USD826185S1 - Ceiling heater for substrate processing apparatus - Google Patents

Ceiling heater for substrate processing apparatus Download PDF

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Publication number
USD826185S1
USD826185S1 US29/596,974 US201729596974F USD826185S US D826185 S1 USD826185 S1 US D826185S1 US 201729596974 F US201729596974 F US 201729596974F US D826185 S USD826185 S US D826185S
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US
United States
Prior art keywords
processing apparatus
substrate processing
ceiling heater
ceiling
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/596,974
Inventor
Tetsuya Kosugi
Takatomo Yamaguchi
Shuhei SAIDO
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KOSUGI, TETSUYA, SAIDO, SHUHEI, YAMAGUCHI, TAKATOMO
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Publication of USD826185S1 publication Critical patent/USD826185S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
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Description

FIG. 1 is a front, bottom and right side perspective view of a ceiling heater for substrate processing apparartus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a rear elevational view thereof.

Claims (1)

    CLAIM
  1. We claim the ornamental design for a ceiling heater for substrate processing apparatus, as shown and described.
US29/596,974 2016-10-14 2017-03-13 Ceiling heater for substrate processing apparatus Active USD826185S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP022413/2016 2016-10-14
JPD2016-22413F JP1581406S (en) 2016-10-14 2016-10-14

Publications (1)

Publication Number Publication Date
USD826185S1 true USD826185S1 (en) 2018-08-21

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ID=59309850

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/596,974 Active USD826185S1 (en) 2016-10-14 2017-03-13 Ceiling heater for substrate processing apparatus

Country Status (3)

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US (1) USD826185S1 (en)
JP (1) JP1581406S (en)
TW (1) TWD187001S (en)

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD841607S1 (en) * 2017-02-14 2019-02-26 Riso Kagaku Corporation Wireless communication tag
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD895587S1 (en) * 2019-10-22 2020-09-08 Avery Dennison Retail Information Services, Llc Antenna
USD913256S1 (en) * 2019-07-31 2021-03-16 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD921431S1 (en) 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
USD922341S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD922340S1 (en) * 2019-11-11 2021-06-15 Asia Vita Components Co., Ltd. Radiating fin
USD922339S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD926716S1 (en) * 2019-07-31 2021-08-03 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD954691S1 (en) 2019-10-22 2022-06-14 Avery Dennison Retail Information Services, Llc Antenna
USD959393S1 (en) 2020-09-24 2022-08-02 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD962184S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD962183S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD980177S1 (en) * 2020-09-24 2023-03-07 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD980199S1 (en) * 2020-12-17 2023-03-07 Megabyte Limited Antenna for radio frequency tag reader
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD1021832S1 (en) * 2020-09-17 2024-04-09 Ebara Corporation Elastic membrane

Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030183614A1 (en) * 2002-03-26 2003-10-02 Hitachi Kokusai Electric Inc. Heat treatment apparatus and method for processing substrates
US6653603B2 (en) * 2000-11-30 2003-11-25 Ngk Insulators, Ltd. Heaters
US20040149719A1 (en) * 2002-12-20 2004-08-05 Kyocera Corporation Wafer heating apparatus
US20050072716A1 (en) * 2001-07-15 2005-04-07 Efrain Quiles Processing system
US20060130763A1 (en) * 2004-11-15 2006-06-22 Emerson David T Restricted radiated heating assembly for high temperature processing
US20070095289A1 (en) * 2003-06-23 2007-05-03 Tokyo Electron Limited Heat treatment apparatus
USD601521S1 (en) * 2006-09-28 2009-10-06 Tokyo Electron Limited Heater for manufacturing semiconductor
USD649126S1 (en) * 2008-10-20 2011-11-22 Ebara Corporation Vacuum contact pad
JP2013004891A (en) * 2011-06-21 2013-01-07 Shibaura Mechatronics Corp Heater unit, fan filter unit, and substrate processing apparatus
US20140021673A1 (en) * 2012-07-18 2014-01-23 Applied Materials, Inc. Pedestal with multi-zone temperature control and multiple purge capabilities
US9719629B2 (en) * 2014-04-08 2017-08-01 Plansee Se Supporting system for a heating element and heating system
USD797690S1 (en) * 2015-03-16 2017-09-19 Nuflare Technology, Inc. Heater for semiconductor manufacturing apparatus
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6653603B2 (en) * 2000-11-30 2003-11-25 Ngk Insulators, Ltd. Heaters
US20050072716A1 (en) * 2001-07-15 2005-04-07 Efrain Quiles Processing system
US20030183614A1 (en) * 2002-03-26 2003-10-02 Hitachi Kokusai Electric Inc. Heat treatment apparatus and method for processing substrates
US20040149719A1 (en) * 2002-12-20 2004-08-05 Kyocera Corporation Wafer heating apparatus
US20070095289A1 (en) * 2003-06-23 2007-05-03 Tokyo Electron Limited Heat treatment apparatus
US20060130763A1 (en) * 2004-11-15 2006-06-22 Emerson David T Restricted radiated heating assembly for high temperature processing
USD601521S1 (en) * 2006-09-28 2009-10-06 Tokyo Electron Limited Heater for manufacturing semiconductor
USD649126S1 (en) * 2008-10-20 2011-11-22 Ebara Corporation Vacuum contact pad
JP2013004891A (en) * 2011-06-21 2013-01-07 Shibaura Mechatronics Corp Heater unit, fan filter unit, and substrate processing apparatus
US20140021673A1 (en) * 2012-07-18 2014-01-23 Applied Materials, Inc. Pedestal with multi-zone temperature control and multiple purge capabilities
US9719629B2 (en) * 2014-04-08 2017-08-01 Plansee Se Supporting system for a heating element and heating system
USD797690S1 (en) * 2015-03-16 2017-09-19 Nuflare Technology, Inc. Heater for semiconductor manufacturing apparatus
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
EC21 Inc. <URL: https://diamondhrichard.en.ec21.com/Duplex_Winding_Infrared_Coil_Ceramic--5521314_8834245.html.> Visited Feb. 28, 2018. Duplex Winding Infrared Coil/ Ceramic Cooker/ Heating Plate/Radiant Element/Hob. *
Modello designs. <URL: https://www.modellocustomstencils.com/collections/medallion-stencils.> Visited Feb. 28, 2018. Medallion Stencils. *

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD841607S1 (en) * 2017-02-14 2019-02-26 Riso Kagaku Corporation Wireless communication tag
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD921431S1 (en) 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
USD962183S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD962184S1 (en) * 2019-07-11 2022-08-30 Kokusai Electric Corporation Retainer plate of top heater for wafer processing furnace
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD926716S1 (en) * 2019-07-31 2021-08-03 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD913256S1 (en) * 2019-07-31 2021-03-16 Eryn Smith Antenna pattern for a semiconductive substrate carrier
USD954691S1 (en) 2019-10-22 2022-06-14 Avery Dennison Retail Information Services, Llc Antenna
USD895587S1 (en) * 2019-10-22 2020-09-08 Avery Dennison Retail Information Services, Llc Antenna
USD922341S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD922340S1 (en) * 2019-11-11 2021-06-15 Asia Vita Components Co., Ltd. Radiating fin
USD922339S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD1021832S1 (en) * 2020-09-17 2024-04-09 Ebara Corporation Elastic membrane
USD959393S1 (en) 2020-09-24 2022-08-02 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD980177S1 (en) * 2020-09-24 2023-03-07 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD980199S1 (en) * 2020-12-17 2023-03-07 Megabyte Limited Antenna for radio frequency tag reader
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication

Also Published As

Publication number Publication date
JP1581406S (en) 2017-07-18
TWD187001S (en) 2017-12-01

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