USD789888S1 - Electrode plate for semiconductor manufacturing apparatus - Google Patents

Electrode plate for semiconductor manufacturing apparatus Download PDF

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Publication number
USD789888S1
USD789888S1 US29558825 US201629558825F USD789888S US D789888 S1 USD789888 S1 US D789888S1 US 29558825 US29558825 US 29558825 US 201629558825 F US201629558825 F US 201629558825F US D789888 S USD789888 S US D789888S
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US
Grant status
Grant
Patent type
Design
Prior art keywords
electrode plate
manufacturing apparatus
semiconductor manufacturing
elevational view
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29558825
Inventor
Hyun Soo JANG
Jeong Ho Lee
Young Hoon Kim
Jong Su Kim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASM IP Holding BV
Original Assignee
ASM IP Holding BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Grant date

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Description

FIG. 1 is a perspective view of an electrode plate for a semiconductor manufacturing apparatus.

FIG. 2 is a front elevational view of the electrode plate.

FIG. 3 is a rear elevational view of the electrode plate.

FIG. 4 is a left side elevational view of the electrode plate.

FIG. 5 is a right side elevational view of the electrode plate.

FIG. 6 is a top plan view of the electrode plate.

FIG. 7 is a bottom plan view of the electrode plate; and,

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 6.

Claims (1)

    CLAIM
  1. The ornamental design for an electrode plate for a semiconductor manufacturing apparatus, as shown and described.
US29558825 2016-01-08 2016-03-22 Electrode plate for semiconductor manufacturing apparatus Active USD789888S1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR30-2016-0000964 2016-01-08
KR20160000964 2016-01-08

Publications (1)

Publication Number Publication Date
USD789888S1 true USD789888S1 (en) 2017-06-20

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Family Applications (1)

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US29558825 Active USD789888S1 (en) 2016-01-08 2016-03-22 Electrode plate for semiconductor manufacturing apparatus

Country Status (1)

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US (1) USD789888S1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD827592S1 (en) * 2017-01-31 2018-09-04 Hitachi High-Technologies Corporation Electrode cover for a plasma processing apparatus

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD363464S (en) * 1992-08-27 1995-10-24 Tokyo Electron Yamanashi Limited Electrode for a semiconductor processing apparatus
US7479304B2 (en) * 2002-02-14 2009-01-20 Applied Materials, Inc. Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate
USD609652S1 (en) * 2008-07-22 2010-02-09 Tokyo Electron Limited Wafer attracting plate
USD609655S1 (en) * 2008-10-03 2010-02-09 Ngk Insulators, Ltd. Electrostatic chuck
USD665055S1 (en) * 2012-01-24 2012-08-07 Asm Ip Holding B.V. Shower plate
USD699199S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode plate for a plasma processing apparatus
USD720838S1 (en) * 2014-02-04 2015-01-06 Asm Ip Holding B.V. Shower plate
USD724701S1 (en) * 2014-02-04 2015-03-17 ASM IP Holding, B.V. Shower plate
USD725168S1 (en) * 2014-02-04 2015-03-24 Asm Ip Holding B.V. Heater block
USD726884S1 (en) * 2014-02-04 2015-04-14 Asm Ip Holding B.V. Heater block
USD732145S1 (en) * 2014-02-04 2015-06-16 Asm Ip Holding B.V. Shower plate
USD732644S1 (en) * 2014-02-04 2015-06-23 Asm Ip Holding B.V. Top plate
USD746955S1 (en) * 2014-11-03 2016-01-05 Micah Corder Drain cover
USD753269S1 (en) * 2015-01-09 2016-04-05 Asm Ip Holding B.V. Top plate

Patent Citations (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD363464S (en) * 1992-08-27 1995-10-24 Tokyo Electron Yamanashi Limited Electrode for a semiconductor processing apparatus
USD411516S (en) * 1996-03-15 1999-06-29 Tokyo Electron Limited Gas diffusion plate for electrode of semiconductor wafer processing apparatus
US7479304B2 (en) * 2002-02-14 2009-01-20 Applied Materials, Inc. Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate
USD609652S1 (en) * 2008-07-22 2010-02-09 Tokyo Electron Limited Wafer attracting plate
USD609655S1 (en) * 2008-10-03 2010-02-09 Ngk Insulators, Ltd. Electrostatic chuck
USD699199S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode plate for a plasma processing apparatus
USD665055S1 (en) * 2012-01-24 2012-08-07 Asm Ip Holding B.V. Shower plate
USD725168S1 (en) * 2014-02-04 2015-03-24 Asm Ip Holding B.V. Heater block
USD724701S1 (en) * 2014-02-04 2015-03-17 ASM IP Holding, B.V. Shower plate
USD720838S1 (en) * 2014-02-04 2015-01-06 Asm Ip Holding B.V. Shower plate
USD726884S1 (en) * 2014-02-04 2015-04-14 Asm Ip Holding B.V. Heater block
USD732145S1 (en) * 2014-02-04 2015-06-16 Asm Ip Holding B.V. Shower plate
USD732644S1 (en) * 2014-02-04 2015-06-23 Asm Ip Holding B.V. Top plate
USD733261S1 (en) * 2014-02-04 2015-06-30 Asm Ip Holding B.V. Top plate
USD733843S1 (en) * 2014-02-04 2015-07-07 ASM IP Holding, B.V. Shower plate
USD735836S1 (en) * 2014-02-04 2015-08-04 Asm Ip Holding B.V. Shower plate
USD746955S1 (en) * 2014-11-03 2016-01-05 Micah Corder Drain cover
USD753269S1 (en) * 2015-01-09 2016-04-05 Asm Ip Holding B.V. Top plate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD827592S1 (en) * 2017-01-31 2018-09-04 Hitachi High-Technologies Corporation Electrode cover for a plasma processing apparatus

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