CN110527891A - Hard alloy in low cobalt surface diamond coating and preparation method thereof - Google Patents
Hard alloy in low cobalt surface diamond coating and preparation method thereof Download PDFInfo
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- CN110527891A CN110527891A CN201910871141.3A CN201910871141A CN110527891A CN 110527891 A CN110527891 A CN 110527891A CN 201910871141 A CN201910871141 A CN 201910871141A CN 110527891 A CN110527891 A CN 110527891A
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
- C22C1/04—Making non-ferrous alloys by powder metallurgy
- C22C1/05—Mixtures of metal powder with non-metallic powder
- C22C1/051—Making hard metals based on borides, carbides, nitrides, oxides or silicides; Preparation of the powder mixture used as the starting material therefor
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
- C22C29/005—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides comprising a particular metallic binder
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
- C22C29/02—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
- C22C29/06—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
- C22C29/067—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds comprising a particular metallic binder
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C29/00—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides
- C22C29/02—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides
- C22C29/06—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds
- C22C29/08—Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides based on carbides or carbonitrides based on carbides, but not containing other metal compounds based on tungsten carbide
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C2204/00—End product comprising different layers, coatings or parts of cermet
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Abstract
The present invention relates to a kind of hard alloy in low cobalt surface diamond coatings and preparation method thereof, using the hard alloy of low cobalt content as basis material depositing diamond film.Using the superior physical properties of graphene, the toughness of low cobalt content hard alloy, the basis material for diamond coatings are promoted.The chemical pretreatment time before reducing diamond coatings avoids prolonged chemical reaction to the corrosion damage of basis material, preferably keeps the dimensional accuracy of product.Meanwhile thermal diffusion effect of cobalt during Diamond coating deposition is alleviated, improve the adhesive strength of coating and matrix.It realizes the double effects that cobalt element adverse effect is promoted and eliminated for diamond coating for hard alloy matrix toughness, provides effective ways to improve diamond coating for hard alloy properties of product.
Description
Technical field
The invention belongs to diamond coatings and its preparation field, in particular to a kind of hard alloy in low cobalt surface diamond applies
Layer and preparation method thereof.
Background technique
High rigidity, high-wearing feature, high heat conductance, low-friction coefficient and the good chemical inertness of diamond coatings etc. are many
Excellent properties, so that it is widely applied in tool and mould field.In hard alloy tool and mould surface deposition of diamond coatings, not only may be used
To increase substantially the service life of tool and mould, moreover it is possible to improve the machined surface quality of workpiece.
The balance of basis material hardness and toughness in order to balance, the hard alloy substrate amount containing cobalt that diamond coatings are selected are logical
It is often 6wt.%~8wt.%.However, in order to eliminate the urging during Diamond coating deposition of the cobalt element in basis material
Graphitizing before preparing diamond coatings, and must carry out " cobalt is removed in chemical attack " pretreatment to hard alloy substrate.
The amount containing cobalt of matrix is higher, and the time of chemical attack is longer.While " removing cobalt ", the carbonization tungsten structure in matrix is brought not
Evitable damage, to influence the performance of basis material.So that the performance of diamond coatings product can not achieve the desired results.
Through the patent retrieval discovery to the prior art, Chinese Patent Application No. 201510673007.4 and 03117958.4 is mentioned
Out using the gradient hard alloy of the poor cobalt of superficial layer as basis material, diamond coatings are prepared, to solve cobalt element to gold
The influence of hard rock coating deposition, combines the intensity and toughness of matrix.But the rich cobalt layers of gradient hard alloy matrix core
During Diamond coating deposition, since matrix is heated, what the thermal diffusion effect of cobalt still can cause diamond coatings urges stone
Inkization and reduction film base adhesive strength.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of hard alloy substrate toughening diamond coatings and its preparations
Method, overcoming in the prior art is 6wt.%~8wt.% applied to amount containing cobalt in the hard alloy of diamond coatings, in order to obtain
Preferable pretreating effect, need to carry out the chemical pretreatment of long period, while " removing cobalt ", also damaged the knot of matrix
Structure performance.In addition, the higher cobalt content of intrinsic silicon during Diamond coating deposition, has stronger thermal diffusion to act on, lead
The technical problem for causing diamond coatings low with the bond strength of matrix.Low cobalt content hard alloy substrate toughening deposits in the present invention
Diamond coatings.
A kind of diamond coatings of the invention, the coating is using hard alloy as basis material depositing diamond film；
It is characterized in that, by mass percentage, the raw material components of hard alloy include: graphene (powder) 0.1wt.%~
1wt.%, cobalt 2wt.%~3wt.%, tungsten carbide (powder) 97.9wt.%-96wt.%.
A kind of preparation method of diamond coatings of the invention, comprising:
(1) by the graphene of dispersion, cobalt powder and tungsten carbide powder ball milling mixing, slurry is obtained, is dried in vacuo, matrix is burnt
Form type, obtains carbide matrix material；
(2) by above-mentioned substrate pretreated, deposition of diamond coatings to get.
The preferred embodiment of above-mentioned preparation method is as follows:
The graphene dispersed in the step (1) specifically: use dehydrated alcohol to disperse solution, dehydrated alcohol and graphite
The proportion of alkene is 100mL:(0.1~0.5) g, using sonic oscillation dispersing technology, wherein supersonic frequency is 40KHz；Ultrasound works
The duty ratio of time is 1:1；The time of sonic oscillation is 4~6h.
Ball milling mixing specific process parameter in the step (1) are as follows: the abrading-ball used is the hard alloy WC- of diameter 5mm
3wt.%Co ball, the revolving speed of ball mill are 300~500rpm, and Ball-milling Time is 6~8h；Wherein dehydrated alcohol: powder: abrading-ball
Proportion are as follows: (1~2) mL:1g:(7~10) g.
Vacuum drying in the step (1) are as follows: it by the slurry after mixing, is placed in a vacuum drying oven, is dried,
In drying process, heating temperature is 90~100 DEG C, until in slurry without visible liquid when, stop heating (close heating function), from
2~3h is so dried, is dried in overall process, the holding indoor pressure of vacuum is 10000~15000Pa.
Sinter molding in the step (1): by the powder after drying, after being pressed into the shape of design requirement, using vacuum
Pressure sintering processes, sinter molding, temperature be 1380 DEG C, pressure 40MPa.
Pretreatment in the step (2) specifically: matrix is immersed in alkaline solution treatment 10min, is cleaned, drying, then will
Matrix after alkali process is immersed in acid solution natural reaction 10s, cleans, drying；With the mixed solution of bortz powder and glycerine
Grinding is cleaned, drying；Wherein lye is the potassium ferricyanide: potassium hydroxide: water=1g:1g:10mL；Acid solution is hydrochloric acid: hydrogen peroxide
=1mL:4mL.
Deposition in the step (2) specifically: set pretreated matrix using hot-wire chemical gas-phase deposition method
In chemical vapor depsotition equipment, after the vacuum chamber pressure of equipment reaches 5Pa or less, input reaction working gas methane flow
10~20sccm, 1000~2000sccm of hydrogen flowing quantity, adjusting reaction pressure are 2000~4000Pa, coat deposition time 6
~10h.The present invention provides a kind of diamond coatings of the method preparation.
The present invention provides a kind of application of diamond coatings.
Beneficial effect
(1) it is unfavorable to coating to solve high cobalt content in the hard alloy substrate of diamond coatings in the prior art by the present invention
The problem of can not coordinating with matrix strength toughness is influenced, a kind of low cobalt content carbide matrix for diamond coatings is provided
Body toughening technique and coating production；
(2) using excellent characteristics such as graphene intensity height, good toughness, the toughness of low cobalt content hard alloy substrate is improved,
The composition of graphene is carbon, does not introduce other impurities element in hard alloy preparation process, so that the composition of hard alloy is not
It will receive influence；
(3) when the hard alloy of low cobalt content is used for diamond coatings, the chemical attack time of pretreatment stage " alkali+acid "
It reduces, avoids long-time chemical attack to the adverse effect of cemented carbide material performance and to finished work-piece dimensional accuracy
It influences, while also avoiding high cobalt content inside conventional rigid alloy to lead to coating quality and film in the thermal diffusion of deposition process
The problem of film-substrate binding strength difference；
(4) present invention utilizes the superior physical properties of graphene, promotes the toughness of low cobalt content hard alloy, is used for Buddha's warrior attendant
The basis material of stone coating, the chemical pretreatment time before reducing diamond coatings avoid prolonged chemical reaction to base
The corrosion damage of body material preferably keeps the dimensional accuracy of product.Meanwhile cobalt is alleviated during Diamond coating deposition
Thermal diffusion effect, improve coating and matrix adhesive strength, realize for diamond coating for hard alloy matrix toughness promoted
With the double effects for eliminating cobalt element adverse effect, efficacious prescriptions have been provided to improve diamond coating for hard alloy properties of product
Method.
Detailed description of the invention
Fig. 1 is the impression shape of ordinary rigid alloy (6wt.%Co) matrix surface diamond coatings obtained in comparative example
Looks；
Fig. 2 is enhancing low cobalt content (3wt.%Co) hard alloy (the 0.3wt.% graphite of graphene made from embodiment 1
Alkene) matrix surface diamond coatings vickers indentation.
Fig. 3 is enhancing low cobalt content (3wt.%Co) hard alloy (the 0.5wt.% graphite of graphene made from embodiment 2
Alkene) matrix surface diamond coatings vickers indentation.
Specific embodiment
Present invention will be further explained below with reference to specific examples.It should be understood that these embodiments are merely to illustrate the present invention
Rather than it limits the scope of the invention.In addition, it should also be understood that, after reading the content taught by the present invention, those skilled in the art
Member can make various changes or modifications the present invention, and such equivalent forms equally fall within the application the appended claims and limited
Range.
Graphene involved in embodiment and comparative example be commercial product, 5-10 microns of piece diameter, 3-10 nanometers of thickness；Cobalt
Powder is commercial product, 1 micron of particle diameter；Tungsten carbide powder is commercial product, and particle diameter is 0.8 micron.
Embodiment 1
It is heavy that graphene enhances low cobalt content (3wt.%Co) hard alloy (0.3wt.% graphene) matrix diamond coating
Product.
(1) graphene dispersion: weighing graphene powder 0.3g with precision electronic balance, pour into the dehydrated alcohol of 100mL,
Using cell pulverization instrument, setting supersonic frequency is 40KHz；The duty ratio of ultrasound works time is 1:1；The time of sonic oscillation is
4h。
(2) ball milling mixing: weighing the cobalt powder of 2.991g and the tungsten-carbide powder of 96.709g with precision electronic balance, together with
(1) graphene-alcoholic solution in pours into ball grinder.Hard alloy (WC-wt.3%Co) ball for weighing 700g diameter 5mm, puts
Enter ball grinder.100mL dehydrated alcohol is added in ball grinder, the revolving speed that ball mill is arranged is 400rpm, Ball-milling Time 8h.
(3) it is dried in vacuo: the slurry after ball milling being placed in a vacuum drying oven, is dried.Pressure in drying box is set
Power is 15000Pa, and heating temperature is 90 DEG C, until in slurry without visible liquid when, close heating function, spontaneously dry 3h.
(4) matrix sinter molding: the powder after drying is suppressed after the sieve sieving of 120 mesh using powder compressing machine
It is preforming.Using vacuum sintering furnace, it is 1380 DEG C, pressure 40MPa, sintering time 40min that sintering temperature, which is arranged,.It is sintered
Sample, with metallographical polishing machine by matrix surface grinding and polishing at mirror surface.
(5) substrate pretreated: after the matrix in step (4) is cleaned by ultrasonic with dehydrated alcohol, drying.Matrix is immersed in
Aqueous slkali (potassium ferricyanide: potassium hydroxide: water=1g:1g:10mL) handles 10min, cleans, drying.Again by the base after alkali process
Body is immersed in acid solution (hydrochloric acid: hydrogen peroxide=1mL:4mL) natural reaction 10s, cleans, drying.With bortz powder and glycerine
Mixed solution grinding, clean, drying.
(6) Diamond coating deposition: using hot-wire chemical gas-phase deposition method, by pretreated matrix in step (5),
It is placed in chemical vapor depsotition equipment, after the vacuum chamber pressure of equipment reaches 5Pa or less, input reaction working gas methane stream
15sccm, hydrogen flowing quantity 1000sccm are measured, adjusting reaction pressure is 3000Pa, coat deposition time 6h.
Embodiment 2
It is heavy that graphene enhances low cobalt content (3wt.%Co) hard alloy (0.5wt.% graphene) matrix diamond coating
Product.
(1) graphene dispersion: weighing graphene powder 0.5g with precision electronic balance, pour into the dehydrated alcohol of 100mL,
Using cell pulverization instrument, setting supersonic frequency is 40KHz；The duty ratio of ultrasound works time are as follows: 1:1；The time of sonic oscillation
For 4h.
(2) ball milling mixing: weighing the cobalt powder of 2.985g and the tungsten-carbide powder of 96.515g with precision electronic balance, together with
(1) graphene-alcoholic solution in pours into ball grinder.Hard alloy (WC-wt.3%Co) ball for weighing 1000g diameter 5mm, puts
Enter ball grinder.100mL dehydrated alcohol is added in ball grinder, the revolving speed that ball mill is arranged is 400rpm, Ball-milling Time 8h.
(3) it is dried in vacuo: the slurry after ball milling being placed in a vacuum drying oven, is dried.Pressure in drying box is set
Power is 15000Pa, and heating temperature is 90 DEG C, until in slurry without visible liquid when, close heating function, spontaneously dry 3h.
(4) matrix sinter molding: the powder after drying is suppressed after the sieve sieving of 120 mesh using powder compressing machine
It is preforming.Using vacuum sintering furnace, it is 1380 DEG C, pressure 40MPa, sintering time 40min that sintering temperature, which is arranged,.It is sintered
Sample, with metallographical polishing machine by matrix surface grinding and polishing at mirror surface.
(5) substrate pretreated: after the matrix in step (4) is cleaned by ultrasonic with dehydrated alcohol, drying.Matrix is immersed in
Aqueous slkali (potassium ferricyanide: potassium hydroxide: water=1g:1g:10mL) handles 10min, cleans, drying.Again by the base after alkali process
Body is immersed in acid solution (hydrochloric acid: hydrogen peroxide=1mL:4mL) natural reaction 10s, cleans, drying.With bortz powder and glycerine
Mixed solution grinding, clean, drying.
(6) Diamond coating deposition: using hot-wire chemical gas-phase deposition method, by pretreated matrix in step (5),
It is placed in chemical vapor depsotition equipment, after the vacuum chamber pressure of equipment reaches 5Pa or less, input reaction working gas methane stream
15sccm, hydrogen flowing quantity 1000sccm are measured, adjusting reaction pressure is 3000Pa, coat deposition time 6h.
Comparative example
Ordinary rigid alloy (6wt.%Co) matrix diamond coating deposition.
(1) ball milling mixing: the tungsten-carbide powder of the cobalt powder and 94g that weigh 6g with precision electronic balance pours into ball grinder.Claim
Hard alloy (WC-wt.6%Co) ball for measuring 1000g diameter 5mm, is put into ball grinder.The anhydrous second of 200mL is added in ball grinder
Alcohol, the revolving speed that ball mill is arranged is 400rpm, Ball-milling Time 8h.
(2) it is dried in vacuo: the slurry after ball milling being placed in a vacuum drying oven, is dried.Pressure in drying box is set
Power is 15000Pa, and heating temperature is 90 DEG C, until in slurry without visible liquid when, close heating function, spontaneously dry 3h.
(3) matrix sinter molding: the powder after drying is suppressed after the sieve sieving of 120 mesh using powder compressing machine
It is preforming.Using vacuum sintering furnace, it is 1380 DEG C, pressure 40MPa, sintering time 40min that sintering temperature, which is arranged,.It is sintered
Sample, with metallographical polishing machine by matrix surface grinding and polishing at mirror surface.Comparison
(4) substrate pretreated: after the matrix in step (3) is cleaned by ultrasonic with dehydrated alcohol, drying.Matrix is immersed in
Aqueous slkali (potassium ferricyanide: potassium hydroxide: water=1g:1g:10mL) handles 10min, cleans, drying.Again by the base after alkali process
Body is immersed in acid solution (hydrochloric acid: hydrogen peroxide=1mL:4mL) natural reaction 10s, cleans, drying.With bortz powder and glycerine
Mixed solution grinding, clean, drying.
(5) Diamond coating deposition: using hot-wire chemical gas-phase deposition method, by pretreated matrix in step (4),
It is placed in chemical vapor depsotition equipment, after the vacuum chamber pressure of equipment reaches 5Pa or less, input reaction working gas methane stream
15sccm, hydrogen flowing quantity 1000sccm are measured, adjusting reaction pressure is 3000Pa, coat deposition time 6h.
Detect sample obtained by step (4) in embodiment 1, step (4) institute in embodiment 2 respectively using microhardness testers
Sample obtained by step (3), is calculated by indentation load and indentation crack extension length in sample obtained, comparative example
Fracture toughness numerical value in the case of three kinds is respectively 13.1 ± 0.1MPam1/2, 12.9 ± 0.1MPam1/2With 10.9 ±
0.1MPa·m1/2.The result shows that process of the invention, can be improved the toughness of hard alloy.
According to GB/T 230.1-2018 " metal material Rockwell hardness test part 1: test method ", diamond is utilized
Circular cone pressure head (120 ° of cone angle, apical curvature radius 0.2mm) carries out indentation test using 980N test force.It is aobvious with scanning electron
Micro mirror detects vickers indentation.Detect diamond coatings sample, the embodiment 1 of ordinary rigid alloy substrate respectively using the above method
With embodiment 2 prepare diamond coatings sample, vickers indentation respectively as shown in Figure 1, Figure 2 and Figure 3.It can be seen that in Fig. 1
The coating shedding area of sample surfaces is greater than the sample surfaces in Fig. 2 and Fig. 3.The result shows that the low cobalt of the method for the present invention preparation contains
The coating adhesive strength for measuring graphene enhancing cemented carbide substrate surfaces is higher than commonly compared with the hard alloy of high cobalt content.
Claims (10)
1. a kind of diamond coatings, the coating is using hard alloy as basis material depositing diamond film；
It is characterized in that, by mass percentage, the raw material components of hard alloy include: graphene 0.1~1%, cobalt 2~3%, carbon
Change tungsten 97.9-96%.
2. a kind of preparation method of diamond coatings, comprising:
(1) by the graphene of dispersion, cobalt powder and tungsten carbide ball milling mixing, slurry is obtained, is dried in vacuo, sinter molding obtains
To hard alloy substrate；
(2) by above-mentioned substrate pretreated, deposition of diamond coatings to get.
3. preparation method according to claim 2, which is characterized in that the graphene dispersed in the step (1) specifically: adopt
It is to disperse solution with dehydrated alcohol, the proportion of dehydrated alcohol and graphene is 100mL:(0.1~0.5) g, utilize sonic oscillation point
Day labor skill, wherein supersonic frequency is 40KHz；The duty ratio of ultrasound works time is 1:1；The time of sonic oscillation is 4~6h.
4. preparation method according to claim 2, which is characterized in that ball milling mixing specific process parameter in the step (1)
Are as follows: for the abrading-ball used for the hard alloy WC-3wt.%Co ball of diameter 5mm, the revolving speed of ball mill is 300~500rpm, ball milling
Time is 6~8h.
5. preparation method according to claim 2, which is characterized in that vacuum drying in the step (1) are as follows: drying process
In, heating temperature is 90~100 DEG C, until in slurry without visible liquid when, stop heating, spontaneously dry 2~3h, dry overall process
In, the holding indoor pressure of vacuum is 10000~15000Pa.
6. preparation method according to claim 2, which is characterized in that the temperature of sinter molding is 1380 in the step (1)
DEG C, pressure 40MPa.
7. preparation method according to claim 2, which is characterized in that pretreatment in the step (2) specifically: soak matrix
It not in alkaline solution treatment 10min, cleans, drying, then the matrix after alkali process is immersed in acid solution natural reaction 10s, clean,
Drying；It is ground, is cleaned with the mixed solution of bortz powder and glycerine, drying；Wherein lye is the potassium ferricyanide: potassium hydroxide:
Water=1g:1g:10mL；Acid solution is hydrochloric acid: hydrogen peroxide=1mL:4mL.
8. preparation method according to claim 2, which is characterized in that deposition in the step (2) specifically: use heated filament
It learns vapor deposition method pretreated matrix is placed in chemical vapor depsotition equipment, the vacuum chamber pressure to equipment reaches
After 5Pa or less, input reaction 10~20sccm of working gas methane flow, 1000~2000sccm of hydrogen flowing quantity adjust reaction
Pressure is 2000~4000Pa, and coat deposition time is 6~10h.
9. a kind of diamond coatings of claim 2 the method preparation.
10. a kind of application of diamond coatings described in claim 1.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111057992A (en) * | 2020-01-07 | 2020-04-24 | 汇专科技集团股份有限公司 | Method for preparing diamond coating on surface of hard alloy with wide cobalt content and tool and die with diamond coating |
| CN112831749A (en) * | 2021-01-06 | 2021-05-25 | 广东省科学院新材料研究所 | Hard alloy matrix and surface pretreatment method thereof |
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| CN111057992A (en) * | 2020-01-07 | 2020-04-24 | 汇专科技集团股份有限公司 | Method for preparing diamond coating on surface of hard alloy with wide cobalt content and tool and die with diamond coating |
| CN112831749A (en) * | 2021-01-06 | 2021-05-25 | 广东省科学院新材料研究所 | Hard alloy matrix and surface pretreatment method thereof |
| CN112831749B (en) * | 2021-01-06 | 2022-11-11 | 广东省科学院新材料研究所 | Hard alloy matrix and surface pretreatment method thereof |
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