JP6287240B2 - 真空処理装置及び真空処理方法 - Google Patents
真空処理装置及び真空処理方法 Download PDFInfo
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- 238000012360 testing method Methods 0.000 description 18
- 238000011156 evaluation Methods 0.000 description 16
- 238000000926 separation method Methods 0.000 description 15
- 239000012495 reaction gas Substances 0.000 description 13
- 238000003860 storage Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910052814 silicon oxide Inorganic materials 0.000 description 6
- 238000000638 solvent extraction Methods 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
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- 238000001312 dry etching Methods 0.000 description 2
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- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- CGRVKSPUKAFTBN-UHFFFAOYSA-N N-silylbutan-1-amine Chemical compound CCCCN[SiH3] CGRVKSPUKAFTBN-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
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- 239000002245 particle Substances 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
- C23C16/45548—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction
- C23C16/45551—Atomic layer deposition [ALD] characterized by the apparatus having arrangements for gas injection at different locations of the reactor for each ALD half-reaction for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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Description
前記処理容器内に設けられた回転テーブルと、
前記回転テーブルにより公転するように当該回転テーブルの一面側に設けられ、その周囲に基板の位置を規制するための規制部が形成された基板の載置領域と、
前記回転テーブル上の基板に処理ガスを供給するためのガス供給部と、
外部の基板の搬送機構と、前記回転テーブルとの間で基板を受け渡すために、当該基板を支持して昇降する昇降部材と、
前記昇降部材により前記載置領域に基板が載置される前に、当該載置領域と基板との間の隙間を選択的に排気するための排気機構と、
を備え、
前記排気機構は、前記回転テーブルの他面側に、回転テーブルの一面側から区画されると共に、排気される排気空間を形成する区画部材を備え、
前記回転テーブルには、前記排気空間が排気されることによって前記隙間が排気されるように、その一端が回転テーブルの一面側に開口すると共に、その他端が前記排気空間に連通可能なガス吸引路が設けられ、
前記排気空間は、前記回転テーブルから離れて形成され、
前記排気機構は、その一端が前記排気空間に連通すると共に区画されたガス流路を形成する流路形成部材を備え、
前記流路形成部材の他端が前記ガス吸引路に接続される状態と、前記接続が解除される状態と、を切り替えるための、当該流路形成部材を移動させる移動機構が設けられることを特徴とする。
本発明の他の真空処理装置は、その内部が排気されて真空雰囲気とされる処理容器と、
前記処理容器内に設けられた回転テーブルと、
前記回転テーブルにより公転するように当該回転テーブルの一面側に当該回転テーブルの回転方向に沿って複数設けられ、底面が各々基板を載置する載置領域をなすと共に側面が当該基板の位置を各々規制するための規制部をなす凹部と、
前記回転テーブル上の基板に処理ガスを供給するためのガス供給部と、
外部の基板の搬送機構と、前記回転テーブルとの間で基板を受け渡すために、当該基板を支持して昇降し、前記各凹部に順番に前記基板を受け渡すように前記回転テーブルの回転により前記各凹部に対する位置が変更され、各凹部で共用される昇降部材と、
前記昇降部材が前記基板を支持した状態で、前記複数の凹部のうちの当該昇降部材が支持した基板の受け渡し先の載置領域を構成する凹部を、当該載置領域に基板が載置される前に選択的に排気するように、前記載置領域と当該基板との間の隙間を選択的に排気し、前記回転テーブルの回転により公転する各基板への前記処理ガスの供給中においては各凹部の前記隙間の選択的な排気を停止する排気機構と、
を備えることを特徴とする。
本発明の真空処理装置の一実施形態であり、基板であるウエハWにALDを行う成膜装置1について図1〜図3を参照しながら説明する。図1は成膜装置1の縦断側面図であり、図2は成膜装置1の内部を示す概略斜視図であり、図3は成膜装置1の横断平面図である。成膜装置1は、概ね円形状の扁平な真空容器(処理容器)11と、真空容器11内に設けられた円板状の水平な回転テーブル2と、を備えている。真空容器11は、天板12と、真空容器11の側壁及び底部をなす容器本体13とにより構成されている。図1中14は容器本体13の下側中央部を塞ぐカバーである。
第2の実施形態の昇降ピン及び付勢機構について、第1の実施形態との差異点を中心に図17を参照しながら説明する。第1の実施形態と同様に構成されている箇所には、第1の実施形態で用いた符号を付して説明を省略する。図17は、第2の実施形態に係る昇降ピン71が、ホームポジションに位置する状態を示している。この昇降ピン71にはフランジ52が設けられておらず、昇降ピン71を構成する基端部71a上には基端部51aよりも縮径された中間部71bが設けられ、当該中間部71b上には、当該中間部71bよりも縮径された先端部71cが設けられている。
評価試験1
ウエハ搬送機構18から上記の成膜装置1の昇降ピン51にウエハWを受け渡し、昇降ピン51を下降させ、凹部21にウエハWを載置した。この載置後に、設計上ウエハWが載置される領域からのウエハWのずれ量(ウエハWの移動距離)を測定した。この凹部21へのウエハWの受け渡しとウエハWの移動距離の測定を繰り返し行った。ただしこの評価試験1では、上記の実施形態で説明した受け渡しとは異なり、ウエハWを凹部21に向けて下降させてから、当該ウエハWが凹部21に載置されるまでの間に当該凹部21の排気を行っていない。
評価試験1と同様に凹部21へのウエハWの受け渡しと、ウエハWの移動量との測定を行った。ただしこの評価試験2では、第1の実施の形態で説明したように凹部21へウエハWを受け渡すときに、貫通孔22から凹部21内の排気を行った。この評価試験2では、評価試験1よりも多くの回数、前記受け渡し及び前記移動量の測定を行った。
D 分離領域
P1、P2 処理領域
1 成膜装置
11 真空容器
2 回転テーブル
21 凹部
22 貫通孔
31、33 反応ガスノズル
32、34 分離ガスノズル
42 筒状体
45 排気空間
51 昇降ピン
56 付勢機構
Claims (18)
- その内部が排気されて真空雰囲気とされる処理容器と、
前記処理容器内に設けられた回転テーブルと、
前記回転テーブルにより公転するように当該回転テーブルの一面側に設けられ、その周囲に基板の位置を規制するための規制部が形成された基板の載置領域と、
前記回転テーブル上の基板に処理ガスを供給するためのガス供給部と、
外部の基板の搬送機構と、前記回転テーブルとの間で基板を受け渡すために、当該基板を支持して昇降する昇降部材と、
前記昇降部材により前記載置領域に基板が載置される前に、当該載置領域と基板との間の隙間を選択的に排気するための排気機構と、
を備え、
前記排気機構は、前記回転テーブルの他面側に、回転テーブルの一面側から区画されると共に、排気される排気空間を形成する区画部材を備え、
前記回転テーブルには、前記排気空間が排気されることによって前記隙間が排気されるように、その一端が回転テーブルの一面側に開口すると共に、その他端が前記排気空間に連通可能なガス吸引路が設けられ、
前記排気空間は、前記回転テーブルから離れて形成され、
前記排気機構は、その一端が前記排気空間に連通すると共に区画されたガス流路を形成する流路形成部材を備え、
前記流路形成部材の他端が前記ガス吸引路に接続される状態と、前記接続が解除される状態と、を切り替えるための、当該流路形成部材を移動させる移動機構が設けられることを特徴とする真空処理装置。 - 前記載置領域は、前記回転テーブルに形成された凹部であり、前記規制部は、前記凹部の側面であることを特徴とする請求項1記載の真空処理装置。
- 前記移動機構は、前記昇降部材の昇降に連動して動作するように構成されていることを特徴とする請求項1または2記載の真空処理装置。
- 前記移動機構は、前記昇降部材の高さに応じて前記流路形成部材を前記回転テーブルの他面に付勢する状態と、前記付勢が解除された状態と、を切り替える付勢機構により構成されることを特徴とする請求項3記載の真空処理装置。
- 前記昇降部材は係合部を備え、
前記付勢機構は、前記昇降部材の下降により、前記係合部と係合して流路形成部材を回転テーブルの他面から離間させるための被係合部を備えることを特徴とする請求項4記載の真空処理装置。 - 前記回転テーブルの一面側の空間よりも1Pa以上低い圧力となるように前記排気機構により排気空間が排気されることに並行して、
支持した基板が前記凹部の底面に載置されるように前記昇降部材が下降することを特徴とする請求項1ないし5のいずれか一つに記載の真空処理装置。 - 前記ガス吸引路は、前記昇降部材の移動路を兼用するものであることを特徴とする請求項1ないし6のいずれか一つに記載の真空処理装置。
- その内部が排気されて真空雰囲気とされる処理容器と、
前記処理容器内に設けられた回転テーブルと、
前記回転テーブルにより公転するように当該回転テーブルの一面側に当該回転テーブルの回転方向に沿って複数設けられ、底面が各々基板を載置する載置領域をなすと共に側面が当該基板の位置を各々規制するための規制部をなす凹部と、
前記回転テーブル上の基板に処理ガスを供給するためのガス供給部と、
外部の基板の搬送機構と、前記回転テーブルとの間で基板を受け渡すために、当該基板を支持して昇降し、前記各凹部に順番に前記基板を受け渡すように前記回転テーブルの回転により前記各凹部に対する位置が変更され、各凹部で共用される昇降部材と、
前記昇降部材が前記基板を支持した状態で、前記複数の凹部のうちの当該昇降部材が支持した基板の受け渡し先の載置領域を構成する凹部を、当該載置領域に基板が載置される前に選択的に排気するように、前記載置領域と当該基板との間の隙間を選択的に排気し、前記回転テーブルの回転により公転する各基板への前記処理ガスの供給中においては各凹部の前記隙間の選択的な排気を停止する排気機構と、
を備えることを特徴とする真空処理装置。 - 前記排気機構は、基板の下面が前記凹部の側壁の上端と同じ高さか、あるいは当該上端よりも低い高さ位置に位置した第1の状態で、当該凹部内の排気を行うことを特徴とする請求項2または8記載の真空処理装置。
- 前記第1の状態は、基板の静止状態であることを特徴とする請求項9記載の真空処理装置。
- 前記排気機構は、基板の下面と凹部の底面との距離が、0mmより大きく20mm以下であるときに、凹部内の排気を行うことを特徴とする請求項2、8、9または10記載の真空処理装置。
- 処理容器の内部を排気して真空雰囲気とする工程と、
前記処理容器内に設けられた回転テーブルを回転させて、当該回転テーブルの一面側に設けられ、その周囲に基板の位置を規制するための規制部が形成された基板の載置領域を公転させる工程と、
基板の搬送機構と、前記回転テーブルとの間で基板を受け渡すために、基板を支持した昇降部材を昇降させる工程と、
ガス供給部により、前記回転テーブル上の基板に処理ガスを供給する工程と、
前記昇降部材により前記載置領域に基板が載置される前に、排気機構により当該載置領域と基板との間の隙間を選択的に排気する工程と、
を備え、
前記排気機構は、前記回転テーブルの他面側に、回転テーブルの一面側から区画されると共に、排気される排気空間を当該回転テーブルから離れて形成する区画部材と、その一端が前記排気空間に連通すると共に区画されたガス流路を形成する流路形成部材とを備え、
前記回転テーブルには、その一端が回転テーブルの一面側に開口すると共に、その他端が前記排気空間に連通可能なガス吸引路が設けられ、
移動機構により、前記流路形成部材の他端が前記ガス吸引路に接続される状態と、前記接続が解除される状態と、を切り替えるために当該流路形成部材を移動させる工程を含み、
前記隙間を選択的に排気する工程は、
前記流路形成部材の他端が前記ガス吸引路に接続される状態で前記排気空間を排気することにより前記ガス流路及び当該ガス吸引路を排気することによって、当該隙間を排気する工程を含むことを特徴とする真空処理方法。 - 前記載置領域は、前記回転テーブルに形成された凹部であり、前記規制部は、前記凹部の側面であることを特徴とする請求項12記載の真空処理方法。
- 前記隙間を選択的に排気する工程は、
前記回転テーブルの一面側の空間よりも1Pa以上低い圧力となるように、前記排気空間を排気する工程と、
前記排気空間を排気する工程及び前記ガス吸引路を排気する工程に並行して行われ、支持した基板が前記載置領域に載置されるように前記昇降部材を下降させる工程と、
を含むことを特徴とする請求項12または13記載の真空処理方法。 - 処理容器の内部を排気して真空雰囲気とする工程と、
前記処理容器内に設けられた回転テーブルを回転させて、当該回転テーブルの一面側に設けられ、当該回転テーブルの回転方向に沿って複数設けられ、底面が各々基板を載置する載置領域をなすと共に側面が当該基板の位置を各々規制するための規制部をなす凹部を各々公転させる工程と、
基板の搬送機構と、前記回転テーブルとの間で基板を受け渡すために、基板を支持した各凹部で共用される昇降部材を昇降させる工程と、
前記各凹部に順番に前記基板を受け渡すために前記回転テーブルの回転により前記各凹部に対する位置を変更する工程と、
ガス供給部により、前記回転テーブル上の基板に処理ガスを供給する工程と、
前記昇降部材が前記基板を支持した状態で、前記複数の凹部のうちの当該昇降部材が支持した基板の受け渡し先の載置領域を構成する凹部を、当該載置領域に基板が載置される前に選択的に排気するように、前記載置領域と当該基板との間の隙間を選択的に排気する工程と、
前記回転テーブルの回転により公転する各基板への前記処理ガスの供給中においては各凹部の前記隙間の選択的な排気を停止する工程と、
を備えることを特徴とする真空処理方法。 - 前記隙間を選択的に排気する工程は、
基板の下面が前記凹部の側壁の上端と同じ高さか、あるいは当該上端よりも低い高さ位置に位置した第1の状態で、当該凹部内の排気を行う工程を含むことを特徴とする請求項13または15記載の真空処理方法。 - 前記第1の状態は、基板の静止状態であることを特徴とする請求項16記載の真空処理方法。
- 前記隙間を選択的に排気する工程は、
基板の下面と凹部の底面との距離が、0mmより大きく20mm以下であるときに排気を行う工程を含むことを特徴とする請求項13、15、16または17に記載の真空処理方法。
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