USD366868S - Wafer boat or rack - Google Patents

Wafer boat or rack Download PDF

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Publication number
USD366868S
USD366868S US29/013,666 US1366693F USD366868S US D366868 S USD366868 S US D366868S US 1366693 F US1366693 F US 1366693F US D366868 S USD366868 S US D366868S
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US
United States
Prior art keywords
rack
wafer boat
view
boat
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/013,666
Inventor
Tetu Ohsawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Tokyo Electron Tohoku Ltd
Original Assignee
Tokyo Electron Ltd
Tokyo Electron Tohoku Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Tokyo Electron Tohoku Ltd filed Critical Tokyo Electron Ltd
Priority to US29/013,666 priority Critical patent/USD366868S/en
Assigned to TOKYO ELECTRON TOBOKU KABUSHIKI KAISHA, TOKYO ELECTRON KABUSHIKI KAISHA reassignment TOKYO ELECTRON TOBOKU KABUSHIKI KAISHA ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OHSAWA, TETU
Application granted granted Critical
Publication of USD366868S publication Critical patent/USD366868S/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front elevational view of a wafer boat or rack showing my new design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a right side elevational view thereof, the left side elevational view being a mirror image and, therefore, not being shown;
FIG. 4 is a top view thereof;
FIG. 5 is a bottom view thereof;
FIG. 6 is a longitudinal sectional view on section 6--6 in FIG. 1;
FIG. 7 is a transverse sectional view on section 7--7 in FIG. 1;
FIG. 8 is an enlarged view of a portion of FIG. 7.

Claims (1)

  1. The ornamental design for wafer boat or rack, as shown and described.
US29/013,666 1993-09-29 1993-09-29 Wafer boat or rack Expired - Lifetime USD366868S (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/013,666 USD366868S (en) 1993-09-29 1993-09-29 Wafer boat or rack

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/013,666 USD366868S (en) 1993-09-29 1993-09-29 Wafer boat or rack

Publications (1)

Publication Number Publication Date
USD366868S true USD366868S (en) 1996-02-06

Family

ID=71130317

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/013,666 Expired - Lifetime USD366868S (en) 1993-09-29 1993-09-29 Wafer boat or rack

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US (1) USD366868S (en)

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
US20100282695A1 (en) * 2008-11-05 2010-11-11 Mark Sandifer High strength camfer on quartzware
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD769201S1 (en) * 2014-11-20 2016-10-18 Tokyo Electron Limited Wafer boat
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD789310S1 (en) * 2014-11-20 2017-06-13 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD908103S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD908102S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD939459S1 (en) * 2019-08-07 2021-12-28 Kokusai Electric Corporation Boat for wafer processing apparatus
USD1022933S1 (en) * 2021-08-27 2024-04-16 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
US20100282695A1 (en) * 2008-11-05 2010-11-11 Mark Sandifer High strength camfer on quartzware
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD769201S1 (en) * 2014-11-20 2016-10-18 Tokyo Electron Limited Wafer boat
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD789310S1 (en) * 2014-11-20 2017-06-13 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD908103S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD908102S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD939459S1 (en) * 2019-08-07 2021-12-28 Kokusai Electric Corporation Boat for wafer processing apparatus
USD1022933S1 (en) * 2021-08-27 2024-04-16 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus

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