USD1022933S1 - Wafer support of semiconductor manufacturing apparatus - Google Patents
Wafer support of semiconductor manufacturing apparatus Download PDFInfo
- Publication number
- USD1022933S1 USD1022933S1 US29/828,155 US202229828155F USD1022933S US D1022933 S1 USD1022933 S1 US D1022933S1 US 202229828155 F US202229828155 F US 202229828155F US D1022933 S USD1022933 S US D1022933S
- Authority
- US
- United States
- Prior art keywords
- manufacturing apparatus
- semiconductor manufacturing
- wafer support
- view
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 239000004065 semiconductor Substances 0.000 title claims description 3
Images
Description
The broken lines in FIGS. 8 and 9 define the boundary of the enlarged portion view of FIG. 9 and form no part of the claimed design.
Claims (1)
- The ornamental design for a wafer support of semiconductor manufacturing apparatus, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021-018468D | 2021-08-27 | ||
JP2021018468F JP1706322S (en) | 2021-08-27 | 2021-08-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD1022933S1 true USD1022933S1 (en) | 2024-04-16 |
Family
ID=80218929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/828,155 Active USD1022933S1 (en) | 2021-08-27 | 2022-02-24 | Wafer support of semiconductor manufacturing apparatus |
Country Status (3)
Country | Link |
---|---|
US (1) | USD1022933S1 (en) |
JP (1) | JP1706322S (en) |
TW (1) | TWD230199S (en) |
Citations (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4355974A (en) * | 1980-11-24 | 1982-10-26 | Asq Boats, Inc. | Wafer boat |
USD291413S (en) * | 1984-07-30 | 1987-08-18 | Tokyo Denshi Kagaku Co., Ltd. | Wafer holding frame |
US4993559A (en) * | 1989-07-31 | 1991-02-19 | Motorola, Inc. | Wafer carrier |
USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
US6095806A (en) * | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
US6171400B1 (en) * | 1998-10-02 | 2001-01-09 | Union Oil Company Of California | Vertical semiconductor wafer carrier |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
USD926715S1 (en) * | 2019-07-29 | 2021-08-03 | Epicrew Corporation | Support for a wafer for fabricating a semiconductor |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
-
2021
- 2021-08-27 JP JP2021018468F patent/JP1706322S/ja active Active
-
2022
- 2022-02-18 TW TW111300807F patent/TWD230199S/en unknown
- 2022-02-24 US US29/828,155 patent/USD1022933S1/en active Active
Patent Citations (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4355974A (en) * | 1980-11-24 | 1982-10-26 | Asq Boats, Inc. | Wafer boat |
US4355974B1 (en) * | 1980-11-24 | 1988-10-18 | ||
USD291413S (en) * | 1984-07-30 | 1987-08-18 | Tokyo Denshi Kagaku Co., Ltd. | Wafer holding frame |
US4993559A (en) * | 1989-07-31 | 1991-02-19 | Motorola, Inc. | Wafer carrier |
USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6095806A (en) * | 1998-06-24 | 2000-08-01 | Tokyo Electron Limited | Semiconductor wafer boat and vertical heat treating system |
US6171400B1 (en) * | 1998-10-02 | 2001-01-09 | Union Oil Company Of California | Vertical semiconductor wafer carrier |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
USD926715S1 (en) * | 2019-07-29 | 2021-08-03 | Epicrew Corporation | Support for a wafer for fabricating a semiconductor |
Non-Patent Citations (1)
Title |
---|
Creative Commons Attribution 3.0, Mechanical structure diagram of the mechanism for storing wafers 1. Chain 2. Limit sensor 3. Guide col. 4. Pressure sensor 5. Pallet 6. Support pole, https://www.researchgate.net/figure/Mechanical-structure-diagram-of-the-mechanism-for-storing-wafers-1-Chain-Jan.-2020. (Year: 2020). * |
Also Published As
Publication number | Publication date |
---|---|
TWD230199S (en) | 2024-03-01 |
JP1706322S (en) | 2022-01-31 |
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Legal Events
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FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |