JP2010251444A - Method of manufacturing soi wafer - Google Patents
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本発明は、ＳＯＩウェーハの製造方法に関する。 The present invention relates to a method for manufacturing an SOI wafer.
半導体集積回路等のデバイスを作製するための基板としては、主にチョクラルスキー法（ＣＺ法）等によって育成されたシリコン単結晶ウェーハが用いられている。このウェーハ上にデバイスを作製する際、ｐ−ｎジャンクションや絶縁体を形成することにより各素子間の分離を行っていた。 As a substrate for manufacturing a device such as a semiconductor integrated circuit, a silicon single crystal wafer grown mainly by the Czochralski method (CZ method) or the like is used. When manufacturing a device on this wafer, separation between elements was performed by forming a pn junction or an insulator.
しかし近年、素子分離用絶縁体を予め基板ウェーハ内に形成しておく構造の基板が使われてきた。この代表的なものがＳＯＩ（Ｓｉｌｉｃｏｎ ｏｎ ｉｎｓｕｌａｔｏｒ）ウェーハである。ＳＯＩウェーハの具体的構造はウェーハの深さ方向に対して、表層のシリコン単結晶層（シリコン活性層、ＳＯＩ層）の下に酸化膜等の絶縁体層（埋め込み絶縁膜）をはさみ、その下部にまたシリコン単結晶層をもつ三層構造になっている。 However, in recent years, a substrate having a structure in which an element isolation insulator is previously formed in a substrate wafer has been used. A typical example is an SOI (Silicon on Insulator) wafer. The specific structure of the SOI wafer is that an insulator layer (embedded insulating film) such as an oxide film is sandwiched under the surface silicon single crystal layer (silicon active layer, SOI layer) with respect to the depth direction of the wafer, and its lower part. Furthermore, it has a three-layer structure having a silicon single crystal layer.
このＳＯＩウェーハの製法には大きく分けて、以下の三種類の方法がある。
第一に、一般に貼り合わせ法と呼ばれる方法で、少なくとも１枚のシリコン単結晶ウェーハに酸化膜を形成し、２枚のシリコン単結晶ウェーハを貼り合わせる方法であり、特に、一方から研磨して所定の厚さのＳＯＩ層を形成する方法である（特許文献１等参照）。
This SOI wafer manufacturing method is roughly divided into the following three methods.
The first is a method generally called a bonding method, in which an oxide film is formed on at least one silicon single crystal wafer, and two silicon single crystal wafers are bonded together. This is a method of forming an SOI layer having a thickness of 10 mm (see Patent Document 1).
第二に、イオン注入剥離法（スマートカット（登録商標）法とも呼ばれる）と呼ばれる方法であり、２枚のシリコン単結晶ウェーハを準備し、どちらか一方のウェーハを酸化し、どちらか一方のウェーハに水素イオンを打ち込み、その後２枚のウェーハを貼り合せて熱処理を行い、水素イオンを打ち込んだ領域を脆弱化して剥離することによりシリコン単結晶薄膜が転写され、ＳＯＩ構造を形成する方法である（特許文献２等参照）。 Second, it is a method called ion implantation delamination method (also called smart cut (registered trademark) method). Two silicon single crystal wafers are prepared, one of the wafers is oxidized, and one of the wafers is oxidized. This is a method in which a silicon single crystal thin film is transferred to form an SOI structure by weakening and exfoliating a region where hydrogen ions are implanted, and then performing heat treatment by bonding two wafers to each other and then heat-treating them. (See Patent Document 2 etc.).
第三に、ＳＩＭＯＸ（Ｓｅｐａｒａｔｉｏｎ ｂｙ Ｉｍｐｌａｎｔｅｄ Ｏｘｙｇｅｎ）法と呼ばれる方法であり、シリコン単結晶ウェーハに表層から酸素イオンを打ち込み、１３００℃程度以上の高温で熱処理することにより埋め込み酸化膜を形成してＳＯＩウェーハとする方法である。
その他の方法も提案されているが現在、これらが主なＳＯＩウェーハの製造方法である。
Third, there is a method called SIMOX (Separation by Implanted Oxygen) method. An SOI wafer is formed by implanting oxygen ions from a surface layer into a silicon single crystal wafer and heat-treating it at a high temperature of about 1300 ° C. to form a buried oxide film. It is a method.
Other methods have been proposed, but these are the main methods for manufacturing SOI wafers.
しかしながら、これらのＳＯＩウェーハの製造方法には、以下のような問題点があった。
貼り合わせ法、イオン注入剥離法を用いた場合、ウェーハ面内に部分的にＳＯＩ構造（以下、部分ＳＯＩ構造と言うことがある）を形成した、部分ＳＯＩウェーハを製造することは、その製造方法の制限からして極めて困難である。さらに、貼り合わせ法は、膜厚均一性が他の方法と比較して劣り、また、膜厚がナノメートルオーダーのような薄膜になると製造自体が極めて困難である上、１枚のＳＯＩウェーハを製造するために２枚のシリコン単結晶ウェーハを必要とするため、製造コストも高い。また、イオン注入剥離法は、高濃度に水素イオン等を注入する必要がある上、やはり１枚のＳＯＩウェーハを製造するために２枚のシリコン単結晶ウェーハを必要とするため、製造コストも高い。
However, these SOI wafer manufacturing methods have the following problems.
When a bonding method or an ion implantation separation method is used, manufacturing a partial SOI wafer in which an SOI structure (hereinafter sometimes referred to as a partial SOI structure) is partially formed in the wafer surface is a manufacturing method thereof. It is extremely difficult due to the limitation of Furthermore, the bonding method is inferior in film thickness uniformity to other methods, and when the film thickness is a thin film of nanometer order, the manufacturing itself is extremely difficult. Since two silicon single crystal wafers are required for manufacturing, the manufacturing cost is high. In addition, the ion implantation delamination method needs to implant hydrogen ions or the like at a high concentration, and also requires two silicon single crystal wafers to produce one SOI wafer. Therefore, the production cost is high. .
一方、ＳＩＭＯＸ法は、酸素イオンを高濃度に注入する必要があることに加え、１３００℃程度以上の高温で長時間の熱処理が必要であるため、製造コストが高い。また、ＳＯＩ層の結晶品質が他の方法と比較して劣るという問題がある。 On the other hand, the SIMOX method has a high manufacturing cost because it requires oxygen ions to be implanted at a high concentration, and requires a long-time heat treatment at a high temperature of about 1300 ° C. or higher. In addition, there is a problem that the crystal quality of the SOI layer is inferior to other methods.
さらに、デバイス製造工程中に部分ＳＯＩ構造を作製する場合には、シリコン単結晶ウェーハ上にアモルファスシリコンを堆積させアニールすることによってアモルファスシリコンを単結晶とすることが提案されている（特許文献３）。
しかしこの方法では単結晶化させたシリコンの中に結晶欠陥が多く存在するという問題があった。また、アモルファスシリコンの替わりに多結晶シリコンを堆積させてアニールするとアモルファスシリコンの場合より欠陥が非常に多い単結晶シリコンが成長してしまうという問題があった。
Furthermore, when a partial SOI structure is manufactured during a device manufacturing process, it has been proposed that amorphous silicon is deposited on a silicon single crystal wafer and annealed to form a single crystal (Patent Document 3). .
However, this method has a problem that many crystal defects exist in the single-crystallized silicon. In addition, when polycrystalline silicon is deposited instead of amorphous silicon and annealed, single crystal silicon having much more defects than amorphous silicon grows.
本発明は、このような問題点に鑑みてなされたもので、容易な方法により低コストで部分ＳＯＩ構造を有するＳＯＩウェーハを製造する方法を提供することを主な目的とする。 The present invention has been made in view of such problems, and a main object of the present invention is to provide a method for manufacturing an SOI wafer having a partial SOI structure at a low cost by an easy method.
本発明は、上記課題を解決するためになされたもので、シリコン単結晶ウェーハからＳＯＩウェーハを製造する方法であって、少なくとも、前記シリコン単結晶ウェーハの表面に第１絶縁膜を形成する工程と、該第１絶縁膜の表面に非単結晶シリコン膜を形成する工程と、前記非単結晶シリコン膜の表面から、前記第１絶縁膜を貫通し、前記シリコン単結晶ウェーハの表面まで達する開口部を形成することにより、前記第１絶縁膜及び前記非単結晶シリコン膜が部分的に表面上に積層されたシリコン単結晶ウェーハを得る工程と、前記第１絶縁膜及び非単結晶シリコン膜が部分的に表面上に積層されたシリコン単結晶ウェーハに対し、水素ガス若しくは不活性ガス又はこれらの混合ガス雰囲気下でＲＴＡ処理を行うことにより、前記非単結晶シリコン膜を前記開口部の前記シリコン単結晶ウェーハが露出された部分に接するようにマイグレーションさせ、前記非単結晶シリコン膜を単結晶化して、前記第１絶縁膜を埋め込み絶縁膜とし、該第１絶縁膜上の単結晶化されたシリコン膜を部分ＳＯＩ層とする部分ＳＯＩ構造を形成する工程とを含み、部分ＳＯＩ構造を有するＳＯＩウェーハを製造することを特徴とするＳＯＩウェーハの製造方法を提供する。 The present invention has been made to solve the above-described problems, and is a method of manufacturing an SOI wafer from a silicon single crystal wafer, comprising at least a step of forming a first insulating film on the surface of the silicon single crystal wafer; A step of forming a non-single-crystal silicon film on the surface of the first insulating film, and an opening extending from the surface of the non-single-crystal silicon film to the surface of the silicon single-crystal wafer through the first insulating film Forming a silicon single crystal wafer in which the first insulating film and the non-single-crystal silicon film are partially stacked on the surface, and the first insulating film and the non-single-crystal silicon film are partially formed. The non-single crystal is obtained by subjecting a silicon single crystal wafer laminated on the surface to RTA treatment in an atmosphere of hydrogen gas, inert gas, or a mixed gas thereof. The recon film is migrated so as to be in contact with the exposed portion of the silicon single crystal wafer in the opening, the non-single crystal silicon film is single crystallized, the first insulating film is used as a buried insulating film, and the first A method of manufacturing an SOI wafer comprising: manufacturing a SOI wafer having a partial SOI structure, comprising: forming a partial SOI structure using a single-crystallized silicon film on an insulating film as a partial SOI layer. To do.
このような工程を含み、部分ＳＯＩ構造を有するＳＯＩウェーハを製造するＳＯＩウェーハの製造方法であれば、シリコン単結晶ウェーハに部分ＳＯＩ構造を低コストで容易に形成することができる。また、１枚のシリコン単結晶ウェーハから１枚のＳＯＩウェーハを製造することができるため、ＳＯＩウェーハの製造コストを低減することができる。また、この方法であれば、得られた部分ＳＯＩ層には欠陥が少なく、その結晶性を良好とすることができる。 If it is the manufacturing method of the SOI wafer which includes such a process and manufactures the SOI wafer which has a partial SOI structure, a partial SOI structure can be easily formed in a silicon single crystal wafer at low cost. Further, since one SOI wafer can be manufactured from one silicon single crystal wafer, the manufacturing cost of the SOI wafer can be reduced. Further, according to this method, the obtained partial SOI layer has few defects and the crystallinity can be improved.
また、本発明は、上記のＳＯＩウェーハの製造方法により製造された、部分ＳＯＩ構造を有するＳＯＩウェーハから、全面ＳＯＩ構造を有するＳＯＩウェーハを製造する方法であって、前記部分ＳＯＩ構造を有するＳＯＩウェーハの、前記第１絶縁膜のない領域の前記シリコン単結晶ウェーハを露出させる工程と、該露出した前記シリコン単結晶ウェーハの表面及び前記部分ＳＯＩ層の表面に第２絶縁膜を形成する工程と、該第２絶縁膜の表面に非単結晶シリコン膜を形成する工程と、前記シリコン単結晶ウェーハの第１絶縁膜のない表面に形成された前記第２絶縁膜及び非単結晶シリコン膜を残し、前記部分ＳＯＩ層の表面に形成された前記第２絶縁膜及び非単結晶シリコン膜を除去することにより、該部分ＳＯＩ層の表面を露出させる工程と、該部分ＳＯＩ層の表面を露出させたＳＯＩウェーハに対し、水素ガス若しくは不活性ガス又はこれらの混合ガス雰囲気下でＲＴＡ処理を行うことにより、前記非単結晶シリコン膜を前記部分ＳＯＩ層に接するようにマイグレーションさせ、前記非単結晶シリコン膜を単結晶化して前記部分ＳＯＩ層と複合した全面ＳＯＩ層を形成し、前記第１絶縁膜及び前記第２絶縁膜を全面埋め込み絶縁膜とする全面ＳＯＩ構造を形成する工程とを含み、全面ＳＯＩ構造を有するＳＯＩウェーハを製造することを特徴とするＳＯＩウェーハの製造方法を提供する。 The present invention is also a method for manufacturing an SOI wafer having a full SOI structure from an SOI wafer having a partial SOI structure manufactured by the above SOI wafer manufacturing method, wherein the SOI wafer has the partial SOI structure. Exposing the silicon single crystal wafer in a region without the first insulating film, and forming a second insulating film on the exposed surface of the silicon single crystal wafer and the surface of the partial SOI layer, Forming a non-single crystalline silicon film on the surface of the second insulating film, leaving the second insulating film and the non-single crystalline silicon film formed on the surface of the silicon single crystal wafer without the first insulating film; A process of exposing the surface of the partial SOI layer by removing the second insulating film and the non-single-crystal silicon film formed on the surface of the partial SOI layer. Then, by subjecting the SOI wafer with the surface of the partial SOI layer exposed to RTA treatment in an atmosphere of hydrogen gas, inert gas, or a mixed gas thereof, the non-single crystal silicon film is formed into the partial SOI layer. Migration is performed in contact with each other, and the non-single-crystal silicon film is single-crystallized to form a whole surface SOI layer composited with the partial SOI layer, and the first insulating film and the second insulating film are used as a whole buried insulating film. The present invention provides a method for manufacturing an SOI wafer, which includes a step of forming an SOI structure, and manufacturing an SOI wafer having an entire SOI structure.
このような工程を含む全面ＳＯＩ構造を有するＳＯＩウェーハを製造するＳＯＩウェーハの製造方法であれば、シリコン単結晶ウェーハに全面ＳＯＩ構造を低コストで形成することができる。また、１枚のシリコン単結晶ウェーハから１枚のＳＯＩウェーハを製造することができるため、ＳＯＩウェーハの製造コストを低減することができる。 With an SOI wafer manufacturing method for manufacturing an SOI wafer having an entire surface SOI structure including such steps, the entire surface SOI structure can be formed on a silicon single crystal wafer at a low cost. Further, since one SOI wafer can be manufactured from one silicon single crystal wafer, the manufacturing cost of the SOI wafer can be reduced.
また、本発明に係るＳＯＩウェーハの製造方法では、前記非単結晶シリコン膜を、多結晶シリコン膜又はアモルファスシリコン膜とすることが好ましい。
このように、本発明に係るＳＯＩウェーハの製造方法において用いる非単結晶シリコン膜を多結晶シリコン膜又はアモルファスシリコン膜とし、これを単結晶化させてＳＯＩ層を形成すれば、部分ＳＯＩ構造又は全面ＳＯＩ構造を低コストで形成することができる。
In the SOI wafer manufacturing method according to the present invention, the non-single crystal silicon film is preferably a polycrystalline silicon film or an amorphous silicon film.
As described above, if the non-single crystal silicon film used in the method for manufacturing an SOI wafer according to the present invention is a polycrystalline silicon film or an amorphous silicon film, and is formed into a single crystal to form an SOI layer, the partial SOI structure or the entire surface is formed. An SOI structure can be formed at low cost.
また、前記ＲＴＡ処理を、１０００℃以上１３００℃以下の温度、１秒以上６００秒以下の時間で行うことが好ましい。
このようにＲＴＡ処理を、１０００℃以上１３００℃以下の温度、１秒以上６００秒以下の時間で行えば、より効率的に、非単結晶シリコン膜を単結晶化し第１絶縁膜又は第２絶縁膜上にＳＯＩ層を形成することができる。
The RTA treatment is preferably performed at a temperature of 1000 ° C. to 1300 ° C. and a time of 1 second to 600 seconds.
When the RTA treatment is performed at a temperature of 1000 ° C. or higher and 1300 ° C. or lower and a time of 1 second or longer and 600 seconds or shorter as described above, the non-single crystal silicon film is more efficiently converted into a single crystal and the first insulating film or the second insulating film. An SOI layer can be formed on the film.
本発明に係るＳＯＩウェーハの製造方法によれば、容易な方法により低コストで部分ＳＯＩ構造を有するＳＯＩウェーハを製造することができる。また、この方法を利用して全面ＳＯＩ構造を有するＳＯＩウェーハを製造することもできる。そして、１枚のシリコン単結晶ウェーハから１枚のＳＯＩウェーハを製造することができるため、ＳＯＩウェーハの製造コストを著しく低減することができる。 According to the method for manufacturing an SOI wafer according to the present invention, an SOI wafer having a partial SOI structure can be manufactured at a low cost by an easy method. In addition, an SOI wafer having a whole surface SOI structure can be manufactured by using this method. And since one SOI wafer can be manufactured from one silicon single crystal wafer, the manufacturing cost of SOI wafer can be reduced significantly.
以下、本発明に係るＳＯＩウェーハの製造方法の一例について、図面を参照して説明するが、本発明はこれに限定されるものではない。 Hereinafter, although an example of the manufacturing method of the SOI wafer which concerns on this invention is demonstrated with reference to drawings, this invention is not limited to this.
図１は、本発明に係る部分ＳＯＩ構造を有するＳＯＩウェーハの製造方法の一例を示す説明図である。
まず、図１（ａ）に示すように、シリコン単結晶ウェーハ１００を準備する（工程１−ａ）。
ここで準備するシリコン単結晶ウェーハ１００は鏡面研磨されたものが好ましく、また、種々の寸法、物性等を有するものとすることができ、用途に応じて適宜選択することができる。
FIG. 1 is an explanatory view showing an example of a method for manufacturing an SOI wafer having a partial SOI structure according to the present invention.
First, as shown in FIG. 1A, a silicon
The silicon
次に、図１（ｂ）に示すように、シリコン単結晶ウェーハ１００の表面に第１絶縁膜１１０を形成する（工程１−ｂ）。
第１絶縁膜１１０は絶縁膜であればよいが、シリコン酸化膜とすれば容易に絶縁膜を得ることができ、好ましい。シリコン酸化膜の形成方法は熱酸化、ＣＶＤ（Ｃｈｅｍｉｃａｌ Ｖａｐｏｒ Ｄｅｐｏｓｉｔｉｏｎ）法のいずれでもよい。
また、シリコン酸化膜以外の絶縁膜を形成する場合も公知の方法を適宜用いることができる。
ここで形成する第１絶縁膜１１０の厚さは、後述するＲＴＡ処理（工程１−ｅ）において、非単結晶シリコン膜をマイグレーションする際にシリコン単結晶ウェーハの露出した表面まで達しやすくするために、１０００ｎｍ以下とすることが好ましい。
Next, as shown in FIG. 1B, a first
The first
Also, a known method can be used as appropriate when an insulating film other than a silicon oxide film is formed.
The thickness of the first insulating
次に、図１（ｃ）に示すように、第１絶縁膜１１０の表面に非単結晶シリコン膜１２０を形成する（工程１−ｃ）。
非単結晶シリコン膜１２０としては、例えば、多結晶シリコン（ポリシリコン）膜又はアモルファスシリコン膜とすることが好ましい。
Next, as shown in FIG. 1C, a non-single-
The non-single
ここで形成する非単結晶シリコン膜１２０の厚さは、５０ｎｍ以上５００ｎｍ以下の範囲とすることが好ましい。非単結晶シリコン膜１２０の厚さを５０ｎｍ以上とすれば、後述するＲＴＡ処理（工程１−ｅ）において、非単結晶シリコン膜をマイグレーションする際にシリコン単結晶ウェーハの露出した表面まで達しやすくすることができる。一方、５００ｎｍ以下であれば、ＲＴＡ処理による単結晶化をより確実に十分に行うことができる。
The thickness of the non-single-
次に、図１（ｄ）に示すように、非単結晶シリコン膜１２０の表面から、第１絶縁膜１１０を貫通し、シリコン単結晶ウェーハ１００の表面１０１まで達する開口部１３０を形成する。これにより、第１絶縁膜１１１及び非単結晶シリコン膜１２１が部分的に表面上に積層されたシリコン単結晶ウェーハを得る（工程１−ｄ）。
Next, as shown in FIG. 1 (d), an
この開口部１３０の形成方法は特に限定されないが、例えば、通常のフォトリソグラフィ技術を用いて、以下のように行うことができる。すなわち、非単結晶シリコン膜１２０の表面にフォトレジスト膜を形成し、所望のパターンで露光を行って開口部１３０に相当する領域のフォトレジスト膜を除去する。その後、残ったフォトレジスト膜パターン部分をマスクとしてエッチングにより非単結晶シリコン膜１２０と第１絶縁膜１１０を除去すればよい。
The method for forming the
この際、開口部１３０の幅や面積は特に限定されないが、開口部１３０以外の領域（残された部分的な第１絶縁膜１１１と部分的な非単結晶シリコン膜１２１の積層膜のパターンが形成されている領域）の幅（ストライプパターンや矩形パターンの場合は短辺の幅）を、１０００ｎｍ以下とすることが好ましい。
上記のように、開口部１３０以外の領域の幅を１０００ｎｍ以下とすることによって、後述のＲＴＡ処理（工程１−ｅ）の際にパターン上の非単結晶シリコン膜１２１を容易に全て単結晶化することが可能となる。
なお、開口部１３０以外の領域を１０００ｎｍを超える幅とした場合、パターン上の非単結晶シリコン膜１２１を全て単結晶化することは比較的難しくなるが、少なくともパターンの外周部（パターンのうち、開口部１３０に直接的に隣接する部分）の非単結晶シリコン膜１２１は単結晶化されるので、第１絶縁膜１１１上に単結晶シリコン層からなるＳＯＩ層を有する部分ＳＯＩ構造が形成される。
At this time, the width and area of the
As described above, by setting the width of the region other than the
Note that when the region other than the
なお、最終的に全面ＳＯＩウェーハを製造する場合には、後述する理由により、開口部１３０の幅を１０００ｎｍ以下とすることが好ましい。
In addition, when finally manufacturing a whole surface SOI wafer, it is preferable to set the width of the
次に、図１（ｅ）に示すように、第１絶縁膜１１１及び非単結晶シリコン膜１２１が部分的に表面上に積層されたシリコン単結晶ウェーハ１００に対し、水素ガス、若しくはヘリウム、ネオン、アルゴンなどの不活性ガス又はこれらの混合ガス雰囲気下でＲＴＡ（Ｒａｐｉｄ Ｔｈｅｒｍａｌ Ａｎｎｅａｌｉｎｇ）処理を行う。このＲＴＡ処理により、部分的な第１絶縁膜１１１の表面に形成されている非単結晶シリコン膜１２１にマイグレーション（移動）が生じる。この非単結晶シリコン膜１２１が開口部１３０に達し、下地のシリコン単結晶ウェーハ１００の露出された部分１０１に接触すると、その接触面から単結晶シリコンの固相成長が発生する。その結果、部分的な第１絶縁膜１１１の表面上に形成されている部分的な非単結晶シリコン膜１２１を単結晶化することができる。この段階で、第１絶縁膜１１１を埋め込み絶縁膜とし、非単結晶シリコン膜１２１が単結晶化されたシリコン膜１４０のうち、第１絶縁膜１１１上の部分を部分ＳＯＩ層１４１とする部分ＳＯＩ構造１５０が形成される（工程１−ｅ）。
Next, as shown in FIG. 1E, hydrogen gas or helium, neon is applied to the silicon
上記の水素ガス若しくは不活性ガス又はこれらの混合ガス雰囲気下で行うＲＴＡ処理の条件としては、部分的な第１絶縁膜１１１の表面上の部分的な非単結晶シリコン膜１２１にマイグレーションが生じ、開口部１３０に達して下地の単結晶シリコンウェーハ１００の表面１０１に接触する条件であれば特に限定されないが、１０００℃以上１３００℃以下の温度、１秒以上６００秒以下の時間で行うことが好ましい。
ＲＴＡ処理の温度が１０００℃以上であれば非単結晶シリコン膜１２１のマイグレーションをより確実に発生させることができ、１３００℃以下の温度であればスリップ転位の発生や金属汚染を抑制することができる。
また、ＲＴＡ処理で十分なマイグレーションを短時間で発生させるためには１１００℃以上とすることがより好ましく、１１５０℃以上とすることがさらに好ましい。また、マイグレーションを比較的低温で発生しやすくするためには、水素ガス１００％雰囲気下、又は、水素ガスを５％以上含む不活性ガス雰囲気下とすることがより好ましい。
As conditions for the RTA treatment performed in the hydrogen gas or inert gas atmosphere or a mixed gas atmosphere thereof, migration occurs in the partial non-single-
If the temperature of the RTA treatment is 1000 ° C. or higher, the migration of the non-single
In order to generate sufficient migration in a short time by the RTA treatment, the temperature is more preferably 1100 ° C. or higher, and further preferably 1150 ° C. or higher. Moreover, in order to make migration easy to occur at a relatively low temperature, it is more preferable to use a 100% hydrogen gas atmosphere or an inert gas atmosphere containing 5% or more hydrogen gas.
以上のような工程１−ａ〜工程１−ｅを経ることにより、図１（ｅ）に示すような、部分ＳＯＩ構造１５０を有するＳＯＩウェーハ１８０（部分ＳＯＩウェーハ）を製造することができる。以上のような工程を経て部分ＳＯＩ構造を有するＳＯＩウェーハを製造するＳＯＩウェーハの製造方法であれば、シリコン単結晶ウェーハに部分ＳＯＩ構造を低コストで容易に形成することができる。また、１枚のシリコン単結晶ウェーハから１枚のＳＯＩウェーハを製造することができるため、ＳＯＩウェーハの製造コストを低減することができる。また、以上のような工程による部分ＳＯＩウェーハの製造方法であれば、非単結晶シリコン膜から単結晶化されたシリコン膜１４０には欠陥が少なく、その結晶性を良好とすることができる。従って、部分ＳＯＩ構造１５０を構成する部分ＳＯＩ層１４１についても、欠陥が少なく、その結晶性を良好とすることができる。
Through the steps 1-a to 1-e as described above, an SOI wafer 180 (partial SOI wafer) having a
なお、この後さらに、工程１−ｅで作製された部分ＳＯＩウェーハ１８０の非単結晶シリコン膜から単結晶化されたシリコン膜１４０の表面の平坦性を高めるために、ＲＴＡ炉又は抵抗加熱炉を用いて、水素ガス、若しくは不活性ガス又はこれらの混合ガス雰囲気下で高温熱処理を行ったり、非単結晶シリコン膜から単結晶化されたシリコン膜１４０表面の微量研磨を行ったりしてもよい。
Thereafter, in order to further improve the flatness of the surface of the
次に、上記のような部分ＳＯＩ構造１５０を有するＳＯＩウェーハ１８０から全面ＳＯＩ構造を有するＳＯＩウェーハ（全面ＳＯＩウェーハ）を製造する方法を説明する。
図２に、本発明に係る、部分ＳＯＩ構造を有するＳＯＩウェーハから全面ＳＯＩ構造を有するＳＯＩウェーハの製造方法の一例を示した。
Next, a method for manufacturing an SOI wafer having a full SOI structure (full SOI wafer) from the
FIG. 2 shows an example of a method for manufacturing an SOI wafer having an entire SOI structure from an SOI wafer having a partial SOI structure according to the present invention.
まず、図２（ａ）に示すように、図１（ｅ）に示した部分ＳＯＩ構造１５０を有するＳＯＩウェーハ１８０において、第１絶縁膜１１１のない領域のシリコン単結晶ウェーハ１００の表面１０２を露出させる（工程２−ａ）。すなわち、非単結晶シリコン膜から単結晶化されたシリコン膜１４０のうち、第１絶縁膜１１１上の部分ＳＯＩ層１４１以外の部分を除去する。
First, as shown in FIG. 2A, in the
この工程２−ａは、工程１−ｄの場合と同様にフォトリソグラフィ技術を用いて行うことができる。すなわち、非単結晶シリコン膜から単結晶化したシリコン膜１４０の表面にフォトレジスト膜を形成し、非単結晶シリコン膜から単結晶化したシリコン膜１４０のうち除去しようとする部分に相当する領域のフォトレジスト膜を除去する。その後、残ったフォトレジスト膜パターン部分をマスクとして選択エッチングにより、除去しようとする非単結晶シリコン膜から単結晶化したシリコン膜１４０のみを除去し、下地のシリコン単結晶ウェーハ１００の表面１０２を露出すればよい。
This step 2-a can be performed using a photolithography technique as in the case of the step 1-d. That is, a photoresist film is formed on the surface of the
なお、この際、下地のシリコン単結晶ウェーハ１００を残し、非単結晶シリコン膜から単結晶化したシリコン膜１４０のみを選択エッチングで除去するため、例えば、前述の工程１−ａで準備するシリコン単結晶ウェーハ１００として、高ドーパント濃度基板（ボロンが高濃度にドープされたｐ＋基板や、リン、アンチモン、ヒ素が高濃度にドープされたｎ＋基板）を用い、一方で、前述の工程１−ｃで形成する非単結晶シリコン膜１２０をノンドープ又は低ドーパント濃度の膜として形成することもできる。また、前述の工程１−ａで準備するシリコン単結晶ウェーハ１００として、アルカリ水溶液に対してエッチング速度が遅い、主表面の面方位を（１１１）面とした、（１１１）基板を用いることもできる。
At this time, since the underlying silicon
次に、図２（ｂ）に示すように、露出したシリコン単結晶ウェーハ１００の表面１０２及び部分ＳＯＩ層１４１の表面に第２絶縁膜２１０を形成する（工程２−ｂ）。
第２絶縁膜２１０としては、工程１−ｂで形成した第１絶縁膜１１０と同様に、絶縁膜であればよいが、例えばシリコン酸化膜とすることが好ましい。シリコン酸化膜の形成方法は熱酸化、ＣＶＤ法のいずれでもよい。
形成する第２絶縁膜２１０の厚さは、部分ＳＯＩ層１４１の下部に形成されている部分的な第１絶縁膜１１１（埋め込み絶縁膜）と同一の厚さとすることができるが、用途に応じて異なる厚さの絶縁膜を形成してもよい。
Next, as shown in FIG. 2B, a second
The second
The thickness of the second
次に、図２（ｃ）に示すように、第２絶縁膜２１０の表面に非単結晶シリコン膜２２０を形成する（工程２−ｃ）。
ここで形成する非単結晶シリコン膜２２０の厚さは、既に形成されている部分ＳＯＩ層１４１の厚さと同等の厚さとすることが好ましい。
Next, as shown in FIG. 2C, a non-single-
The thickness of the non-single-
次に、図２（ｄ）に示すように、シリコン単結晶ウェーハ１００の第１絶縁膜１１１のない表面に形成された第２絶縁膜２１１及び非単結晶シリコン膜２２１を残し、部分ＳＯＩ層１４１の表面に形成された第２絶縁膜２１０及び非単結晶シリコン膜２２０を除去する。これにより、部分ＳＯＩ層１４１の表面１４２を露出させる（工程２−ｄ）。
Next, as shown in FIG. 2D, the second
この工程２−ｄは、前述の工程１−ｄ、工程２−ａと同様にフォトリソグラフィ技術を用いて行うことができる。すなわち、非単結晶シリコン膜２２０の表面にフォトレジスト膜を形成し、部分ＳＯＩ層１４１の上部に相当する領域のフォトレジスト膜を除去した後、残ったフォトレジスト膜パターン部分をマスクとしてエッチングにより非単結晶シリコン膜２２０と第２絶縁膜２１０を除去すればよい。このようにして、図２（ｄ）に示したように、シリコン単結晶ウェーハ１００の表面に形成された絶縁膜（部分的な第１絶縁膜１１１と第２絶縁膜２１１とからなり、シリコン単結晶ウェーハ１００全面を覆う絶縁膜）上に、部分ＳＯＩ層１４１と部分的な非単結晶シリコン膜２２１が交互に形成されたＳＯＩウェーハを得ることができる。
This step 2-d can be performed using the photolithography technique in the same manner as the above-described step 1-d and step 2-a. That is, after forming a photoresist film on the surface of the non-single
次に、図２（ｄ）に示した部分ＳＯＩ層１４１の表面を露出させたＳＯＩウェーハに対し、水素ガス若しくは不活性ガス又はこれらの混合ガス雰囲気下でＲＴＡ処理を行う。このＲＴＡ処理により、非単結晶シリコン膜２２１と部分ＳＯＩ層１４１にマイグレーションが生じ、非単結晶シリコン膜２２１と部分ＳＯＩ層１４１が接触する。部分ＳＯＩ層１４１は単結晶化されたシリコン膜であるので、非単結晶シリコン膜２２１側において非単結晶シリコン膜２２１と部分ＳＯＩ層１４１の接触面から単結晶シリコンの固相成長が発生する。その結果、図２（ｅ）に示したように、非単結晶シリコン膜２２１が単結晶化され、部分ＳＯＩ層１４１と複合した全面ＳＯＩ層２６０を形成し、第１絶縁膜１１１及び第２絶縁膜２１１を併せて全面埋め込み絶縁膜とする全面ＳＯＩ構造を形成される（工程２−ｅ）。
Next, an RTA process is performed in an atmosphere of hydrogen gas, inert gas, or a mixed gas thereof on the SOI wafer from which the surface of the
この工程２−ｅにおけるＲＴＡ処理は、工程１−ｅのＲＴＡ処理の場合と同様の条件下、すなわち、１０００℃以上１３００℃以下の温度、１秒以上６００秒以下の時間で行うことが好ましい。また、ＲＴＡ処理において十分なマイグレーションを短時間で発生させるためには１１００℃以上とすることがより好ましく、１１５０℃以上とすることがさらに好ましい。また、マイグレーションを比較的低温で発生しやすくするためには、水素ガス１００％雰囲気下、又は、水素ガスを５％以上含む不活性ガス雰囲気とすることがより好ましい。 The RTA treatment in Step 2-e is preferably performed under the same conditions as in the RTA treatment in Step 1-e, that is, at a temperature of 1000 ° C. to 1300 ° C. and a time of 1 second to 600 seconds. In order to generate sufficient migration in the RTA process in a short time, the temperature is more preferably 1100 ° C. or higher, and further preferably 1150 ° C. or higher. In order to easily cause migration at a relatively low temperature, it is more preferable to use an atmosphere of 100% hydrogen gas or an inert gas atmosphere containing 5% or more of hydrogen gas.
なお、この際、ＲＴＡ処理を行う前の部分的な非単結晶シリコン膜２２１の幅（ストライプパターンや矩形パターンの場合は短辺の幅）が１０００ｎｍ以下になるようにすれば、ＲＴＡ処理により部分的な非単結晶シリコン膜２２１をより容易に全て単結晶化することができる。従って、全面ＳＯＩ構造を有するＳＯＩウェーハを得るためには、部分的な非単結晶シリコン膜２２１の幅を１０００ｎｍ以下とすることが好ましい。このようにするためには、前述の工程１−ｄにおいて、図１（ｄ）に示した開口部１３０を形成する際の開口部１３０の幅を１０００ｎｍ以下とすることが必要となる。
At this time, if the width of the partial non-single-
以上のような工程を経て、図２（ｅ）に示したような、全面ＳＯＩ構造を有するＳＯＩウェーハ２８０を製造することができる。
なお、この後さらに、工程２−ｅで作製された全面ＳＯＩ構造を有するＳＯＩウェーハ２８０の全面ＳＯＩ層２６０表面の平坦性を高めるため、ＲＴＡ炉又は抵抗加熱炉を用いて、水素ガス、若しくは不活性ガス又はこれらの混合ガス雰囲気下で高温熱処理を行ったり、全面ＳＯＩ層２６０表面の微量研磨を行ったりしてもよい。
Through the steps as described above, an
Thereafter, in order to further improve the flatness of the surface of the
以上のような工程を経て全面ＳＯＩ構造を有するＳＯＩウェーハを製造するＳＯＩウェーハの製造方法であれば、シリコン単結晶ウェーハに全面ＳＯＩ構造を低コストで形成することができる。そして、１枚のシリコン単結晶ウェーハから１枚のＳＯＩウェーハを製造することができるため、ＳＯＩウェーハの製造コストを低減することができる。また、以上のような工程による全面ＳＯＩウェーハの製造方法であれば、欠陥が少なく結晶性が良好な部分ＳＯＩ層１４１を有する部分ＳＯＩウェーハから全面ＳＯＩウェーハの製造を行うため、最終的に形成した全面ＳＯＩ層２６０についても、欠陥が少なく、その結晶性を良好とすることができる。
With an SOI wafer manufacturing method for manufacturing an SOI wafer having an entire SOI structure through the above-described steps, the entire SOI structure can be formed on a silicon single crystal wafer at low cost. Since one SOI wafer can be manufactured from one silicon single crystal wafer, the manufacturing cost of the SOI wafer can be reduced. In addition, if the method for manufacturing a full-scale SOI wafer according to the above-described process is used, a full-scale SOI wafer is manufactured from a partial SOI wafer having a
以下、本発明を実施例を挙げて具体的に説明するが、本発明はこれに限定されるものではない。
（実施例）
図１（ａ）〜（ｅ）、図２（ａ）〜（ｅ）に示した本発明の全面ＳＯＩウェーハの製造方法に従い、以下のように部分ＳＯＩウェーハ及び全面ＳＯＩウェーハを製造した。
Hereinafter, the present invention will be specifically described with reference to examples, but the present invention is not limited thereto.
(Example)
In accordance with the method for manufacturing a full surface SOI wafer of the present invention shown in FIGS. 1A to 1E and FIGS. 2A to 2E, a partial SOI wafer and a full surface SOI wafer were manufactured as follows.
まず、図１（ａ）に示したように、シリコン単結晶ウェーハ１００として、導電型ｐ型、抵抗率０．０１Ωｃｍ、直径３００ｍｍ、厚さ７７５μｍ、面方位（１００）のＣＺウェーハを準備した（工程１−ａ）。 First, as shown in FIG. 1A, a CZ wafer having a conductivity type p-type, a resistivity of 0.01 Ωcm, a diameter of 300 mm, a thickness of 775 μm, and a plane orientation (100) was prepared as a silicon single crystal wafer 100 ( Step 1-a).
次に、図１（ｂ）に示したように、シリコン単結晶ウェーハ１００の表面に、第１絶縁膜１１０としてドライ酸化により熱酸化膜（シリコン酸化膜）を１０ｎｍの厚さで形成した（工程１−ｂ）。
Next, as shown in FIG. 1B, a thermal oxide film (silicon oxide film) having a thickness of 10 nm is formed as a first
次に、図１（ｃ）に示したように、シリコン酸化膜（第１絶縁膜）１１０の表面に、非単結晶シリコン膜１２０としてノンドープの多結晶シリコン膜を、減圧ＣＶＤ法によって堆積温度を６２０℃として３００ｎｍの厚さで形成した（工程１−ｃ）。
Next, as shown in FIG. 1C, a non-doped polycrystalline silicon film as a non-single
次に、図１（ｄ）に示したように、フォトリソグラフィ技術により、非単結晶シリコン膜（多結晶シリコン膜）１２０の表面から、シリコン酸化膜（第１絶縁膜）１１０を貫通し、シリコン単結晶ウェーハ１００の表面１０１まで達する開口部１３０を形成した。
具体的には、パターン形状をライン＆スペース（それぞれ１０００ｎｍ幅）のストライプパターンとした。
また、多結晶シリコン膜（非単結晶シリコン膜）１２０のエッチングにはＴＭＡＨ（水酸化テトラメチルアンモニウム）水溶液を、シリコン酸化膜（第１絶縁膜）１１０のエッチングにはフッ化水素酸（ＨＦ）１％水溶液を用いた。
Next, as shown in FIG. 1D, the silicon oxide film (first insulating film) 110 is penetrated from the surface of the non-single-crystal silicon film (polycrystalline silicon film) 120 by photolithography, and silicon An
Specifically, the pattern shape was a stripe pattern of lines and spaces (each 1000 nm width).
Further, a TMAH (tetramethylammonium hydroxide) aqueous solution is used for etching the polycrystalline silicon film (non-single crystal silicon film) 120, and hydrofluoric acid (HF) is used for etching the silicon oxide film (first insulating film) 110. A 1% aqueous solution was used.
次に、このシリコン酸化膜（第１絶縁膜）１１１及び多結晶シリコン膜（非単結晶シリコン膜）１２１が部分的に表面上に積層されたシリコン単結晶ウェーハ１００に対し、ＲＴＡ処理を水素ガス１００％雰囲気下、１１５０℃、３０秒の条件で行った。これにより、図１（ｅ）に示したように、部分的な多結晶シリコン膜（非単結晶シリコン膜）１２１が単結晶化されたシリコン膜１４０が形成され、埋め込み酸化膜（部分的な第１絶縁膜）１１１の上に部分ＳＯＩ層１４１が形成された部分ＳＯＩウェーハ１８０を得た。
Next, RTA treatment is performed on the silicon
次に、図１（ｅ）に示した部分ＳＯＩ構造１５０を有するＳＯＩウェーハ１８０において、フォトリソグラフィ技術により、埋め込み酸化膜（第１絶縁膜）１１１のない領域を除去し、図２（ａ）に示したように、シリコン単結晶ウェーハ１００の表面１０２を露出させた（工程２−ａ）。
多結晶シリコン膜から単結晶化されたシリコン膜１４０のエッチングにはＴＭＡＨ水溶液を用いた。
Next, in the
A TMAH aqueous solution was used for etching the
次に、図２（ｂ）に示したように、露出したシリコン単結晶ウェーハ１００の表面１０２及び部分ＳＯＩ層１４１の表面に、第２絶縁膜２１０として熱酸化膜（シリコン酸化膜）を形成した（工程２−ｂ）。この熱酸化膜はドライ酸化により形成し、膜厚は１０ｎｍとした。
Next, as shown in FIG. 2B, a thermal oxide film (silicon oxide film) is formed as the second
次に、図２（ｃ）に示したように、第２絶縁膜（シリコン酸化膜）２１０の表面に、非単結晶シリコン膜２２０としてノンドープの多結晶シリコン膜を、減圧ＣＶＤ法によって堆積温度を６２０℃として３００ｎｍの厚さで形成した（工程２−ｃ）。
Next, as shown in FIG. 2C, a non-doped polycrystalline silicon film as a non-single
次に、図２（ｄ）に示したように、フォトリソグラフィ技術により、シリコン単結晶ウェーハ１００の第１絶縁膜１１１のない表面に形成された第２絶縁膜２１１及び多結晶シリコン膜（非単結晶シリコン膜）２２１を残し、部分ＳＯＩ層１４１の表面に形成された第２絶縁膜２１０及び多結晶シリコン膜（非単結晶シリコン膜）２２０を除去した。これにより、部分ＳＯＩ層１４１の表面１４２を露出させた（工程２−ｄ）。
なお、多結晶シリコン膜（非単結晶シリコン膜）２２０のエッチングにはＴＭＡＨ水溶液を、シリコン酸化膜（第２絶縁膜）２１０のエッチングにはＨＦ１％水溶液を用いた。
Next, as shown in FIG. 2D, the second
Note that a TMAH aqueous solution was used for etching the polycrystalline silicon film (non-single-crystal silicon film) 220, and an HF 1% aqueous solution was used for etching the silicon oxide film (second insulating film) 210.
次に、この部分ＳＯＩ層１４１の表面１４２を露出させたＳＯＩウェーハに対しＲＴＡ処理を水素ガス１００％雰囲気下、１１５０℃、３０秒の条件で行った（工程２−ｅ）。
これにより、図２（ｅ）に示したように、第１絶縁膜１１１及び第２絶縁膜２１１を併せて全面埋め込み絶縁膜（全面埋め込み酸化膜）とし、該全面埋め込み絶縁膜上に全面ＳＯＩ層２６０が形成されたＳＯＩウェーハ（全面ＳＯＩウェーハ）２８０を製造した。
Next, the RTA process was performed on the SOI wafer from which the
As a result, as shown in FIG. 2E, the first insulating
＜評価＞
このようにして工程１−ａ〜１−ｅ、２−ａ〜２−ｅを経て作製された全面ＳＯＩ層２６０をＴＥＭ（透過型電子顕微鏡）の高倍率観察により評価した。その結果、ＲＴＡ処理前のポリシリコン膜にはポリシリコンの粒界が観察されていたのに対し、ＲＴＡ処理後の全面ＳＯＩ層２６０には多結晶シリコンの粒界や欠陥が観察されなかったことから、全面ＳＯＩ層２６０は良好な単結晶になっていることが確認された。
<Evaluation>
Thus, the whole
なお、本発明は、上記実施形態に限定されるものではない。上記実施形態は、例示であり、本発明の特許請求の範囲に記載された技術的思想と実質的に同一な構成を有し、同様な作用効果を奏するものは、いかなるものであっても本発明の技術的範囲に包含される。 The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has substantially the same configuration as the technical idea described in the claims of the present invention, and any device that exhibits the same function and effect is the present invention. It is included in the technical scope of the invention.
１００…シリコン単結晶ウェーハ、
１０１、１０２…シリコン単結晶ウェーハの表面（露出面）、
１１０…第１絶縁膜、 １１１…部分的な第１絶縁膜、
１２０…非単結晶シリコン膜、 １２１…部分的な非単結晶シリコン膜、
１３０…開口部、
１４０…非単結晶シリコン膜から単結晶化された単結晶シリコン膜、
１４１…部分ＳＯＩ層、
１５０…部分ＳＯＩ構造、 １８０…部分ＳＯＩウェーハ、
２１０…第２絶縁膜、 ２１１…部分的な第２絶縁膜、
２２０…非単結晶シリコン膜、 ２２１…部分的な非単結晶シリコン膜、
２６０…全面ＳＯＩ層、 ２８０…全面ＳＯＩウェーハ。
100: Silicon single crystal wafer,
101, 102 ... surface of silicon single crystal wafer (exposed surface),
110 ... first insulating film, 111 ... partial first insulating film,
120 ... Non-single-
130 ... opening,
140... A single crystal silicon film that has been single crystallized from a non-single crystal silicon film,
141... Partial SOI layer,
150 ... Partial SOI structure, 180 ... Partial SOI wafer,
210 ... second insulating
220 ... non-single-crystal silicon film, 221 ... partial non-single-crystal silicon film,
260... Whole surface SOI layer, 280... Whole surface SOI wafer.
Claims (4)
前記シリコン単結晶ウェーハの表面に第１絶縁膜を形成する工程と、
該第１絶縁膜の表面に非単結晶シリコン膜を形成する工程と、
前記非単結晶シリコン膜の表面から、前記第１絶縁膜を貫通し、前記シリコン単結晶ウェーハの表面まで達する開口部を形成することにより、前記第１絶縁膜及び前記非単結晶シリコン膜が部分的に表面上に積層されたシリコン単結晶ウェーハを得る工程と、
前記第１絶縁膜及び非単結晶シリコン膜が部分的に表面上に積層されたシリコン単結晶ウェーハに対し、水素ガス若しくは不活性ガス又はこれらの混合ガス雰囲気下でＲＴＡ処理を行うことにより、前記非単結晶シリコン膜を前記開口部の前記シリコン単結晶ウェーハが露出された部分に接するようにマイグレーションさせ、前記非単結晶シリコン膜を単結晶化して、前記第１絶縁膜を埋め込み絶縁膜とし、該第１絶縁膜上の単結晶化されたシリコン膜を部分ＳＯＩ層とする部分ＳＯＩ構造を形成する工程と
を含み、部分ＳＯＩ構造を有するＳＯＩウェーハを製造することを特徴とするＳＯＩウェーハの製造方法。 A method of manufacturing an SOI wafer from a silicon single crystal wafer, comprising:
Forming a first insulating film on the surface of the silicon single crystal wafer;
Forming a non-single crystal silicon film on the surface of the first insulating film;
By forming an opening extending from the surface of the non-single crystal silicon film to the surface of the silicon single crystal wafer through the first insulating film, the first insulating film and the non-single crystal silicon film are partially To obtain a silicon single crystal wafer laminated on the surface,
The silicon single crystal wafer in which the first insulating film and the non-single crystal silicon film are partially laminated on the surface is subjected to RTA treatment in an atmosphere of hydrogen gas, inert gas, or a mixed gas thereof, The non-single crystal silicon film is migrated so as to be in contact with the exposed portion of the silicon single crystal wafer in the opening, the non-single crystal silicon film is monocrystallized, and the first insulating film is used as a buried insulating film, Forming a partial SOI structure using a single-crystallized silicon film on the first insulating film as a partial SOI layer, and manufacturing an SOI wafer having a partial SOI structure. Method.
前記部分ＳＯＩ構造を有するＳＯＩウェーハの、前記第１絶縁膜のない領域の前記シリコン単結晶ウェーハを露出させる工程と、
該露出した前記シリコン単結晶ウェーハの表面及び前記部分ＳＯＩ層の表面に第２絶縁膜を形成する工程と、
該第２絶縁膜の表面に非単結晶シリコン膜を形成する工程と、
前記シリコン単結晶ウェーハの第１絶縁膜のない表面に形成された前記第２絶縁膜及び非単結晶シリコン膜を残し、前記部分ＳＯＩ層の表面に形成された前記第２絶縁膜及び非単結晶シリコン膜を除去することにより、該部分ＳＯＩ層の表面を露出させる工程と、
該部分ＳＯＩ層の表面を露出させたＳＯＩウェーハに対し、水素ガス若しくは不活性ガス又はこれらの混合ガス雰囲気下でＲＴＡ処理を行うことにより、前記非単結晶シリコン膜を前記部分ＳＯＩ層に接するようにマイグレーションさせ、前記非単結晶シリコン膜を単結晶化して前記部分ＳＯＩ層と複合した全面ＳＯＩ層を形成し、前記第１絶縁膜及び前記第２絶縁膜を全面埋め込み絶縁膜とする全面ＳＯＩ構造を形成する工程と
を含み、全面ＳＯＩ構造を有するＳＯＩウェーハを製造することを特徴とするＳＯＩウェーハの製造方法。 A method for manufacturing an SOI wafer having a full-scale SOI structure from an SOI wafer having a partial SOI structure manufactured by the method for manufacturing an SOI wafer according to claim 1,
Exposing the silicon single crystal wafer in a region without the first insulating film of the SOI wafer having the partial SOI structure;
Forming a second insulating film on the exposed surface of the silicon single crystal wafer and the surface of the partial SOI layer;
Forming a non-single crystal silicon film on the surface of the second insulating film;
The second insulating film and non-single crystal formed on the surface of the partial SOI layer, leaving the second insulating film and non-single crystal silicon film formed on the surface without the first insulating film of the silicon single crystal wafer. Exposing the surface of the partial SOI layer by removing the silicon film;
By subjecting the SOI wafer with the surface of the partial SOI layer exposed to RTA treatment in an atmosphere of hydrogen gas, inert gas, or a mixed gas thereof, the non-single crystal silicon film is brought into contact with the partial SOI layer. The entire SOI structure in which the non-single crystal silicon film is monocrystallized to form a whole surface SOI layer combined with the partial SOI layer, and the first insulating film and the second insulating film are entirely buried insulating films. A method for manufacturing an SOI wafer, comprising: manufacturing an SOI wafer having an entire SOI structure.
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