JP1700777S - - Google Patents
Info
- Publication number
- JP1700777S JP1700777S JPD2021-5258F JP2021005258F JP1700777S JP 1700777 S JP1700777 S JP 1700777S JP 2021005258 F JP2021005258 F JP 2021005258F JP 1700777 S JP1700777 S JP 1700777S
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2021-5258F JP1700777S (en) | 2021-03-15 | 2021-03-15 | |
| TW110304575F TWD225035S (en) | 2021-03-15 | 2021-08-31 | Part of wafer boat for substrate processing equipment |
| US29/807,738 USD981971S1 (en) | 2021-03-15 | 2021-09-14 | Boat of substrate processing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2021-5258F JP1700777S (en) | 2021-03-15 | 2021-03-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1700777S true JP1700777S (en) | 2021-11-29 |
Family
ID=78766340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JPD2021-5258F Active JP1700777S (en) | 2021-03-15 | 2021-03-15 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD981971S1 (en) |
| JP (1) | JP1700777S (en) |
| TW (1) | TWD225035S (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1731675S (en) * | 2022-05-30 | 2022-12-08 | ||
| JP1731674S (en) * | 2022-05-30 | 2022-12-08 | ||
| JP1731673S (en) * | 2022-05-30 | 2022-12-08 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD302382S (en) * | 1987-08-19 | 1989-07-25 | Bleakley David M | Pin for locking or stopping a sliding window sash |
| EP1006562A3 (en) * | 1998-12-01 | 2005-01-19 | Greene, Tweed Of Delaware, Inc. | Two-piece clamp ring for holding semiconductor wafer or other workpiece |
| US6455395B1 (en) * | 2000-06-30 | 2002-09-24 | Integrated Materials, Inc. | Method of fabricating silicon structures including fixtures for supporting wafers |
| JP2002324830A (en) * | 2001-02-20 | 2002-11-08 | Mitsubishi Electric Corp | Holding tool for substrate heat treatment, substrate heat treating equipment method for manufacturing semiconductor device, method for manufacturing the holding tool for substrate heat treatment and method for deciding structure of the holding tool for substrate heat treatment |
| JP4467028B2 (en) * | 2001-05-11 | 2010-05-26 | 信越石英株式会社 | Vertical wafer support jig |
| EP1796143B1 (en) * | 2004-09-01 | 2011-11-23 | Nikon Corporation | Substrate holder, stage apparatus, and exposure apparatus |
| USD580894S1 (en) * | 2006-05-01 | 2008-11-18 | Tokyo Electron Limited | Wafer boat |
| US9153466B2 (en) | 2012-04-26 | 2015-10-06 | Asm Ip Holding B.V. | Wafer boat |
| TWD166332S (en) * | 2013-03-22 | 2015-03-01 | 日立國際電氣股份有限公司 | Part of the wafer boat for substrate processing equipment |
| US9343304B2 (en) * | 2014-09-26 | 2016-05-17 | Asm Ip Holding B.V. | Method for depositing films on semiconductor wafers |
| WO2016162088A1 (en) * | 2015-04-10 | 2016-10-13 | Ev Group E. Thallner Gmbh | Substrate holder and method for bonding two substrates |
| CN111128814A (en) * | 2018-10-31 | 2020-05-08 | 长鑫存储技术有限公司 | Crystal boat |
| KR102406942B1 (en) * | 2019-09-16 | 2022-06-10 | 에이피시스템 주식회사 | Edge ring and heat treatment apparatus having the same |
| JP1665228S (en) * | 2019-11-28 | 2020-08-03 | ||
| CN114378751B (en) * | 2020-10-20 | 2022-11-01 | 长鑫存储技术有限公司 | Mounting clamp of bearing ring for wafer |
| CN114628291A (en) * | 2022-04-01 | 2022-06-14 | 合肥真萍电子科技有限公司 | Quartz boat structure for wafer baking |
-
2021
- 2021-03-15 JP JPD2021-5258F patent/JP1700777S/ja active Active
- 2021-08-31 TW TW110304575F patent/TWD225035S/en unknown
- 2021-09-14 US US29/807,738 patent/USD981971S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD981971S1 (en) | 2023-03-28 |
| TWD225035S (en) | 2023-05-01 |