TWD167988S - Wafer boats for semiconductor manufacturing equipment - Google Patents

Wafer boats for semiconductor manufacturing equipment

Info

Publication number
TWD167988S
TWD167988S TW103300468F TW103300468F TWD167988S TW D167988 S TWD167988 S TW D167988S TW 103300468 F TW103300468 F TW 103300468F TW 103300468 F TW103300468 F TW 103300468F TW D167988 S TWD167988 S TW D167988S
Authority
TW
Taiwan
Prior art keywords
manufacturing equipment
semiconductor manufacturing
wafer
semiconductor wafer
wafer boats
Prior art date
Application number
TW103300468F
Other languages
Chinese (zh)
Inventor
Hidenari Yoshida
Tomoshi Taniyama
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD167988S publication Critical patent/TWD167988S/en

Links

Abstract

【物品用途】;本設計的物品是半導體製造裝置用晶舟，為一種半導體晶圓施行成膜時，用以將半導體晶圓水平地保持在反應室內的晶舟。;【設計說明】;如B-B放大剖面圖所示，將半導體晶圓載置在前方左右形成梳子狀的爪部、和形成在後方左右之支柱部的梳子狀段差部。本物品是由石英製成。[Use of article] The article designed is a wafer boat for semiconductor manufacturing equipment. It is a wafer boat used to hold the semiconductor wafer horizontally in the reaction chamber when the semiconductor wafer is film-formed. ; [Design Description]; As shown in the B-B enlarged cross-sectional view, the semiconductor wafer is placed with comb-shaped claw portions formed on the front and left sides, and comb-shaped step portions formed on the rear and left pillar portions. This item is made of quartz.

TW103300468F 2013-07-29 2014-01-24 Wafer boats for semiconductor manufacturing equipment TWD167988S (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013017233 2013-07-29

Publications (1)

Publication Number Publication Date
TWD167988S true TWD167988S (en) 2015-05-21

Family

ID=54012970

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103300468F TWD167988S (en) 2013-07-29 2014-01-24 Wafer boats for semiconductor manufacturing equipment

Country Status (2)

Country Link
US (1) USD738329S1 (en)
TW (1) TWD167988S (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD764423S1 (en) * 2014-03-05 2016-08-23 Hzo, Inc. Corrugated elements for defining longitudinal channels in a boat for a deposition apparatus
USD766850S1 (en) * 2014-03-28 2016-09-20 Tokyo Electron Limited Wafer holder for manufacturing semiconductor
JP1537630S (en) * 2014-11-20 2015-11-09
JP1537313S (en) * 2014-11-20 2015-11-09
JP1537312S (en) * 2014-11-20 2015-11-09
JP1537629S (en) * 2014-11-20 2015-11-09
JP1563649S (en) * 2016-02-12 2016-11-21
JP1597807S (en) * 2017-08-21 2018-02-19
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
JP1638282S (en) * 2018-09-20 2019-08-05
USD908103S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
USD908102S1 (en) * 2019-02-20 2021-01-19 Veeco Instruments Inc. Transportable semiconductor wafer rack
JP1658652S (en) * 2019-08-07 2020-04-27
JP1678278S (en) * 2020-03-19 2021-02-01 Boat for substrate processing equipment
JP1731673S (en) * 2022-05-30 2022-12-08
JP1731674S (en) * 2022-05-30 2022-12-08
JP1731675S (en) * 2022-05-30 2022-12-08

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
JP3218164B2 (en) * 1995-05-31 2001-10-15 東京エレクトロン株式会社 Support boat for object to be processed, heat treatment apparatus and heat treatment method
JP3122364B2 (en) * 1996-02-06 2001-01-09 東京エレクトロン株式会社 Wafer boat
TW325588B (en) * 1996-02-28 1998-01-21 Asahi Glass Co Ltd Vertical wafer boat
US6062853A (en) * 1996-02-29 2000-05-16 Tokyo Electron Limited Heat-treating boat for semiconductor wafers
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
KR20000002833A (en) * 1998-06-23 2000-01-15 윤종용 Semiconductor wafer boat
JP3487497B2 (en) * 1998-06-24 2004-01-19 岩手東芝エレクトロニクス株式会社 Object to be processed accommodation jig and heat treatment apparatus using the same
US6099645A (en) * 1999-07-09 2000-08-08 Union Oil Company Of California Vertical semiconductor wafer carrier with slats
US6287112B1 (en) * 2000-03-30 2001-09-11 Asm International, N.V. Wafer boat
US6341935B1 (en) * 2000-06-14 2002-01-29 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer boat having improved wafer holding capability
JP4506125B2 (en) * 2003-07-16 2010-07-21 信越半導体株式会社 Vertical boat for heat treatment and manufacturing method thereof
USD580894S1 (en) * 2006-05-01 2008-11-18 Tokyo Electron Limited Wafer boat
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
USD600221S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD600222S1 (en) * 2008-03-28 2009-09-15 Tokyo Electron Limited Wafer boat
USD616394S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616395S1 (en) * 2009-03-11 2010-05-25 Tokyo Electron Limited Support of wafer boat for manufacturing semiconductor wafers
USD616396S1 (en) * 2009-03-12 2010-05-25 Tokyo Electron Limited Pedestal of heat insulating cylinder for manufacturing semiconductor wafers
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus

Also Published As

Publication number Publication date
USD738329S1 (en) 2015-09-08

Similar Documents

Publication Publication Date Title
TWD167988S (en) Wafer boats for semiconductor manufacturing equipment
TWD168827S (en) Wafer boats for semiconductor manufacturing equipment
TWD165429S (en) Wafer boats for semiconductor manufacturing equipment
TWD161688S (en) Semiconductor manufacturing equipment wafer boat
TWD166332S (en) Part of the wafer boat for substrate processing equipment
TWD166822S (en) Charm
TWD182929S (en) Charm
TWD179809S (en) Charm
TWD166821S (en) Earring
TWD166857S (en) Vehicle wheel (c)
TWD166825S (en) Jewellery setting
TWD168204S (en) Vehicle headlight (high)
TWD166749S (en) Vehicle taillight
TWD166748S (en) Vehicle taillight
TWD163542S (en) Wafer boat for substrate processing equipment
TWD176632S (en) Wheel
TWD168146S (en) Case for a communications headset
TWD167109S (en) Substrate retaining ring
TWD166713S (en) Sealing member for substrate tray
TWD193548S (en) Car
TWD164266S (en) Wrench handle part
TWD167463S (en) Motor scooter
TWD164267S (en) Wrench handle part
TWD167984S (en) Part of the wafer boat for substrate processing equipment
TWD167115S (en) Part of the wafer boat for substrate processing equipment