USD793976S1 - Substrate retaining ring - Google Patents
Substrate retaining ring Download PDFInfo
- Publication number
- USD793976S1 USD793976S1 US29/573,831 US201629573831F USD793976S US D793976 S1 USD793976 S1 US D793976S1 US 201629573831 F US201629573831 F US 201629573831F US D793976 S USD793976 S US D793976S
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- US
- United States
- Prior art keywords
- retaining ring
- substrate retaining
- substrate
- view
- ring
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Claims (1)
- The ornamental design for a substrate retaining ring, as shown and described.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/573,831 USD793976S1 (en) | 2013-05-15 | 2016-08-10 | Substrate retaining ring |
Applications Claiming Priority (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPD2013-10671F JP1494712S (en) | 2013-05-15 | 2013-05-15 | |
JP2013-10671 | 2013-05-15 | ||
JP2013-13457 | 2013-06-14 | ||
JPD2013-13457F JP1495083S (en) | 2013-06-14 | 2013-06-14 | |
JP2013-25259 | 2013-10-30 | ||
JPD2013-25259F JP1495084S (en) | 2013-10-30 | 2013-10-30 | |
US29/472,350 USD766849S1 (en) | 2013-05-15 | 2013-11-12 | Substrate retaining ring |
US29/573,831 USD793976S1 (en) | 2013-05-15 | 2016-08-10 | Substrate retaining ring |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/472,350 Division USD766849S1 (en) | 2013-05-15 | 2013-11-12 | Substrate retaining ring |
Publications (1)
Publication Number | Publication Date |
---|---|
USD793976S1 true USD793976S1 (en) | 2017-08-08 |
Family
ID=56895896
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/472,350 Active USD766849S1 (en) | 2013-05-15 | 2013-11-12 | Substrate retaining ring |
US29/573,831 Active USD793976S1 (en) | 2013-05-15 | 2016-08-10 | Substrate retaining ring |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/472,350 Active USD766849S1 (en) | 2013-05-15 | 2013-11-12 | Substrate retaining ring |
Country Status (1)
Country | Link |
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US (2) | USD766849S1 (en) |
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US11515188B2 (en) | 2019-05-16 | 2022-11-29 | Asm Ip Holding B.V. | Wafer boat handling device, vertical batch furnace and method |
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US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
US11530483B2 (en) | 2018-06-21 | 2022-12-20 | Asm Ip Holding B.V. | Substrate processing system |
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US11551925B2 (en) | 2019-04-01 | 2023-01-10 | Asm Ip Holding B.V. | Method for manufacturing a semiconductor device |
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US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
USD979524S1 (en) * | 2020-03-19 | 2023-02-28 | Applied Materials, Inc. | Confinement liner for a substrate processing chamber |
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US11594450B2 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Method for forming a structure with a hole |
USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
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US11610774B2 (en) | 2019-10-02 | 2023-03-21 | Asm Ip Holding B.V. | Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process |
USD981459S1 (en) * | 2021-06-16 | 2023-03-21 | Ebara Corporation | Retaining ring for substrate |
USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
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USD989012S1 (en) * | 2020-09-17 | 2023-06-13 | Ebara Corporation | Elastic membrane |
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US11823876B2 (en) | 2019-09-05 | 2023-11-21 | Asm Ip Holding B.V. | Substrate processing apparatus |
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US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
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Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD766849S1 (en) * | 2013-05-15 | 2016-09-20 | Ebara Corporation | Substrate retaining ring |
JP1551512S (en) * | 2015-06-12 | 2016-06-13 | ||
TWD179095S (en) * | 2015-08-25 | 2016-10-21 | 荏原製作所股份有限公司 | Substrate retaining ring |
JP1556433S (en) * | 2015-10-06 | 2016-08-15 | ||
USD786201S1 (en) * | 2015-10-19 | 2017-05-09 | Tymphany Hk Limited | Heat sink for woofer |
USD881767S1 (en) * | 2018-11-30 | 2020-04-21 | Warn Automotive, Llc | Latch ring |
USD879744S1 (en) * | 2019-06-27 | 2020-03-31 | Shenzhen Qianhai Patuoxun Network And Technology Co., Ltd | Earphones |
JP1651623S (en) * | 2019-07-18 | 2020-01-27 | ||
USD998575S1 (en) * | 2020-04-07 | 2023-09-12 | Applied Materials, Inc. | Collimator for use in a physical vapor deposition (PVD) chamber |
USD1013841S1 (en) * | 2020-04-20 | 2024-02-06 | Reliance Worldwide Corporation | Retaining ring |
USD997111S1 (en) * | 2021-12-15 | 2023-08-29 | Applied Materials, Inc. | Collimator for use in a physical vapor deposition (PVD) chamber |
Citations (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5205082A (en) | 1991-12-20 | 1993-04-27 | Cybeq Systems, Inc. | Wafer polisher head having floating retainer ring |
US5403401A (en) * | 1993-03-04 | 1995-04-04 | Xycarb B.V. | Substrate carrier |
US5944593A (en) | 1997-09-01 | 1999-08-31 | United Microelectronics Corp. | Retainer ring for polishing head of chemical-mechanical polish machines |
US6068548A (en) | 1997-12-17 | 2000-05-30 | Intel Corporation | Mechanically stabilized retaining ring for chemical mechanical polishing |
US6186880B1 (en) | 1999-09-29 | 2001-02-13 | Semiconductor Equipment Technology | Recyclable retaining ring assembly for a chemical mechanical polishing apparatus |
US6224472B1 (en) | 1999-06-24 | 2001-05-01 | Samsung Austin Semiconductor, L.P. | Retaining ring for chemical mechanical polishing |
US6264540B1 (en) | 2000-03-30 | 2001-07-24 | Speedfam-Ipec Corporation | Method and apparatus for disposable bladder carrier assembly |
US6602116B1 (en) | 1997-12-30 | 2003-08-05 | Applied Materials Inc. | Substrate retaining ring |
US6869335B2 (en) | 2002-07-08 | 2005-03-22 | Micron Technology, Inc. | Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces |
US6893507B2 (en) * | 1997-11-03 | 2005-05-17 | Asm America, Inc. | Self-centering wafer support system |
US20050193952A1 (en) * | 2004-02-13 | 2005-09-08 | Goodman Matt G. | Substrate support system for reduced autodoping and backside deposition |
US7029386B2 (en) | 2004-06-10 | 2006-04-18 | R & B Plastics, Inc. | Retaining ring assembly for use in chemical mechanical polishing |
US7029375B2 (en) | 2004-08-31 | 2006-04-18 | Tech Semiconductor Pte. Ltd. | Retaining ring structure for edge control during chemical-mechanical polishing |
US7160493B2 (en) | 2002-10-11 | 2007-01-09 | Semplastics, Llc | Retaining ring for use on a carrier of a polishing apparatus |
US7186171B2 (en) | 2005-04-22 | 2007-03-06 | Applied Materials, Inc. | Composite retaining ring |
USD548705S1 (en) | 2005-09-29 | 2007-08-14 | Tokyo Electron Limited | Attracting disc for an electrostatic chuck for semiconductor production |
US7326105B2 (en) | 2005-08-31 | 2008-02-05 | Micron Technology, Inc. | Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces |
US7344434B2 (en) | 2003-11-13 | 2008-03-18 | Applied Materials, Inc. | Retaining ring with shaped surface |
US7459057B2 (en) | 1998-05-15 | 2008-12-02 | Applied Materials, Inc. | Substrate retainer |
US7597609B2 (en) | 2006-10-12 | 2009-10-06 | Iv Technologies Co., Ltd. | Substrate retaining ring for CMP |
USD614593S1 (en) * | 2008-07-21 | 2010-04-27 | Asm Genitech Korea Ltd | Substrate support for a semiconductor deposition apparatus |
US7819723B2 (en) | 2007-03-22 | 2010-10-26 | Nec Electronics Corporation | Retainer ring and polishing machine |
USD648289S1 (en) * | 2010-10-21 | 2011-11-08 | Novellus Systems, Inc. | Electroplating flow shaping plate having offset spiral hole pattern |
US8298046B2 (en) | 2009-10-21 | 2012-10-30 | SPM Technology, Inc. | Retaining rings |
US8517803B2 (en) | 2009-09-16 | 2013-08-27 | SPM Technology, Inc. | Retaining ring for chemical mechanical polishing |
USD699200S1 (en) | 2011-09-30 | 2014-02-11 | Tokyo Electron Limited | Electrode member for a plasma processing apparatus |
USD709537S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
USD709538S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
USD709539S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
USD709536S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
USD716742S1 (en) | 2013-09-13 | 2014-11-04 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
USD724553S1 (en) | 2013-09-13 | 2015-03-17 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
USD734377S1 (en) | 2013-03-28 | 2015-07-14 | Hirata Corporation | Top cover of a load lock chamber |
USD766849S1 (en) * | 2013-05-15 | 2016-09-20 | Ebara Corporation | Substrate retaining ring |
-
2013
- 2013-11-12 US US29/472,350 patent/USD766849S1/en active Active
-
2016
- 2016-08-10 US US29/573,831 patent/USD793976S1/en active Active
Patent Citations (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5205082A (en) | 1991-12-20 | 1993-04-27 | Cybeq Systems, Inc. | Wafer polisher head having floating retainer ring |
US5403401A (en) * | 1993-03-04 | 1995-04-04 | Xycarb B.V. | Substrate carrier |
US5944593A (en) | 1997-09-01 | 1999-08-31 | United Microelectronics Corp. | Retainer ring for polishing head of chemical-mechanical polish machines |
US6893507B2 (en) * | 1997-11-03 | 2005-05-17 | Asm America, Inc. | Self-centering wafer support system |
US6068548A (en) | 1997-12-17 | 2000-05-30 | Intel Corporation | Mechanically stabilized retaining ring for chemical mechanical polishing |
US6602116B1 (en) | 1997-12-30 | 2003-08-05 | Applied Materials Inc. | Substrate retaining ring |
US7459057B2 (en) | 1998-05-15 | 2008-12-02 | Applied Materials, Inc. | Substrate retainer |
US6224472B1 (en) | 1999-06-24 | 2001-05-01 | Samsung Austin Semiconductor, L.P. | Retaining ring for chemical mechanical polishing |
US6186880B1 (en) | 1999-09-29 | 2001-02-13 | Semiconductor Equipment Technology | Recyclable retaining ring assembly for a chemical mechanical polishing apparatus |
US6264540B1 (en) | 2000-03-30 | 2001-07-24 | Speedfam-Ipec Corporation | Method and apparatus for disposable bladder carrier assembly |
US6869335B2 (en) | 2002-07-08 | 2005-03-22 | Micron Technology, Inc. | Retaining rings, planarizing apparatuses including retaining rings, and methods for planarizing micro-device workpieces |
US7160493B2 (en) | 2002-10-11 | 2007-01-09 | Semplastics, Llc | Retaining ring for use on a carrier of a polishing apparatus |
US7344434B2 (en) | 2003-11-13 | 2008-03-18 | Applied Materials, Inc. | Retaining ring with shaped surface |
US20050193952A1 (en) * | 2004-02-13 | 2005-09-08 | Goodman Matt G. | Substrate support system for reduced autodoping and backside deposition |
US7029386B2 (en) | 2004-06-10 | 2006-04-18 | R & B Plastics, Inc. | Retaining ring assembly for use in chemical mechanical polishing |
US7029375B2 (en) | 2004-08-31 | 2006-04-18 | Tech Semiconductor Pte. Ltd. | Retaining ring structure for edge control during chemical-mechanical polishing |
US7186171B2 (en) | 2005-04-22 | 2007-03-06 | Applied Materials, Inc. | Composite retaining ring |
US7326105B2 (en) | 2005-08-31 | 2008-02-05 | Micron Technology, Inc. | Retaining rings, and associated planarizing apparatuses, and related methods for planarizing micro-device workpieces |
USD548705S1 (en) | 2005-09-29 | 2007-08-14 | Tokyo Electron Limited | Attracting disc for an electrostatic chuck for semiconductor production |
US7597609B2 (en) | 2006-10-12 | 2009-10-06 | Iv Technologies Co., Ltd. | Substrate retaining ring for CMP |
US7819723B2 (en) | 2007-03-22 | 2010-10-26 | Nec Electronics Corporation | Retainer ring and polishing machine |
USD614593S1 (en) * | 2008-07-21 | 2010-04-27 | Asm Genitech Korea Ltd | Substrate support for a semiconductor deposition apparatus |
US8517803B2 (en) | 2009-09-16 | 2013-08-27 | SPM Technology, Inc. | Retaining ring for chemical mechanical polishing |
US8298046B2 (en) | 2009-10-21 | 2012-10-30 | SPM Technology, Inc. | Retaining rings |
USD648289S1 (en) * | 2010-10-21 | 2011-11-08 | Novellus Systems, Inc. | Electroplating flow shaping plate having offset spiral hole pattern |
USD709537S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
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USD949116S1 (en) * | 2019-05-03 | 2022-04-19 | Lumileds Holding B.V. | Flexible circuit board with connectors |
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US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
USD940670S1 (en) * | 2019-09-26 | 2022-01-11 | Willbe S&T Co., Ltd. | Retainer ring for chemical mechanical polishing device |
US11610774B2 (en) | 2019-10-02 | 2023-03-21 | Asm Ip Holding B.V. | Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process |
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US11961741B2 (en) | 2020-03-12 | 2024-04-16 | Asm Ip Holding B.V. | Method for fabricating layer structure having target topological profile |
USD943539S1 (en) * | 2020-03-19 | 2022-02-15 | Applied Materials, Inc. | Confinement plate for a substrate processing chamber |
USD986190S1 (en) | 2020-03-19 | 2023-05-16 | Applied Materials, Inc. | Confinement plate for a substrate processing chamber |
USD979524S1 (en) * | 2020-03-19 | 2023-02-28 | Applied Materials, Inc. | Confinement liner for a substrate processing chamber |
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USD989012S1 (en) * | 2020-09-17 | 2023-06-13 | Ebara Corporation | Elastic membrane |
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USD1006768S1 (en) * | 2021-01-07 | 2023-12-05 | Solaero Technologies Corp. | Semiconductor wafer for mosaic solar cell fabrication |
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USD981459S1 (en) * | 2021-06-16 | 2023-03-21 | Ebara Corporation | Retaining ring for substrate |
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