢視断面図である。成膜装置1は、概ね円形状の扁平な真空容器(処理容器)11を備えており、真空容器11は例えばアルミニウムなどの金属により構成され、当該真空容器11の側壁12及び周縁部側の底部13を形成する容器本体14と、真空容器11の天井部を構成する概ね円形の蓋体15と、を備えている。
第2の実施形態に係る成膜装置7について、図6、図7を参照しながら成膜装置1との差異点を中心に説明する。図6は成膜装置7の縦断側面図であり、図7は成膜装置7の概略横断平面図である。この図7では、図5と同様に、矢印によって成膜処理時の各ガスの流れを示している。
続いて、第3の実施形態に係る成膜装置9について、縦断側面図である図11、概略横断平面図である図12を夫々参照しながら、第2の実施形態の成膜装置7との差異点を中心に説明する。図12では、図7と同様に、矢印によって成膜処理時の各ガスの流れを示している。この成膜装置9に関しては、ガスノズル61、63の構成について成膜装置7と異なっている。
D 分離領域
P1、P2 処理領域
1 成膜装置
11 真空容器
21 回転テーブル
28 底部形成部
31 支柱
41 載置面
42 載置面
61 第1の処理ガスノズル
62、64 分離ガスノズル
63 第2の処理ガスノズル
Claims (5)
- 真空容器内にて回転テーブル上に載置した基板を公転させながら、当該基板に対して処理ガスを供給して処理を行う基板処理装置において、
前記真空容器の底部を含む部分を構成する容器本体と、
前記真空容器を開閉するために前記容器本体に対して分離自在に構成された、当該真空容器の天井部を含む部分を構成する蓋体と、
前記蓋体を容器本体に装着したときに前記回転テーブルの回転中心部を貫くように前記蓋体及び容器本体のうちの一方に設けられ、前記真空容器内を真空引きしたときに前記容器本体に対して蓋体を支持する支柱と、
を備え、
前記支柱には、前記蓋体及び容器本体のうちの他方に接する接触面を囲む環状の段差部が設けられ、
前記蓋体を前記容器本体に装着したときに前記蓋体及び容器本体のうちの他方に密着する弾性体からなるシール部材が前記段差部に設けられることを特徴とする基板処理装置。 - 真空容器内にて回転テーブル上に載置した基板を公転させながら、当該基板に対して処理ガスを供給して処理を行う基板処理装置において、
前記真空容器の底部を含む部分を構成する容器本体と、
前記真空容器を開閉するために前記容器本体に対して分離自在に構成された、当該真空容器の天井部を含む部分を構成する蓋体と、
前記蓋体を容器本体に装着したときに前記回転テーブルの回転中心部を貫くように前記蓋体及び容器本体のうちの一方に設けられ、前記真空容器内を真空引きしたときに前記容器本体に対して蓋体を支持する支柱と、
を備え、
前記支柱には、前記真空容器内を排気するための排気口が形成されていることを特徴とする基板処理装置。 - 前記回転テーブルの回転方向に互いに離れて設けられ、前記基板に夫々第1の処理ガス及び第2の処理ガスを供給するための第1の処理ガス供給部及び第2の処理ガス供給部と、
前記第1の処理ガスが供給される第1の処理領域と第2の処理ガスが供給される第2の処理領域との雰囲気を分離するために前記回転方向においてこれら処理領域の間に設けられ、分離ガス供給部から分離ガスを供給するための分離領域と、を備え、
前記排気口は互いに区画された第1の排気口と第2の排気口とにより構成され、
前記第1の排気口は、第1の処理ガス及び第2の処理ガスのうちの一方を限定的に排気し、第2の排気口は第1の処理ガス及び第2の処理ガスのうちの他方を限定的に排気することを特徴とする請求項2記載の基板処理装置。 - 前記支柱は、前記容器本体に設けられることを特徴とする請求項1ないし3のいずれか一つに記載の基板処理装置。
- 前記支柱には、前記処理ガスを供給するための供給路が形成されていることを特徴とする請求項1ないし4のいずれか一つに記載の基板処理装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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JP2015020536A JP6398761B2 (ja) | 2015-02-04 | 2015-02-04 | 基板処理装置 |
US15/007,488 US9683290B2 (en) | 2015-02-04 | 2016-01-27 | Substrate processing apparatus having a pillar support structure for preventing transformation of a ceiling portion |
KR1020160012346A KR102003108B1 (ko) | 2015-02-04 | 2016-02-01 | 기판 처리 장치 |
TW105103221A TWI673793B (zh) | 2015-02-04 | 2016-02-02 | 基板處理裝置 |
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JP2015020536A JP6398761B2 (ja) | 2015-02-04 | 2015-02-04 | 基板処理装置 |
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JP2016143836A JP2016143836A (ja) | 2016-08-08 |
JP6398761B2 true JP6398761B2 (ja) | 2018-10-03 |
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US (1) | US9683290B2 (ja) |
JP (1) | JP6398761B2 (ja) |
KR (1) | KR102003108B1 (ja) |
TW (1) | TWI673793B (ja) |
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