USD361752S
(en)
*
|
1993-09-17 |
1995-08-29 |
Tokyo Electron Kasbushiki Kaisha |
Wafer boat or rack for holding semiconductor wafers
|
USD366868S
(en)
*
|
1993-09-29 |
1996-02-06 |
Tokyo Electron Kabushiki Kaisha |
Wafer boat or rack
|
USD380454S
(en)
*
|
1995-05-30 |
1997-07-01 |
Tokyo Electron Limited |
Wafer boat
|
USD378675S
(en)
*
|
1995-05-30 |
1997-04-01 |
Tokyo Electron Limited |
Wafer boat
|
USD378823S
(en)
*
|
1995-05-30 |
1997-04-15 |
Tokyo Electron Limited |
Wafer boat
|
JP3218164B2
(en)
*
|
1995-05-31 |
2001-10-15 |
東京エレクトロン株式会社 |
Support boat for object to be processed, heat treatment apparatus and heat treatment method
|
JP3122364B2
(en)
*
|
1996-02-06 |
2001-01-09 |
東京エレクトロン株式会社 |
Wafer boat
|
TW325588B
(en)
*
|
1996-02-28 |
1998-01-21 |
Asahi Glass Co Ltd |
Vertical wafer boat
|
KR19990077350A
(en)
*
|
1996-02-29 |
1999-10-25 |
히가시 데쓰로 |
Heat treatment boat of semiconductor wafer
|
USD404015S
(en)
*
|
1997-01-31 |
1999-01-12 |
Tokyo Electron Ltd. |
Wafer boat for use in a semiconductor wafer heat processing apparatus
|
USD409158S
(en)
*
|
1997-08-20 |
1999-05-04 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus
|
USD404371S
(en)
*
|
1997-08-20 |
1999-01-19 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus
|
USD411176S
(en)
*
|
1997-08-20 |
1999-06-22 |
Tokyo Electron Limited |
Wafer boat for use in a semiconductor wafer heat processing apparatus
|
KR20000002833A
(en)
*
|
1998-06-23 |
2000-01-15 |
윤종용 |
Semiconductor wafer boat
|
US6099645A
(en)
*
|
1999-07-09 |
2000-08-08 |
Union Oil Company Of California |
Vertical semiconductor wafer carrier with slats
|
US6287112B1
(en)
*
|
2000-03-30 |
2001-09-11 |
Asm International, N.V. |
Wafer boat
|
US6341935B1
(en)
*
|
2000-06-14 |
2002-01-29 |
Taiwan Semiconductor Manufacturing Company, Ltd. |
Wafer boat having improved wafer holding capability
|
US20020130061A1
(en)
*
|
2000-11-02 |
2002-09-19 |
Hengst Richard R. |
Apparatus and method of making a slip free wafer boat
|
KR100410982B1
(en)
*
|
2001-01-18 |
2003-12-18 |
삼성전자주식회사 |
Boat for Semiconductor Manufacturing Apparatus
|
JP2002324830A
(en)
*
|
2001-02-20 |
2002-11-08 |
Mitsubishi Electric Corp |
Holding tool for substrate heat treatment, substrate heat treating equipment method for manufacturing semiconductor device, method for manufacturing the holding tool for substrate heat treatment and method for deciding structure of the holding tool for substrate heat treatment
|
JP4467028B2
(en)
*
|
2001-05-11 |
2010-05-26 |
信越石英株式会社 |
Vertical wafer support jig
|
US6811040B2
(en)
*
|
2001-07-16 |
2004-11-02 |
Rohm And Haas Company |
Wafer holding apparatus
|
JP4506125B2
(en)
*
|
2003-07-16 |
2010-07-21 |
信越半導体株式会社 |
Vertical boat for heat treatment and manufacturing method thereof
|
US20050145584A1
(en)
*
|
2004-01-06 |
2005-07-07 |
Buckley Richard F. |
Wafer boat with interference fit wafer supports
|
USD570308S1
(en)
*
|
2006-05-01 |
2008-06-03 |
Tokyo Electron Limited |
Wafer boat
|
USD580894S1
(en)
*
|
2006-05-01 |
2008-11-18 |
Tokyo Electron Limited |
Wafer boat
|
USD570309S1
(en)
*
|
2006-10-25 |
2008-06-03 |
Tokyo Electron Limited |
Wafer boat
|
USD600221S1
(en)
*
|
2008-03-28 |
2009-09-15 |
Tokyo Electron Limited |
Wafer boat
|
USD600222S1
(en)
*
|
2008-03-28 |
2009-09-15 |
Tokyo Electron Limited |
Wafer boat
|
USD616394S1
(en)
*
|
2009-03-06 |
2010-05-25 |
Tokyo Electron Limited |
Support of wafer boat for manufacturing semiconductor wafers
|
USD616395S1
(en)
*
|
2009-03-11 |
2010-05-25 |
Tokyo Electron Limited |
Support of wafer boat for manufacturing semiconductor wafers
|
USD655682S1
(en)
*
|
2010-06-18 |
2012-03-13 |
Hitachi Kokusai Electric Inc. |
Boat of wafer processing apparatus
|
USD655255S1
(en)
*
|
2010-06-18 |
2012-03-06 |
Hitachi Kokusai Electric Inc. |
Boat of wafer processing apparatus
|
TWD163542S
(en)
*
|
2013-03-22 |
2014-10-11 |
日立國際電氣股份有限公司 |
Wafer boat for substrate processing equipment
|
TWD166332S
(en)
*
|
2013-03-22 |
2015-03-01 |
日立國際電氣股份有限公司 |
Part of the wafer boat for substrate processing equipment
|
TWD167988S
(en)
*
|
2013-07-29 |
2015-05-21 |
日立國際電氣股份有限公司 |
Wafer boats for semiconductor manufacturing equipment
|
TWD165429S
(en)
*
|
2013-07-29 |
2015-01-11 |
日立國際電氣股份有限公司 |
Wafer boats for semiconductor manufacturing equipment
|
TWD168827S
(en)
*
|
2013-07-29 |
2015-07-01 |
日立國際電氣股份有限公司 |
Wafer boats for semiconductor manufacturing equipment
|