CN114628291A - Quartz boat structure for wafer baking - Google Patents

Quartz boat structure for wafer baking Download PDF

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CN114628291A
CN114628291A CN202210357281.0A CN202210357281A CN114628291A CN 114628291 A CN114628291 A CN 114628291A CN 202210357281 A CN202210357281 A CN 202210357281A CN 114628291 A CN114628291 A CN 114628291A
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crankshaft
wafer
quartz boat
upper top
lower bottom
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CN114628291B (en
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刘汉东
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Hefei Zhenping Electronic Technology Co ltd
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Hefei Zhenping Electronic Technology Co ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses a quartz boat structure for wafer baking, which comprises an upper top plate and a lower bottom plate, wherein at least one crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate, at least one vertical rod is fixed between the edge positions of the upper top plate and the lower bottom plate, the vertical rod is provided with a clamping groove, and the crankshaft structure comprises a plurality of sections of connecting shafts and U-shaped arms fixedly connected between adjacent connecting shafts. The quartz boat can be conveniently and horizontally placed in the quartz boat, and can keep the wafer stable and prevent the wafer from falling off when the quartz boat moves.

Description

一种晶圆烘烤用石英舟结构A quartz boat structure for wafer baking

技术领域technical field

本发明涉及石英舟领域，具体是一种晶圆烘烤用石英舟结构。The invention relates to the field of quartz boats, in particular to a quartz boat structure for wafer baking.

背景技术Background technique

目前，晶圆烘烤采用竖式石英舟作为承载物，该石英舟结构如图1、图2所示，包括轴向竖直的上顶板1和下底板2，上顶板1、下底板2同轴，由上顶板1、下底板2之间确定筒形区域，在上顶板1、下底板2边缘位置之间连接若干竖棒3，每个竖棒3朝向筒形区域内的一面分别设有多层卡槽，多个竖棒3的多层卡槽位置一一对应，并且多个竖棒3组成的弧形的圆角大于或等于180度。工作时将晶圆4置于筒形区域中并位于竖棒3其中一层卡槽高度，令晶圆4呈水平，并通过各个竖棒3处于同一层的卡槽相互配合卡于晶圆4侧边，由此形成对晶圆4的固定。At present, a vertical quartz boat is used as a carrier for wafer baking. The structure of the quartz boat is shown in Figures 1 and 2, including an axially vertical upper top plate 1 and a lower bottom plate 2. The upper top plate 1 and the lower bottom plate 2 are the same as Axle, the cylindrical area is determined between the upper top plate 1 and the lower bottom plate 2, and several vertical bars 3 are connected between the edge positions of the upper top plate 1 and the lower bottom plate 2, and the side of each vertical bar 3 facing the cylindrical area is respectively provided with In the multi-layer card slot, the positions of the multi-layer card slots of the plurality of vertical bars 3 correspond one-to-one, and the rounded corner of the arc formed by the plurality of vertical bars 3 is greater than or equal to 180 degrees. When working, place the wafer 4 in the cylindrical area and at the height of one of the slots of the vertical bars 3, so that the wafer 4 is horizontal, and is clamped to the wafer 4 through the slot of each vertical bar 3 on the same layer. side, thereby forming a fixation to the wafer 4 .

由于石英舟在烘烤晶圆时需要转动、升降等，以调整姿态使晶圆烘烤充分，因此竖棒3的组成的弧形圆角一般设置为大于180度，这样才能保持在晶圆4周围有效固定住晶圆，以免石英舟运动时晶圆4从筒形区域内脱落。但竖棒3分布大于180度的石英舟结构存在的问题是晶圆4放入比较困难，必须将晶圆4先竖置通过相邻竖棒3之间空隙塞入筒形区域中，然后再调整晶圆4使之水平，在晶圆4调整过程中容易于四周的竖棒3等产生碰撞，进而导致损坏。Since the quartz boat needs to rotate, lift, etc. when baking the wafer, to adjust the posture to make the wafer fully baked, the arc-shaped fillet of the vertical bar 3 is generally set to be greater than 180 degrees, so as to maintain the position on the wafer 4 The wafers are effectively fixed around to prevent the wafers 4 from falling off from the cylindrical area when the quartz boat moves. However, the problem of the quartz boat structure with the vertical rods 3 distributed more than 180 degrees is that it is difficult to put the wafer 4 in. The wafer 4 must be placed vertically through the gap between the adjacent vertical rods 3 and inserted into the cylindrical area, and then the wafer 4 must be placed vertically. When the wafer 4 is adjusted to be level, it is easy to collide with the surrounding vertical bars 3 and the like during the adjustment process of the wafer 4, thereby causing damage.

为了解决这一问题，有的石英舟中竖棒3组成的弧形圆角等于180度(如图2所示)，相当于各个竖棒3位于筒形区域其中一个径向的一侧外，该结构的石英舟虽然能够令晶圆4呈平放状态送入筒形区域中(即从没有竖棒3的一侧送入晶圆4)，但其既然晶圆4能平放送入，那么晶圆4同样能够平放脱落，因此仍然存在晶圆4脱落的问题。In order to solve this problem, the arc-shaped fillet formed by the vertical rods 3 in some quartz boats is equal to 180 degrees (as shown in Figure 2), which is equivalent to that each vertical rod 3 is located outside one of the radial sides of the cylindrical area, Although the quartz boat of this structure can make the wafers 4 be fed into the cylindrical area in a flat state (that is, the wafers 4 are fed into the side without the vertical bars 3), since the wafers 4 can be fed in flat, then The wafer 4 can also fall off when laid flat, so the problem of the wafer 4 falling off still exists.

发明内容SUMMARY OF THE INVENTION

本发明的目的是提供一种晶圆烘烤用石英舟结构，以解决现有技术石英舟存在的晶圆放置困难、容易脱落的问题。The purpose of the present invention is to provide a quartz boat structure for wafer baking, so as to solve the problems that the wafers are difficult to place and fall off easily in the prior art quartz boats.

为了达到上述目的，本发明所采用的技术方案为：In order to achieve the above object, the technical scheme adopted in the present invention is:

一种晶圆烘烤用石英舟结构，包括上顶板和下底板，其特征在于：上顶板与下底板之间转动连接有至少一个曲轴结构，曲轴结构包括多段竖直的连接轴以及固定连接于相邻连接轴之间的U型臂，所述U型臂呈U形面平行于竖直方向的水平平放状态，还包括连接于上顶板、下底板边缘位置之间的至少一个竖棒，所述竖棒对应每个U型臂的高度位置分别设有卡槽。A quartz boat structure for wafer baking includes an upper top plate and a lower bottom plate, and is characterized in that at least one crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate, and the crankshaft structure includes a plurality of vertical connecting shafts and a fixed connection on the The U-shaped arm between the adjacent connecting shafts, the U-shaped arm is in a horizontal and flat state with the U-shaped surface parallel to the vertical direction, and also includes at least one vertical bar connected between the edge positions of the upper top plate and the lower bottom plate, The vertical bars are respectively provided with card slots corresponding to the height positions of each U-shaped arm.

进一步的，所述曲轴结构有两个，其中一个曲轴结构转动连接于上顶板、下底板的中心之间，另一个曲轴结构转动连接于上顶板、下底板之间靠近中心位置。Further, there are two crankshaft structures, one of which is rotatably connected between the centers of the upper top plate and the lower bottom plate, and the other is rotatably connected between the upper top plate and the lower bottom plate near the center.

进一步的，：所述曲轴结构有两个，两个曲轴结构在上顶板的连接位置按中心呈相互对称，对应的两个曲轴结构在下底板的连接位置按中心呈相互对称。Further, there are two crankshaft structures, the two crankshaft structures are symmetrical to each other at the connection position of the upper top plate, and the corresponding two crankshaft structures are symmetrical to each other at the connection position of the lower bottom plate.

进一步的，当竖棒有多个时，多个竖棒组成的弧向的圆角小于180度。Further, when there are multiple vertical rods, the rounded angle of the arc formed by the multiple vertical rods is less than 180 degrees.

进一步的，所述竖棒上卡槽为台阶槽。Further, the upper clamping groove of the vertical rod is a stepped groove.

进一步的，还包括设于上顶部、下底板中至少一者的电驱动装置，所述电驱动装置与曲轴结构的对应轴端连接，由电驱动装置驱动曲轴结构转动。Further, it also includes an electric drive device disposed on at least one of the upper top and the lower bottom plate, the electric drive device is connected with the corresponding shaft end of the crankshaft structure, and the crankshaft structure is driven to rotate by the electric drive device.

本发明中，通过设置至少一个可转动的曲轴结构，通过曲轴结构的各个曲型臂与竖棒的对应卡槽配合，用于固定多层晶圆。当需要晶圆放入时，可转动曲轴结构使曲型臂末端、竖棒组成的弧形的圆角小于180度，即可平放放入晶圆；当需要固定晶圆，可转动曲轴结构使曲型臂末端、竖棒组成的弧形的圆角大于180度，即可在四周固定住晶圆。In the present invention, at least one rotatable crankshaft structure is provided, and each curved arm of the crankshaft structure cooperates with the corresponding slot of the vertical rod to fix the multi-layer wafer. When the wafer needs to be placed, the crankshaft structure can be rotated so that the rounded angle of the arc formed by the end of the curved arm and the vertical rod is less than 180 degrees, and the wafer can be placed flat; when the wafer needs to be fixed, the crankshaft structure can be rotated If the rounded corner of the arc formed by the end of the curved arm and the vertical rod is greater than 180 degrees, the wafer can be fixed around.

与现有技术相比，本发明能够方便晶圆水平放入石英舟，并能够在需要时从四周固定住晶圆，具有使用方便的优点，能够在石英舟运动时保持晶圆稳固、防止晶圆脱落。Compared with the prior art, the present invention can conveniently place the wafer into the quartz boat horizontally, and can fix the wafer from all around when needed, has the advantages of convenient use, can keep the wafer stable when the quartz boat moves, and prevent the wafer from being damaged. The circle falls off.

附图说明Description of drawings

图1是现有技术石英舟结构示意图。FIG. 1 is a schematic structural diagram of a quartz boat in the prior art.

图2是现有技术石英舟内部结构俯视图。FIG. 2 is a top view of the internal structure of the quartz boat in the prior art.

图3是本发明曲轴结构对称时的结构正视图。FIG. 3 is a front view of the structure of the crankshaft of the present invention when the structure is symmetrical.

图4是图3结构放置晶圆时状态正视图。FIG. 4 is a front view of the state of placing the wafer in the structure of FIG. 3 .

图5是图3内部结构俯视图。FIG. 5 is a top view of the internal structure of FIG. 3 .

图6是图3结构放置晶圆时状态俯视图。FIG. 6 is a top view of the state in which a wafer is placed in the structure of FIG. 3 .

图7是图3结构放置晶圆后固定晶圆时的工作状态俯视图。FIG. 7 is a top view of the working state when the wafer is fixed after the structure of FIG. 3 is placed.

图8是本发明其中一个曲轴结构位于中心时的结构俯视图。FIG. 8 is a top view of the structure when one of the crankshaft structures of the present invention is located in the center.

图9是图8结构放置晶圆后固定晶圆时的工作状态俯视图。FIG. 9 is a top view of the working state when the wafer is fixed after the structure of FIG. 8 is placed.

图10是本发明单个曲轴结构时的结构俯视图。FIG. 10 is a top view of the structure of the present invention when a single crankshaft is constructed.

具体实施方式Detailed ways

下面结合附图和实施例对本发明进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

如图3、图4、图5所示，本发明一种晶圆烘烤用石英舟结构，包括上顶板1和位于上顶板1下方的下底板2，上顶板1、下底板2轴向竖直且同轴，由上顶板1、下底板2确定筒形区域，其中上顶板1为筒形区域顶、下底板2为筒形区域底。As shown in FIGS. 3 , 4 and 5 , a quartz boat structure for wafer baking according to the present invention includes an upper top plate 1 and a lower bottom plate 2 located below the upper top plate 1 . The upper top plate 1 and the lower bottom plate 2 are axially vertical. Straight and coaxial, the cylindrical area is determined by the upper top plate 1 and the lower bottom plate 2, wherein the upper top plate 1 is the top of the cylindrical area, and the lower bottom plate 2 is the bottom of the cylindrical area.

上顶板1、下底板2的后侧边缘之间固定连接有一个竖棒3，或者固定连接有若干个竖棒3，当竖棒3为多个时，多个竖棒3组成的弧形的圆角小于180度。每个竖棒3朝向筒形区域内的一面设有多个卡槽5，卡槽5为台阶槽结构，每个竖棒3上的各个卡槽5沿竖向分布，当有多个竖棒3时卡槽5位置一一对应。A vertical bar 3 is fixedly connected between the rear edges of the upper top plate 1 and the lower bottom plate 2, or several vertical bars 3 are fixedly connected. Rounded corners are less than 180 degrees. The side of each vertical rod 3 facing the cylindrical area is provided with a plurality of card slots 5, the card grooves 5 are stepped groove structures, and the respective card grooves 5 on each vertical rod 3 are distributed vertically. At 3 o'clock, the positions of the card slots 5 correspond one by one.

上顶板1、下底板2中心偏左位置之间转动连接有曲轴结构，上顶板1、下底板2中心偏右位置之间同样转动连接有曲轴结构，两个曲轴结构按筒形区域中心轴线相互对称。具体的，该曲轴结构包括多段同轴竖直的连接轴7以及设于相邻连接轴7之间的U型臂6，U型臂6整体呈水平平放，U型臂6的U型面平行于竖直方向，U型臂6的U型口朝向筒形区域中心方向，U型臂6的U型底朝向筒形区域边缘方向，每个U型臂6的U型口两端分别固定连接于对应的两个连接轴6。并且，每个曲轴结构的各个U型臂6位置与竖棒3的卡槽5位置一一对应，由此，每层高度上均由竖棒3的卡槽5、U型臂6的U型口内部配合固定置于该层高度的晶圆4。并且，两个曲轴结构中对应层U型臂6处于同一径向时的总长度大于晶圆4的直径。A crankshaft structure is rotatably connected between the upper top plate 1 and the lower bottom plate 2 at the left center position, and a crankshaft structure is also rotatably connected between the center right position of the upper top plate 1 and the lower bottom plate 2, and the two crankshaft structures are mutually connected according to the central axis of the cylindrical area. symmetry. Specifically, the crankshaft structure includes multiple coaxial vertical connecting shafts 7 and U-shaped arms 6 arranged between adjacent connecting shafts 7 . Parallel to the vertical direction, the U-shaped mouth of the U-shaped arm 6 faces the center of the cylindrical area, the U-shaped bottom of the U-shaped arm 6 faces the edge direction of the cylindrical area, and the two ends of the U-shaped mouth of each U-shaped arm 6 are respectively fixed. Connected to the corresponding two connecting shafts 6 . In addition, the positions of the U-shaped arms 6 of each crankshaft structure correspond to the positions of the slots 5 of the vertical rods 3 one-to-one. Therefore, the height of each layer is composed of the slots 5 of the vertical rods 3 and the U-shaped arms of the U-shaped arms 6. The inside of the opening fits and fixes the wafer 4 at this level. In addition, the total length of the U-shaped arms 6 of the corresponding layers in the two crankshaft structures in the same radial direction is greater than the diameter of the wafer 4 .

在上顶板1的顶部对应每个曲轴结构位置分别安装有转子、定子构成的电驱动装置8，其中转子固定于对应曲轴结构中最上方的连接轴上端，定子分布于转子周围并与外部电源电连接，类似于电动机，当通电时曲轴结构整体随转子转动，由此可实现自动转动调节曲轴结构。当然，还可以在转子上集成转动传感器以检测曲轴结构的转动角度。An electric drive device 8 composed of a rotor and a stator is installed on the top of the upper top plate 1 corresponding to each crankshaft structure. The rotor is fixed on the upper end of the uppermost connecting shaft in the corresponding crankshaft structure, and the stator is distributed around the rotor and is electrically connected to an external power source. The connection is similar to that of an electric motor. When the power is turned on, the crankshaft structure rotates with the rotor as a whole, so that the automatic rotation adjustment of the crankshaft structure can be realized. Of course, a rotation sensor can also be integrated on the rotor to detect the rotation angle of the crankshaft structure.

如图6所示，当需要放置晶圆4时，转动两个曲轴结构，使竖棒3、两个曲轴结构中U型臂6最外端(即U型底)确定的弧形的圆角小于或等于180度(图6中是等于180度)，这样就可以将晶圆4水平平放放入至被一层卡槽5、U型臂6的U型口配合夹持固定。As shown in FIG. 6 , when the wafer 4 needs to be placed, the two crankshaft structures are rotated so that the vertical rod 3 and the outermost end of the U-shaped arm 6 (ie the U-shaped bottom) of the two crankshaft structures have an arc-shaped rounded corner. Less than or equal to 180 degrees (in FIG. 6 is equal to 180 degrees), so that the wafer 4 can be placed horizontally and placed into the slot 5 and the U-shaped mouth of the U-shaped arm 6 to be clamped and fixed.

如图7所示，晶圆4放置后，当需要固定晶圆4时，转动两个曲轴结构，由于同一层的两个U型臂6处于同一径向时的总长度大于一个晶圆4的直径，因此有充足的余量使U型臂6能够转动。故转动后使竖棒3、两个曲轴结构中U型臂6最外端确定的弧形的圆角大于180度，此时通过竖棒3的卡槽5、U型臂6的U型口相互配合，可在四周固定住晶圆4，防止石英舟整体运动时晶圆4脱落。As shown in FIG. 7 , after the wafer 4 is placed, when the wafer 4 needs to be fixed, the two crankshaft structures are rotated. Since the total length of the two U-shaped arms 6 on the same layer in the same radial direction is greater than that of one wafer 4 diameter, so there is sufficient margin for the U-arm 6 to be able to rotate. Therefore, after the rotation, the rounded angle of the arc determined by the outermost end of the U-shaped arm 6 in the vertical rod 3 and the two crankshaft structures is greater than 180 degrees. In cooperation with each other, the wafer 4 can be fixed around, preventing the wafer 4 from falling off when the quartz boat moves as a whole.

如图8所示，作为本发明的一个变形结构，当具有两个曲轴结构时，其中一个曲轴结构可转动连接于上顶板1、下底板2的中心之间，而另外一个曲轴结构转动连接于上顶板1、下底板2之间中心偏右位置。如图9所示，当放置晶圆4后需要固定晶圆4时，可保持中心偏右的曲轴结构不动，仅转动中心处的曲轴结构，此时即可对晶圆4形成有效固定。As shown in FIG. 8, as a modified structure of the present invention, when there are two crankshaft structures, one of the crankshaft structures is rotatably connected between the centers of the upper top plate 1 and the lower bottom plate 2, and the other crankshaft structure is rotatably connected to The center between the upper top plate 1 and the lower bottom plate 2 is to the right. As shown in FIG. 9 , when the wafer 4 needs to be fixed after the wafer 4 is placed, the crankshaft structure with the center to the right can be kept stationary, and only the crankshaft structure at the center can be rotated, and the wafer 4 can be effectively fixed at this time.

如图10所示，作为本发明的一个变形结构，本发明可以仅有一个曲轴结构，该曲轴结构可配合至少两个竖棒3。该曲轴结构最好连接于上顶板1、下底板2的中心之间，由此通过转动曲轴结构可使两个竖棒3、曲轴结构最外端确定的弧形的圆角具有小于或等于270度的变化范围，由此不仅能够使晶圆平放置于筒形区域内，还能够有效固定晶圆。As shown in FIG. 10 , as a modified structure of the present invention, the present invention may have only one crankshaft structure, and the crankshaft structure may be matched with at least two vertical rods 3 . The crankshaft structure is preferably connected between the centers of the upper top plate 1 and the lower bottom plate 2, so that by rotating the crankshaft structure, the two vertical rods 3 and the outermost end of the crankshaft structure can have a radius of less than or equal to 270 Therefore, not only can the wafer be placed flat in the cylindrical area, but also the wafer can be effectively fixed.

本发明所述的实施例仅仅是对本发明的优选实施方式进行的描述，并非对本发明构思和范围进行限定，在不脱离本发明设计思想的前提下，本领域中工程技术人员对本发明的技术方案作出的各种变型和改进，均应落入本发明的保护范围，本发明请求保护的技术内容，已经全部记载在权利要求书中。The embodiments of the present invention are only descriptions of the preferred embodiments of the present invention, and do not limit the concept and scope of the present invention. Various modifications and improvements made should fall within the protection scope of the present invention, and the technical content claimed in the present invention has been fully recorded in the claims.

Claims (6)

1. The utility model provides a wafer toasts uses quartz boat structure, includes roof and lower plate, its characterized in that: the improved structure comprises an upper top plate, a lower bottom plate and at least one vertical rod, wherein at least one crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate, the crankshaft structure comprises multiple sections of vertical connecting shafts and U-shaped arms fixedly connected between adjacent connecting shafts, each U-shaped arm is in a horizontal flat state with a U-shaped surface parallel to the vertical direction, the improved structure further comprises the at least one vertical rod connected between the upper top plate and the lower bottom plate, and the vertical rod is provided with a clamping groove corresponding to the height position of each U-shaped arm.
2. The quartz boat structure for wafer baking of claim 1, wherein: the two crankshaft structures are arranged, one crankshaft structure is rotatably connected between the centers of the upper top plate and the lower bottom plate, and the other crankshaft structure is rotatably connected between the centers of the upper top plate and the lower bottom plate and close to the center.
3. The quartz boat structure for wafer baking of claim 1, wherein: the two crankshaft structures are symmetrical to each other according to the center at the connecting position of the upper top plate, and the two corresponding crankshaft structures are symmetrical to each other according to the center at the connecting position of the lower bottom plate.
4. The quartz boat structure for wafer baking of claim 1, wherein: when the number of the vertical rods is multiple, the arc-direction fillet formed by the multiple vertical rods is less than 180 degrees.
5. The quartz boat structure for wafer baking of claim 1, wherein: the clamping groove on the vertical rod is a step groove.
6. The quartz boat structure for wafer baking of claim 1, wherein: the electric drive device is connected with the corresponding shaft end of the crankshaft structure and drives the crankshaft structure to rotate.
CN202210357281.0A 2022-04-01 2022-04-01 A quartz boat structure for wafer baking Active CN114628291B (en)

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USD981971S1 (en) * 2021-03-15 2023-03-28 Kokusai Electric Corporation Boat of substrate processing apparatus

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