USD959393S1 - Ceiling heater for substrate processing apparatus - Google Patents

Ceiling heater for substrate processing apparatus Download PDF

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Publication number
USD959393S1
USD959393S1 US29/773,979 US202129773979F USD959393S US D959393 S1 USD959393 S1 US D959393S1 US 202129773979 F US202129773979 F US 202129773979F US D959393 S USD959393 S US D959393S
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US
United States
Prior art keywords
processing apparatus
substrate processing
ceiling heater
ceiling
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/773,979
Inventor
Shinobu Sugiura
Tetsuya Kosugi
Yuya YOSHIMURA
Takuto Shoji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: YOSHIMURA, Yuya, SUGIURA, SHINOBU, KOSUGI, TETSUYA, SHOJI, TAKUTO
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHOJI, TAKUTO, YOSHIMURA, Yuya, KOSUGI, TETSUYA, SUGIURA, SHINOBU
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Description

FIG. 1 is a front, top and right side perspective view of a ceiling heater for substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof; and,
FIG. 7 is a rear elevational view.

Claims (1)

    CLAIM
  1. The ornamental design for a ceiling heater for substrate processing apparatus, as shown and described.
US29/773,979 2020-09-24 2021-03-12 Ceiling heater for substrate processing apparatus Active USD959393S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020020257F JP1684469S (en) 2020-09-24 2020-09-24 Ceiling heater for substrate processing equipment
JP2020020257D 2020-09-24

Publications (1)

Publication Number Publication Date
USD959393S1 true USD959393S1 (en) 2022-08-02

Family

ID=75801969

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/773,979 Active USD959393S1 (en) 2020-09-24 2021-03-12 Ceiling heater for substrate processing apparatus

Country Status (3)

Country Link
US (1) USD959393S1 (en)
JP (1) JP1684469S (en)
TW (1) TWD217778S (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD980177S1 (en) * 2020-09-24 2023-03-07 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication

Citations (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2417977A (en) * 1943-03-04 1947-03-25 French Jeannette Cook stove and range
USD312126S (en) * 1988-02-10 1990-11-13 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
USD312127S (en) * 1988-02-10 1990-11-13 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
USD323385S (en) * 1990-02-10 1992-01-21 Ceramaspeed Limited Radiant stove heater
USD340517S (en) * 1990-07-15 1993-10-19 E.G.O. Elektro-Gerate Blanc U. Fischer Heating coil
US20030183614A1 (en) * 2002-03-26 2003-10-02 Hitachi Kokusai Electric Inc. Heat treatment apparatus and method for processing substrates
US20040149719A1 (en) * 2002-12-20 2004-08-05 Kyocera Corporation Wafer heating apparatus
US20050072716A1 (en) * 2001-07-15 2005-04-07 Efrain Quiles Processing system
USD517743S1 (en) * 2003-12-09 2006-03-21 Le Creuset Of America, Inc. Hotpad
US20060130763A1 (en) * 2004-11-15 2006-06-22 Emerson David T Restricted radiated heating assembly for high temperature processing
USD541486S1 (en) * 2005-07-22 2007-04-24 Le Creuset Of America, Inc. Hotpad
US20070095289A1 (en) * 2003-06-23 2007-05-03 Tokyo Electron Limited Heat treatment apparatus
USD589471S1 (en) * 2006-09-28 2009-03-31 Tokyo Electron Limited Heater for manufacturing semiconductor
USD601521S1 (en) * 2006-09-28 2009-10-06 Tokyo Electron Limited Heater for manufacturing semiconductor
USD616389S1 (en) * 2008-10-20 2010-05-25 Ebara Corporation Vacuum contact pad
USD625558S1 (en) * 2010-02-05 2010-10-19 Chef'n Corporation Trivet
US20120300576A1 (en) * 2010-01-26 2012-11-29 Board Of Governors For Higher Education, State Of Rhode Island And Providence Plantations Planar labyrinth micromixer systems and methods
US20140021673A1 (en) * 2012-07-18 2014-01-23 Applied Materials, Inc. Pedestal with multi-zone temperature control and multiple purge capabilities
JP1581406S (en) 2016-10-14 2017-07-18
US9719629B2 (en) * 2014-04-08 2017-08-01 Plansee Se Supporting system for a heating element and heating system
USD797690S1 (en) * 2015-03-16 2017-09-19 Nuflare Technology, Inc. Heater for semiconductor manufacturing apparatus
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater
US20190284696A1 (en) * 2016-12-01 2019-09-19 Kokusai Electric Corporation Substrate processing apparatus and ceiling heater
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD921431S1 (en) * 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
USD922341S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD922340S1 (en) * 2019-11-11 2021-06-15 Asia Vita Components Co., Ltd. Radiating fin

Patent Citations (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2417977A (en) * 1943-03-04 1947-03-25 French Jeannette Cook stove and range
USD312126S (en) * 1988-02-10 1990-11-13 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
USD312127S (en) * 1988-02-10 1990-11-13 Redring Electric Limited Electric heater element for use in a radiant heater for a glass ceramic hob
USD323385S (en) * 1990-02-10 1992-01-21 Ceramaspeed Limited Radiant stove heater
USD340517S (en) * 1990-07-15 1993-10-19 E.G.O. Elektro-Gerate Blanc U. Fischer Heating coil
US20050072716A1 (en) * 2001-07-15 2005-04-07 Efrain Quiles Processing system
US20030183614A1 (en) * 2002-03-26 2003-10-02 Hitachi Kokusai Electric Inc. Heat treatment apparatus and method for processing substrates
US20040149719A1 (en) * 2002-12-20 2004-08-05 Kyocera Corporation Wafer heating apparatus
US20070095289A1 (en) * 2003-06-23 2007-05-03 Tokyo Electron Limited Heat treatment apparatus
USD517743S1 (en) * 2003-12-09 2006-03-21 Le Creuset Of America, Inc. Hotpad
US20060130763A1 (en) * 2004-11-15 2006-06-22 Emerson David T Restricted radiated heating assembly for high temperature processing
USD541486S1 (en) * 2005-07-22 2007-04-24 Le Creuset Of America, Inc. Hotpad
USD589471S1 (en) * 2006-09-28 2009-03-31 Tokyo Electron Limited Heater for manufacturing semiconductor
USD601521S1 (en) * 2006-09-28 2009-10-06 Tokyo Electron Limited Heater for manufacturing semiconductor
USD616389S1 (en) * 2008-10-20 2010-05-25 Ebara Corporation Vacuum contact pad
US20120300576A1 (en) * 2010-01-26 2012-11-29 Board Of Governors For Higher Education, State Of Rhode Island And Providence Plantations Planar labyrinth micromixer systems and methods
USD625558S1 (en) * 2010-02-05 2010-10-19 Chef'n Corporation Trivet
US20140021673A1 (en) * 2012-07-18 2014-01-23 Applied Materials, Inc. Pedestal with multi-zone temperature control and multiple purge capabilities
US9719629B2 (en) * 2014-04-08 2017-08-01 Plansee Se Supporting system for a heating element and heating system
USD797690S1 (en) * 2015-03-16 2017-09-19 Nuflare Technology, Inc. Heater for semiconductor manufacturing apparatus
USD798250S1 (en) * 2015-12-01 2017-09-26 Nuflare Technology, Inc. Heater
JP1581406S (en) 2016-10-14 2017-07-18
USD826185S1 (en) 2016-10-14 2018-08-21 Hitachi Kokusai Electric Inc. Ceiling heater for substrate processing apparatus
US20190284696A1 (en) * 2016-12-01 2019-09-19 Kokusai Electric Corporation Substrate processing apparatus and ceiling heater
USD887358S1 (en) * 2018-12-06 2020-06-16 Lofelt Gmbh Motor membrane
USD921431S1 (en) * 2019-04-01 2021-06-08 Veeco Instruments, Inc. Multi-filament heater assembly
USD918848S1 (en) * 2019-07-18 2021-05-11 Kokusai Electric Corporation Retainer of ceiling heater for semiconductor fabrication apparatus
USD922341S1 (en) * 2019-11-11 2021-06-15 Asia Vital Components Co., Ltd. Radiating fin
USD922340S1 (en) * 2019-11-11 2021-06-15 Asia Vita Components Co., Ltd. Radiating fin

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD980177S1 (en) * 2020-09-24 2023-03-07 Kokusai Electric Corporation Ceiling heater for substrate processing apparatus
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication

Also Published As

Publication number Publication date
TWD217778S (en) 2022-03-21
JP1684469S (en) 2021-05-10

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