USD772183S1 - Wafer boat - Google Patents
Wafer boat Download PDFInfo
- Publication number
- USD772183S1 USD772183S1 US29/525,561 US201529525561F USD772183S US D772183 S1 USD772183 S1 US D772183S1 US 201529525561 F US201529525561 F US 201529525561F US D772183 S USD772183 S US D772183S
- Authority
- US
- United States
- Prior art keywords
- wafer boat
- view
- taken along
- along line
- enlarged portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Description
The broken lines shown in the drawings represent portions of the wafer boat that form no part of the claimed design. All sides not shown form no part of the claimed design.
Claims (1)
- The ornamental design for a wafer boat, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPD2014-25968F JP1537313S (en) | 2014-11-20 | 2014-11-20 | |
JP2014-025968 | 2014-11-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD772183S1 true USD772183S1 (en) | 2016-11-22 |
Family
ID=54398946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/525,561 Active USD772183S1 (en) | 2014-11-20 | 2015-04-30 | Wafer boat |
Country Status (3)
Country | Link |
---|---|
US (1) | USD772183S1 (en) |
JP (1) | JP1537313S (en) |
TW (1) | TWD175115S (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210035835A1 (en) * | 2019-07-31 | 2021-02-04 | Kokusai Electric Corporation | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device |
USD920935S1 (en) * | 2018-09-20 | 2021-06-01 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD958093S1 (en) * | 2019-11-28 | 2022-07-19 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD965542S1 (en) * | 2020-03-19 | 2022-10-04 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
Citations (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US5897311A (en) * | 1995-05-31 | 1999-04-27 | Tokyo Electron Limited | Support boat for objects to be processed |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6062853A (en) * | 1996-02-29 | 2000-05-16 | Tokyo Electron Limited | Heat-treating boat for semiconductor wafers |
US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
US20020187023A1 (en) * | 2001-05-11 | 2002-12-12 | Itsuo Araki | Vertical type wafer supporting jig |
US20030024888A1 (en) * | 2001-07-16 | 2003-02-06 | Rohm And Haas Company | Wafer holding apparatus |
US20050145584A1 (en) * | 2004-01-06 | 2005-07-07 | Buckley Richard F. | Wafer boat with interference fit wafer supports |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
-
2014
- 2014-11-20 JP JPD2014-25968F patent/JP1537313S/ja active Active
-
2015
- 2015-04-30 US US29/525,561 patent/USD772183S1/en active Active
- 2015-05-18 TW TW104302640F patent/TWD175115S/en unknown
Patent Citations (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
US5897311A (en) * | 1995-05-31 | 1999-04-27 | Tokyo Electron Limited | Support boat for objects to be processed |
US5752609A (en) * | 1996-02-06 | 1998-05-19 | Tokyo Electron Limited | Wafer boat |
US6065615A (en) * | 1996-02-28 | 2000-05-23 | Asahi Glass Company, Ltd. | Vertical wafer boat |
US6062853A (en) * | 1996-02-29 | 2000-05-16 | Tokyo Electron Limited | Heat-treating boat for semiconductor wafers |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
US6099302A (en) * | 1998-06-23 | 2000-08-08 | Samsung Electronics Co., Ltd. | Semiconductor wafer boat with reduced wafer contact area |
US6099645A (en) * | 1999-07-09 | 2000-08-08 | Union Oil Company Of California | Vertical semiconductor wafer carrier with slats |
US6287112B1 (en) * | 2000-03-30 | 2001-09-11 | Asm International, N.V. | Wafer boat |
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US20020187023A1 (en) * | 2001-05-11 | 2002-12-12 | Itsuo Araki | Vertical type wafer supporting jig |
US20030024888A1 (en) * | 2001-07-16 | 2003-02-06 | Rohm And Haas Company | Wafer holding apparatus |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
US20050145584A1 (en) * | 2004-01-06 | 2005-07-07 | Buckley Richard F. | Wafer boat with interference fit wafer supports |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD600221S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD600222S1 (en) * | 2008-03-28 | 2009-09-15 | Tokyo Electron Limited | Wafer boat |
USD616394S1 (en) * | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616395S1 (en) * | 2009-03-11 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
Non-Patent Citations (3)
Title |
---|
U.S. Appl. No. 29/525,559, filed Apr. 30, 2015, Tokyo Electron Limited. |
U.S. Appl. No. 29/525,563, filed Apr. 30, 2015, Tokyo Electron Limited. |
U.S. Appl. No. 29/525,566, filed Apr. 30, 2015, Tokyo Electron Limited. |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD920935S1 (en) * | 2018-09-20 | 2021-06-01 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
US20210035835A1 (en) * | 2019-07-31 | 2021-02-04 | Kokusai Electric Corporation | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device |
US11929272B2 (en) * | 2019-07-31 | 2024-03-12 | Kokusai Electric Corporation | Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device |
USD958093S1 (en) * | 2019-11-28 | 2022-07-19 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD965542S1 (en) * | 2020-03-19 | 2022-10-04 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP1537313S (en) | 2015-11-09 |
TWD175115S (en) | 2016-04-21 |
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