USD868995S1 - Gas diffusion plate for a plasma processing apparatus - Google Patents
Gas diffusion plate for a plasma processing apparatus Download PDFInfo
- Publication number
- USD868995S1 USD868995S1 US29/638,441 US201829638441F USD868995S US D868995 S1 USD868995 S1 US D868995S1 US 201829638441 F US201829638441 F US 201829638441F US D868995 S USD868995 S US D868995S
- Authority
- US
- United States
- Prior art keywords
- processing apparatus
- plasma processing
- gas diffusion
- diffusion plate
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
The broken lines show the boundary of enlarged portions and form no part of the claimed design.
Claims (1)
- The ornamental design for a gas diffusion plate for a plasma processing apparatus, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017-024710 | 2017-11-06 | ||
JPD2017-24710F JP1605832S (en) | 2017-11-06 | 2017-11-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD868995S1 true USD868995S1 (en) | 2019-12-03 |
Family
ID=62239122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/638,441 Active USD868995S1 (en) | 2017-11-06 | 2018-02-27 | Gas diffusion plate for a plasma processing apparatus |
Country Status (3)
Country | Link |
---|---|
US (1) | USD868995S1 (en) |
JP (1) | JP1605832S (en) |
TW (1) | TWD194248S (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD954986S1 (en) * | 2019-10-18 | 2022-06-14 | Hitachi High-Tech Corporation | Electrode cover for a plasma processing device |
USD955217S1 (en) * | 2019-10-04 | 2022-06-21 | Coart Inc. | Cup lid |
USD962206S1 (en) * | 2020-01-09 | 2022-08-30 | Space Exploration Technologies Corp. | Antenna apparatus |
USD962908S1 (en) * | 2020-07-09 | 2022-09-06 | Space Exploration Technologies Corp. | Antenna apparatus |
USD962906S1 (en) * | 2020-01-09 | 2022-09-06 | Space Exploration Technologies Corp. | Antenna apparatus |
USD963623S1 (en) * | 2020-01-09 | 2022-09-13 | Space Exploration Technologies Corp. | Antenna apparatus |
USD971192S1 (en) * | 2019-06-03 | 2022-11-29 | Space Exploration Technologies Corp. | Antenna apparatus |
USD971900S1 (en) * | 2019-06-03 | 2022-12-06 | Space Exploration Technologies Corp. | Antenna apparatus |
USD976242S1 (en) * | 2019-06-03 | 2023-01-24 | Space Exploration Technologies Corp. | Antenna apparatus |
USD986228S1 (en) * | 2020-01-09 | 2023-05-16 | Space Exploration Technologies Corp. | Antenna apparatus |
USD1012249S1 (en) * | 2020-09-29 | 2024-01-23 | Brent Waterman | Pipe covering |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD411516S (en) * | 1996-03-15 | 1999-06-29 | Tokyo Electron Limited | Gas diffusion plate for electrode of semiconductor wafer processing apparatus |
USD589473S1 (en) * | 2007-05-30 | 2009-03-31 | Nitto Denko Corporation | Adhesive film material for use in manufacturing semiconductors |
USD638550S1 (en) * | 2009-11-13 | 2011-05-24 | 3M Innovative Properties Company | Sample processing disk cover |
USD648289S1 (en) * | 2010-10-21 | 2011-11-08 | Novellus Systems, Inc. | Electroplating flow shaping plate having offset spiral hole pattern |
US20120097770A1 (en) * | 2009-07-01 | 2012-04-26 | Jang Woo Lee | Water spray plate |
USD667561S1 (en) * | 2009-11-13 | 2012-09-18 | 3M Innovative Properties Company | Sample processing disk cover |
USD672050S1 (en) * | 2012-01-13 | 2012-12-04 | Samsung Electronics Co., Ltd. | Disk for a medical testing machine |
USD734483S1 (en) * | 2013-12-31 | 2015-07-14 | Alamak Biosciences Incorporation Company Limited | Tissue cell block for cancer detection |
USD789888S1 (en) * | 2016-01-08 | 2017-06-20 | Asm Ip Holding B.V. | Electrode plate for semiconductor manufacturing apparatus |
USD793572S1 (en) * | 2015-06-10 | 2017-08-01 | Tokyo Electron Limited | Electrode plate for plasma processing apparatus |
USD794210S1 (en) * | 2014-04-15 | 2017-08-08 | Q-Linea Ab | Sample holding disc and master used in its manufacture |
US20180247853A1 (en) * | 2017-02-27 | 2018-08-30 | Disco Corporation | Electrostatic chuck table using method |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6245192B1 (en) | 1999-06-30 | 2001-06-12 | Lam Research Corporation | Gas distribution apparatus for semiconductor processing |
TWM557450U (en) | 2017-09-06 | 2018-03-21 | K Max Technology Co Ltd | Ion implanter arc chamber |
-
2017
- 2017-11-06 JP JPD2017-24710F patent/JP1605832S/ja active Active
-
2018
- 2018-02-27 TW TW107301129F patent/TWD194248S/en unknown
- 2018-02-27 US US29/638,441 patent/USD868995S1/en active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD411516S (en) * | 1996-03-15 | 1999-06-29 | Tokyo Electron Limited | Gas diffusion plate for electrode of semiconductor wafer processing apparatus |
USD589473S1 (en) * | 2007-05-30 | 2009-03-31 | Nitto Denko Corporation | Adhesive film material for use in manufacturing semiconductors |
US20120097770A1 (en) * | 2009-07-01 | 2012-04-26 | Jang Woo Lee | Water spray plate |
USD638550S1 (en) * | 2009-11-13 | 2011-05-24 | 3M Innovative Properties Company | Sample processing disk cover |
USD667561S1 (en) * | 2009-11-13 | 2012-09-18 | 3M Innovative Properties Company | Sample processing disk cover |
USD648289S1 (en) * | 2010-10-21 | 2011-11-08 | Novellus Systems, Inc. | Electroplating flow shaping plate having offset spiral hole pattern |
USD672050S1 (en) * | 2012-01-13 | 2012-12-04 | Samsung Electronics Co., Ltd. | Disk for a medical testing machine |
USD734483S1 (en) * | 2013-12-31 | 2015-07-14 | Alamak Biosciences Incorporation Company Limited | Tissue cell block for cancer detection |
USD794210S1 (en) * | 2014-04-15 | 2017-08-08 | Q-Linea Ab | Sample holding disc and master used in its manufacture |
USD793572S1 (en) * | 2015-06-10 | 2017-08-01 | Tokyo Electron Limited | Electrode plate for plasma processing apparatus |
USD789888S1 (en) * | 2016-01-08 | 2017-06-20 | Asm Ip Holding B.V. | Electrode plate for semiconductor manufacturing apparatus |
US20180247853A1 (en) * | 2017-02-27 | 2018-08-30 | Disco Corporation | Electrostatic chuck table using method |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD971192S1 (en) * | 2019-06-03 | 2022-11-29 | Space Exploration Technologies Corp. | Antenna apparatus |
USD971900S1 (en) * | 2019-06-03 | 2022-12-06 | Space Exploration Technologies Corp. | Antenna apparatus |
USD976242S1 (en) * | 2019-06-03 | 2023-01-24 | Space Exploration Technologies Corp. | Antenna apparatus |
USD1012070S1 (en) | 2019-06-03 | 2024-01-23 | Space Exploration Technologies Corp. | Antenna apparatus |
USD955217S1 (en) * | 2019-10-04 | 2022-06-21 | Coart Inc. | Cup lid |
USD954986S1 (en) * | 2019-10-18 | 2022-06-14 | Hitachi High-Tech Corporation | Electrode cover for a plasma processing device |
USD962206S1 (en) * | 2020-01-09 | 2022-08-30 | Space Exploration Technologies Corp. | Antenna apparatus |
USD962906S1 (en) * | 2020-01-09 | 2022-09-06 | Space Exploration Technologies Corp. | Antenna apparatus |
USD963623S1 (en) * | 2020-01-09 | 2022-09-13 | Space Exploration Technologies Corp. | Antenna apparatus |
USD986228S1 (en) * | 2020-01-09 | 2023-05-16 | Space Exploration Technologies Corp. | Antenna apparatus |
USD962908S1 (en) * | 2020-07-09 | 2022-09-06 | Space Exploration Technologies Corp. | Antenna apparatus |
USD1012249S1 (en) * | 2020-09-29 | 2024-01-23 | Brent Waterman | Pipe covering |
Also Published As
Publication number | Publication date |
---|---|
TWD194248S (en) | 2018-11-21 |
JP1605832S (en) | 2018-06-04 |
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