DE102015110440A1 - CVD or PVD reactor for coating large-area substrates - Google Patents

Abstract

The invention relates to a CVD or PVD coating device having a housing (1, 2) and a gas outlet surface (7 ') attached to the housing (1, 2) and having a gas outlet opening (8) extending in a gas outlet plane. ) having assembly means (13, 14) at an upper portion of the housing (1) by means of hangers (6) on a plurality of suspension points (6 ') is attached, wherein temperature control means (9) are provided with where the gas inlet member (7) is temperature-controlled. The fastening means (13, 14) have force transmission means (26.1, 26.2, 26.3, 26.4); (27, 28, 29), which deform correspondingly elastically at a caused by the temperature change of the assembly (23) or shift against each other.

Description

Field of engineering

The invention relates to a CVD or PVD coating device comprising a housing and a gas inlet member attached to the housing with a gas outlet surface having gas outlet openings, with a holding device attached to an upper portion of the housing, to which the gas inlet member is attached to a plurality of suspension points.

State of the art

A generic coating device describes the EP 1 815 493 B1 showing a housing of a coating device, in which a holding device is arranged, which holds a gas inlet member. A similar device is used in the US 2008/0317973 A1 described.

A generic coating device has a susceptor for receiving the substrate to be coated and a function of a gas distributor exerting gas inlet member with the process gases can be introduced into a process chamber extending between a bottom of the gas distributor and the susceptor. The gas distributor has on its underside a plurality of gas outlet openings through which the process gas can enter the process chamber. Within the gas distributor are chambers for distributing the process gas to the gas outlet openings. A gas distributor of this kind is used for example in the DE 10 2013 101 534 A1 described.

For the deposition of OLEDs gaseous organic starting materials are fed by means of a carrier gas in a heated gas distributor.

These gaseous starting materials enter through the gas outlet openings in the process chamber to condense on a substrate, which rests on the cooled susceptor for this purpose. The substrates may have a surface area of more than 1 m ² . There is a requirement to produce CVD or PVD reactors with a susceptor diagonal of 2m to 3m. Since the gas inlet member must extend over the entire surface of the susceptor, there is a need to create a gas inlet member with a diagonal of 2 m to 3 m. The process chamber has a process chamber height of a few centimeters. In order to be able to deposit a layer of uniform layer thickness and uniform layer quality over the entire substrate surface, it is necessary for the process chamber height to assume a constant value within narrow tolerances over the entire process chamber. The deposition process takes place in the low pressure range, ie in a region in which the atmospheric pressure acts on the housing walls with considerable deformation forces. It is inevitable that the housing deforms when lowering the pressure. In addition, the gas inlet member is heated, so that in addition to the mechanical forces thermal expansion phenomena are taken into account.

Summary of the invention

The invention has the object of developing a generic coating device such that the process chamber height varies over the entire surface of the susceptor or the gas outlet surface of the gas inlet member only in close tolerances.

The object is achieved by the invention specified in the claims, each claim is basically an independent solution to the problem.

An assembly is secured to an upper portion of the housing. This assembly includes a gas inlet member having a gas outlet openings having gas outlet surface. The gas outlet surface extends in a particular horizontal gas outlet plane. The assembly is attached to a variety of suspension points on the housing. There are provided temperature control means with which the gas inlet member can be tempered from a first temperature, which substantially corresponds to the temperature of the housing, to a second temperature, which is different from the housing temperature. This can be done by heating the gas inlet member, to which the gas inlet member is provided with a heater. In the unheated state, the gas inlet member has the temperature of the housing. In the heated state, the gas inlet member has a higher temperature than the housing. But it is also possible that the gas inlet member can be cooled with a cooling device to a temperature which is below the housing temperature. The temperature control means may be channels in the gas outlet member, which are flowed through by a tempered, ie hot or cold liquid. As a result of this tempering and the associated temperature change of components of the assembly, the size of the assembly changes. At least the size of the gas inlet member changes due to the thermal expansion. The fastening means are designed so that they deform in such a change in size of the assembly or have elements that shift against each other in a size change. The fastening means have for this purpose force transmission means, the weight of the assembly to the Housing transferred. The power transmission means are in particular elastically deformable or have elements which can preferably be displaced relative to one another without abrasion. The fastening means are preferably fastened exclusively to the outer horizontal edge of the assembly and in particular exclusively to a holding device. The power transmission means may preferably move / deform only in the horizontal direction and not in the vertical direction. The attachment is preferably at the corners of a polygon. Preferably at the corners of a triangle or a quadrangle. These may be points on the horizontal edge of the holding device. For example, two attachment points may be assigned to the corner points of the holding device, for example the two corner points of a narrow side. A third attachment point can be arranged in the middle of this narrow side opposite narrow side. The attachment points can also be assigned to the broad side corners or a broadside locally. The force transmission means may each be a bending element. The bending element is connected to a housing-side fastening element and a module-side fastening element. It can be a rectangular, thin plate. The bending plates arranged in the corner area are aligned with respect to the assembly or the holding device in such a way that the assembly or the holding device can spread out both in the widthwise extension direction and in the narrow-side extension direction. Preferably, the flexurally elastic plate lies in a vertical plane and has a surface normal, which runs in the bisector of the enclosed angle of the side walls of the narrow side and broad side of the holding device or assembly. The surface normal is preferably directed to the geometric center of gravity, in particular the center of gravity of the assembly lying in the horizontal plane, so that the temperature expansion direction of the assembly at the attachment point coincides with the main bending direction of the force transmission element. In the case of a holding device or assembly having a square outline, the bending plates thus preferably extend at an angle of 45 ° to the broad side or narrow side. The two bending plates each arranged at adjacent corners thus each extend in a plane, these two vertical planes intersecting at an angle of 90 °. A third attachment plate is arranged at a side wall opposite the two attachment points approximately in the middle thereof. The bending plate, which likewise extends in a vertical plane, extends parallel to the side wall of the holding device or assembly. In a non-square plan, the Hauptbiegerichtung of the power transmission means, ie in particular the surface normal of a planar bending element on the center of gravity of the assembly, in particular the gas inlet member or its holding device, on. It may additionally be provided a floating bearing transversely to Biegeverlagerungsrichtung. For this purpose, a bolt is preferably provided, which projects with horizontal movement play in an opening. In particular, a fastening pin is provided, with which the force transmission means, in particular the bending plate, is fastened to a fastening means, wherein the fastening pin has a bearing flank, which is supported on a sliding element, which lies on a bearing surface, so that the fastening pin is relatively transverse to the Main deformation direction of the bending element relative to the bearing surface can shift. In addition, a securing device can be provided which prevents the assembly, in particular the gas inlet member, from falling if the force-transmitting means, in particular a breakage of a bending element, breaks. For this purpose, a securing pin with vertical and / or horizontal movement distance can pass through a securing opening. During thermal expansion, the securing pin can move freely through the securing opening. A fastening means arranged in the corner area of the holding device or the assembly, but which can also be fastened between the two corner points on a lateral wall of the holding device or the assembly, can be formed by a rod or cable extending in the vertical direction. The solid or hollow rod has an upper end, which is preferably fixed to the housing, and a lower end, which is preferably attached to the holding device or the assembly. However, a bending element in the form of a solid or hollow rod can also be arranged on a side wall of the assembly. But the bending elements can also have a different shape. It is advantageous if the bending elements allow a horizontal movement of the assembly or the holding device with minimal friction. The attachment can be done via angle elements. Fasteners arranged in the corner region can also be fastened to the housing by means of a cross-member. In a variant of the invention, the fastening elements have mutually rolling elements. A first element may be firmly attached to the housing. A second member may be fixedly secured to the assembly or to the retainer, and a third member may interconnect the first and second members. There may also be provided two or more elements that connect the fixed to the housing and fixed to the assembly fastener together. These are preferably chain links. With regard to the arrangement of the rolling fasteners reference is made to the comments on the bending elements. This is especially true in relation to the Movement directions that are permitted by the rolling fasteners.

The assembly preferably has a retainer attached to an upper portion of the housing. It is a temperature-stabilized or mechanically stabilized holding device. At this dimensionally stable holding device, the gas inlet member is attached to a plurality of suspension points. The suspension points are distributed substantially uniformly over the entire extension surface of the gas inlet member. The distance of the suspension points from each other is at least a factor of 3, but preferably by a factor of 4 or by a factor of 5, less than the diagonal extent of the gas inlet member. It is also possible a maximum distance between two adjacent suspension points, which may amount to a maximum of one tenth of the diagonal extent of the gas inlet member. For mechanical stabilization, the holding device may have mechanical stabilizing elements. These mechanical stabilizing elements may be formed by vertical walls. The holding device preferably forms a framework, which is formed by intersecting vertical walls. The distance between two vertically and optionally also parallel to each other vertical walls is at least a factor of 3, a factor of 4, but preferably a factor of 5, less than the diagonal distance of the gas inlet member. It form in the vertical direction extending cylindrical cells with a base area, which preferably corresponds to a maximum of one hundredth of the base of the gas inlet member and may have a checkered or honeycomb-like floor plan. The holding device is preferably fastened exclusively to the housing with a horizontal edge. It is the horizontal edge of the retainer that is attached to the housing. The entire central surface portion of the holding device spans freely the gas inlet member, but has a holding connection to the gas inlet member at a plurality of substantially uniformly distributed over the surface locations. The holding device is temperature-stabilized. For this purpose, an active or a passive temperature stabilization device can be provided. The holding device is temperature-stabilized in such a way that its temperature changes significantly neither in the horizontal direction nor in the vertical direction when the temperature difference to the gas inlet member changes. Preferably, the temperature varies within the entire body formed by the holding device, so preferably the truss by +/- 5 degrees. Preferably, the temperature difference between the coldest point and the hottest point is a maximum of 5 degrees. For passive temperature stabilization heat shields may be provided, for example with reflective surfaces or insulator. For active temperature stabilization, tempering media can be used, for example tempering liquids which flow through tempering channels. The temperature control channels can be arranged within the holding device. Preferably, however, the temperature control channels are provided above or below the holding device. If the holding device for temperature control has to be cooled, because the temperature of the gas inlet element is kept at a high temperature during the coating process, it is preferable to use an active tempering element, which is arranged in the region between gas inlet element and holding device. The honeycomb or box-like structure of the holding device, which gives it the shape of a truss, also leads to its mechanical stabilization. The fastening means are the said elastic fastening means with which the edge region of the holding device is fastened to the housing. In a preferred embodiment, a vertical distance space extends between the gas inlet member and the holding device. For attachment of the gas inlet member to the holding device serves a variety of hangers. The hangers can be elongated metallic or ceramic tension elements, which are fastened with their upper end to the holding device and with their lower end to an attachment point of the gas inlet member. The hangers can be height adjustable. This makes it possible to adjust the distance between the gas outlet surface and susceptor top side, ie the process chamber height, at each suspension point. Preferably, the hangers are made of a material which has a low thermal expansion coefficient. The walls of the gas inlet member are provided with Temperierungskanälen. In particular, the gas outlet surface forming wall of the gas inlet member but also the wall facing away from it is provided with channels through which a tempering, such as a hot liquid can flow. For temperature stabilization of the holding device not only contributes to their shape. The holding device is designed as a lightweight component. The measures that are taken to actively reduce the heat transfer from the gas inlet member to the holding device, the arrangement may include one or more heat shields in the space between the gas inlet member and holding device. The heat shields are area objects that are parallel to the surface extent of the gas inlet member in the distance space. Their surfaces can be highly reflective. Alternatively, insulating bodies can be arranged in the distance space. At least one heat shield can be actively cooled. The actively cooled heat shield is preferably immediately adjacent to the holding device. The actively cooled heat shield may be a plate whose areal extent is approximately the area extent of the holding device or the areal extent of the Gas inlet member corresponds. Within the plate run coolant channels through which a coolant can flow. As a result, the holding device can be kept at a constant temperature. If the gas inlet member is heated, the holding device essentially maintains its temperature. The distance that the process chamber height can change during operation of the device is less than 1 mm. The surface temperature of the housing is about 30 ° C. The temperature of the holding device can be stabilized to a value of 50 ° C. For this purpose, the active heat shield is cooled to a temperature of about 50 °. The trained as a showerhead gas inlet member is operated at a temperature of for example 450 ° and the substrate is cooled to a temperature of 20 °. By one or more passive heat shields, which are located between the active heat shield and the gas inlet member, the heat flow from the gas inlet member is reduced to the actively cooled heat shield. For example, a heat shield adjacent to the gas inlet member may have a surface temperature of 350 °. The heat shield may be made of metal or a ceramic material. Between this passive heat shield and the active heat shield, a further passive heat shield may be arranged, which is also formed by a metal plate or a ceramic plate. Its temperature during operation is around 270 ° C. There may also be more than two passive heat shields between the gas inlet member and the actively cooled heat shield. The surfaces of the heat shields may have a low optical emissivity. They can be polished, reflective surfaces. The hangers can be used to hold the heat shields. But it is also envisaged that the hangers protrude only through openings of the heat shields, so that a deformation of the heat shields does not affect the position of the gas inlet member in the room. According to the invention, the holding device is stabilized against deformation. These are deformations caused by changing temperature and / or pressure. The heat shields may be hung on separate hangers which are attached either to the housing cover or to the support means. The invention further relates to a method for operating such a device.

Brief description of the drawings

In the following the invention will be explained in more detail by means of exemplary embodiments. Show it:

1 a section along the line II in 2 by a schematically illustrated PVD coating device,

2 the top view of the coating device,

3 the section according to the line III-III in 1 .

4 the upper housing part of a PVD reactor of a second embodiment in a sectional view approximately according to 1 .

5 the cut housing top according to 4 in a perspective view,

6 A third embodiment of the invention in a representation according to 3 .

7 the section according to the line VII-VII in 6 .

8th the section according to the line VIII-VIII in 6 .

9 as a fourth embodiment, a perspective view of a further fastening means,

10 as a fifth embodiment, a perspective view of a further fastening means,

11 as a sixth embodiment, a perspective view of a further fastening means,

12 the detail XII in 11 , the figures

13a -D variants for the arrangement of fasteners 13 on an assembly 23 .

14 a further embodiment in a representation similar to the 6 .

15 the top view of a fastener 13.2 out 14 .

16 the section according to the line XVI-XVI in 15 .

17 the section according to the line XVII-XVII in 16 .

18 the section according to the line XVIII-XVIII in 16 .

19 the section according to the line IXX-IXX in 16 .

19a enlarges the section IXXa in 19 .

20 the fastener 13.1 out 14 .

21 the section according to the line XXI-XXI in 20 .

22 the section according to the line XXII-XXII in 21 .

23 the section according to the line XXIII-XXIII in 21 .

24 the section according to the line XXIV-XXIV in 21 , and

24a enlarges the section XXIVa in 24 ,

Description of the embodiments

The in the 1 to 3 The device shown is a PVD device for coating large-area substrates with organic layers. The substrates may have a rectangular shape with a diagonal of more than 1 m, preferably more than 2 m or 3 m. The lower housing part 2 carries a susceptor 15 for supporting the substrate. The susceptor 15 has a variety of coolant channels 16 through which a coolant can be introduced into the process chamber. The susceptor is maintained at a temperature of about 20 ° C by means of the coolant.

The upper part 1 The housing has a housing cover, which is of a ribbed structure 17 . 18 mechanically stabilized. The lower housing part 2 has a similar rib structure for mechanical stabilization of the housing bottom. In the housing cover Temperiermittelkanäle be arranged through which a liquid temperature control medium flows to keep the housing cover at a predetermined temperature.

At the edge of the housing cover and at the edge of the side wall of the housing upper part 1 are fasteners 13 . 14 intended. These are elastic fastening means 13 . 14 with which a holding device 3 at its horizontal edge on the upper housing part 1 is attached.

The holding device 3 is a lightweight component in the form of a framework or a honeycomb structure. It has a plurality along vertical connecting lines of interconnected surface elements 4 . 5 , The surface elements 4 . 5 form vertical walls. In the embodiment, the holding device 3 from a crossing vertical walls 4 . 5 forming support frame formed with its edge 3 ' over the fasteners 13 . 14 on the housing 1 is attached. As the holding device 3 only at the edge 3 ' with the housing 1 attached, one leads to a pressure change inside the housing 1 . 2 unavoidable bending of the housing cover to any relevant change in position of the holding device 3 inside the case 1 . 2 , The whole of the edge 3 ' surrounded middle area of the holding device 3 freely clamps the ceiling wall of the upper part of the housing that runs parallel to it 1 , The fasteners 13 . 14 are on the edge of the ceiling wall of the housing top 1 attached. The holding device 3 forms an open or closed cell structure, wherein the horizontal surfaces of the cells are at least a factor of 100 smaller than the horizontal surface of the holding device 3 , The vertical height of a surface may be on the order of a circular equivalent diagonal of the horizontal surface of the cell.

A gas inlet organ 7 in which it is a hollow body whose walls tempering channels 9 is vertically above the susceptor 15 arranged. The distance of the bottom of the gas inlet member 7 that has a gas outlet surface 7 ' forms, to the top of the susceptor 15 is a few inches. The gas outlet surface 7 ' has a variety of showerhead-like arranged gas outlet openings 8th through which out of the cavity of the gas inlet member 7 Process gases can flow into the process chamber from the top of the susceptor 15 and the bottom of the gas inlet member 7 is formed. The gas inlet organ 7 is tempered to temperatures of about 450 ° C.

The gas inlet organ 7 is with mechanical fasteners 6 on the holding device 3 attached. The mechanical fasteners 6 are substantially uniform over the entire surface area of the gas inlet member 7 arranged distributed. The distances between adjacent fasteners 6 one another are much smaller than an edge length or the diagonal of the gas inlet member 7 , Preferably, the maximum distance, the two adjacent fastener 6 have less than the tenth part of the circle-equivalent diagonals of the gas inlet member.

The mechanical fasteners are hangers 6 that with a head 6 ' on the holding device 3 are attached and a vertical distance space to the gas inlet member 7 extend. There are the hangers 6 at suspension points 6 ' with her feet on the gas inlet 7 attached. The gas inlet organ 7 has two mutually parallel walls, each Temperiermittelkanäle 9 exhibit. All six sides of the gas inlet member are preferred 7 , which is preferably designed as a showerhead, heated. For this purpose, the walls of all six sides tempering, for example. Electric heaters or channels, through which a Tempering liquid can flow, so that the gas inlet member is homogeneously heated to a temperature of, for example, 450 °. The attachment points 6 ' can be on the upper wall of the gas inlet 7 be provided. In the embodiment, the attachment points 6 ' but at the gas outlet openings 8th having wall of the gas inlet member 7 intended. The feet of the trailer 6 So there are at the bottom wall of the gas inlet organ 7 attached.

The heads 6 '' the trailer 6 are in openings or recesses 19 the top of the holding device 3 stored. The heads 6 '' can be formed by screws that are screwed into threads, allowing themselves over a rotation of the heads 6 '' the length of the trailer 6 or the vertical position of the suspension points 6 ' change. The heads 6 '' However, they can also be formed by nuts or other adjusting members with which the altitude of the gas inlet member can be adjusted locally. As a result, the height of the process chamber can be preset locally. The hangers 6 are preferably made of a material that has only a low coefficient of thermal expansion, so that the heating of the trailer 6 does not affect the local height of the process chamber.

In a preferred embodiment, which also in the in the 1 and 3 illustrated embodiment is realized, it is in the holding device 3 not only a mechanically stabilized holding frame, but also a temperature-stabilized holding frame. This is located immediately below the holding device 3 an actively tempered heat shield 11 , At the heat shield 11 it is a metal or ceramic plate with coolant channels 12 , Through these coolant channels 12 a coolant is passed through what the actively cooled heat shield 11 brings to a temperature of about 50 °. The holding device can also be cooled directly.

Between the actively cooled heat shield 11 and the gas inlet member 7 one or more passive heat shields may be arranged. In the embodiment, a passive heat shield 10 provided, which may also be a metal plate or a ceramic plate. The passive heat shield has a temperature which is in the range between the temperature of the gas inlet member and the temperature of the active heat shield. The temperature of the passive heat shield can be in the range between 400 ° and 200 °. When using a plurality of passive heat shields arranged parallel to one another, the individual heat shields can have temperatures of 270 ° or 350 °. The temperature of the holding device is thereby maintained at about 50 °. The housing temperature is then around 30 ° C. The passive heat shields 10 are preferably metal plates with highly reflective surfaces. Their emission coefficient is less than 0.2.

That in the 4 and 5 illustrated second embodiment of a housing upper part 1 also has a support frame designed as a lightweight component 3 made of a truss-like chamber structure, wherein vertical chamber walls 4 . 5 are connected to each other on vertical connecting lines. The chamber walls 4 . 5 can also be formed here of thin metal plates. In addition, there is the support frame 3 nor a horizontally extending upper horizontal wall 20 and a lower horizontal wall 21 on.

Also in this embodiment, only the vertical peripheral edge 3 ' the holding device 3 with the housing 1 connected. The relevant fasteners 13 can be elastic attachment means. All walls of the holding device 3 consist of thinnest surface materials, such as sheets. It forms an open or closed-cell space structure. The holding device 3 is on the edge of a ceiling plate of the housing top 1 attached. But it is also possible, the holding device 3 manufacture monolithic, for example, to mill out a framework from a massive block.

A gas inlet organ 7 with a plurality of gas outlet openings is over a plurality of substantially uniformly over the extension surface of the gas inlet member 7 arranged attachment points 6 ' on the holding device 3 attached. They are mechanical fasteners 6 connected, which are formed here by hangers. The head of the trailer 6 '' is with the holding device 3 connected. The foot of the trailer 6 is at the attachment points 6 ' with the gas inlet member 7 connected. Again, located in the vertical distance space between the holding device 3 and the gas inlet member 7 several heat shields 10 . 11 , Again, at least one actively cooled heat shield 11 provided, which is arranged immediately below the holding device and parallel to the underside of the holding device 3 extends. Between the actively cooled heat shield 11 and the top of the gas inlet member 7 extends a plurality of mutually parallel passive heat shields 10 ,

In the embodiment, the heat shields are with the hangers 6 connected. The hangers 6 So not only keep the gas inlet organ 7 on the holding device 3 , but also the thermal shields 10 . 11 in their vertical position. The heat shields 10 . 11 but you can too with separate hangers on the holding device 3 be attached. They have highly reflective surfaces. One below the holding device 3 arranged plate 11 extending over the entire surface extension of the holding device 3 extends, has coolant channels 12 through which cooling water flows.

In an embodiment, not shown, it can be provided that the heat shields 10 . 11 whose vertical position is essentially uncritical, via separate hangers directly on the housing 1 are attached. Related hangers may be on the edge of the heat shields 10 . 11 be provided. But you can also in the middle area of the heat shields 10 . 11 be provided and for example through passage openings of the holding device 3 reach through to the ceiling of the housing top 1 to be attached.

In the cover section of the upper housing part 1 are closable openings 22 in the area between the stiffening ribs 17 . 18 arranged. By opening these openings 22 is an access to the top of the holding device 3 or to the upper horizontal wall 20 possible. There are the openings 19 in which the heads 6 '' the trailer 6 stuck. The heads 6 '' can be formed by threaded parts, so that by turning the heads 6 '' the effective length of the trailer 6 can be influenced. The heads 6 '' The hangers thus form setting members to locally the height of the process chamber, ie the distance of the gas inlet member 7 from the susceptor 15 to influence.

The device described above is used to deposit OLEDs on large area substrates. In this method, solid, in powder form starting materials are brought via an evaporator into a gaseous form. By means of a carrier gas, the organic vapor thus formed in the gas inlet member 7 promoted, where the steam from the gas outlets 7 ' comes out to the surface of a susceptor 15 to condense on lying substrate.

In the embodiments described above, the holding device forms 3 together with the gas inlet member 7 an assembly 23 by means of fasteners 13 . 14 at an upper portion of a housing 1 is attached.

In the in the 6 bi 8th illustrated embodiment is only the holding device 3 the assembly 23 shown. The holding device 3 Here is a lightweight body, for example. A frame formed by a framework. It has a rectangular floor plan with four corners and the corners connecting side walls. On two, connected by a side wall corners are fasteners 13.1 , On the middle of the opposite side wall is another fastener 13.2 so that the fasteners 13.1 . 13.2 are arranged on the vertices of an isosceles triangle.

The fasteners 13.1 . 13.2 consist essentially of three fasteners. They each have a fastener 24.1 . 24.2 with which the fastener 13.1 . 13.2 on the upper part of the housing 1 is attached. Another fastener 25.1 . 25.2 is on the holding device 3 attached. The fastener 25.1 is an angle-shaped element, which is the corner region of the holding device 3 comprises and has angle legs which are flat with the side wall of the holding device 3 are connected. The fastener 25.2 has a mounting surface extending in a plane which is approximately in the middle of the side wall of the holding device 3 is attached.

The two fasteners 24.1 respectively. 24.2 and 25.1 respectively. 25.2 are each by means of an intermediate element 26.1 . 26.2 connected with each other. The intermediate elements 26.1 . 26.2 serve the power transmission, with which the weight of the fastener 25.1 . 25.2 on the fastener 24.1 . 24.2 is transmitted. At the intermediate elements 26.1 . 26.2 it is thus a force transmission means, which in the embodiment of the 6 to 8th each having the shape of a rectangular plate. An upper section of the bending element 26.1 . 26.2 is each with a housing-side fastener 24.1 . 24.2 connected. A lower section of the intermediate element 26.1 . 26.2 is with the braugruppenseitigen fastener 25.1 . 25.2 connected. The bending elements 26.1 . 26.2 have a bending surface extending in the vertical direction, so that the surface normal points in the horizontal direction. The surface normals of the bending elements 26.1 have approximately in the direction of the bisector of the two meeting in the vertex side walls of the holding device 3 , In a preferred variant, the surface normals of the bending elements 26.1 but in the direction of the geometric center of gravity M of the holding device 3 such that the thermal expansion direction h at the point of attachment to the surface normal of the flexures 26.1 matches. The surface normal of the bending element 26.2 extends in a direction transverse to the side wall of the holding device. At a temperature expansion of the holding device 3 The latter can expand in the horizontal plane. In this case, the distance between the individual corners of the holding device 3 zoom in or out. Such a change in size of the holding device 3 is with a slight bending of the planar bending element 26.1 . 26.2 connected.

The bending elements can be bending plates which have mutually parallel peripheral edges, each with fastening jaws on a fastening element 24.1 . 24.2 . 25.1 . 25.2 the housing or the holding device are attached. The force transmission means according to the invention are designed or fastened to fastening elements such that they deflect the assembly 23 , in particular the gas inlet member, allow only in the horizontal plane. The displacement paths of the bending elements are therefore smaller by at least one order of magnitude (factor 10) than the length of the bending section of the bending element.

The 9 shows a variant of a fastener 13.4 , A flexurally elastic intermediate element 26.4 in the form of a rod, which may be solid or hol, is by means of an upper fastener 24.4 with the housing 1 and a lower fastener 25.4 with the holding device 3 connected. Instead of a rod but also a rope can be used. The rod and the cable are the force transmission means with which the weight of the holding device 3 or the gas inlet member is transferred to the housing. For the fasteners 24.1 respectively. 25.4 they can be angular elements. The intermediate element 26.1 is preferably the same as the intermediate elements 26.1 and 26.2 made of metal. The rod 26.4 extends in the vertical direction. But he can also be inclined to do so. He has a circular cross section, but can also have another, for example. Have a polygonal cross-section.

That in the 10 illustrated embodiment corresponds substantially to the in the 6 and 8th illustrated corner bracket. Shown, however, designed as a Traverse housing-side fastener 24.1 , which with screws on the inner side walls of the housing top 1 is attached. The assembly-side fastener 25.1 has two at an angle of 90 ° angle leg, which also by means of screws with the assembly 23 are attached. One each offset by 45 ° to the angle legs of the fastener 25.1 extending side is with the bending elastic intermediate element 26.1 connected. At the intermediate element 26.1 it is just like the intermediate element 26.1 to a power transmission means.

That in the 11 and 12 illustrated embodiment shows a compound of a traverse 30 , made by two housing-side fasteners 24.3 . 24.4 is worn, and over four links 27 . 28 . 29 with a module-side fastening element 25.3 is connected, which is an angle element. A top chain element 27 is from a mounting bolt of the crossbar 30 held and inserted this purpose in a slot of the traverse 30 , A lower chain element 29 is between two attachment legs of the fastener 25.3 held and is also penetrated by a mounting bolt. They are two intermediate links 28 provided that the upper chain link 27 with the lower chain link 29 connect. The chain links 27 . 28 . 29 form a power transmission means to transmit the weight.

As with the in the 6 illustrated embodiment is here in the corner an evasive movement diagonal to the side walls of the module 23 possible, with the chain links 27 . 28 . 29 roll against each other. The openings of the chain links 27 and 29 are offset by 90 ° to each other. The chain links 27 . 28 . 29 are each in a plane extending circular objects, each interlocked by 90 ° angularly interlocked.

In an analogous manner to that in the 6 illustrated embodiment may be provided approximately in the middle of the two corner regions opposite side wall, a third, not shown fastening means, which also has a plurality of interlocking chain links 27 . 29 . 29 has, so that the local narrow wall can escape in a direction transverse to its extension direction.

The 13a schematically shows the arrangement of fasteners 13 at two corners and in the middle of an opposite side wall of an assembly 23 so that the fasteners 13 are arranged at the vertices of an isosceles triangle.

The 13b shows the arrangement of fasteners 13 at the four corners of a rectangular plan having assembly, in which case the fastening means 13 are arranged on the vertices of a quadrangle.

The 13c shows a further variant in which the fastening means 13 approximately in the middle of the mutually perpendicular side walls of the assembly 23 are arranged. These are bending elements which have a bending direction that run perpendicular to the extension direction of the side walls. The bending elements are designed such that the assembly 23 also in a direction that lies in the surface of the bending elements, can expand. The bending elements can not be designed as a flat body, but for example, be designed like a comb or have spokes.

That in the 13d illustrated embodiment shows the attachment of an assembly 23 using four fasteners 13 , wherein in each case two fastening means 13 on two opposite side walls of the assembly 23 are attached. The fasteners 13 are spaced from the vertices. They are, for example, spaced by a third of the side length of the respective vertex and associated with the longer side walls. The bending elements can be formed here by rods which are fixedly secured with an upper end to the housing, so that the lower end of the assembly 23 is fixed, can shift elastic in a horizontal plane.

The 14 to 24a show a particularly preferred embodiment in which the assembly 23 in which it is a holding device 3 with attached gas inlet member 7 or just a gas inlet 7 can be acted on three attachment points attached to the housing. These are three fasteners 13.1 . 13.2 provided on the horizontal edge of the assembly 23 attack and this assembly-side fasteners 25.1 and 25.2 form. The assembly 23 has a non-square, rectangular floor plan. At two corners of a shorter side of the rectangle are two assembly-side fasteners 25.1 attached. Each of the two assembly-side fasteners 25.1 is with a housing-side fastener 24.1 connected, which is fixed to the housing, on the shorter rectangular side opposite shorter rectangular side is in the middle of the third fastening means 13.1 , which is also a module-side fastener 25.2 and a housing-side fastener 24.2 having.

From the 16 and 21 and the cuts drawn in it can be seen that each assembly-side fastener 25.1 . 25.2 with an intermediate element 26.1 . 26.2 with a housing-side fastener 24.1 . 24.2 connected is. At the intermediate element 26.1 . 26.2 it is a force transmission means in the form of a bending plate. The bending plate has a substantially rectangular cross-section and on its upper and lower sides of a thickening material. The upper material thickening of the intermediate element 26.1 . 26.2 has screw holes, through which fastening screws are screwed, with which the intermediate element 26.1 . 26.2 on the housing side fastener 24.1 . 24.2 screwed on. For this purpose, the housing-side fastening element 24.1 . 24.2 a vertically displaceable adjusting body 14 on which the power transmission means is attached. By means of adjusting screws 42 on which the adjusting body 41 supports, the adjustment body 41 be adjusted in height, so as to the distance of the gas inlet member 7 opposite the susceptor 15 adjust.

The lower material thickening of the intermediate element 26.1 . 26.2 has a bearing opening 36 , This bearing opening 36 is from a mounting pin 32 passed through the fixed with the assembly-side fastener 25.1 . 25.2 connected is. The assembly-side fastener 25.1 . 25.2 For this purpose has a vertically extending slot in which the lower material thickening of the intermediate element 26.1 . 26.2 is plugged in. The slot is from a mounting hole 35 crossed, in which the mounting pin 32 plugged in, the part of a bolt 31 ,

The holding opening 36 has a horizontally extending bearing surface 40 on which a sliding element 39 lies. On the sliding element 39 supports a bearing flank 38 of the fastening pin 32 such that the bearing flank 38 opposite the storage area 40 can shift slightly in the horizontal direction. As a result, movement components of the temperature expansion movement can be compensated, which does not move in the direction of the main bending direction of the formed as a bending element intermediate element 26.1 . 26.2 extend.

In the event that the intermediate element 26.1 . 26.2 should break, is a safety device 34 . 33 intended. The safety device is a safety pin 33 , which is fixed to one of the two modules 24 . 25 is attached and in one eye 34 engages the other fastening element. In the embodiment, the securing pin 33 the assembly-side fastener 25.1 . 25.2 permanently assigned. In detail, the security pin 33 from the said bolt 31 educated. The safety eye is from a safety hole 34 formed on an extension of the housing-side fastener 24.1 . 24.2 sitting.

The diameter of the fuse opening 34 is larger than the diameter of the securing pin 33 so that the safety pin 33 free in the opening 34 protrudes. The peripheral surface of the securing pin 33 has over its entire circumference a distance from the inner wall of the securing opening 34 so that the safety pin 33 free and non-contact in the fuse opening 34 protrudes.

Should there be a breakage of the flexurally elastic power transmission means, then the assembly falls 23 only so far down until the safety pin 33 to the wall of the opening 34 abuts.

The securing device according to the invention has one with allseitigem distance in a fuse opening 34 engaging safety pin 33 , where the securing pin 33 is associated with either a housing-side or a module-side fastener and the fuse opening 34 the respective other fastening element, wherein the assembly-side fixing element and the housing-side fastening element are otherwise connected to each other exclusively by a horizontal deflection movement enabling intermediate element.

The above explanations serve to explain the inventions as a whole, which further develop the state of the art independently, at least by the following feature combinations, namely:
A CVD or PVD coating device, characterized in that the fastening means 13 . 14 Power transmission means 26.1 . 26.2 . 26.3 . 26.4 ; 27 . 28 . 29 have, at a caused by the temperature change of the assembly 23 deform or shift against each other.

A CVD or PVD coating device, characterized in that the assembly 23 exclusively on its horizontal edge 3 ' on the housing 1 . 2 is attached.

A CVD or PVD coating device, characterized in that the assembly 23 with elastically deformable power transmission centers 26.1 . 26.2 . 26.4 on the housing 1 . 2 fixed, which have a main deformation direction, which on the horizontal centroid M of the assembly 23 is directed.

A CVD or PVD coating device, which is characterized in that the gas inlet member 7 with a plurality of distributed over the entire horizontal extension surface arranged hangers 6 at one with the fasteners 13 . 14 on the housing 1 . 2 attached holding device 3 the assembly 23 is attached, with the hangers 6 in vertical direction from the suspension points 6 ' to the holding device 3 extend and in a vertical space between the gas inlet member 7 and holding device 3 a tempering device 11 . 12 and / or one or more heat shields 10 . 11 are arranged.

A CVD or PVD coating device, characterized in that the fastening means 13 . 14 . 13.1 . 13.2 . 13.3 . 13.4 on the edge of a rectangular plan having assembly 23 are arranged at the vertices of a polygon, in particular a triangle or quadrangle.

A CVD or PVD coating device, which is characterized in that at least one force transmission means comprises an elastically deformable bending element 26.1 . 26.2 . 26.4 is.

A CVD or PVD coating device, which is characterized in that the force transmission element 26.1 . 26.2 a rectangular plate is or that the bending element 26.4 is a solid or hollow rod, or that the flexure is a rope.

A CVD or PVD coating device, which is characterized in that at least one power transmission means 13.3 rolling against each other elements 27 . 28 . 29 having.

A CVD or PVD coating device, which is characterized in that of the rolling elements against each other, a first element 27 firmly on the housing 1 . 2 is attached, a second element 29 is firmly attached to the assembly, and at least a third element 28 the first and second elements 27 . 29 connects with each other.

A CVD or PVD coating device, characterized in that the elements rolling against each other 27 . 28 . 29 Chain links are.

A CVD or PVD coating device, characterized in that the force transmission means is an intermediate element 26.1 . 26.3 . 26.4 is, with the at least one of the arranged in particular in a corner region fasteners 24.1 . 24.2 . 24.3 . 24.4 via an intermediate element 26.1 . 26.3 . 26.4 at one on the assembly 23 fastened fastener 25.1 . 25.3 . 25.4 is attached.

A CVD or PVD coating device, which is characterized in that a bending element 26.4 with his on a module-side fastener 25.4 fixed end in a horizontal plane bending elastic with respect to its on the housing side fastener 24.4 can relocate.

A CVD or PVD coating device, which is characterized in that the housing-side fastening element 24.1 - 24.3 is about the same vertical height as the associated assembly-side fastener 25.1 - 25.3 ,

A CVD or PVD coating device characterized by a securing device which is subject to breakage of the power transmission means 26.1 . 26.2 . 26.3 . 26.4 ; 27 . 28 . 29 comes into effect to the assembly 23 on the housing 1 to hold, in particular to a module-side fastener 25.1 - 25.4 on the housing side fastener 24.1 . 24.2 . 24.3 . 24.4 to keep, in particular a security pin 33 non-contact in a fuse opening 34 intervenes.

All disclosed features are essential to the invention (individually, but also in combination with one another). The disclosure of the associated / attached priority documents (copy of the prior application) is hereby also incorporated in full in the disclosure of the application, also for the purpose of including features of these documents in claims of the present application. The subclaims characterize with their features independent inventive developments of the prior art, in particular to make on the basis of these claims divisional applications.

LIST OF REFERENCE NUMBERS

1

Housing top

2

Housing top

3

holder

3 '

Edge of the assembly

4

vertical wall

5

vertical wall

6

trailer

6 '

fastener

7

Gas inlet element

8th

Gas outlet

9

tempering

10

passive heat shield

11

active heat shield

12

Coolant channel

13

fastener

13.1

fastener

13.2

fastener

13.3

fastener

13.4

fastener

14

fastener

15

susceptor

16

Coolant channel

17

rib

18

rib

19

opening

20

upper horizontal wall

21

lower horizontal wall

22

opening

23

module

24.1

Housing-side fastener

24.2

Housing-side fastener

24.3

Housing-side fastener

24.4

Housing-side fastener

25.1

Module-side fastening element

25.2

Module-side fastening element

25.3

Module-side fastening element

25.4

Module-side fastening element

26.1

intermediate element

26.2

intermediate element

26.3

intermediate element

26.4

intermediate element

27

Chain link, on the housing side

28

Chain link, medium

29

Chain link, module side

30

traverse

31

bolt

32

fastening pins

33

Security bolt

34

securing aperture

35

fastening opening

36

holding opening

38

bearing edge

39

Slide

40

storage area

41

adjusting body

42

adjusting screws

QUOTES INCLUDE IN THE DESCRIPTION

This list of the documents listed by the applicant has been generated automatically and is included solely for the better information of the reader. The list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions.

Cited patent literature

• EP 1815493 B1 [0002]
• US 2008/0317973 A1 [0002]
• DE 102013101534 A1 [0003]

Claims (15)

CVD or PVD coating device with a housing ( 1 . 2 ) and one on the housing ( 1 . 2 ), a gas inlet member ( 7 ) with a gas outlet openings ( 8th ) in a gas outlet plane extending gas outlet surface ( 7 ' ) having assembly ( 23 ), which are provided with fasteners ( 13 . 14 ) at an upper portion of the housing ( 1 ) at a plurality of suspension points ( 6 ' ), wherein tempering agent ( 9 ) are provided, with which the gas inlet member ( 7 ) of a first temperature, substantially the temperature of the housing ( 1 . 2 ), is temperature-controlled to a second temperature, which is different from the housing temperature, characterized in that the fastening means ( 13 . 14 ) Power transmission means ( 26.1 . 26.2 . 26.3 . 26.4 ); ( 27 . 28 . 29 ), which are at a caused by the temperature change of the assembly ( 23 ) deform or shift against each other. CVD or PVD coating device according to claim 1, characterized in that the assembly ( 23 ) only at its horizontal edge ( 3 ' ) on the housing ( 1 . 2 ) is attached. CVD or PVD coating device according to one of the preceding claims, characterized in that the assembly ( 23 ) with elastically deformable power transmission means ( 26.1 . 26.2 . 26.4 ) on the housing ( 1 . 2 ), which have a main deformation direction, which on the horizontal centroid (M) of the assembly ( 23 ). CVD or PVD coating device according to one of the preceding claims, characterized in that the gas inlet member ( 7 ) having a multiplicity of hangers distributed over the entire horizontal extension surface ( 6 ) at one with the fastening means ( 13 . 14 ) on the housing ( 1 . 2 ) fixed holding device ( 3 ) of the assembly ( 23 ), whereby the hangers ( 6 ) in the vertical direction from the suspension points ( 6 ' ) to the holding device ( 3 ) and in a vertical space between the gas inlet member ( 7 ) and holding device ( 3 ) a tempering device ( 11 . 12 ) and / or one or more heat shields ( 10 . 11 ) are arranged. CVD or PVD coating device according to one of the preceding claims, characterized in that the fastening means ( 13 . 14 . 13.1 . 13.2 . 13.3 . 13.4 ) at the edge of the rectangular plan view assembly ( 23 ) are arranged at the vertices of a polygon, in particular a triangle or quadrilateral. CVD or PVD coating device according to one of the preceding claims, characterized in that at least one force transmission means comprises an elastically deformable bending element ( 26.1 . 26.2 . 26.4 ). CVD or PVD coating device according to claim 5, characterized in that the force transmission means ( 26.1 . 26.2 ) is a rectangular plate or that the bending element ( 26.4 ) is a solid or hollow rod, or that the flexure is a rope. CVD or PVD coating device according to one of the preceding claims, characterized in that at least one force transmission means ( 13.3 ) against each other rolling elements ( 27 . 28 . 29 ) having. CVD or PVD coating device according to claim 8, characterized in that of the rolling elements against each other, a first element ( 27 ) firmly on the housing ( 1 . 2 ), a second element ( 29 ) is fixedly attached to the assembly, and at least a third element ( 28 ) the first and second elements ( 27 . 29 ) connects to each other. CVD or PVD coating device according to one of claims 9 or 10, characterized in that the elements rolling against each other ( 27 . 28 . 29 ) Are chain links. CVD or PVD coating device according to one of the preceding claims, characterized in that the force transmission means is an intermediate element ( 26.1 . 26.3 . 26.4 ) is, with the at least one of the arranged in particular in a corner region fasteners ( 24.1 . 24.2 . 24.3 . 24.4 ) via an intermediate element ( 26.1 . 26.3 . 26.4 ) on one of the assembly ( 23 ) fastened fastener ( 25.1 . 25.3 . 25.4 ) is attached. CVD or PVD coating device according to one of the preceding claims, characterized in that a bending element ( 26.4 ) with its on a module-side fastener ( 25.4 ) fastened end in a horizontal plane bending elastic with respect to its on the housing-side fastener ( 24.4 ) can relocate. CVD or PVD coating device according to one of the preceding claims, characterized in that the housing-side fastening element ( 24.1 - 24.3 ) is approximately at the same vertical height as the associated assembly-side fastener ( 25.1 - 25.3 ). CVD or PVD coating device, characterized by a securing device, which in case of a breakage of the power transmission means ( 26.1 . 26.2 . 26.3 . 26.4 ); ( 27 . 28 . 29 ) takes effect to the assembly ( 23 ) on the housing ( 1 ), in particular to a module-side fastener ( 25.1 - 25.4 ) on the housing-side fastening element ( 24.1 . 24.2 . 24.3 . 24.4 ), in particular a securing pin ( 33 ) without contact in a fuse opening ( 34 ) intervenes. CVD or PVD coating device, characterized by one or more of the characterizing features of one of the preceding claims.

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