USD830981S1 - Susceptor for semiconductor substrate processing apparatus - Google Patents

Susceptor for semiconductor substrate processing apparatus Download PDF


Publication number
USD830981S1 US29/604,288 US201729604288F USD830981S US D830981 S1 USD830981 S1 US D830981S1 US 201729604288 F US201729604288 F US 201729604288F US D830981 S USD830981 S US D830981S
United States
Prior art keywords
processing apparatus
semiconductor substrate
substrate processing
Prior art date
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Sang Jin Jeong
Jeung Hoon Han
Young Seok Choi
Ju Hyuk Park
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ASM IP Holding BV
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ASM IP Holding BV
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Priority to KR20170016290 priority Critical
Priority to KR30-2017-0016290 priority
Application filed by ASM IP Holding BV filed Critical ASM IP Holding BV
Application granted granted Critical
Publication of USD830981S1 publication Critical patent/USD830981S1/en
Application status is Active legal-status Critical
Anticipated expiration legal-status Critical




FIG. 1 is a perspective view of a susceptor for semiconductor substrate processing apparatus, showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a rear perspective view thereof; and,

FIG. 9 is a sectional view taken along line 9-9 of FIG. 6.

Claims (1)

  1. The ornamental design for a susceptor for semiconductor substrate processing apparatus, as shown and described.
US29/604,288 2017-04-07 2017-05-16 Susceptor for semiconductor substrate processing apparatus Active USD830981S1 (en)

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KR20170016290 2017-04-07
KR30-2017-0016290 2017-04-07

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10229833B2 (en) 2016-11-01 2019-03-12 Asm Ip Holding B.V. Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures
US10249524B2 (en) 2017-08-09 2019-04-02 Asm Ip Holding B.V. Cassette holder assembly for a substrate cassette and holding member for use in such assembly

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