CN108060410A - Structure is protected for the admission line of flat-plate type PECVD - Google Patents
Structure is protected for the admission line of flat-plate type PECVD Download PDFInfo
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- CN108060410A CN108060410A CN201711346028.0A CN201711346028A CN108060410A CN 108060410 A CN108060410 A CN 108060410A CN 201711346028 A CN201711346028 A CN 201711346028A CN 108060410 A CN108060410 A CN 108060410A
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- piston
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- seat
- plate type
- inlet
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45561—Gas plumbing upstream of the reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Earth Drilling (AREA)
- Orthopedics, Nursing, And Contraception (AREA)
Abstract
The present invention relates to pipe protection structures, it is desirable to provide a kind of admission line for flat-plate type PECVD protects structure.This kind protects structure for the admission line of flat-plate type PECVD, including air inlet seat, dust cover shift plate, dust cover, screw rod, hook and weight.The present invention is designed using purely mechanic mechanism, simple and stable structure, and later maintenance cost is cheap；The present invention can effectively solve metal hose after repeatedly bending easily it is cracked the defects of, reduce the time for causing equipment downtime due to gas leakage, indirectly to enterprise reduce production and safeguard cost；The present invention can greatly reduce stock's accessory of enterprise, and production cost is reduced directly to enterprise.
Description
Technical field
The present invention relates to pipe protection construction applications, more particularly to protect knot for the admission line of flat-plate type PECVD
Structure.
Background technology
PECVD (Plasma Enhanced Chemical Vapor Deposition) i.e. plasma enhanced chemical gas
Phase deposition technique, refer to makes the gas containing film composed atom that ionization occur by microwave or radio frequency is being partially formed plasma
Body goes out desired film by the chemical characteristic that plasma vivaciously easily reacts in deposition on substrate.The technology extensively should
For in the production of crystal silicon solar energy battery.
The mode of plated film air inlet on existing flat-plate type PECVD generally uses and welds air inlet pipe on chamber side flanges
Road, chamber interior are then attached by metal hose and the admission line on cavity cover board.It is cleared up to inside cavity
In the operating process such as maintenance test, cover board need to be opened；Before plated film production, then need to close cover board, ensure the vacuum of inside cavity
Sealing.So connection mode causes after prolonged use, in the state of appearing in the multiple folding of cover board, the generation of metal hose
Bending.It once bending place leaks, then will can not be controlled into the reaction gas of deposition shield, equipment plating film uniformity
It can not be guaranteed.Since plated film is consecutive production, so a batch plated film silicon chip can be caused to scrap, it is straight to manufacturing enterprise
Tape splicing carrys out larger economic loss.Particularly plant maintenance needs to spend substantial amounts of manpower and time after leakage occurs, indirectly
Huge economic loss is brought to manufacturing enterprise.
The content of the invention
It is a primary object of the present invention to overcoming deficiency of the prior art, provide it is a kind of for flat-plate type PECVD into
Tracheae pipe protection structure.In order to solve the above technical problems, the solution of the present invention is：
A kind of admission line for flat-plate type PECVD is provided and protects structure, including air inlet seat, dust cover shift plate, dust-proof
Cover, screw rod, hook and weight；
The air inlet seat includes enterprising pneumatic module and lower air intake assembly, at least install in air inlet seat three inlet pistons (because
Generally need to be into three kinds of different special gas, therefore three inlet pistons are fitted in each air inlet seat, but can also be adjusted according to air inlet needs
Whole inlet piston quantity), each inlet piston include enterprising pneumatic module in upper air piston and lower air intake assembly under into
Gas piston；
The enterprising pneumatic module includes upper air seat, upper air piston, upper compression spring；Upper air seat is bolted
It is installed on the cavity cover board of flat-plate type PECVD, enterprising pneumatic module is made to be fixed on cavity cover board inner wall front end；Upper air piston leads to
Compression spring is crossed to be fixed on upper air seat：Upper air piston is pressed in enterprising by one end of upper compression spring by elastic deformation
In gas seat, the other end is pressed on cavity cover board；Stomata is equipped in upper air piston, for plate type PECVD apparatus process gas
Conveying；Upper air seat is fixed on cavity cover board, when cavity cover plate closing, the lower end of upper air piston stomata and lower air inlet
Piston inner air vent docks；
The lower air intake assembly includes lower air inlet seat, lower inlet piston, lower compression spring, lower air inlet seat cover board；Lower air inlet
Seat is bolted on the cavity inner wall for being installed on flat-plate type PECVD；Lower inlet piston passes through lower compression spring and lower air inlet
Flap plate, in lower air inlet seat：The lower end of lower inlet piston is equipped with lower compression spring, the upper end installation of lower inlet piston
Have lower air inlet seat cover board, lower air inlet seat cover board is fixed in lower air inlet seat, by it is lower compression spring elastic deformation, under realization into
The up and down motion of gas piston；Lower inlet piston is equipped with boss, and lower air inlet seat cover board is equipped with hole, passes through matching somebody with somebody for the boss and hole
It closes, realizes the /V of lower inlet piston；Perforative stomata is provided in lower inlet piston, O is installed on the excircle of stomata upper end
Type sealing ring, the sealed connection being used to implement between upper air piston and lower inlet piston, stomata lower end is used for and admission line
Connection, so as to fulfill the air inlet function of lower air intake assembly；
The dust cover is installed on by axis pin in lower air inlet seat, for the lower air intake assembly of dust-proof and protection；Under dust cover
Side is by hanging with weight；Screw rod is inserted on dust cover, and is fixed using nut；
The dust cover shift plate is fixed on the both sides of upper air seat, and enterprising pneumatic module is fixed on the cavity of flat-plate type PECVD
On cover board, lower air intake assembly is fixed on the cavity inner wall of flat-plate type PECVD, can be realized：In the cavity lid of flat-plate type PECVD
During plate is closed, as cavity cover board is close to lower air intake assembly, dust cover shift plate moves downward enterprising pneumatic module, when touching
During screw rod on to dust cover, dust cover is driven to be rotated down around its axis pin, dust cover is gradually opened, the chamber of flat-plate type PECVD
When body cover board is closed, dust cover is opened completely, realize lower inlet piston and upper air piston sealing docking (enterprising pneumatic module with
Lower air intake assembly compresses sealing on O-ring seal face, realizes docking and being sealed into for enterprising pneumatic module and lower air intake assembly
Gas)；During the cavity cover board of flat-plate type PECVD is opened, enterprising pneumatic module as cavity cover board is away from lower air intake assembly,
Dust cover shift plate moves upwards, and dust cover is rotated up, dust cover progressively closes off, flat under weight effect around its axis pin
When the cavity cover board of PECVD is opened, dust cover is closed, and realizes that (dust cover closing can prevent dust to the protection to lower inlet piston
Tracheae is blocked with reaction particles object, influences the normal air inlet of air intake assembly；Realize that enterprising pneumatic module is disconnected with lower air intake assembly).
As a further improvement, installation there are three inlet piston, that is, is correspondingly provided with three upper airs in the air inlet seat
Piston and three lower inlet pistons.
As a further improvement, the tracheae that is welded on the upper air piston, is tightened or cutting ferrule by gasket seal
Mode is connected with the being sealed property of admission line on cavity cover board.
As a further improvement, the stomata lower end of the lower inlet piston, by way of O-ring seal or cutting ferrule,
It is connected with being sealed property of admission line.
Compared with prior art, the beneficial effects of the invention are as follows：
1st, the present invention is designed using purely mechanic mechanism, simple and stable structure, and later maintenance cost is cheap.
2nd, the present invention can effectively solve metal hose after repeatedly bending easily it is cracked the defects of, reduce because of gas
It reveals and causes the time of equipment downtime, reduce production and the cost safeguarded to enterprise indirectly.
3rd, the present invention can greatly reduce stock's accessory of enterprise, and production cost is reduced directly to enterprise.
Description of the drawings
Fig. 1 is that air intake assembly seals the schematic diagram of opposite joining relation up and down in the present invention.
Fig. 2 is the schematic diagram of upper and lower air intake assembly assembly relation in the present invention.
Fig. 3 is the structure diagram of lower air intake assembly in the present invention.
Fig. 4 is the structure diagram of enterprising pneumatic module in the present invention.
Reference numeral in figure is：Spring is compressed on 1；2 upper air seats；3 upper air pistons；4 dust cover shift plates；5 is dust-proof
Cover；6 screw rods；7O type sealing rings；8 times air inlet seat cover boards；9 times inlet pistons；10 times air inlet seats；11 times compression springs；12 hooks；
13 weights；14 cavity cover boards；15 enterprising pneumatic modules；16 cavity inner walls；17 times air intake assemblies.
Specific embodiment
The present invention is described in further detail with specific embodiment below in conjunction with the accompanying drawings：
The admission line protection structure for flat-plate type PECVD as shown in Figure 2, including air inlet seat, dust cover shift plate 4,
Dust cover 5, screw rod 6, hook 12 and weight 13.
The air inlet seat includes enterprising pneumatic module 15 and lower air intake assembly 17, because need to be into three kinds of different special gas, therefore air inlet
Installation is there are three inlet piston in seat, but also can adjust inlet piston quantity according to air inlet needs；Each inlet piston includes upper
The lower inlet piston 9 in upper air piston 3 and lower air intake assembly 17 in air intake assembly 15 is correspondingly provided with three upper airs and lives
Plug 3 and three lower inlet pistons 9.
Enterprising pneumatic module 15 as shown in Figure 3 includes upper air seat 2, upper air piston 3, upper compression spring 1.Upper air seat
2 are bolted on the cavity cover board 14 for being installed on flat-plate type PECVD, and enterprising pneumatic module 15 is made to be fixed on flat-plate type PECVD
14 inner wall front end of cavity cover board, can refer to Fig. 1.Upper air piston 3 is fixed on by upper compression spring 1 on upper air seat 2：On
Upper air piston 3 is pressed in upper air seat 2 by one end of compression spring 1 by elastic deformation, and the other end is pressed in flat-plate type PECVD
Cavity cover board 14 on.Stomata is equipped in upper air piston 3, for the conveying of plate type PECVD apparatus process gas；Upper air
Seat 2 is fixed on the cavity cover board 14 of flat-plate type PECVD, when the cavity cover board 14 of flat-plate type PECVD is closed, upper air piston
It is docked with lower 9 inner air vent of inlet piston the lower end of 3 stomatas.
Lower air intake assembly 17 as shown in Figure 4 includes lower air inlet seat 10, lower inlet piston 9, lower compression spring 11, lower air inlet
Flap plate 8, lower air inlet seat 10 are bolted on the cavity inner wall 16 for being installed on flat-plate type PECVD, can refer to Fig. 1.Under into
Gas piston 9 is by lower compression spring 11 and lower air inlet seat cover board 8, in lower air inlet seat 10：The lower end peace of lower inlet piston 9
Equipped with lower compression spring 11, upper end is equipped with lower air inlet seat cover board 8, and lower air inlet seat cover board 8 is fixed in lower air inlet seat 10, passes through
The elastic deformation of lower compression spring 11 is, it can be achieved that the up and down motion of lower inlet piston 9；Lower inlet piston 9 be equipped with boss, under into
Gas flap plate 8 is equipped with hole, by the cooperation in the boss and hole, realizes the /V of lower inlet piston 9；It is opened in lower inlet piston 9
There is perforative stomata, O-ring seal 7 is installed on the excircle of stomata upper end, be used to implement upper air piston 3 and live with lower air inlet
Sealed connection between plug 9；Stomata lower end is connected by way of O-ring seal 7 or cutting ferrule with being sealed property of admission line
It connects, so as to fulfill the air inlet function of lower air intake assembly 17.
The dust cover 5 is installed on by axis pin in lower air inlet seat 10, for the lower air intake assembly 17 of dust-proof and protection；It is dust-proof
5 lower section of cover hangs with weight 13 by hook 12；Screw rod 6 is inserted on dust cover 5, and fixed using nut.The dust cover shift plate 4
It is fixed on the both sides of upper air seat 2.
When this protects arrangement works for the admission line of flat-plate type PECVD, detailed process is：Enterprising pneumatic module 15 is fixed
On the cavity cover board 14 of flat-plate type PECVD, lower air intake assembly 17 is fixed on the cavity inner wall 16 of flat-plate type PECVD, flat
During the cavity cover board 14 of board-like PECVD is closed, enterprising pneumatic module 15 close to lower air intake assembly 17, dust cover shift plate 4 to
Lower movement when touching the screw rod 6 on dust cover 5, drives dust cover 5 to be rotated down around its axis pin, dust cover 5 is gradually beaten
It opens, when the cavity cover board 14 of flat-plate type PECVD is closed, dust cover 5 is opened completely, realizes lower inlet piston 9 and upper air piston 3
Sealing docking, enterprising pneumatic module 15 and lower air intake assembly 17 compress sealing on 7 face of O-ring seal, realize enterprising pneumatic module
15 dock and seal air inlet with lower air intake assembly 17；During the cavity cover board 14 of flat-plate type PECVD is opened, upper air
Component 15 is moved upwards away from lower air intake assembly 17, dust cover shift plate 4, and dust cover 5 is upward around its axis pin under the effect of weight 13
It rotates, dust cover 5 progressively closes off, and when the cavity cover board 14 of flat-plate type PECVD is opened, dust cover 5 is closed, and realizes and lives to lower air inlet
The protection of plug 9, the closing of dust cover 5 can prevent dust and reaction particles object from blocking tracheae, influence the normal air inlet of air intake assembly；It is real
Existing enterprising pneumatic module 15 is disconnected with lower air intake assembly 17.
Finally it should be noted that listed above is only specific embodiments of the present invention.It is clear that the invention is not restricted to
Above example can also have many variations.Those of ordinary skill in the art can directly lead from present disclosure
All deformations for going out or associating, are considered as protection scope of the present invention.
Claims (4)
1. a kind of admission line for flat-plate type PECVD protects structure, which is characterized in that including air inlet seat, dust cover shift plate,
Dust cover, screw rod, hook and weight；
The air inlet seat includes enterprising pneumatic module and lower air intake assembly, and three inlet pistons, Mei Gejin are at least installed in air inlet seat
Gas piston includes the lower inlet piston in upper air piston and lower air intake assembly in enterprising pneumatic module；
The enterprising pneumatic module includes upper air seat, upper air piston, upper compression spring；Upper air seat is bolted installation
Cavity cover board inner wall front end is fixed on the cavity cover board of flat-plate type PECVD, making enterprising pneumatic module；Upper air piston passes through upper
Compression spring is fixed on upper air seat：Upper air piston is pressed in upper air seat by one end of upper compression spring by elastic deformation
Interior, the other end is pressed on cavity cover board；Stomata is equipped in upper air piston, for the defeated of plate type PECVD apparatus process gas
It send；Upper air seat is fixed on cavity cover board, when cavity cover plate closing, the lower end of upper air piston stomata and lower inlet piston
Inner air vent docks；
The lower air intake assembly includes lower air inlet seat, lower inlet piston, lower compression spring, lower air inlet seat cover board；Lower air inlet seat is led to
Bolt is crossed to be fixedly installed on the cavity inner wall of flat-plate type PECVD；Lower inlet piston passes through lower compression spring and lower air inlet flap
Plate, in lower air inlet seat：The lower end of lower inlet piston is equipped with lower compression spring, and the upper end of lower inlet piston is equipped with down
Air inlet seat cover board, lower air inlet seat cover board are fixed in lower air inlet seat, by the elastic deformation of lower compression spring, realize that lower air inlet is lived
The up and down motion of plug；Lower inlet piston is equipped with boss, and lower air inlet seat cover board is equipped with hole, by the cooperation in the boss and hole,
Realize the /V of lower inlet piston；Perforative stomata is provided in lower inlet piston, is equipped on the excircle of stomata upper end O-shaped close
Seal, the sealed connection being used to implement between upper air piston and lower inlet piston, stomata lower end are used to connect with admission line,
So as to fulfill the air inlet function of lower air intake assembly；
The dust cover is installed on by axis pin in lower air inlet seat, for the lower air intake assembly of dust-proof and protection；It is logical below dust cover
It crosses and hangs with weight；Screw rod is inserted on dust cover, and is fixed using nut；
The dust cover shift plate is fixed on the both sides of upper air seat, and enterprising pneumatic module is fixed on the cavity cover board of flat-plate type PECVD
On, lower air intake assembly is fixed on the cavity inner wall of flat-plate type PECVD, can be realized：It is closed in the cavity cover board of flat-plate type PECVD
During closing, as cavity cover board is close to lower air intake assembly, dust cover shift plate moves downward enterprising pneumatic module, anti-when touching
During screw rod on dust hood, dust cover is driven to be rotated down around its axis pin, dust cover is gradually opened, the cavity lid of flat-plate type PECVD
When plate is closed, dust cover is opened completely, realizes the sealing docking of lower inlet piston and upper air piston；When flat-plate type PECVD
During cavity cover board is opened, as cavity cover board is away from lower air intake assembly, dust cover shift plate moves upwards enterprising pneumatic module,
Dust cover is rotated up under weight effect around its axis pin, and dust cover progressively closes off, and the cavity cover board of flat-plate type PECVD is opened
When, dust cover is closed, and realizes the protection to lower inlet piston.
2. a kind of admission line for flat-plate type PECVD according to claim 1 protects structure, which is characterized in that institute
It states installation in air inlet seat and there are three inlet piston, that is, is correspondingly provided with three upper air pistons and three lower inlet pistons.
3. a kind of admission line for flat-plate type PECVD according to claim 1 protects structure, which is characterized in that institute
State the tracheae welded on upper air piston, gasket seal tighten or cutting ferrule by way of, with the admission line on cavity cover board
Being sealed property connects.
4. a kind of admission line for flat-plate type PECVD according to claim 1 protects structure, which is characterized in that institute
The stomata lower end of lower inlet piston is stated, by way of O-ring seal or cutting ferrule, is connected with being sealed property of admission line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711346028.0A CN108060410B (en) | 2017-12-15 | 2017-12-15 | Air inlet pipeline protection structure for flat-plate PECVD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711346028.0A CN108060410B (en) | 2017-12-15 | 2017-12-15 | Air inlet pipeline protection structure for flat-plate PECVD |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108060410A true CN108060410A (en) | 2018-05-22 |
| CN108060410B CN108060410B (en) | 2023-08-18 |
Family
ID=62138944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711346028.0A Active CN108060410B (en) | 2017-12-15 | 2017-12-15 | Air inlet pipeline protection structure for flat-plate PECVD |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108060410B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110241399A (en) * | 2019-07-02 | 2019-09-17 | 淮安信息职业技术学院 | A kind of diamond-coated tool |
| CN111748791A (en) * | 2019-03-29 | 2020-10-09 | 中国电子科技集团公司第四十八研究所 | Flat PECVD equipment business turn over material chamber |
| CN111748795A (en) * | 2019-03-29 | 2020-10-09 | 中国电子科技集团公司第四十八研究所 | Special gas coupling conveying device for reaction chamber of flat plate type PECVD (plasma enhanced chemical vapor deposition) equipment |
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| WO2003035927A2 (en) * | 2001-10-26 | 2003-05-01 | Applied Materials, Inc. | Gas delivery apparatus for atomic layer deposition |
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| CN1774525A (en) * | 2001-10-26 | 2006-05-17 | 应用材料有限公司 | Gas delivery apparatus for atomic layer deposition |
| KR101215511B1 (en) * | 2012-06-27 | 2012-12-26 | (주)이노시티 | Apparatus for process chamber and processing substrate |
| TW201425831A (en) * | 2012-11-30 | 2014-07-01 | Kateeva Inc | Gas enclosure assembly and system |
| DE102015110440A1 (en) * | 2014-11-20 | 2016-05-25 | Aixtron Se | CVD or PVD reactor for coating large-area substrates |
| CN207646284U (en) * | 2017-12-15 | 2018-07-24 | 浙江晶盛机电股份有限公司 | A kind of admission line for flat-plate type PECVD protects structure |
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2017
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US5488967A (en) * | 1993-10-27 | 1996-02-06 | Masako Kiyohara | Method and apparatus for feeding gas into a chamber |
| WO2003035927A2 (en) * | 2001-10-26 | 2003-05-01 | Applied Materials, Inc. | Gas delivery apparatus for atomic layer deposition |
| CN1774525A (en) * | 2001-10-26 | 2006-05-17 | 应用材料有限公司 | Gas delivery apparatus for atomic layer deposition |
| CN1563483A (en) * | 2004-04-01 | 2005-01-12 | 南昌大学 | Bilayer inlet gas spray nozzle in use for metal-organic chemical vapor deposition device |
| KR101215511B1 (en) * | 2012-06-27 | 2012-12-26 | (주)이노시티 | Apparatus for process chamber and processing substrate |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111748791A (en) * | 2019-03-29 | 2020-10-09 | 中国电子科技集团公司第四十八研究所 | Flat PECVD equipment business turn over material chamber |
| CN111748795A (en) * | 2019-03-29 | 2020-10-09 | 中国电子科技集团公司第四十八研究所 | Special gas coupling conveying device for reaction chamber of flat plate type PECVD (plasma enhanced chemical vapor deposition) equipment |
| CN110241399A (en) * | 2019-07-02 | 2019-09-17 | 淮安信息职业技术学院 | A kind of diamond-coated tool |
| CN110241399B (en) * | 2019-07-02 | 2023-10-20 | 江苏电子信息职业学院 | Diamond coating tool |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108060410B (en) | 2023-08-18 |
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