USD965542S1 - Boat of substrate processing apparatus - Google Patents

Boat of substrate processing apparatus Download PDF

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Publication number
USD965542S1
USD965542S1 US29/750,438 US202029750438F USD965542S US D965542 S1 USD965542 S1 US D965542S1 US 202029750438 F US202029750438 F US 202029750438F US D965542 S USD965542 S US D965542S
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US
United States
Prior art keywords
boat
processing apparatus
substrate processing
enlarged
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/750,438
Inventor
Satoshi Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: FUJII, SATOSHI
Application granted granted Critical
Publication of USD965542S1 publication Critical patent/USD965542S1/en
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Description

FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is an enlarged portion view taken along line 8-8 in FIG. 2 thereof;
FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2 thereof;
FIG. 10 is an enlarged portion view taken along line 10-10 in FIG. 2 thereof;
FIG. 11 is an enlarged perspective view of the claimed portion indicated by the solid line FIG. 8 thereof;
FIG. 12 is an enlarged front elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;
FIG. 13 is an enlarged left side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;
FIG. 14 is an enlarged right side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;
FIG. 15 is an enlarged top plan view of the claimed portion indicated by the solid line in FIG. 8 thereof;
FIG. 16 is an enlarged bottom plan elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof; and,
FIG. 17 is an enlarged rear elevational view of the claimed portion indicated by the solid line in FIG. 8.
The dashed-dot-dashed lines represent the boundary lines of the claimed design. The broken lines are included for the purpose of illustrating portions of the article that form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a boat of substrate processing apparatus, as shown and described.
US29/750,438 2020-03-19 2020-09-14 Boat of substrate processing apparatus Active USD965542S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020005341F JP1678278S (en) 2020-03-19 2020-03-19 Boat for substrate processing equipment
JP2020-005341D 2020-03-19

Publications (1)

Publication Number Publication Date
USD965542S1 true USD965542S1 (en) 2022-10-04

Family

ID=74312790

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/750,438 Active USD965542S1 (en) 2020-03-19 2020-09-14 Boat of substrate processing apparatus

Country Status (3)

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US (1) USD965542S1 (en)
JP (1) JP1678278S (en)
TW (1) TWD218093S (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

Citations (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
US20130284683A1 (en) * 2012-04-26 2013-10-31 Asm Ip Holding B.V. Wafer boat
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
US20160093487A1 (en) * 2014-09-26 2016-03-31 Asm Ip Holding B.V. Method for depositing films on semiconductor wafers
USD769201S1 (en) * 2014-11-20 2016-10-18 Tokyo Electron Limited Wafer boat
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD789310S1 (en) * 2014-11-20 2017-06-13 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
JP1640260S (en) 2018-11-19 2019-09-02
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
US20130284683A1 (en) * 2012-04-26 2013-10-31 Asm Ip Holding B.V. Wafer boat
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD739831S1 (en) * 2013-03-22 2015-09-29 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
US20160093487A1 (en) * 2014-09-26 2016-03-31 Asm Ip Holding B.V. Method for depositing films on semiconductor wafers
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD769201S1 (en) * 2014-11-20 2016-10-18 Tokyo Electron Limited Wafer boat
USD789310S1 (en) * 2014-11-20 2017-06-13 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD893438S1 (en) * 2017-08-21 2020-08-18 Tokyo Electron Limited Wafer boat
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus
JP1640260S (en) 2018-11-19 2019-09-02
USD940669S1 (en) * 2018-11-19 2022-01-11 Kokusai Electric Corporation Boat for substrate processing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

Also Published As

Publication number Publication date
TWD218093S (en) 2022-04-11
JP1678278S (en) 2021-02-01

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