USD871608S1 - Gas ring for a plasma processing apparatus - Google Patents

Gas ring for a plasma processing apparatus Download PDF

Info

Publication number
USD871608S1
USD871608S1 US29/635,289 US201829635289F USD871608S US D871608 S1 USD871608 S1 US D871608S1 US 201829635289 F US201829635289 F US 201829635289F US D871608 S USD871608 S US D871608S
Authority
US
United States
Prior art keywords
processing apparatus
plasma processing
gas ring
view
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/635,289
Inventor
Kouji Okuda
Motohiro Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Technologies Corp filed Critical Hitachi High Technologies Corp
Assigned to HITACHI HIGH-TECHNOLOGIES CORPORATION reassignment HITACHI HIGH-TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: OKUDA, KOUJI, TANAKA, MOTOHIRO
Application granted granted Critical
Publication of USD871608S1 publication Critical patent/USD871608S1/en
Assigned to HITACHI HIGH-TECH CORPORATION reassignment HITACHI HIGH-TECH CORPORATION CHANGE OF NAME AND ADDRESS Assignors: HITACHI HIGH-TECHNOLOGIES CORPORATION
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Description

This application contains subject matter related to the following co-pending U.S. design patent applications:
Application Ser. No. 29/635,287, filed herewith and entitled “Electrode Plate for a Plasma Processing Apparatus”;
Application Ser. No. 29/635,292, filed herewith and entitled “Electrode Cover for a Plasma Processing Apparatus”; and
Application Ser. No. 29/635,296, filed herewith and entitled “Electrode Plate Peripheral Ring for a Plasma Processing Apparatus”.
FIG. 1 is a front and bottom perspective view of a gas ring for a plasma processing apparatus according to the design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a rear elevational view thereof;
FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 2; and,
FIG. 9 is an enlarged view of the portion shown in BOX 9 in FIG. 8.
The broken lines in FIG. 8 show the boundary of the enlarged portion illustrated in FIG. 9 and form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a gas ring for a plasma processing apparatus, as shown and described.
US29/635,289 2017-07-31 2018-01-30 Gas ring for a plasma processing apparatus Active USD871608S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-016497 2017-02-01
JPD2017-16497F JP1598984S (en) 2017-07-31 2017-07-31

Publications (1)

Publication Number Publication Date
USD871608S1 true USD871608S1 (en) 2019-12-31

Family

ID=61274621

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/635,289 Active USD871608S1 (en) 2017-07-31 2018-01-30 Gas ring for a plasma processing apparatus

Country Status (3)

Country Link
US (1) USD871608S1 (en)
JP (1) JP1598984S (en)
TW (1) TWD193438S (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD889335S1 (en) * 2018-10-03 2020-07-07 Vaughn C Jewell Disc
USD891636S1 (en) * 2018-10-25 2020-07-28 Hitachi High-Tech Corporation Ring for a plasma processing apparatus
USD891923S1 (en) * 2017-11-12 2020-08-04 Yun Lin Container lid
USD917825S1 (en) * 2019-07-16 2021-04-27 Entegris, Inc. Wafer support ring
USD954986S1 (en) * 2019-10-18 2022-06-14 Hitachi High-Tech Corporation Electrode cover for a plasma processing device
USD974910S1 (en) * 2020-02-04 2023-01-10 Wilson Sporting Goods Co. Tennis ball container overcap

Citations (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5174775A (en) * 1991-10-23 1992-12-29 Amp Incorporated RF convertor and switch
US5486975A (en) * 1994-01-31 1996-01-23 Applied Materials, Inc. Corrosion resistant electrostatic chuck
USD447223S1 (en) * 1998-11-06 2001-08-28 Lindab Ab Sealing rings for ventilation ducts
USD465061S1 (en) * 2000-09-15 2002-10-29 Spa Electrics Pty. Ltd. Sealing ring
US20040004327A1 (en) * 2002-07-03 2004-01-08 Veiga Jose Carlos C. Gasket seal for flanges of piping and equipment, a method for manufacturing gasket seals, and a sealing ring for a gasket seal
USD494552S1 (en) * 2002-12-12 2004-08-17 Tokyo Electron Limited Exhaust ring for manufacturing semiconductors
USD515675S1 (en) * 2001-12-27 2006-02-21 Flow International Corporation Element for a superpressure static fluid seal
US20070050901A1 (en) * 2005-05-17 2007-03-08 Den-Lu Hung Sealing ring structure of a sinkhole
USD574934S1 (en) * 2007-07-17 2008-08-12 S & B Technical Products, Inc. Pipe gasket
USD631142S1 (en) * 2009-02-11 2011-01-18 Kmt Waterjet Systems Inc. Inner packing element for a high pressure seal
US7885530B1 (en) * 2008-07-23 2011-02-08 Irving E. Bushnell, III Manual focus driving ring
USD638550S1 (en) * 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD655401S1 (en) * 2009-08-10 2012-03-06 Nippon Valqua Industries, Ltd. Hybrid seal member
USD659175S1 (en) * 2010-08-17 2012-05-08 Ebara Corporation Sealing ring
USD667561S1 (en) * 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
USD672050S1 (en) * 2012-01-13 2012-12-04 Samsung Electronics Co., Ltd. Disk for a medical testing machine
USD699200S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode member for a plasma processing apparatus
US20140090554A1 (en) * 2012-09-28 2014-04-03 Air Products And Chemicals, Inc. Wear-Compensating Sealing Ring Assembly
USD730734S1 (en) * 2013-07-10 2015-06-02 Gino Rapparini Reinforcement ring for beverage capsule
USD743513S1 (en) * 2014-06-13 2015-11-17 Asm Ip Holding B.V. Seal ring
JP1545406S (en) 2015-06-16 2016-03-14
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
USD793976S1 (en) * 2013-05-15 2017-08-08 Ebara Corporation Substrate retaining ring
USD810705S1 (en) * 2016-04-01 2018-02-20 Veeco Instruments Inc. Self-centering wafer carrier for chemical vapor deposition
USD811226S1 (en) * 2013-10-31 2018-02-27 Clariant Production (France) Sas Container

Patent Citations (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5174775A (en) * 1991-10-23 1992-12-29 Amp Incorporated RF convertor and switch
US5486975A (en) * 1994-01-31 1996-01-23 Applied Materials, Inc. Corrosion resistant electrostatic chuck
USD447223S1 (en) * 1998-11-06 2001-08-28 Lindab Ab Sealing rings for ventilation ducts
USD465061S1 (en) * 2000-09-15 2002-10-29 Spa Electrics Pty. Ltd. Sealing ring
USD515675S1 (en) * 2001-12-27 2006-02-21 Flow International Corporation Element for a superpressure static fluid seal
US20040004327A1 (en) * 2002-07-03 2004-01-08 Veiga Jose Carlos C. Gasket seal for flanges of piping and equipment, a method for manufacturing gasket seals, and a sealing ring for a gasket seal
USD494552S1 (en) * 2002-12-12 2004-08-17 Tokyo Electron Limited Exhaust ring for manufacturing semiconductors
US20070050901A1 (en) * 2005-05-17 2007-03-08 Den-Lu Hung Sealing ring structure of a sinkhole
USD574934S1 (en) * 2007-07-17 2008-08-12 S & B Technical Products, Inc. Pipe gasket
US7885530B1 (en) * 2008-07-23 2011-02-08 Irving E. Bushnell, III Manual focus driving ring
USD631142S1 (en) * 2009-02-11 2011-01-18 Kmt Waterjet Systems Inc. Inner packing element for a high pressure seal
USD655401S1 (en) * 2009-08-10 2012-03-06 Nippon Valqua Industries, Ltd. Hybrid seal member
USD667561S1 (en) * 2009-11-13 2012-09-18 3M Innovative Properties Company Sample processing disk cover
USD638550S1 (en) * 2009-11-13 2011-05-24 3M Innovative Properties Company Sample processing disk cover
USD659175S1 (en) * 2010-08-17 2012-05-08 Ebara Corporation Sealing ring
USD699200S1 (en) * 2011-09-30 2014-02-11 Tokyo Electron Limited Electrode member for a plasma processing apparatus
USD672050S1 (en) * 2012-01-13 2012-12-04 Samsung Electronics Co., Ltd. Disk for a medical testing machine
US20140090554A1 (en) * 2012-09-28 2014-04-03 Air Products And Chemicals, Inc. Wear-Compensating Sealing Ring Assembly
USD793976S1 (en) * 2013-05-15 2017-08-08 Ebara Corporation Substrate retaining ring
USD730734S1 (en) * 2013-07-10 2015-06-02 Gino Rapparini Reinforcement ring for beverage capsule
USD811226S1 (en) * 2013-10-31 2018-02-27 Clariant Production (France) Sas Container
USD743513S1 (en) * 2014-06-13 2015-11-17 Asm Ip Holding B.V. Seal ring
USD793572S1 (en) * 2015-06-10 2017-08-01 Tokyo Electron Limited Electrode plate for plasma processing apparatus
JP1545406S (en) 2015-06-16 2016-03-14
USD810705S1 (en) * 2016-04-01 2018-02-20 Veeco Instruments Inc. Self-centering wafer carrier for chemical vapor deposition

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
Isozaki et al., Design U.S. Appl. No. 29/635,287, filed Jan. 30, 2018.
Isozaki et al., Design U.S. Appl. No. 29/635,292, filed Jan. 30, 2018.
Isozaki et al., Design U.S. Appl. No. 29/635,296, filed Jan. 30, 2018.
Metal Gaskets Manufacturer. Online, published date unknown. Retrieved on Apr. 27, 2019 from URL: https://www.jaydeepsteels.com/metal-gaskets/. *
S-SiC Mechanical Components. Online, published date unknown. Retrieved on Apr. 27, 2019 from URL: http://caecsic.com/S-SiC.html. *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD891923S1 (en) * 2017-11-12 2020-08-04 Yun Lin Container lid
USD889335S1 (en) * 2018-10-03 2020-07-07 Vaughn C Jewell Disc
USD891636S1 (en) * 2018-10-25 2020-07-28 Hitachi High-Tech Corporation Ring for a plasma processing apparatus
USD917825S1 (en) * 2019-07-16 2021-04-27 Entegris, Inc. Wafer support ring
USD954986S1 (en) * 2019-10-18 2022-06-14 Hitachi High-Tech Corporation Electrode cover for a plasma processing device
USD974910S1 (en) * 2020-02-04 2023-01-10 Wilson Sporting Goods Co. Tennis ball container overcap

Also Published As

Publication number Publication date
JP1598984S (en) 2018-03-05
TWD193438S (en) 2018-10-11

Similar Documents

Publication Publication Date Title
USD871609S1 (en) Electrode plate peripheral ring for a plasma processing apparatus
USD868993S1 (en) Electrode plate for a plasma processing apparatus
USD827592S1 (en) Electrode cover for a plasma processing apparatus
USD840364S1 (en) Electrode cover for a plasma processing apparatus
USD870314S1 (en) Electrode cover for a plasma processing apparatus
USD840365S1 (en) Cover ring for a plasma processing apparatus
USD871608S1 (en) Gas ring for a plasma processing apparatus
USD859353S1 (en) Earphones
USD770992S1 (en) Electrode cover for a plasma processing apparatus
USD812578S1 (en) Upper chamber for a plasma processing apparatus
USD858750S1 (en) Oral irrigator unit
USD836573S1 (en) Ring for a plasma processing apparatus
USD868995S1 (en) Gas diffusion plate for a plasma processing apparatus
USD859644S1 (en) Oral irrigator unit
USD804436S1 (en) Upper chamber for a plasma processing apparatus
USD802790S1 (en) Cover ring for a plasma processing apparatus
USD793572S1 (en) Electrode plate for plasma processing apparatus
USD821328S1 (en) Electrical power unit
USD953936S1 (en) Electric bicycle
USD791956S1 (en) Electrode
USD836875S1 (en) Paint vessel
USD933352S1 (en) Case for an oral device
USD891636S1 (en) Ring for a plasma processing apparatus
USD973016S1 (en) Battery enclosure
USD868273S1 (en) TENS machine

Legal Events

Date Code Title Description
FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY