CN1563483A - Bilayer inlet gas spray nozzle in use for metal-organic chemical vapor deposition device - Google Patents

Bilayer inlet gas spray nozzle in use for metal-organic chemical vapor deposition device Download PDF

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Publication number
CN1563483A
CN1563483A CN 200410017471 CN200410017471A CN1563483A CN 1563483 A CN1563483 A CN 1563483A CN 200410017471 CN200410017471 CN 200410017471 CN 200410017471 A CN200410017471 A CN 200410017471A CN 1563483 A CN1563483 A CN 1563483A
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China
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lower
upper
chamber
pipe
outlet pipe
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CN 200410017471
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Chinese (zh)
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CN1292092C (en
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江风益
蒲勇
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南昌大学
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Publication of CN1292092C publication Critical patent/CN1292092C/en

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Abstract

This invention discloses a two-layer gas inlet blow head of a metal organic chemical gas phase deposit device including a closed shell having an upper gas inlet cavity and a lower gas inlet cavity, an upper escape pipe communicating with the upper gas cavity and reaction chamber is set between the upper-middle and the base plate and a lower escape pipe communicating with a lower gas inlet cavity and the reaction chamber is set between the lower plate and base plate characterizing that diameter of the lower escape pipe is layer than the upper and the upper is put in the lower. A cooling cavity is designed, the first reaction gas enters into the reaction chamber at the substrate surface from the upper and lower escape pipes separately.

Description

用于金属有机化学气相沉积设备的双层进气喷头 Double inlet nozzle for a metal organic chemical vapor deposition apparatus

技术领域 FIELD

本发明涉及喷头,尤其是涉及一种用于金属有机化学气相沉积设备(CVD)的双层进气喷头。 The present invention relates to a nozzle, particularly relates to double metal organic chemical vapor deposition apparatus (CVD) for the intake nozzle.

背景技术 Background technique

在用金属有机化学气相沉积设备(MOCVD)制备半导体薄膜材料时,需要将不同反应气体分别送入反应室,然后将反应气体在衬底表面充分混合均匀,同时使得材料制备时的预反应减小,从而提高材料的有关性能。 Pre-reaction time of when the semiconductor thin film material prepared by metal organic chemical vapor deposition apparatus (MOCVD), require different reaction gases are fed into the reaction chamber, the reaction gas is sufficiently mixed and then the surface of the substrate uniformly, while allowing the preparation of the material is reduced to improve the performance of the material. 目前用于化学气相沉积设备的双层进气喷头内都设计有相互隔开的上进气腔和下进气腔,不同反应气体分别经上出气管和下出气管进入反应室,由于上出气管和下出气管间隔排列,因而存在以下缺点:由于上出气管和下出气管之间的管间距离较远,两管中气体不易混合充分和均匀,所以只适合低压生长。 At present the double nozzle for the intake of the chemical vapor deposition apparatus are designed with mutually spaced upper air intake chamber and a lower chamber, respectively, through the different reaction gases at the outlet pipe and outlet pipe into the reaction chamber, since the upper trachea and the outlet pipe are arranged at intervals, and thus there is a disadvantage: because the lower the distance between the trachea and endotracheal tube between far, two gas sufficiently and uniformly mixed easily, so only low pressure for growth.

发明内容 SUMMARY

本发明的目的在于提供一种能够将不同反应气体分别送入反应室、使反应气体充分混合均匀、减小预反应的用于金属有机化学气相沉积设备的双层进气喷头。 Object of the present invention is to provide a different reaction gases are fed into the reaction chamber, the reaction gas is sufficiently mixed, pre-reaction for reducing a double metal organic chemical vapor deposition apparatus of the intake nozzle.

本发明的目的是这样实现的:本发明包括封闭形的外壳体,在外壳体内固定有上中层板和下中层板,在顶板与上中层板之间形成上进气腔,在上中层板与下中层板之间形成下进气腔,在外壳体的侧壁上安装有与上进气腔连通的上进气管、与下进气腔连通的下进气管,在上中层板与底板之间安装有与上进气腔和反应室连通的上出气管,在下中层板与底板之间安装有与下进气腔和反应室连通的下出气管,特征是下出气管的直径大于上出气管的直径,且上出气管放置于下出气管中。 Object of the present invention is implemented as follows: The present invention comprises a closed-shaped outer housing, the housing body is fixed to the upper and lower plies in the laminate, upper air chamber is formed between the top plate and the intermediate plate, with the plies the intermediate plate is formed between the lower intake chamber mounted on a side wall of the outer shell has motivated the trachea and the upper air intake chamber communicating with the lower air intake chamber in communication with the intake pipe, mounted on the base plate between the plies there upper air chamber and the reaction chamber and the outlet pipe, the lower base plate and the intermediate plate is mounted between the lower intake chamber and the reaction chamber under a communication pipe, wherein the pipe is a pipe of larger diameter than the diameter, and the outlet pipe is placed at the trachea.

在下中层板与底板之间为冷却腔,在外壳体的侧壁上安装有冷却水进水管和冷却水出水管。 Between the intermediate plate and the base plate of the lower cooling chamber, the cooling water is attached to the cooling water inlet pipe and outlet pipe on the side wall of the outer shell.

本发明是在常规用于金属有机化学气相沉积设备的双层进气喷头基础上将上出气管放置于下出气管中,这样第一路反应气体就可从上进气管进入上进气腔,然后经上出气管进入反应室,到达衬底表面,第二路反应气体就可从下进气管进入下进气腔,然后经下出气管与上出气管之间的间隙进入反应室,到达衬底表面,从而达到了将不同反应气体分别送入反应室、使反应气体在衬底表面附近范围充分混合均匀和减小预反应的目的。 The present invention is based on the head in a conventional metal organic chemical vapor deposition apparatus for a double intake pipe is placed at the outlet pipe, so that a first reaction gas passage into the upper air chamber can progress from the trachea, and then through the outlet pipe into the reaction chamber, to the substrate surface, a second reaction gas passage into the intake pipe can lower from the intake chamber, and the outlet pipe and a gap between the trachea into the reaction chamber through the lower, to the substrate surface, so as to achieve a different reaction gases are fed into the reaction chamber, the reaction gas is sufficiently mixed and pre-reacted in the purpose of reducing the range in the vicinity of the substrate surface. 本发明还设计有用于冷却底板温度的冷却腔。 The present invention also contemplates a cooling chamber for cooling the base plate temperature. 因此本发明具有如下优点:1、能够将不同反应气体分别送入反应室、使反应气体充分混合均匀、减小预反应;2、两路气流同时从一个较小区域喷出,在相同面积上容易将喷孔分布得更密集,从而提高均匀性;3、上出气管可以设计成与上中层板一起从上方取出的活动形式,这样就非常便于清洗;4、加工简便,成品率高,从而制作费用较低。 Therefore, the present invention has the following advantages: 1, respectively, can be different reaction gases into the reaction chamber, the reaction gas is sufficiently mixed, pre-reaction is reduced; 2, while two gas flow ejected from a smaller area, in the same area orifice easily distributed more densely, thereby improving uniformity; 3, the outlet pipe can be designed in the form of the activity taken together with the intermediate plate from above, so it is very easy to clean; 4, easy processing, high yield, thereby lower production costs. 5、该喷头适用于常压和低压生长技术。 5, the pressure applied to the nozzle and a low pressure growth technique.

附图说明 BRIEF DESCRIPTION

图1为本发明的剖视示意图;图2为图1的AA向俯视图。 Figure 1 is a schematic cross-sectional view of the invention; FIG. 2 is a plan view AA of FIG. 1 to FIG.

具体实施方式 Detailed ways

下面结合实施例并对照附图对本发明作进一步详细说明。 Below with reference to the drawings and embodiments of the present invention is described in further detail.

本发明包括封闭形的外壳体1,在外壳体1内固定有上中层板4和下中层板5,在顶板3与上中层板4之间形成密封的上进气腔2,在上中层板4与下中层板5之间形成密封的下进气腔9,在外壳体1的侧壁14上安装有与上进气腔2连通的上进气管17、与下进气腔9连通的下进气管16,在上中层板4与底板6之间安装有与上进气腔2和反应室13连通的上出气管7,在下中层板5与底板6之间安装有与下进气腔9和反应室13连通的下出气管8,下出气管8的直径大于上出气管7的直径,且上出气管7放置于下出气管8中。 The present invention comprises a closed-shaped outer housing 1, the outer casing 1 is fixed to the intermediate plate 4 and the lower intermediate plate 5, a seal is formed between the top plate 3 and the upper board 4 in the upper air chamber 2, in the laminate 4 the intake chamber to form a seal between the lower intermediate plate 5 and 9, the side walls of the outer housing 1 is attached to the communication progress with progress pipe 14 of the air chamber 2 17 communicates with the intake chamber 9 of the feed line 16, is mounted on the board 4 between the bottom plate 6 have communication with the upper air chamber 2 and the reaction chamber 13 pipe 7, has the lower intake chamber between 6 and 9 mounted in the lower plate 5 and the shelves the reaction chamber 13 at the communication pipe 8, the pipe 8 having a diameter larger than the diameter of the pipe 7 and the outlet pipe 7 is placed at the outlet pipe 8.

在下中层板5与底板6之间为冷却腔12,在外壳体1的侧壁14上安装有冷却水进水管15和冷却水出水管11。 In the next lamina 5 and the base plate 6 between the cooling chamber 12, the outer side wall of the housing 1 is attached to a cooling water inlet pipe 15 and a cooling water outlet pipe 11 on 14.

第一路反应气体可从上进气管17进入上进气腔2,然后经上出气管7进入反应室13,到达衬底10表面,第二路反应气体可从下进气管16进入下进气腔9,然后经下出气管8与上出气管7之间的间隙进入反应室13,到达衬底10表面。 A first reaction gas channel may enter the cavity 2 from the upper intake pipe 17 to make progress, and on the pipe 7 into the reaction chamber via 13, 10 reach the surface of the substrate, the reaction gas may be a second passage from the inlet pipe 16 into the intake chamber 9, and then through the outlet pipe 8 with a gap between the tube 7 into the reaction chamber 13, 10 reaches the surface of the substrate. 冷却水从冷却水进水管15进入冷却腔12,带走由衬底10及其基座传到底板6及上出气管7、下出气管8的热量,然后从冷却水出水管11流出。 Cooling water intake pipe 15 from the cooling water into the cooling chamber 12, the substrate 10 and away from the base plate 6 and passes out of the pipe 7, a heat pipe at 8, 11 and then flows out from the cooling water outlet pipe.

Claims (2)

1.一种用于金属有机化学气相沉积设备的双层进气喷头,包括封闭形的外壳体(1),在外壳体(1)内固定有上中层板(4)和下中层板(5),在顶板(3)与上中层板(4)之间形成密封的上进气腔(2),在上中层板(4)与下中层板(5)之间形成密封的下进气腔(9),在外壳体(1)的侧壁(14)上安装有与上进气腔(2)连通的上进气管(17)、与下进气腔(9)连通的下进气管(16),在上中层板(4)与底板(6)之间安装有与上进气腔(2)和反应室(13)连通的上出气管(7),在下中层板(5)与底板(6)之间安装有与下进气腔(9)和反应室(13)连通的下出气管(8),其特征在于:下出气管(8)的直径大于上出气管(7)的直径,且上出气管(7)放置于下出气管(8)中。 A metal organic chemical vapor deposition apparatus for a double inlet nozzle, comprising a closed housing shaped body (1), an outer housing (1) is fixed on the intermediate plate (4) and the lower ply (5 lower intake chamber), to form a sealed upper air chamber (2) in the top plate (3) and the upper intermediate plate (4), forming a seal between the upper ply (4) in the lower lamina (5) (9), the side walls of the outer housing (1) is mounted (14) has motivated pipe (17) and the upper air chamber (2) communicating the communication with the lower intake chamber (9) into the pipe (16 ), between the intermediate plate (4) and the base plate (6) is mounted on the outlet pipe (7) and the upper air chamber (2) and the reaction chamber (13) communicating the next intermediate plate (5) and the bottom plate ( 6 is mounted between a) and the lower intake chamber (9) and the reaction chamber (13) communicating with the outlet pipe (8), characterized in that: the diameter of the pipe (8) is larger than the outlet pipe (7) and the outlet pipe (7) is placed at the outlet pipe (8).
2.如权利要求1所述的用于金属有机化学气相沉积设备的双层进气喷头,其特征在于:在下中层板(5)与底板(6)之间为冷却腔(12),在外壳体(1)的侧壁(14)上安装有冷却水进水管(15)和冷却水出水管(11)。 2. The intake nozzle for double metal organic chemical vapor deposition apparatus according to claim 1, characterized in that: between the lower lamina (5) the base plate (6) is a cooling chamber (12), the housing side wall member (1) is mounted a cooling water inlet pipe (15) and a cooling water outlet pipe (11) (14).
CN 200410017471 2004-04-01 2004-04-01 Bilayer inlet gas spray nozzle in use for metal-organic chemical vapor deposition device CN1292092C (en)

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