CN114628291A - Quartz boat structure for wafer baking - Google Patents
Quartz boat structure for wafer baking Download PDFInfo
- Publication number
- CN114628291A CN114628291A CN202210357281.0A CN202210357281A CN114628291A CN 114628291 A CN114628291 A CN 114628291A CN 202210357281 A CN202210357281 A CN 202210357281A CN 114628291 A CN114628291 A CN 114628291A
- Authority
- CN
- China
- Prior art keywords
- wafer
- crankshaft
- quartz boat
- upper top
- bottom plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 235000012431 wafers Nutrition 0.000 description 52
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
- H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a quartz boat structure for wafer baking, which comprises an upper top plate and a lower bottom plate, wherein at least one crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate, at least one vertical rod is fixed between the edge positions of the upper top plate and the lower bottom plate, the vertical rod is provided with a clamping groove, and the crankshaft structure comprises a plurality of sections of connecting shafts and U-shaped arms fixedly connected between adjacent connecting shafts. The quartz boat can be conveniently and horizontally placed in the quartz boat, and can keep the wafer stable and prevent the wafer from falling off when the quartz boat moves.
Description
Technical Field
The invention relates to the field of quartz boats, in particular to a quartz boat structure for wafer baking.
Background
At present, wafer toasts and adopts vertical quartz boat as the carrier, this quartz boat structure is as shown in figure 1, figure 2 shows, including axial vertical last roof 1 and lower plate 2, it is coaxial to go up roof 1, lower plate 2, by last roof 1, confirm the cylindric region between the lower plate 2, go up roof 1, connect a plurality of vertical bars 3 between the 2 border positions of lower plate, every vertical bar 3 is equipped with the multilayer draw-in groove respectively towards the one side in the cylindric region, the multilayer draw-in groove position one-to-one of a plurality of vertical bars 3, and the curved fillet that a plurality of vertical bars 3 constitute is greater than or equal to 180 degrees. During operation, the wafer 4 is arranged in the cylindrical area and is positioned at the height of one layer of clamping grooves of the vertical rods 3, so that the wafer 4 is horizontal, and the clamping grooves of the vertical rods 3 positioned at the same layer are mutually matched and clamped on the side edge of the wafer 4, thereby fixing the wafer 4.
Because the quartz boat needs to rotate, lift and the like when baking the wafer to adjust the posture to fully bake the wafer, the arc-shaped fillet formed by the vertical rods 3 is generally set to be more than 180 degrees, so that the wafer can be effectively fixed around the wafer 4, and the wafer 4 is prevented from falling off from the cylindrical area when the quartz boat moves. However, the quartz boat structure with the vertical rods 3 distributed at an angle larger than 180 degrees has the problem that the wafer 4 is difficult to put in, the wafer 4 must be firstly vertically arranged to pass through the gap between the adjacent vertical rods 3 and be stuffed into the cylindrical area, then the wafer 4 is adjusted to be horizontal, and the vertical rods 3 around are easy to collide in the adjustment process of the wafer 4, so that the wafer is damaged.
In order to solve this problem, some quartz boats have the vertical rods 3 forming an arc-shaped rounded corner equal to 180 degrees (as shown in fig. 2), which is equivalent to each vertical rod 3 being located outside one of the radial sides of the cylindrical area, and although the quartz boat with this structure can put the wafer 4 into the cylindrical area in a flat state (i.e. put the wafer 4 from the side without the vertical rods 3), since the wafer 4 can be put into the cylindrical area in a flat state, the wafer 4 can be also dropped off in a flat state, and thus the problem of dropping off the wafer 4 still exists.
Disclosure of Invention
The invention aims to provide a quartz boat structure for wafer baking, which solves the problems of difficult wafer placement and easy falling of the quartz boat in the prior art.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the utility model provides a wafer toasts uses quartz boat structure, includes roof and lower plate, its characterized in that: go up and rotate between roof and the lower plate and be connected with at least one bent axle structure, bent axle structure includes the vertical connecting axle of multistage and the U type arm of fixed connection between adjacent connecting axle, U type arm is the horizontal state of keeping flat that the U-shaped face is on a parallel with vertical direction, still including connecting in last roof, at least one vertical rod between the bottom plate border position, the high position that the vertical rod corresponds every U type arm is equipped with the draw-in groove respectively.
Furthermore, the number of the crank shaft structures is two, one crank shaft structure is rotatably connected between the centers of the upper top plate and the lower bottom plate, and the other crank shaft structure is rotatably connected between the centers of the upper top plate and the lower bottom plate and close to the center.
Further, the method comprises the following steps: the two crankshaft structures are symmetrical to each other according to the center at the connecting position of the upper top plate, and the two corresponding crankshaft structures are symmetrical to each other according to the center at the connecting position of the lower bottom plate.
Further, when the number of the vertical rods is multiple, the arc-direction fillet formed by the multiple vertical rods is less than 180 degrees.
Furthermore, the clamping groove on the vertical rod is a step groove.
Furthermore, the electric driving device is arranged on at least one of the upper top and the lower bottom plate and is connected with the corresponding shaft end of the crankshaft structure, and the crankshaft structure is driven to rotate by the electric driving device.
According to the invention, at least one rotatable crankshaft structure is arranged, and each bent arm of the crankshaft structure is matched with the corresponding clamping groove of the vertical rod to fix the multilayer wafer. When a wafer is required to be placed in, the crankshaft structure can be rotated to enable the arc-shaped fillet formed by the tail end of the curved arm and the vertical rod to be less than 180 degrees, and then the wafer can be placed in a flat mode; when the wafer needs to be fixed, the crankshaft structure can be rotated to enable the arc-shaped fillet formed by the tail end of the crank arm and the vertical rod to be larger than 180 degrees, and then the wafer can be fixed on the periphery.
Compared with the prior art, the quartz boat has the advantages that the quartz boat can be conveniently horizontally placed into the wafer, the wafer can be fixed from the periphery when needed, the use is convenient, the wafer can be kept stable when the quartz boat moves, and the wafer is prevented from falling off.
Drawings
FIG. 1 is a schematic view of a prior art quartz boat configuration.
FIG. 2 is a top view of the internal structure of a prior art quartz boat.
FIG. 3 is a front view of the crankshaft of the present invention in a symmetrical configuration.
Fig. 4 is a front view of the structure of fig. 3 in a state in which a wafer is placed.
Fig. 5 is a top view of the internal structure of fig. 3.
Fig. 6 is a top view of the structure of fig. 3 with a wafer placed thereon.
Fig. 7 is a top view of the structure of fig. 3 in an operating state after the wafer is placed and fixed.
FIG. 8 is a top view of one of the crankshaft structures of the present invention in the center.
Fig. 9 is a top view of the structure of fig. 8 in an operating state after the wafer is placed and fixed.
FIG. 10 is a top view of a single crankshaft configuration of the present invention.
Detailed Description
The invention is further illustrated with reference to the following figures and examples.
As shown in fig. 3, 4 and 5, the quartz boat structure for wafer baking of the present invention comprises an upper top plate 1 and a lower bottom plate 2 located below the upper top plate 1, wherein the upper top plate 1 and the lower bottom plate 2 are axially vertical and coaxial, a cylindrical area is defined by the upper top plate 1 and the lower bottom plate 2, and the upper top plate 1 is a cylindrical area and the lower bottom plate 2 is a cylindrical area.
Go up roof 1, 2 rear side edges of lower plate between the vertical bar 3 of fixedly connected with, perhaps a plurality of vertical bar 3 of fixedly connected with, when vertical bar 3 was a plurality of, the curved fillet of a plurality of vertical bar 3 component was less than 180 degrees. Every vertical bar 3 is equipped with a plurality of draw-in grooves 5 towards the one side in the cylindric region, and draw-in groove 5 is the step groove structure, and each draw-in groove 5 on every vertical bar 3 is along vertical distribution, draw-in groove 5 position one-to-one when a plurality of vertical bars 3.
The crankshaft structures are rotatably connected between the left positions of the centers of the upper top plate 1 and the lower bottom plate 2, the crankshaft structures are also rotatably connected between the right positions of the centers of the upper top plate 1 and the lower bottom plate 2, and the two crankshaft structures are mutually symmetrical according to the central axis of the cylindrical area. Concretely, this crankshaft structure includes the coaxial vertical connecting axle 7 of multistage and locates U type arm 6 between the adjacent connecting axle 7, and U type arm 6 wholly is the level and keeps flat, and U type arm 6's U profile is on a parallel with vertical direction, and U type mouth towards the regional central direction of cylindric of U type arm 6, and towards the regional marginal direction of cylindric at the bottom of U type arm 6's U type, U type mouth both ends difference fixed connection in two connecting axles 6 that correspond of every U type arm 6. Moreover, the positions of the U-shaped arms 6 of each crankshaft structure correspond to the positions of the clamping grooves 5 of the vertical rods 3 one by one, and therefore, the clamping grooves 5 of the vertical rods 3 and the U-shaped openings of the U-shaped arms 6 are matched and fixed in the wafers 4 at the height layer in each layer. And the total length of the U-shaped arms 6 of the corresponding layers in the two crankshaft structures in the same radial direction is larger than the diameter of the wafer 4.
The top of the upper top plate 1 is provided with an electric driving device 8 consisting of a rotor and a stator corresponding to each crankshaft structure respectively, wherein the rotor is fixed at the upper end of the uppermost connecting shaft in the corresponding crankshaft structure, the stators are distributed around the rotor and are electrically connected with an external power supply, and the crankshaft structure integrally rotates along with the rotor when electrified, so that the crankshaft structure can be automatically rotated and adjusted. Of course, it is also possible to integrate a rotation sensor on the rotor to detect the angle of rotation of the crankshaft structure.
As shown in fig. 6, when the wafer 4 needs to be placed, the two crank shaft structures are rotated to make the vertical rod 3 and the arc-shaped fillet defined by the outermost end (i.e., the U-shaped bottom) of the U-shaped arm 6 in the two crank shaft structures less than or equal to 180 degrees (equal to 180 degrees in fig. 6), so that the wafer 4 can be horizontally placed and placed into the clamping groove 5 on one layer and clamped and fixed by the U-shaped opening of the U-shaped arm 6 in a matching manner.
As shown in fig. 7, after the wafer 4 is placed, when the wafer 4 needs to be fixed, the two crank shaft structures are rotated, and since the total length of the two U-shaped arms 6 in the same layer in the same radial direction is greater than the diameter of one wafer 4, there is sufficient margin for the U-shaped arms 6 to rotate. The arc fillet that makes 6 outermost ends of U type arm among vertical bar 3, two bent axle structures confirm after the event rotates is greater than 180 degrees, and the U type mouth through draw-in groove 5 of vertical bar 3, U type arm 6 mutually supports this moment, can fix wafer 4 all around, and wafer 4 drops when preventing quartz boat bulk motion.
As shown in fig. 8, as a modified structure of the present invention, when two crank shaft structures are provided, one of the crank shaft structures is rotatably connected between the centers of the upper top plate 1 and the lower bottom plate 2, and the other crank shaft structure is rotatably connected between the centers of the upper top plate 1 and the lower bottom plate 2 at a position off-center to the right. As shown in fig. 9, when the wafer 4 needs to be fixed after the wafer 4 is placed, the crankshaft structure with the center being shifted to the right can be kept still, and only the crankshaft structure at the center is rotated, so that the wafer 4 can be effectively fixed.
As a modification of the present invention, as shown in fig. 10, the present invention may have only one crank shaft structure which can be fitted with at least two vertical rods 3. The crankshaft structure is preferably connected between the centers of the upper top plate 1 and the lower bottom plate 2, so that the arc-shaped round angle determined by the two vertical rods 3 and the outermost end of the crankshaft structure can have a variation range smaller than or equal to 270 degrees by rotating the crankshaft structure, and therefore, the wafer can be horizontally placed in the cylindrical area and can be effectively fixed.
The embodiments of the present invention are described only for the preferred embodiments of the present invention, and not for the limitation of the concept and scope of the present invention, and various modifications and improvements made to the technical solution of the present invention by those skilled in the art without departing from the design concept of the present invention shall fall into the protection scope of the present invention, and the technical content of the present invention which is claimed is fully set forth in the claims.
Claims (6)
1. The utility model provides a wafer toasts uses quartz boat structure, includes roof and lower plate, its characterized in that: the improved structure comprises an upper top plate, a lower bottom plate and at least one vertical rod, wherein at least one crankshaft structure is rotatably connected between the upper top plate and the lower bottom plate, the crankshaft structure comprises multiple sections of vertical connecting shafts and U-shaped arms fixedly connected between adjacent connecting shafts, each U-shaped arm is in a horizontal flat state with a U-shaped surface parallel to the vertical direction, the improved structure further comprises the at least one vertical rod connected between the upper top plate and the lower bottom plate, and the vertical rod is provided with a clamping groove corresponding to the height position of each U-shaped arm.
2. The quartz boat structure for wafer baking of claim 1, wherein: the two crankshaft structures are arranged, one crankshaft structure is rotatably connected between the centers of the upper top plate and the lower bottom plate, and the other crankshaft structure is rotatably connected between the centers of the upper top plate and the lower bottom plate and close to the center.
3. The quartz boat structure for wafer baking of claim 1, wherein: the two crankshaft structures are symmetrical to each other according to the center at the connecting position of the upper top plate, and the two corresponding crankshaft structures are symmetrical to each other according to the center at the connecting position of the lower bottom plate.
4. The quartz boat structure for wafer baking of claim 1, wherein: when the number of the vertical rods is multiple, the arc-direction fillet formed by the multiple vertical rods is less than 180 degrees.
5. The quartz boat structure for wafer baking of claim 1, wherein: the clamping groove on the vertical rod is a step groove.
6. The quartz boat structure for wafer baking of claim 1, wherein: the electric drive device is connected with the corresponding shaft end of the crankshaft structure and drives the crankshaft structure to rotate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210357281.0A CN114628291A (en) | 2022-04-01 | 2022-04-01 | Quartz boat structure for wafer baking |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210357281.0A CN114628291A (en) | 2022-04-01 | 2022-04-01 | Quartz boat structure for wafer baking |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114628291A true CN114628291A (en) | 2022-06-14 |
Family
ID=81906291
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210357281.0A Pending CN114628291A (en) | 2022-04-01 | 2022-04-01 | Quartz boat structure for wafer baking |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114628291A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD981971S1 (en) * | 2021-03-15 | 2023-03-28 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1334596A (en) * | 2000-06-30 | 2002-02-06 | 东京毅力科创株式会社 | Liquid processing device |
| US20020170571A1 (en) * | 2001-05-21 | 2002-11-21 | Koji Egashira | Rotary substrate processing apparatus and method |
| KR20050122020A (en) * | 2004-06-23 | 2005-12-28 | 삼성전자주식회사 | Wafer boat of semiconductor manufacturing apparatus |
| US20080185308A1 (en) * | 2007-02-01 | 2008-08-07 | Tokyo Electron Limited | Semiconductor wafer boat for batch processing |
| CN103715120A (en) * | 2012-10-09 | 2014-04-09 | 沈阳芯源微电子设备有限公司 | Front-open type wafer box |
| CN210403683U (en) * | 2019-11-12 | 2020-04-24 | 苏州阿特斯阳光电力科技有限公司 | Quartz boat |
-
2022
- 2022-04-01 CN CN202210357281.0A patent/CN114628291A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1334596A (en) * | 2000-06-30 | 2002-02-06 | 东京毅力科创株式会社 | Liquid processing device |
| US20020170571A1 (en) * | 2001-05-21 | 2002-11-21 | Koji Egashira | Rotary substrate processing apparatus and method |
| KR20050122020A (en) * | 2004-06-23 | 2005-12-28 | 삼성전자주식회사 | Wafer boat of semiconductor manufacturing apparatus |
| US20080185308A1 (en) * | 2007-02-01 | 2008-08-07 | Tokyo Electron Limited | Semiconductor wafer boat for batch processing |
| CN103715120A (en) * | 2012-10-09 | 2014-04-09 | 沈阳芯源微电子设备有限公司 | Front-open type wafer box |
| CN210403683U (en) * | 2019-11-12 | 2020-04-24 | 苏州阿特斯阳光电力科技有限公司 | Quartz boat |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD981971S1 (en) * | 2021-03-15 | 2023-03-28 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
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