|
US5637153A
(en)
*
|
1993-04-30 |
1997-06-10 |
Tokyo Electron Limited |
Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus
|
|
USD424024S
(en)
*
|
1997-01-31 |
2000-05-02 |
Tokyo Electron Limited |
Quartz process tube
|
|
USD405430S
(en)
*
|
1997-01-31 |
1999-02-09 |
Tokyo Electron Limited |
Inner tube for use in a semiconductor wafer heat processing apparatus
|
|
USD423463S
(en)
*
|
1997-01-31 |
2000-04-25 |
Tokyo Electron Limited |
Quartz process tube
|
|
USD551634S1
(en)
*
|
2005-02-28 |
2007-09-25 |
Tokyo Electron Limited |
Wafer-boat for heat-processing of semiconductor wafers
|
|
USD552047S1
(en)
*
|
2005-02-28 |
2007-10-02 |
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|
|
USD600659S1
(en)
*
|
2006-09-12 |
2009-09-22 |
Tokyo Electron Limited |
Process tube for manufacturing semiconductor wafers
|
|
JP4331768B2
(en)
*
|
2007-02-28 |
2009-09-16 |
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|
|
US8023806B2
(en)
*
|
2007-03-20 |
2011-09-20 |
Tokyo Electron Limited |
Heat processing furnace and vertical-type heat processing apparatus
|
|
USD594488S1
(en)
*
|
2007-04-20 |
2009-06-16 |
Tokyo Electron Limited |
Process tube for manufacturing semiconductor wafers
|
|
USD619630S1
(en)
*
|
2007-05-08 |
2010-07-13 |
Tokyo Electron Limited |
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|
|
USD611013S1
(en)
*
|
2008-03-28 |
2010-03-02 |
Tokyo Electron Limited |
Process tube for manufacturing semiconductor wafers
|
|
USD610559S1
(en)
*
|
2008-05-30 |
2010-02-23 |
Hitachi Kokusai Electric, Inc. |
Reaction tube
|
|
US8398773B2
(en)
*
|
2011-01-21 |
2013-03-19 |
Asm International N.V. |
Thermal processing furnace and liner for the same
|
|
USD724551S1
(en)
*
|
2011-11-18 |
2015-03-17 |
Tokyo Electron Limited |
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|
|
USD720309S1
(en)
*
|
2011-11-18 |
2014-12-30 |
Tokyo Electron Limited |
Inner tube for process tube for manufacturing semiconductor wafers
|
|
USD720308S1
(en)
*
|
2011-11-18 |
2014-12-30 |
Tokyo Electron Limited |
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|
|
TWD166332S
(en)
*
|
2013-03-22 |
2015-03-01 |
日立國際電氣股份有限公司 |
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|
|
USD739832S1
(en)
*
|
2013-06-28 |
2015-09-29 |
Hitachi Kokusai Electric Inc. |
Reaction tube
|
|
TWD167986S
(en)
*
|
2013-06-28 |
2015-05-21 |
日立國際電氣股份有限公司 |
part of reaction tube
|
|
TWD168774S
(en)
*
|
2013-06-28 |
2015-07-01 |
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part of reaction tube
|
|
TWD167985S
(en)
*
|
2013-06-28 |
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日立國際電氣股份有限公司 |
part of reaction tube
|
|
TWD167987S
(en)
*
|
2013-06-28 |
2015-05-21 |
日立國際電氣股份有限公司 |
part of reaction tube
|
|
TWD167988S
(en)
*
|
2013-07-29 |
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日立國際電氣股份有限公司 |
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|
|
TWD168827S
(en)
*
|
2013-07-29 |
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日立國際電氣股份有限公司 |
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|
|
JP1535455S
(en)
*
|
2015-02-25 |
2015-10-19 |
|
|
|
JP1546512S
(en)
*
|
2015-09-04 |
2016-03-22 |
|
|
|
JP1546345S
(en)
*
|
2015-09-04 |
2016-03-22 |
|
|
|
JP1563649S
(en)
*
|
2016-02-12 |
2016-11-21 |
|
|
|
JP1563524S
(en)
|
2016-03-30 |
2016-11-21 |
|
|
|
JP1605460S
(en)
*
|
2017-08-09 |
2021-05-31 |
|
|
|
JP1605461S
(en)
*
|
2017-08-10 |
2021-05-31 |
|
|
|
JP1605462S
(en)
*
|
2017-08-10 |
2021-05-31 |
|
|
|
JP1605982S
(en)
*
|
2017-12-27 |
2021-05-31 |
|
|
|
USD846514S1
(en)
*
|
2018-05-03 |
2019-04-23 |
Kokusai Electric Corporation |
Boat of substrate processing apparatus
|
|
USD847105S1
(en)
*
|
2018-05-03 |
2019-04-30 |
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Boat of substrate processing apparatus
|
|
JP6856576B2
(en)
*
|
2018-05-25 |
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|
|
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(en)
*
|
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2019-08-05 |
|
|
|
JP1640260S
(en)
*
|
2018-11-19 |
2019-09-02 |
|
|
|
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(en)
|
2019-03-20 |
2019-10-28 |
|
|
|
JP1658652S
(en)
*
|
2019-08-07 |
2020-04-27 |
|
|
|
JP1665228S
(en)
*
|
2019-11-28 |
2020-08-03 |
|
|
|
USD931823S1
(en)
*
|
2020-01-29 |
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Reaction tube
|
|
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(en)
*
|
2020-03-10 |
2021-02-01 |
|
reaction tube
|
|
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(en)
*
|
2020-03-19 |
2021-02-01 |
|
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|
|
JP7461490B2
(en)
*
|
2020-09-28 |
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|
|
JP1700777S
(en)
*
|
2021-03-15 |
2021-11-29 |
|
|