USD868995S1 - Gas diffusion plate for a plasma processing apparatus - Google Patents

Gas diffusion plate for a plasma processing apparatus Download PDF

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Publication number
USD868995S1
USD868995S1 US29/638,441 US201829638441F USD868995S US D868995 S1 USD868995 S1 US D868995S1 US 201829638441 F US201829638441 F US 201829638441F US D868995 S USD868995 S US D868995S
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Prior art keywords
processing apparatus
plasma processing
gas diffusion
diffusion plate
view
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US29/638,441
Inventor
Kazuumi Tanaka
Kouji Okuda
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Hitachi High Tech Corp
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Hitachi High Technologies Corp
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Assigned to HITACHI HIGH-TECHNOLOGIES CORPORATION reassignment HITACHI HIGH-TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OKUDA, KOUJI, TANAKA, KAZUUMI
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Publication of USD868995S1 publication Critical patent/USD868995S1/en
Assigned to HITACHI HIGH-TECH CORPORATION reassignment HITACHI HIGH-TECH CORPORATION CHANGE OF NAME AND ADDRESS Assignors: HITACHI HIGH-TECHNOLOGIES CORPORATION
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FIG. 1 is a front, bottom and right side perspective view of a gas diffusion plate for a plasma processing apparatus according to the design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a rear elevational view thereof;
FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2;
FIG. 9 is an enlarged view of the portion shown in BOX 9 in FIG. 2; and,
FIG. 10 is an enlarged view of the portion shown in BOX 10 in FIG. 8.
The broken lines show the boundary of enlarged portions and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a gas diffusion plate for a plasma processing apparatus, as shown and described.
US29/638,441 2017-11-06 2018-02-27 Gas diffusion plate for a plasma processing apparatus Active USD868995S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-024710 2017-11-06
JPD2017-24710F JP1605832S (en) 2017-11-06 2017-11-06

Publications (1)

Publication Number Publication Date
USD868995S1 true USD868995S1 (en) 2019-12-03

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US29/638,441 Active USD868995S1 (en) 2017-11-06 2018-02-27 Gas diffusion plate for a plasma processing apparatus

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US (1) USD868995S1 (en)
JP (1) JP1605832S (en)
TW (1) TWD194248S (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD954986S1 (en) * 2019-10-18 2022-06-14 Hitachi High-Tech Corporation Electrode cover for a plasma processing device
USD955217S1 (en) * 2019-10-04 2022-06-21 Coart Inc. Cup lid
USD962206S1 (en) * 2020-01-09 2022-08-30 Space Exploration Technologies Corp. Antenna apparatus
USD962908S1 (en) * 2020-07-09 2022-09-06 Space Exploration Technologies Corp. Antenna apparatus
USD962906S1 (en) * 2020-01-09 2022-09-06 Space Exploration Technologies Corp. Antenna apparatus
USD963623S1 (en) * 2020-01-09 2022-09-13 Space Exploration Technologies Corp. Antenna apparatus
USD971192S1 (en) * 2019-06-03 2022-11-29 Space Exploration Technologies Corp. Antenna apparatus
USD971900S1 (en) * 2019-06-03 2022-12-06 Space Exploration Technologies Corp. Antenna apparatus
USD976242S1 (en) * 2019-06-03 2023-01-24 Space Exploration Technologies Corp. Antenna apparatus
USD986228S1 (en) * 2020-01-09 2023-05-16 Space Exploration Technologies Corp. Antenna apparatus
USD1012249S1 (en) * 2020-09-29 2024-01-23 Brent Waterman Pipe covering

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD411516S (en) * 1996-03-15 1999-06-29 Tokyo Electron Limited Gas diffusion plate for electrode of semiconductor wafer processing apparatus
USD589473S1 (en) * 2007-05-30 2009-03-31 Nitto Denko Corporation Adhesive film material for use in manufacturing semiconductors
USD638550S1 (en) * 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD648289S1 (en) * 2010-10-21 2011-11-08 Novellus Systems, Inc. Electroplating flow shaping plate having offset spiral hole pattern
US20120097770A1 (en) * 2009-07-01 2012-04-26 Jang Woo Lee Water spray plate
USD667561S1 (en) * 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
USD672050S1 (en) * 2012-01-13 2012-12-04 Samsung Electronics Co., Ltd. Disk for a medical testing machine
USD734483S1 (en) * 2013-12-31 2015-07-14 Alamak Biosciences Incorporation Company Limited Tissue cell block for cancer detection
USD789888S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Electrode plate for semiconductor manufacturing apparatus
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
USD794210S1 (en) * 2014-04-15 2017-08-08 Q-Linea Ab Sample holding disc and master used in its manufacture
US20180247853A1 (en) * 2017-02-27 2018-08-30 Disco Corporation Electrostatic chuck table using method

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6245192B1 (en) 1999-06-30 2001-06-12 Lam Research Corporation Gas distribution apparatus for semiconductor processing
TWM557450U (en) 2017-09-06 2018-03-21 K Max Technology Co Ltd Ion implanter arc chamber

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD411516S (en) * 1996-03-15 1999-06-29 Tokyo Electron Limited Gas diffusion plate for electrode of semiconductor wafer processing apparatus
USD589473S1 (en) * 2007-05-30 2009-03-31 Nitto Denko Corporation Adhesive film material for use in manufacturing semiconductors
US20120097770A1 (en) * 2009-07-01 2012-04-26 Jang Woo Lee Water spray plate
USD638550S1 (en) * 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD667561S1 (en) * 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
USD648289S1 (en) * 2010-10-21 2011-11-08 Novellus Systems, Inc. Electroplating flow shaping plate having offset spiral hole pattern
USD672050S1 (en) * 2012-01-13 2012-12-04 Samsung Electronics Co., Ltd. Disk for a medical testing machine
USD734483S1 (en) * 2013-12-31 2015-07-14 Alamak Biosciences Incorporation Company Limited Tissue cell block for cancer detection
USD794210S1 (en) * 2014-04-15 2017-08-08 Q-Linea Ab Sample holding disc and master used in its manufacture
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
USD789888S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Electrode plate for semiconductor manufacturing apparatus
US20180247853A1 (en) * 2017-02-27 2018-08-30 Disco Corporation Electrostatic chuck table using method

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD971192S1 (en) * 2019-06-03 2022-11-29 Space Exploration Technologies Corp. Antenna apparatus
USD971900S1 (en) * 2019-06-03 2022-12-06 Space Exploration Technologies Corp. Antenna apparatus
USD976242S1 (en) * 2019-06-03 2023-01-24 Space Exploration Technologies Corp. Antenna apparatus
USD1012070S1 (en) 2019-06-03 2024-01-23 Space Exploration Technologies Corp. Antenna apparatus
USD955217S1 (en) * 2019-10-04 2022-06-21 Coart Inc. Cup lid
USD954986S1 (en) * 2019-10-18 2022-06-14 Hitachi High-Tech Corporation Electrode cover for a plasma processing device
USD962206S1 (en) * 2020-01-09 2022-08-30 Space Exploration Technologies Corp. Antenna apparatus
USD962906S1 (en) * 2020-01-09 2022-09-06 Space Exploration Technologies Corp. Antenna apparatus
USD963623S1 (en) * 2020-01-09 2022-09-13 Space Exploration Technologies Corp. Antenna apparatus
USD986228S1 (en) * 2020-01-09 2023-05-16 Space Exploration Technologies Corp. Antenna apparatus
USD962908S1 (en) * 2020-07-09 2022-09-06 Space Exploration Technologies Corp. Antenna apparatus
USD1012249S1 (en) * 2020-09-29 2024-01-23 Brent Waterman Pipe covering

Also Published As

Publication number Publication date
TWD194248S (en) 2018-11-21
JP1605832S (en) 2018-06-04

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