JP6550029B2 - 基板処理装置、ノズル基部および半導体装置の製造方法 - Google Patents
基板処理装置、ノズル基部および半導体装置の製造方法 Download PDFInfo
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45578—Elongated nozzles, tubes with holes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45587—Mechanical means for changing the gas flow
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
Description
反応管と前記反応管を下方から支持するマニホールドとにより構成され、内部で基板を処理する処理容器と、
前記基板に対して処理ガスを供給するノズルと、
前記ノズルを前記処理容器内に立設させる接続部と、を有し、
前記接続部は、
前記マニホールドに設けられた導入部に挿入される筒部と前記筒部の端部に形成される板部とで構成される固定部と、
前記板部と係合する係合部と前記ノズルが設置される設置部とで構成され、前記固定部に取り付けられる取付け部と、を有し、
前記係合部には切欠きが形成されており、前記板部と前記切欠きが当接されるように構成される技術が提供される。
図4に示すように、固定部70は、筒部72と板部74とで構成される。筒部72は中空の円筒形状に形成され、ポート56に挿入され固定される。筒部72の外径はポート56の直径以下であって、ガス供給管36の外径と略同じ寸法に形成される。また、筒部72の内径は、ガス供給管36の内径と略同じ寸法に形成される。板部74は、筒部72の端部に多角形の板状に形成される。ここでは、長方形状に形成されており、上下方向の第一面S1と、第一面S1に垂直に交わる水平方向(左右方向)の第二面S2を有する。板部74の表面積は、筒部72の外径の断面積よりも大きく形成される。図4に示すように、固定部70は、板部74が処理容器11の内側に位置するように、好ましくは、板部74がマニホールド18の内壁面に接するように構成される。筒部72はポート56に挿入されると、その端部がガス供給管36と密閉部材を介してシールされる。
ノズル44を処理容器11内へ取り付ける際、まず、台座部92をマニホールド18から取り外す。次に、取付け部80の円筒部74に予め挿入され固定されたノズル44の先端を、供給バッファ室14A内へ搬入し、取付け部80をマニホールド18に平行に上方向に移動させる。切欠き82Aが板部74と同じか少し高い位置まで到達したら、取付け部80を固定部70へ押し当てるように、板部74に切欠き82Aを当接させ、板部74に係合部82を載置する。言い換えれば、板部74の第一面S1と切欠き82Aの第一面S3および板部74の第二面S2と切欠き82Aの第二面S4とをそれぞれ当接させる。すなわち、板部74の第一面S1および第二面S2と切欠き82Aの二側面とを当接させる。これにより、ノズル44が処理容器11内で位置決めされる。ノズル44が位置決めされると、ボルト64を取り付け、取付け部80と固定部70とを固定する。その後、台座部92を取り付ける。ノズル44が前後方向に傾いている場合、台座部92の下方より調節部94によって取付け部80を押し上げることにより、傾きを調節する。
[原料ガス供給工程]
先ず、処理室14内のウエハWに対してDCSガスを供給する。
次に、DCSガスの供給を停止し、真空ポンプ52により処理室14内を真空排気する。この時、不活性ガス供給部から不活性ガスとしてN2ガスを処理室14内に供給しても良い(不活性ガスパージ)。
次に、処理室14内のウエハWに対してO2ガスを供給する。
次に、O2ガスの供給を停止し、真空ポンプ52により処理室14内を真空排気する。この時、不活性ガス供給部からN2ガスを処理室14内に供給しても良い。
所定膜厚の膜を形成した後、不活性ガス供給部からN2ガスが供給され、処理室14内がN2ガスに置換されると共に、処理室14の圧力が常圧に復帰される。その後、ボートエレベータ32により蓋部22が降下されて、ボート26が反応管10から搬出(ボートアンロード)される。その後、処理済ウエハWはボート26より取出される(ウエハディスチャージ)。
処理温度(ウエハ温度):300℃〜700℃、
処理圧力(処理室内圧力)1Pa〜4000Pa、
DCSガス:100sccm〜10000sccm、
O2ガス:100sccm〜10000sccm、
N2ガス:100sccm〜10000sccm、
それぞれの処理条件を、それぞれの範囲内の値に設定することで、成膜処理を適正に進行させることが可能となる。
本実施形態によれば、以下に示す1つ又は複数の効果が得られる。
11・・・処理容器
60・・・接続部
70・・・固定部
80・・・取付け部
Claims (11)
- 反応管と前記反応管を下方から支持するマニホールドとにより構成され、内部で基板を処理する処理容器と、
前記基板に対して処理ガスを供給するノズルと、
前記ノズルを前記処理容器内に立設させる接続部と、を有し、
前記接続部は、
前記マニホールドに設けられた導入部に挿入される筒部と前記筒部の端部に形成される板部とで構成される固定部と、
前記板部と係合する係合部と前記ノズルが設置される設置部とで構成され、前記固定部に取り付けられる取付け部と、を有し、
前記係合部には切欠きが形成されており、前記板部と前記切欠きが当接されるように構成される基板処理装置。 - 前記板部は、第一面と、前記第一面に垂直に交わる第二面とを備え、
前記切欠きの二側面が前記第一面および前記第二面と当接することにより、前記ノズルの位置が決定される請求項1に記載の基板処理装置。 - 前記取付け部の下方に設置され、前記ノズルの傾きを調整する調整部が設置される台座部をさらに有する請求項2に記載の基板処理装置。
- 前記調整部は、前記取付け部の下側から前記取付け部を押し上げることにより、前記ノズルの傾きを調整するよう構成される請求項3に記載の基板処理装置。
- 前記板部の幅は、前記切欠きの深さよりも広く形成される請求項4に記載の基板処理装置。
- 前記板部および前記切欠きは長方形状に形成され、前記切欠きの長辺は、前記板部の長辺よりも長く形成される請求項5に記載の基板処理装置。
- 前記板部の短辺は、前記切欠きの短辺よりも長く形成される請求項6に記載の基板処理装置。
- 前記設置部は、内管と外管とを備え、前記内管と前記外管との間に形成された円環状の空間に前記ノズルを挿入するよう構成される請求項7に記載の基板処理装置。
- 前記切欠きは、前記切欠きの長辺の中心位置が、前記内管の中心位置よりも外方にずれるように形成される請求項8に記載の基板処理装置。
- 基板に対して処理ガスを供給するノズルを、前記基板を処理する反応管と前記反応管を下方から支持するマニホールドとにより構成される処理容器内に立設させるためのノズル基部であって、
前記ノズル基部は、
前記マニホールドに形成される導入部に挿入される筒部と、前記筒部の端部に形成される板部とを備える固定部と、
前記板部と係合する係合部と前記ノズルが設置される設置部とで構成され、前記固定部に取り付けられる取付け部と、を有し、
前記係合部には切欠きが形成されており、前記板部と前記切欠きが当接されるように構成されるノズル基部。 - 反応管と、前記反応管を下方から支持するマニホールドとにより構成され、基板を処理する処理容器内に前記基板を搬入する工程と、
前記処理容器内の前記基板に対し、接続部によって前記処理容器内に立設されるノズルから処理ガスを供給し、前記基板を処理する工程と、
前記処理容器から前記基板を搬出する工程と、を有する半導体装置の製造方法であって、
前記接続部は、
前記マニホールドに設けられた導入部に挿入される筒部と前記筒部の端部に形成される板部とで構成される固定部と、
前記板部と係合する係合部と前記ノズルが設置される設置部とで構成され、前記固定部に取り付けられる取付け部と、を有し、
前記係合部には切欠きが形成されており、前記板部と前記切欠きが当接されるように構成される半導体装置の製造方法。
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