USD720308S1 - Inner tube for process tube for manufacturing semiconductor wafers - Google Patents

Inner tube for process tube for manufacturing semiconductor wafers Download PDF

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Publication number
USD720308S1
USD720308S1 US29/420,536 US201229420536F USD720308S US D720308 S1 USD720308 S1 US D720308S1 US 201229420536 F US201229420536 F US 201229420536F US D720308 S USD720308 S US D720308S
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US
United States
Prior art keywords
tube
semiconductor wafers
manufacturing semiconductor
inner tube
process tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/420,536
Inventor
Hirofumi Kaneko
Atsushi Endo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KANEKO, HIROFUMI, ENDO, ATSUSHI
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Publication of USD720308S1 publication Critical patent/USD720308S1/en
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FIG. 1 is a perspective view of an inner tube for process tube for manufacturing semiconductor wafers showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a rear view thereof;
FIG. 4 is a right side thereof;
FIG. 5 is a left side view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof;
FIG. 8 is an enlarged cross-sectional view taken along line 8-8 of FIG. 2; and,
FIG. 9 is another front view thereof, shown in a used condition.
The broken lines shown in the drawings represent portions of the inner tube for process tube for manufacturing semiconductor wafers that form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for an inner tube for process tube for manufacturing semiconductor wafers, as shown and described.
US29/420,536 2011-11-18 2012-05-10 Inner tube for process tube for manufacturing semiconductor wafers Active USD720308S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011026685 2011-11-18
JP2011-026685 2011-11-18

Publications (1)

Publication Number Publication Date
USD720308S1 true USD720308S1 (en) 2014-12-30

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ID=52112856

Family Applications (1)

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US29/420,536 Active USD720308S1 (en) 2011-11-18 2012-05-10 Inner tube for process tube for manufacturing semiconductor wafers

Country Status (1)

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US (1) USD720308S1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD742339S1 (en) * 2014-03-12 2015-11-03 Hitachi Kokusai Electric Inc. Reaction tube
USD748594S1 (en) * 2014-03-12 2016-02-02 Hitachi Kokusai Electric Inc. Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD742339S1 (en) * 2014-03-12 2015-11-03 Hitachi Kokusai Electric Inc. Reaction tube
USD748594S1 (en) * 2014-03-12 2016-02-02 Hitachi Kokusai Electric Inc. Reaction tube
USD853979S1 (en) * 2017-12-27 2019-07-16 Kokusai Electric Corporation Reaction tube
USD1019581S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019583S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment
USD1019582S1 (en) * 2022-05-30 2024-03-26 Kokusai Electric Corporation Inner tube of reaction tube for semiconductor manufacturing equipment

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