USD378675S - Wafer boat - Google Patents
Wafer boat Download PDFInfo
- Publication number
- USD378675S USD378675S US29/047,279 US4727995F USD378675S US D378675 S USD378675 S US D378675S US 4727995 F US4727995 F US 4727995F US D378675 S USD378675 S US D378675S
- Authority
- US
- United States
- Prior art keywords
- wafer boat
- view
- wafer
- boat
- cross sectional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
FIG. 1 is a front view of a first embodiment of a wafer boat showing my new design;
FIG. 2 is a rear view of the embodiment of FIG. 1;
FIG. 3 is a top view of the embodiment of FIG. 1;
FIG. 4 is a bottom view of the embodiment of FIG. 1;
FIG. 5 is a left side view of the embodiment of FIG. 1, the right side view being a mirror image and, therefore, not shown;
FIG. 6 is a cross sectional view of the embodiment of FIG. 1 on section line 6--6 in FIG. 1;
FIG. 7 is a cross sectional view of the embodiment of FIG. 1 on section line 7--7 in FIG. 3;
FIG. 8 is a front/top/right side perspective view of the embodiment of FIG. 1;
FIG. 9 is a front view of a second embodiment of a wafer boat showing my new design;
FIG. 10 is a rear view of the embodiment of FIG. 9;
FIG. 11 is a top view of the embodiment of FIG. 9;
FIG. 12 is a bottom view of the embodiment of FIG. 9;
FIG. 13 is a left side view of the embodiment of FIG. 9, the right side view being a mirror image and, therefore, not shown;
FIG. 14 is a cross sectional view of the embodiment of FIG. 9 on section line 14--14 in FIG. 9;
FIG. 15 is a cross sectional view of the embodiment of FIG. 9 on section line 15--15 in FIG. 11; and,
FIG. 16 is a front/top/right side perspective view of the embodiment of FIG. 9.
Claims (1)
- The ornamental design for wafer boat, as shown and described.
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1516995 | 1995-05-30 | ||
JP7-15170 | 1995-05-30 | ||
JP7-15169 | 1995-05-30 | ||
JP1517095 | 1995-05-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD378675S true USD378675S (en) | 1997-04-01 |
Family
ID=71463831
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/047,279 Expired - Lifetime USD378675S (en) | 1995-05-30 | 1995-11-30 | Wafer boat |
Country Status (1)
Country | Link |
---|---|
US (1) | USD378675S (en) |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD760180S1 (en) * | 2014-02-21 | 2016-06-28 | Hzo, Inc. | Hexcell channel arrangement for use in a boat for a deposition apparatus |
USD769201S1 (en) * | 2014-11-20 | 2016-10-18 | Tokyo Electron Limited | Wafer boat |
USD772183S1 (en) * | 2014-11-20 | 2016-11-22 | Tokyo Electron Limited | Wafer boat |
USD789310S1 (en) * | 2014-11-20 | 2017-06-13 | Tokyo Electron Limited | Wafer boat |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
USD908102S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
USD908103S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
USD939459S1 (en) * | 2019-08-07 | 2021-12-28 | Kokusai Electric Corporation | Boat for wafer processing apparatus |
USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5482559A (en) * | 1993-10-21 | 1996-01-09 | Tokyo Electron Kabushiki Kaisha | Heat treatment boat |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
US5510146A (en) * | 1991-07-16 | 1996-04-23 | Seiko Epson Corporation | CVD apparatus, method of forming semiconductor film, and method of fabricating thin-film semiconductor device |
-
1995
- 1995-11-30 US US29/047,279 patent/USD378675S/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5510146A (en) * | 1991-07-16 | 1996-04-23 | Seiko Epson Corporation | CVD apparatus, method of forming semiconductor film, and method of fabricating thin-film semiconductor device |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
US5482559A (en) * | 1993-10-21 | 1996-01-09 | Tokyo Electron Kabushiki Kaisha | Heat treatment boat |
Cited By (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
USD739831S1 (en) * | 2013-03-22 | 2015-09-29 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD760180S1 (en) * | 2014-02-21 | 2016-06-28 | Hzo, Inc. | Hexcell channel arrangement for use in a boat for a deposition apparatus |
USD772183S1 (en) * | 2014-11-20 | 2016-11-22 | Tokyo Electron Limited | Wafer boat |
USD769201S1 (en) * | 2014-11-20 | 2016-10-18 | Tokyo Electron Limited | Wafer boat |
USD789310S1 (en) * | 2014-11-20 | 2017-06-13 | Tokyo Electron Limited | Wafer boat |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD893438S1 (en) * | 2017-08-21 | 2020-08-18 | Tokyo Electron Limited | Wafer boat |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD847105S1 (en) * | 2018-05-03 | 2019-04-30 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD908102S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
USD908103S1 (en) * | 2019-02-20 | 2021-01-19 | Veeco Instruments Inc. | Transportable semiconductor wafer rack |
USD939459S1 (en) * | 2019-08-07 | 2021-12-28 | Kokusai Electric Corporation | Boat for wafer processing apparatus |
USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
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