CN110241399A - A kind of diamond-coated tool - Google Patents

A kind of diamond-coated tool Download PDF

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Publication number
CN110241399A
CN110241399A CN201910590731.9A CN201910590731A CN110241399A CN 110241399 A CN110241399 A CN 110241399A CN 201910590731 A CN201910590731 A CN 201910590731A CN 110241399 A CN110241399 A CN 110241399A
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CN
China
Prior art keywords
cabinet
diamond
matrix
pedestal
fixedly connected
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Granted
Application number
CN201910590731.9A
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Chinese (zh)
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CN110241399B (en
Inventor
王鸿翔
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Huaian Vocational College of Information Technology
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Huaian Vocational College of Information Technology
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Publication of CN110241399B publication Critical patent/CN110241399B/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • C23C16/27Diamond only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4584Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention discloses a kind of diamond-coated tools, it is related to chemical field, including pedestal, the upper surface of the pedestal is connected with cabinet, body pivot is connected with the sealing cover of matching setting, and the exhaust pipe of the bottom connection of cabinet, the clamping device for fixing base is connected in the cabinet, and the driving mechanism for driving clamping device to rotate is installed on pedestal;The matrix that the present invention drives clamped mechanism to grip by driving mechanism uniform rotation at a slow speed, so that contact of the matrix with gas source is more uniform, so that the thickness of coatings growth is more uniform on matrix, improve the quality of diamond coatings, and effectively reduce the diamond coatings as caused by matrix surface is uneven and grow non-uniform problem, improve the scope of application of device;Admission gear in the present invention, so that gas source is entered in cabinet with stable speed, is further conducive to the homoepitaxial of coating on matrix so as to buffer the fluctuation of gas source flow velocity with the function of current stabilization.

Description

A kind of diamond-coated tool
Technical field
The present invention relates to chemical field, specifically a kind of diamond-coated tool.
Background technique
Diamond coatings are an emerging high-tech sectors, currently, cutting element, wire drawing die, sliding bearing and permitted The basis material of mostly anti-friction composite members mainly uses hard alloy.Traditional cutting element due to serious there are fretting wear and And the service life it is short the disadvantages of, it is difficult to meet high-speed and high-efficiency cutting needs, therefore, the deposition of diamond coatings on hard alloy substrate Just become a kind of effective ways for improving or solving these problems.Diamond coating for hard alloy tool be very suitable for efficiently and Non- Ferrious material and alloy, metal composite material and hard crisp nonmetallic materials are (such as ceramics, graphite and enhancing shape in high precision Material) processing, compared with non-deposited coated carbides, real application shows that diamond coating for hard alloy substantially increases The service life of tool.Simultaneously because thin film diamond coated cutting tool is inexpensive and high-effect, it is allowed to answer in commercialization The great potential in.
It is known that face, generally forms diamond coatings in matrix surface using chemical vapour deposition technique, applies in diamond During layer preparation, matrix not can be carried out rotation when diamond coatings are grown, to can make when the uneven surface of matrix Contact at matrix surface with gas source is not uniform enough, so that the growth of matrix surface diamond coatings is not uniform enough, influences Buddha's warrior attendant The quality of stone coating.
Summary of the invention
1. to solve the problems, such as
Aiming at the problems existing in the prior art, the purpose of the present invention is to provide a kind of diamond-coated tools, make Used time, the matrix for driving clamped mechanism to grip by driving mechanism uniform rotation at a slow speed, so that matrix and gas source connect It touches more uniform, so that the thickness of coatings growth is more uniform on matrix, improves the quality of diamond coatings, and effectively reduce The diamond coatings as caused by matrix surface is uneven grow non-uniform problem, the scope of application of device are improved, to solve The problem of being mentioned in above-mentioned background story.
2. technical solution
To achieve the above object, the invention provides the following technical scheme:
A kind of diamond-coated tool, including pedestal, the upper surface of the pedestal are connected with cabinet, body pivot connection There are the sealing cover of matching setting, and the exhaust pipe of the bottom connection of cabinet, the folder for fixing base is connected in the cabinet Mechanism is held, and the driving mechanism for driving clamping device to rotate is installed on pedestal, by driving mechanism matrix is carried out Uniform rotation, so that contact of the matrix with gas source is more uniform, so that the thickness of coatings growth is more equal on matrix It is even;The upper surface of the cabinet is equipped with the admission gear with flow stabilizing function so that gas source it is more stable enter cabinet It is interior, be further conducive to the homoepitaxial of coating on matrix.
As a further solution of the present invention: the clamping device is mainly by inner thread sleeve, threaded rod, pressing plate, turntable It is formed with fixed link, the side inner wall of the cabinet is fixedly connected with the fixed link being laterally arranged, and one end of fixed link, which rotates, to be connected It being connected to turntable, and the other side inner wall of cabinet is rotatably connected to inner thread sleeve, inner thread sleeve internal screw thread is connected with threaded rod, One end of threaded rod extends to the outside of inner thread sleeve and is fixedly connected with pressing plate, and pressing plate and turntable are to positive setting.
As a further solution of the present invention: the driving mechanism is mainly by driven wheel, belt, decelerating motor and driving wheel The upper surface of composition, the pedestal is fixedly connected with decelerating motor by motor mount, and the output end of decelerating motor is fixed to be connected Connect the side center of rotation of driving wheel;One end of the inner thread sleeve runs through cabinet and is fixedly connected with the side rotation of driven wheel Center, and driving wheel is sequentially connected by belt and driven wheel.
As a further solution of the present invention: the admission gear is mainly by air inlet pipe, baffle-box, fixed plate, branched pipe Terminal pad, piston plate, connecting tube, spring one, connecting rod, sliding block and gag lever post, the upper surface of the cabinet are fixedly connected with slow Rush case, the upper surface of baffle-box is communicated with one end of connecting tube, the other end of connecting tube be connected to that cabinet upper surface opens up into In port;The upper surface of the baffle-box is also connected to one end of air inlet pipe, and the other end of air inlet pipe is connected with branched pipe terminal pad, And the piston plate of matching setting is slidably connected in baffle-box, the lower surface of piston plate is fixedly connected with fixed block, and fixed block turns Dynamic one end for being connected with connecting rod, the other end of connecting rod are rotatably connected to sliding block, and gag lever post is slided through sliding block and with sliding block Connection, and the both ends of gag lever post pass through fixed plate and are fixedly connected with the inner bottom wall of baffle-box, and string has spring one on gag lever post.
As a further solution of the present invention: heating source being installed, heating source is tantalum wire in the cabinet.
As a further solution of the present invention: the pedestal is connect by damping with cabinet, damping mainly by Spring two and telescopic rod composition, are connected with multiple springs two in rectangular distribution between the pedestal and cabinet, and pedestal and Symmetrically arranged telescopic rod there are two being also connected between cabinet.
As a further solution of the present invention: the upper surface of the pedestal is also fixedly connected with rubber pad, rubber pad it is upper End is fixedly connected with cabinet.
As a further solution of the present invention: the threaded rod is fixedly connected with the rotating block rotated coaxially, and rotating block leans on Nearly pressing plate setting, and the turntable face opposite with pressing plate is fixedly connected with convex block, convex block is close to the setting of the edge of turntable.
Compared with prior art, the beneficial effects of the present invention are:
1, the present invention is driven by driving mechanism is clamped the matrix that grips of mechanism uniform rotation at a slow speed, so that matrix Contact with gas source is more uniform, so that the thickness of coatings growth is more uniform on matrix, improves the quality of diamond coatings, and It effectively reduces the diamond coatings as caused by matrix surface is uneven and grows non-uniform problem, improve the applicable model of device It encloses;
2, the admission gear in the present invention makes to bring about the desired sensation with the function of current stabilization so as to buffer the fluctuation of gas source flow velocity Source is entered in cabinet with stable speed, is further conducive to the homoepitaxial of coating on matrix;
3, the vibration energy and decelerating motor outside buffering and release can be absorbed by the deformation of spring two by the present invention Vibration energy when work reduces matrix to reduce the influence that exterior vibration and decelerating motor work to cabinet endobasal-body The probability shaken in cabinet, to be conducive to the growth of diamond coatings.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of diamond-coated tool.
Fig. 2 is the partial enlarged view in Fig. 1 at A.
Fig. 3 is a kind of structural schematic diagram of admission gear in diamond-coated tool.
In figure: 1, driven wheel;2, belt;3, decelerating motor;4, heating source;5, cabinet;6, admission gear;7, sealing cover; 8, exhaust pipe;9, driving wheel;10, spring two;11, pedestal;12, telescopic rod;13, rubber pad;14, inner thread sleeve;15, screw thread Bar;16, rotating block;17, pressing plate;18, convex block;19, turntable;20, fixed link;601, air inlet pipe;602, baffle-box;603, fixed Plate;604, branched pipe terminal pad;605, piston plate;606, connecting tube;607, spring one;608, connecting rod;609, sliding block; 6010, gag lever post.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
Please refer to Fig. 1~3, in the embodiment of the present invention, a kind of diamond-coated tool, including pedestal 11, the pedestal 11 Upper surface be connected with cabinet 5, cabinet 5 is rotatably connected to the sealing cover 7 of matching setting, and the row of the bottom connection of cabinet 5 Tracheae 8 is connected with the clamping device for fixing base in the cabinet 5, and is equipped on pedestal 11 for driving clamping machine The driving mechanism of structure rotation makes matrix carry out uniform rotation, so that contact of the matrix with gas source is more by driving mechanism Add uniformly, so that the thickness of coatings growth is more uniform on matrix;The upper surface of the cabinet 5 is equipped with current stabilization function The admission gear 6 of energy, enters in cabinet 5 so that gas source is more stable, is further conducive to the uniform life of coating on matrix It is long.
The clamping device is mainly made of inner thread sleeve 14, threaded rod 15, pressing plate 17, turntable 19 and fixed link 20, The side inner wall of the cabinet 5 is fixedly connected with the fixed link 20 being laterally arranged, and one end of fixed link 20 is rotatably connected to turntable 19, and the other side inner wall of cabinet 5 is rotatably connected to inner thread sleeve 14,14 internal screw thread of inner thread sleeve is connected with threaded rod 15, one end of threaded rod 15 extends to the outside of inner thread sleeve 14 and is fixedly connected with pressing plate 17, and pressing plate 17 and turntable 19 are right Positive setting.
Need to illustrate: inner thread sleeve 14 is rotatablely connected by sealing bearing and cabinet 5, and passes through rotation threaded rod 15, So that threaded rod 15 extends to the increase of the length outside inner thread sleeve 14, to be squeezed by pressing plate 17 and turntable 19 fixed pre- Treated matrix.
Also need to illustrate: the pretreatment of matrix includes the techniques such as alkali cleaning, the preparation of copper filter layer and ultrasonic cleaning, this is existing There is technology, again without repeating.
The driving mechanism is mainly made of driven wheel 1, belt 2, decelerating motor 3 and driving wheel 9, the pedestal 11 it is upper Surface is fixedly connected with decelerating motor 3 by motor mount, and the output end of decelerating motor 3 is fixedly connected with the side of driving wheel 9 Center of rotation;One end of the inner thread sleeve 14 runs through cabinet 5 and is fixedly connected with the side center of rotation of driven wheel 1, and main Driving wheel 9 is sequentially connected by belt 2 and driven wheel 1.
It needs to illustrate: be worked by decelerating motor 3, so that driving wheel 9 rotates, under the action of belt 2, drive driven wheel 1 rotation, so that inner thread sleeve 14 rotates, and then the matrix for driving clamped mechanism to grip uniform rotation at a slow speed, So that contact of the matrix with gas source is more uniform, so that the thickness of coatings growth is more uniform on matrix, diamond coatings are improved Quality, and effectively reduce the diamond coatings as caused by matrix surface is uneven and grow non-uniform problem, improve device The scope of application.
Also need to illustrate: the lubrication of turntable 19 is good, when inner thread sleeve 14 rotates, threaded rod 15 and inner thread sleeve 14 rotate synchronously, to will not impact to clamping device.
The admission gear 6 is mainly by air inlet pipe 601, baffle-box 602, fixed plate 603, branched pipe terminal pad 604, piston The upper surface of plate 605, connecting tube 606, spring 1, connecting rod 608, sliding block 609 and gag lever post 6010, the cabinet 5 is fixed It is connected with baffle-box 602, the upper surface of baffle-box 602 is communicated with one end of connecting tube 606, the other end connection of connecting tube 606 In the air inlet that 5 upper surface of cabinet opens up;The upper surface of the baffle-box 602 is also connected to one end of air inlet pipe 601, air inlet pipe 601 other end is connected with branched pipe terminal pad 604, and the piston plate 605 of matching setting is slidably connected in baffle-box 602, The lower surface of piston plate 605 is fixedly connected with fixed block, and fixed block is rotatably connected to one end of connecting rod 608, connecting rod 608 The other end is rotatably connected to sliding block 609, and gag lever post 6010 is slidably connected through sliding block 609 and with sliding block 609, and gag lever post 6010 Both ends pass through fixed plate 603 and be fixedly connected with the inner bottom wall of baffle-box 602, and string has spring 1 on gag lever post 6010.
Need to illustrate: the gas source (carbon source air-flow, hydrogen gas stream etc.) that coating preparation needs is passed through cabinet by admission gear 6 In 5, so that the growth for diamond coatings provides necessary condition, and admission gear 6 has the function of current stabilization, so as to slow The fluctuation of qi of chong channel ascending adversely source stream speed is further conducive to the uniform of coating on matrix so that gas source is entered in cabinet 5 with stable speed Growth.
Also need to illustrate: carbon source air-flow, hydrogen gas stream snorkel the interface different from branched pipe terminal pad 604 connects respectively It connecing, mixed airflow is entered in baffle-box 602 by air inlet pipe 601, when the flow velocity of mixed airflow fluctuates, spring 607 Deformation occurs and piston plate 605 is moved for meeting, can be absorbed, buffers and discharge air-flow to work by the deformation of spring 1 The impact energy of seben 605, and pass through the movement of piston plate 605, so that the volume that the gas in baffle-box 602 is full of increases, To the fluctuation of buffer gas flow flow velocity, so that mixed airflow is sent into cabinet 5 with stable speed by connecting tube 606, thus Be conducive to the homoepitaxial of coating on matrix.
Heating source 4 is installed, heating source 4 is tantalum wire in the cabinet 5.
It needs to illustrate: the air in cabinet 5 being heated by heating source 4, provide must for the growths of diamond coatings The temperature condition wanted.
The pedestal 11 is connect by damping with cabinet 5, and damping is mainly by spring 2 10 and 12 groups of telescopic rod At being connected with multiple springs 2 10 in rectangular distribution between the pedestal 11 and cabinet 5, and between pedestal 11 and cabinet 5 Symmetrically arranged telescopic rod 12 there are two being also connected with.
It needs to illustrate: the vibration energy outside buffering and release can be absorbed by the deformation of spring 2 10 and the electricity that slows down Vibration energy when machine 3 works reduces to reduce the influence that exterior vibration and decelerating motor 3 work to 5 endobasal-body of cabinet The probability that matrix shakes in cabinet 5, to be conducive to the growth of diamond coatings.
The upper surface of the pedestal 11 is also fixedly connected with rubber pad 13, and the upper end of rubber pad 13 is fixedly connected with cabinet 5.
Need to illustrate: rubber pad 13 also functions to the effect of buffering.
The threaded rod 15 is fixedly connected with the rotating block 16 rotated coaxially, and rotating block 16 is arranged close to pressing plate 17, and turns The face opposite with pressing plate 17 of disk 19 is fixedly connected with convex block 18, and convex block 18 is arranged close to the edge of turntable 19.
It needs to illustrate: facilitating operator to rotate threaded rod 15 by rotating block 16, reduce the work difficulty of operator, And convex block 18 can play the role of limit, matrix can be placed on convex block 18, to reduce the fixed difficulty of matrix.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical", The orientation or positional relationship of the instructions such as "horizontal", "front", "rear" be based on the orientation or positional relationship shown in the drawings, merely to Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation, It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention, in the present invention, it is also necessary to explanation, Term " installation ", " connection " shall be understood in a broad sense, for example, can be fixedly connected, may be a detachable connection, or be integrally formed Connection, is also possible to be mechanically connected, is also possible to be indirectly connected with by intermediary, can understand that term exists by concrete condition Concrete meaning in the present invention
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (8)

1. a kind of diamond-coated tool, including pedestal (11), the upper surface of the pedestal (11) is connected with cabinet (5), case Body (5) is rotatably connected to the sealing cover (7) of matching setting, and the exhaust pipe (8) of the bottom connection of cabinet (5), which is characterized in that It is connected with the clamping device for fixing base in the cabinet (5), and is equipped on pedestal (11) for driving clamping device The driving mechanism of rotation makes matrix carry out uniform rotation, so that contact of the matrix with gas source is more by driving mechanism Uniformly, so that the thickness of coatings growth is more uniform on matrix;The upper surface of the cabinet (5) is equipped with current stabilization function Can admission gear (6) entered in cabinet (5) so that gas source is more stable, be further conducive to the equal of coating on matrix Even growth.
2. a kind of diamond-coated tool according to claim 1, which is characterized in that the clamping device is mainly by interior spiral shell Line sleeve (14), threaded rod (15), pressing plate (17), turntable (19) and fixed link (20) composition, the side inner wall of the cabinet (5) It is fixedly connected with the fixed link (20) being laterally arranged, one end of fixed link (20) is rotatably connected to turntable (19), and cabinet (5) Other side inner wall is rotatably connected to inner thread sleeve (14), and inner thread sleeve (14) internal screw thread is connected with threaded rod (15), screw thread One end of bar (15) extends to the outside of inner thread sleeve (14) and is fixedly connected with pressing plate (17), pressing plate (17) and turntable (19) To positive setting.
3. a kind of diamond-coated tool according to claim 1, which is characterized in that the driving mechanism is mainly by driven (1), belt (2), decelerating motor (3) and driving wheel (9) composition are taken turns, the upper surface of the pedestal (11) is solid by motor mount Surely it is connected with decelerating motor (3), the output end of decelerating motor (3) is fixedly connected with the side center of rotation of driving wheel (9);In described One end of screw shell (14) runs through cabinet (5) and is fixedly connected with the side center of rotation of driven wheel (1), and driving wheel (9) is logical Belt (2) and driven wheel (1) are crossed to be sequentially connected.
4. a kind of diamond-coated tool according to claim 1, which is characterized in that the admission gear (6) mainly by Air inlet pipe (601), baffle-box (602), fixed plate (603), branched pipe terminal pad (604), piston plate (605), connecting tube (606), the upper surface of spring one (607), connecting rod (608), sliding block (609) and gag lever post (6010), the cabinet (5) is fixed Be connected with baffle-box (602), the upper surface of baffle-box (602) is communicated with one end of connecting tube (606), connecting tube (606) it is another One end is connected in the air inlet that cabinet (5) upper surface opens up;The upper surface of the baffle-box (602) is also connected to air inlet pipe (601) one end, the other end of air inlet pipe (601) are connected with branched pipe terminal pad (604), and sliding connects in baffle-box (602) It is connected to the piston plate (605) of matching setting, the lower surface of piston plate (605) is fixedly connected with fixed block, fixed block rotation connection There is one end of connecting rod (608), the other end of connecting rod (608) is rotatably connected to sliding block (609), and gag lever post (6010) is through cunning Block (609) is simultaneously slidably connected with sliding block (609), and the both ends of gag lever post (6010) pass through fixed plate (603) and baffle-box (602) inner bottom wall is fixedly connected, and string has spring one (607) on gag lever post (6010).
5. a kind of diamond-coated tool according to claim 1, which is characterized in that be equipped with and add in the cabinet (5) Heat source (4), heating source (4) are tantalum wire.
6. a kind of diamond-coated tool according to claim 1, which is characterized in that the pedestal (11) passes through damping machine Structure is connect with cabinet (5), and damping is mainly made of spring two (10) and telescopic rod (12), the pedestal (11) and cabinet (5) multiple springs two (10) in rectangular distribution are connected between, and there are two being also connected between pedestal (11) and cabinet (5) Symmetrically arranged telescopic rod (12).
7. a kind of diamond-coated tool according to claim 1, which is characterized in that the upper surface of the pedestal (11) is also It is fixedly connected with rubber pad (13), the upper end of rubber pad (13) is fixedly connected with cabinet (5).
8. a kind of diamond-coated tool according to claim 2, which is characterized in that the threaded rod (15) is fixedly connected There is the rotating block (16) rotated coaxially, rotating block (16) is arranged close to pressing plate (17), and turntable (19) and pressing plate (17) are opposite Face is fixedly connected with convex block (18), and convex block (18) is arranged close to the edge of turntable (19).
CN201910590731.9A 2019-07-02 2019-07-02 Diamond coating tool Active CN110241399B (en)

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CN110241399B CN110241399B (en) 2023-10-20

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112453389A (en) * 2020-10-31 2021-03-09 湖北小蚂蚁金刚石工具有限公司 Device for coating diamond

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US5338580A (en) * 1988-11-15 1994-08-16 Canon Kabushiki Kaisha Method of preparation of functional deposited film by microwave plasma chemical vapor deposition
CN206394092U (en) * 2016-12-05 2017-08-11 郑州法图曼工具磨具有限公司 A kind of diamond diel for having a damping effect
CN206512273U (en) * 2017-03-20 2017-09-22 郑州嘉晨化工科技有限公司 A kind of radio frequency plasma chemical vapor deposition unit of diamond thin
CN107937883A (en) * 2017-12-25 2018-04-20 深圳先进技术研究院 The device of deposition of diamond coatings and the preparation method of deposition of diamond coatings
CN108060410A (en) * 2017-12-15 2018-05-22 浙江晶盛机电股份有限公司 Structure is protected for the admission line of flat-plate type PECVD

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5338580A (en) * 1988-11-15 1994-08-16 Canon Kabushiki Kaisha Method of preparation of functional deposited film by microwave plasma chemical vapor deposition
CN206394092U (en) * 2016-12-05 2017-08-11 郑州法图曼工具磨具有限公司 A kind of diamond diel for having a damping effect
CN206512273U (en) * 2017-03-20 2017-09-22 郑州嘉晨化工科技有限公司 A kind of radio frequency plasma chemical vapor deposition unit of diamond thin
CN108060410A (en) * 2017-12-15 2018-05-22 浙江晶盛机电股份有限公司 Structure is protected for the admission line of flat-plate type PECVD
CN107937883A (en) * 2017-12-25 2018-04-20 深圳先进技术研究院 The device of deposition of diamond coatings and the preparation method of deposition of diamond coatings

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112453389A (en) * 2020-10-31 2021-03-09 湖北小蚂蚁金刚石工具有限公司 Device for coating diamond
CN112453389B (en) * 2020-10-31 2023-01-13 湖北小蚂蚁金刚石工具有限公司 Device for coating diamond

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