JP1537313S - - Google Patents

Info

Publication number
JP1537313S
JP1537313S JPD2014-25968F JP2014025968F JP1537313S JP 1537313 S JP1537313 S JP 1537313S JP 2014025968 F JP2014025968 F JP 2014025968F JP 1537313 S JP1537313 S JP 1537313S
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JPD2014-25968F
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JPD2014-25968F priority Critical patent/JP1537313S/ja
Priority to US29/525,561 priority patent/USD772183S1/en
Priority to TW104302640F priority patent/TWD175115S/en
Application granted granted Critical
Publication of JP1537313S publication Critical patent/JP1537313S/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JPD2014-25968F 2014-11-20 2014-11-20 Active JP1537313S (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JPD2014-25968F JP1537313S (en) 2014-11-20 2014-11-20
US29/525,561 USD772183S1 (en) 2014-11-20 2015-04-30 Wafer boat
TW104302640F TWD175115S (en) 2014-11-20 2015-05-18 Wafer support claws for wafer boat (2)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2014-25968F JP1537313S (en) 2014-11-20 2014-11-20

Publications (1)

Publication Number Publication Date
JP1537313S true JP1537313S (en) 2015-11-09

Family

ID=54398946

Family Applications (1)

Application Number Title Priority Date Filing Date
JPD2014-25968F Active JP1537313S (en) 2014-11-20 2014-11-20

Country Status (3)

Country Link
US (1) USD772183S1 (en)
JP (1) JP1537313S (en)
TW (1) TWD175115S (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1638282S (en) * 2018-09-20 2019-08-05
KR102552458B1 (en) * 2019-07-31 2023-07-06 가부시키가이샤 코쿠사이 엘렉트릭 Substrate processing apparatus, substrate support, and method of manufacturing semiconductor device
JP1665228S (en) * 2019-11-28 2020-08-03
JP1678278S (en) * 2020-03-19 2021-02-01 Boat for substrate processing equipment

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
JP3218164B2 (en) * 1995-05-31 2001-10-15 東京エレクトロン株式会社 Support boat for object to be processed, heat treatment apparatus and heat treatment method
JP3122364B2 (en) * 1996-02-06 2001-01-09 東京エレクトロン株式会社 Wafer boat
TW325588B (en) * 1996-02-28 1998-01-21 Asahi Glass Co Ltd Vertical wafer boat
KR19990077350A (en) * 1996-02-29 1999-10-25 히가시 데쓰로 Heat treatment boat of semiconductor wafer
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
KR20000002833A (en) * 1998-06-23 2000-01-15 윤종용 Semiconductor wafer boat
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
KR100410982B1 (en) * 2001-01-18 2003-12-18 삼성전자주식회사 Boat for Semiconductor Manufacturing Apparatus
JP2002324830A (en) * 2001-02-20 2002-11-08 Mitsubishi Electric Corp Holding tool for substrate heat treatment, substrate heat treating equipment method for manufacturing semiconductor device, method for manufacturing the holding tool for substrate heat treatment and method for deciding structure of the holding tool for substrate heat treatment
JP4467028B2 (en) * 2001-05-11 2010-05-26 信越石英株式会社 Vertical wafer support jig
US6811040B2 (en) * 2001-07-16 2004-11-02 Rohm And Haas Company Wafer holding apparatus
JP4506125B2 (en) * 2003-07-16 2010-07-21 信越半導体株式会社 Vertical boat for heat treatment and manufacturing method thereof
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD600222S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
TWD163542S (en) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 Wafer boat for substrate processing equipment
TWD166332S (en) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 Part of the wafer boat for substrate processing equipment
TWD167988S (en) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD165429S (en) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment
TWD168827S (en) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 Wafer boats for semiconductor manufacturing equipment

Also Published As

Publication number Publication date
USD772183S1 (en) 2016-11-22
TWD175115S (en) 2016-04-21

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