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Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species
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Method of forming a structure on a substrate
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Vertical furnace for processing substrates and a liner for use therein
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2018-08-16 |
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Gas distribution device for a wafer processing apparatus
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Thin film deposition method
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2018-09-14 |
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Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
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2018-09-27 |
2020-01-07 |
B. Erickson Manufacturing Ltd. |
Rotatable e-track
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2018-10-01 |
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Substrate retaining apparatus, system including the apparatus, and method of using same
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2018-10-03 |
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Substrate processing apparatus and method
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2018-10-08 |
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Method of forming conformal silicon carbide film by cyclic CVD
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Method for etching a carbon-containing feature
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Susceptor for semiconductor substrate supporting apparatus
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Methods for forming a silicon nitride film
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Substrate processing apparatus for processing substrates
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Substrate processing apparatus for processing substrates
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2018-11-02 |
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Methods for selectively depositing an amorphous silicon film on a substrate
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Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures
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Substrate processing apparatus for processing substrates
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Method for forming an ultraviolet radiation responsive metal oxide-containing film
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Substrate processing device
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Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
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Cyclical deposition method including treatment step and apparatus for same
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Cyclical deposition method and apparatus for filling a recess formed within a substrate surface
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Method and apparatus for filling a recess formed within a substrate surface
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2019-02-20 |
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Layer forming method and apparatus
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Gas-phase reactor system-with a reaction chamber, a solid precursor source vessel, a gas distribution system, and a flange assembly
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Chemical source vessel with dip tube
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Susceptor shaft
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Susceptor shaft
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Gas channel plate
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Showerhead vacuum transport
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Radical assist ignition plasma system and method
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Vertical batch furnace assembly
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Vertical batch furnace assembly
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Vertical batch furnace assembly
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Vertical batch furnace assembly
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Liquid level sensor for a chemical source vessel
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Susceptor shaft
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2019-08-21 |
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Asm Ip Holding B.V. |
Insulator
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Electrode
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2019-08-22 |
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Method for forming a structure with a hole
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2019-08-23 |
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Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane
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Methods for selective deposition using a sacrificial capping layer
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2019-09-05 |
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Substrate processing apparatus
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2019-09-10 |
2020-12-15 |
Illinois Tool Works Inc. |
Fastener
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2019-09-25 |
2023-01-24 |
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Substrate processing method
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2019-10-02 |
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Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process
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Method of forming a photoresist underlayer and structure including same
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Vertical batch furnace assembly with detector to detect cassette
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2019-10-16 |
2023-04-25 |
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2019-10-17 |
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Methods for selective deposition of doped semiconductor material
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2019-11-20 |
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Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface
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Substrate processing apparatus
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2019-11-29 |
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Substrate processing apparatus
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2019-11-29 |
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Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing
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2019-12-02 |
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Substrate processing apparatus having electrostatic chuck and substrate processing method
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2019-12-04 |
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Substrate processing apparatus
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2019-12-17 |
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Method of forming vanadium nitride layer and structure including the vanadium nitride layer
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2019-12-19 |
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Methods for filling a gap feature on a substrate surface and related semiconductor structures
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Method of forming structures including a vanadium or indium layer
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Method for depositing low temperature phosphorous-doped silicon
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System dedicated for parts cleaning
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Substrate handling device with adjustable joints
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Thin film forming method
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Apparatus and methods for selectively etching silicon oxide films
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Solid source precursor vessel
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Substrate processing apparatus
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Apparatus for depositing thin films using hydrogen peroxide
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Substrate processing device
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Method for forming a layer provided with silicon
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Electrode for semiconductor processing apparatus
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Apparatus and method for etching metal nitrides
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Method of depositing vanadium metal
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Method and device for depositing silicon onto substrates
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Methods for filling a gap and related systems and devices
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Injector configured for arrangement within a reaction chamber of a substrate processing apparatus
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Transition metal deposition method
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Nanjing Easthouse Electrical Co., Ltd. |
Mounting holder for input panel of input controller
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Peter Jon Rubenzer |
Load carrying holder
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Substrate processing system for processing substrates with an electronics module located behind a door in a front wall of the substrate processing system
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Electrode for substrate processing apparatus
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Asm Ip Holding B.V. |
Reactor wall for substrate processing apparatus
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Asm Ip Holding B.V. |
Gas flow control plate for substrate processing apparatus
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Asm Ip Holding B.V. |
Gas distributor for substrate processing apparatus
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Gas flow control plate
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2022-01-13 |
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Pgytech Co., Ltd. |
Quick release mount
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