USD958093S1 - Boat of substrate processing apparatus - Google Patents

Boat of substrate processing apparatus Download PDF

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Publication number
USD958093S1
USD958093S1 US29/735,900 US202029735900F USD958093S US D958093 S1 USD958093 S1 US D958093S1 US 202029735900 F US202029735900 F US 202029735900F US D958093 S USD958093 S US D958093S
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US
United States
Prior art keywords
boat
processing apparatus
substrate processing
view
elevational view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/735,900
Inventor
Satoru Murata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MURATA, SATORU
Application granted granted Critical
Publication of USD958093S1 publication Critical patent/USD958093S1/en
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Description

FIG. 1 is a front, top and right side perspective view of a boat of substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a rear elevational view thereof;
FIG. 8 is an enlarged portion view taken along line 8-8 in FIG. 2 thereof;
FIG. 9 is an enlarged portion view taken along line 9-9 in FIG. 2 thereof;
FIG. 10 is an enlarged portion view taken along line 10-10 in FIG. 2 thereof;
FIG. 11 is a perspective view of the claimed portion indicated by the solid line FIG thereof;
FIG. 12 is a front elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;
FIG. 13 is a left side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;
FIG. 14 is a right side elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof;
FIG. 15 is a top plan view of the claimed portion indicated by the solid line in FIG. 8 thereof;
FIG. 16 is a bottom plan elevational view of the claimed portion indicated by the solid line in FIG. 8 thereof; and,
FIG. 17 is a rear elevational view of the claimed portion indicated by the solid line in FIG. 8.
The broken lines shown represent environmental subject matter and form no part of the claimed design. The dashed-dot-dashed broken lines define the bounds of the claim and form no part thereof.

Claims (1)

    CLAIM
  1. I claim the ornamental design for a boat of substrate processing apparatus, as shown and described.
US29/735,900 2019-11-28 2020-05-26 Boat of substrate processing apparatus Active USD958093S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2019-26362F JP1665228S (en) 2019-11-28 2019-11-28
JP2019-026362 2019-11-28

Publications (1)

Publication Number Publication Date
USD958093S1 true USD958093S1 (en) 2022-07-19

Family

ID=71843123

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/735,900 Active USD958093S1 (en) 2019-11-28 2020-05-26 Boat of substrate processing apparatus

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US (1) USD958093S1 (en)
JP (1) JP1665228S (en)
TW (1) TWD212726S (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD981971S1 (en) * 2021-03-15 2023-03-28 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD868012S1 (en) * 2017-01-18 2019-11-26 Kokusai Electric Corporation Cassette receiving tool for semiconductor manufacturing apparatus

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20020092815A1 (en) * 2001-01-18 2002-07-18 Hong-Guen Kim Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same
US20020113027A1 (en) * 2001-02-20 2002-08-22 Mitsubishi Denki Kabushiki Kaisha Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer
US7484958B2 (en) * 2003-07-16 2009-02-03 Shin-Etsu Handotai Co., Ltd. Vertical boat for heat treatment and method for producing the same
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD740769S1 (en) * 2013-03-22 2015-10-13 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD772183S1 (en) * 2014-11-20 2016-11-22 Tokyo Electron Limited Wafer boat
USD791721S1 (en) * 2014-11-20 2017-07-11 Tokyo Electron Limited Wafer boat
USD868012S1 (en) * 2017-01-18 2019-11-26 Kokusai Electric Corporation Cassette receiving tool for semiconductor manufacturing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD981971S1 (en) * 2021-03-15 2023-03-28 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

Also Published As

Publication number Publication date
JP1665228S (en) 2020-08-03
TWD212726S (en) 2021-07-21

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