USD958093S1 - Boat of substrate processing apparatus - Google Patents
Boat of substrate processing apparatus Download PDFInfo
- Publication number
- USD958093S1 USD958093S1 US29/735,900 US202029735900F USD958093S US D958093 S1 USD958093 S1 US D958093S1 US 202029735900 F US202029735900 F US 202029735900F US D958093 S USD958093 S US D958093S
- Authority
- US
- United States
- Prior art keywords
- boat
- processing apparatus
- substrate processing
- view
- elevational view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Description
The broken lines shown represent environmental subject matter and form no part of the claimed design. The dashed-dot-dashed broken lines define the bounds of the claim and form no part thereof.
Claims (1)
- I claim the ornamental design for a boat of substrate processing apparatus, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPD2019-26362F JP1665228S (en) | 2019-11-28 | 2019-11-28 | |
JP2019-026362 | 2019-11-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD958093S1 true USD958093S1 (en) | 2022-07-19 |
Family
ID=71843123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/735,900 Active USD958093S1 (en) | 2019-11-28 | 2020-05-26 | Boat of substrate processing apparatus |
Country Status (3)
Country | Link |
---|---|
US (1) | USD958093S1 (en) |
JP (1) | JP1665228S (en) |
TW (1) | TWD212726S (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD981971S1 (en) * | 2021-03-15 | 2023-03-28 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD1019581S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
USD1019582S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
USD1019583S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD772183S1 (en) * | 2014-11-20 | 2016-11-22 | Tokyo Electron Limited | Wafer boat |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
USD868012S1 (en) * | 2017-01-18 | 2019-11-26 | Kokusai Electric Corporation | Cassette receiving tool for semiconductor manufacturing apparatus |
-
2019
- 2019-11-28 JP JPD2019-26362F patent/JP1665228S/ja active Active
-
2020
- 2020-05-04 TW TW109302373F patent/TWD212726S/en unknown
- 2020-05-26 US US29/735,900 patent/USD958093S1/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6341935B1 (en) * | 2000-06-14 | 2002-01-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer boat having improved wafer holding capability |
US20020092815A1 (en) * | 2001-01-18 | 2002-07-18 | Hong-Guen Kim | Semiconductor wafer boat having stackable independently replaceable boat parts and vertical heat-treating apparatus comprising the same |
US20020113027A1 (en) * | 2001-02-20 | 2002-08-22 | Mitsubishi Denki Kabushiki Kaisha | Retainer for use in heat treatment of substrate, substrate heat treatment equipment, and method of manufacturing the retainer |
US7484958B2 (en) * | 2003-07-16 | 2009-02-03 | Shin-Etsu Handotai Co., Ltd. | Vertical boat for heat treatment and method for producing the same |
USD655255S1 (en) * | 2010-06-18 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD655682S1 (en) * | 2010-06-18 | 2012-03-13 | Hitachi Kokusai Electric Inc. | Boat of wafer processing apparatus |
USD740769S1 (en) * | 2013-03-22 | 2015-10-13 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD772183S1 (en) * | 2014-11-20 | 2016-11-22 | Tokyo Electron Limited | Wafer boat |
USD791721S1 (en) * | 2014-11-20 | 2017-07-11 | Tokyo Electron Limited | Wafer boat |
USD868012S1 (en) * | 2017-01-18 | 2019-11-26 | Kokusai Electric Corporation | Cassette receiving tool for semiconductor manufacturing apparatus |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD981971S1 (en) * | 2021-03-15 | 2023-03-28 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD1019581S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
USD1019582S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
USD1019583S1 (en) * | 2022-05-30 | 2024-03-26 | Kokusai Electric Corporation | Inner tube of reaction tube for semiconductor manufacturing equipment |
Also Published As
Publication number | Publication date |
---|---|
JP1665228S (en) | 2020-08-03 |
TWD212726S (en) | 2021-07-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |