USD926715S1 - Support for a wafer for fabricating a semiconductor - Google Patents
Support for a wafer for fabricating a semiconductor Download PDFInfo
- Publication number
- USD926715S1 USD926715S1 US29/712,911 US201929712911F USD926715S US D926715 S1 USD926715 S1 US D926715S1 US 201929712911 F US201929712911 F US 201929712911F US D926715 S USD926715 S US D926715S
- Authority
- US
- United States
- Prior art keywords
- fabricating
- wafer
- support
- semiconductor
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Description
Claims (1)
- The ornamental design for a support for a wafer for fabricating a semiconductor, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPD2019-16842F JP1651258S (en) | 2019-07-29 | 2019-07-29 | |
JP2019-016842 | 2019-07-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD926715S1 true USD926715S1 (en) | 2021-08-03 |
Family
ID=69183509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/712,911 Active USD926715S1 (en) | 2019-07-29 | 2019-11-12 | Support for a wafer for fabricating a semiconductor |
Country Status (3)
Country | Link |
---|---|
US (1) | USD926715S1 (en) |
JP (1) | JP1651258S (en) |
TW (1) | TWD207362S (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD947913S1 (en) * | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD953309S1 (en) * | 2020-03-11 | 2022-05-31 | Zhicheng Zhou | TV antenna |
USD965044S1 (en) * | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
USD975665S1 (en) * | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030029570A1 (en) * | 2000-10-16 | 2003-02-13 | Keisuke Kawamura | Wafer holder, wafer support member, wafer holding device, and heat treating furnance |
US6572814B2 (en) * | 1998-09-08 | 2003-06-03 | Applied Materials Inc. | Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas |
US20040124413A1 (en) * | 2002-12-26 | 2004-07-01 | Kazuhisa Arai | Wafer support plate |
USD552565S1 (en) * | 2005-09-08 | 2007-10-09 | Tokyo Ohka Kogyo Co., Ltd. | Supporting plate |
USD606952S1 (en) * | 2009-01-16 | 2009-12-29 | Asm Genitech Korea Ltd. | Plasma inducing plate for semiconductor deposition apparatus |
USD614593S1 (en) * | 2008-07-21 | 2010-04-27 | Asm Genitech Korea Ltd | Substrate support for a semiconductor deposition apparatus |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD784276S1 (en) * | 2013-08-06 | 2017-04-18 | Applied Materials, Inc. | Susceptor assembly |
USD819580S1 (en) * | 2016-04-01 | 2018-06-05 | Veeco Instruments, Inc. | Self-centering wafer carrier for chemical vapor deposition |
USD830981S1 (en) * | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
USD864134S1 (en) * | 2018-10-24 | 2019-10-22 | Asm Ip Holding B.V. | Susceptor |
US10854498B2 (en) * | 2011-07-15 | 2020-12-01 | Asm Ip Holding B.V. | Wafer-supporting device and method for producing same |
-
2019
- 2019-07-29 JP JPD2019-16842F patent/JP1651258S/ja active Active
- 2019-11-04 TW TW108306786F patent/TWD207362S/en unknown
- 2019-11-12 US US29/712,911 patent/USD926715S1/en active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6572814B2 (en) * | 1998-09-08 | 2003-06-03 | Applied Materials Inc. | Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas |
US20030029570A1 (en) * | 2000-10-16 | 2003-02-13 | Keisuke Kawamura | Wafer holder, wafer support member, wafer holding device, and heat treating furnance |
US20040124413A1 (en) * | 2002-12-26 | 2004-07-01 | Kazuhisa Arai | Wafer support plate |
USD552565S1 (en) * | 2005-09-08 | 2007-10-09 | Tokyo Ohka Kogyo Co., Ltd. | Supporting plate |
USD614593S1 (en) * | 2008-07-21 | 2010-04-27 | Asm Genitech Korea Ltd | Substrate support for a semiconductor deposition apparatus |
USD606952S1 (en) * | 2009-01-16 | 2009-12-29 | Asm Genitech Korea Ltd. | Plasma inducing plate for semiconductor deposition apparatus |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
US10854498B2 (en) * | 2011-07-15 | 2020-12-01 | Asm Ip Holding B.V. | Wafer-supporting device and method for producing same |
USD784276S1 (en) * | 2013-08-06 | 2017-04-18 | Applied Materials, Inc. | Susceptor assembly |
USD819580S1 (en) * | 2016-04-01 | 2018-06-05 | Veeco Instruments, Inc. | Self-centering wafer carrier for chemical vapor deposition |
USD830981S1 (en) * | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
USD864134S1 (en) * | 2018-10-24 | 2019-10-22 | Asm Ip Holding B.V. | Susceptor |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD947913S1 (en) * | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD975665S1 (en) * | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD965044S1 (en) * | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
USD953309S1 (en) * | 2020-03-11 | 2022-05-31 | Zhicheng Zhou | TV antenna |
USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP1651258S (en) | 2020-01-27 |
TWD207362S (en) | 2020-09-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |
|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO SMALL (ORIGINAL EVENT CODE: SMAL); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY |