USD959393S1 - Ceiling heater for substrate processing apparatus - Google Patents
Ceiling heater for substrate processing apparatus Download PDFInfo
- Publication number
- USD959393S1 USD959393S1 US29/773,979 US202129773979F USD959393S US D959393 S1 USD959393 S1 US D959393S1 US 202129773979 F US202129773979 F US 202129773979F US D959393 S USD959393 S US D959393S
- Authority
- US
- United States
- Prior art keywords
- processing apparatus
- substrate processing
- ceiling heater
- ceiling
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
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Description
Claims (1)
- The ornamental design for a ceiling heater for substrate processing apparatus, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020020257F JP1684469S (en) | 2020-09-24 | 2020-09-24 | Ceiling heater for substrate processing equipment |
JP2020020257D | 2020-09-24 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD959393S1 true USD959393S1 (en) | 2022-08-02 |
Family
ID=75801969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/773,979 Active USD959393S1 (en) | 2020-09-24 | 2021-03-12 | Ceiling heater for substrate processing apparatus |
Country Status (3)
Country | Link |
---|---|
US (1) | USD959393S1 (en) |
JP (1) | JP1684469S (en) |
TW (1) | TWD217778S (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD980177S1 (en) * | 2020-09-24 | 2023-03-07 | Kokusai Electric Corporation | Ceiling heater for substrate processing apparatus |
USD1006768S1 (en) * | 2021-01-07 | 2023-12-05 | Solaero Technologies Corp. | Semiconductor wafer for mosaic solar cell fabrication |
Citations (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2417977A (en) * | 1943-03-04 | 1947-03-25 | French Jeannette | Cook stove and range |
USD312126S (en) * | 1988-02-10 | 1990-11-13 | Redring Electric Limited | Electric heater element for use in a radiant heater for a glass ceramic hob |
USD312127S (en) * | 1988-02-10 | 1990-11-13 | Redring Electric Limited | Electric heater element for use in a radiant heater for a glass ceramic hob |
USD323385S (en) * | 1990-02-10 | 1992-01-21 | Ceramaspeed Limited | Radiant stove heater |
USD340517S (en) * | 1990-07-15 | 1993-10-19 | E.G.O. Elektro-Gerate Blanc U. Fischer | Heating coil |
US20030183614A1 (en) * | 2002-03-26 | 2003-10-02 | Hitachi Kokusai Electric Inc. | Heat treatment apparatus and method for processing substrates |
US20040149719A1 (en) * | 2002-12-20 | 2004-08-05 | Kyocera Corporation | Wafer heating apparatus |
US20050072716A1 (en) * | 2001-07-15 | 2005-04-07 | Efrain Quiles | Processing system |
USD517743S1 (en) * | 2003-12-09 | 2006-03-21 | Le Creuset Of America, Inc. | Hotpad |
US20060130763A1 (en) * | 2004-11-15 | 2006-06-22 | Emerson David T | Restricted radiated heating assembly for high temperature processing |
USD541486S1 (en) * | 2005-07-22 | 2007-04-24 | Le Creuset Of America, Inc. | Hotpad |
US20070095289A1 (en) * | 2003-06-23 | 2007-05-03 | Tokyo Electron Limited | Heat treatment apparatus |
USD589471S1 (en) * | 2006-09-28 | 2009-03-31 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD601521S1 (en) * | 2006-09-28 | 2009-10-06 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD616389S1 (en) * | 2008-10-20 | 2010-05-25 | Ebara Corporation | Vacuum contact pad |
USD625558S1 (en) * | 2010-02-05 | 2010-10-19 | Chef'n Corporation | Trivet |
US20120300576A1 (en) * | 2010-01-26 | 2012-11-29 | Board Of Governors For Higher Education, State Of Rhode Island And Providence Plantations | Planar labyrinth micromixer systems and methods |
US20140021673A1 (en) * | 2012-07-18 | 2014-01-23 | Applied Materials, Inc. | Pedestal with multi-zone temperature control and multiple purge capabilities |
JP1581406S (en) | 2016-10-14 | 2017-07-18 | ||
US9719629B2 (en) * | 2014-04-08 | 2017-08-01 | Plansee Se | Supporting system for a heating element and heating system |
USD797690S1 (en) * | 2015-03-16 | 2017-09-19 | Nuflare Technology, Inc. | Heater for semiconductor manufacturing apparatus |
USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
US20190284696A1 (en) * | 2016-12-01 | 2019-09-19 | Kokusai Electric Corporation | Substrate processing apparatus and ceiling heater |
USD887358S1 (en) * | 2018-12-06 | 2020-06-16 | Lofelt Gmbh | Motor membrane |
USD918848S1 (en) * | 2019-07-18 | 2021-05-11 | Kokusai Electric Corporation | Retainer of ceiling heater for semiconductor fabrication apparatus |
USD921431S1 (en) * | 2019-04-01 | 2021-06-08 | Veeco Instruments, Inc. | Multi-filament heater assembly |
USD922341S1 (en) * | 2019-11-11 | 2021-06-15 | Asia Vital Components Co., Ltd. | Radiating fin |
USD922340S1 (en) * | 2019-11-11 | 2021-06-15 | Asia Vita Components Co., Ltd. | Radiating fin |
-
2020
- 2020-09-24 JP JP2020020257F patent/JP1684469S/en active Active
-
2021
- 2021-03-09 TW TW110301195F patent/TWD217778S/en unknown
- 2021-03-12 US US29/773,979 patent/USD959393S1/en active Active
Patent Citations (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2417977A (en) * | 1943-03-04 | 1947-03-25 | French Jeannette | Cook stove and range |
USD312126S (en) * | 1988-02-10 | 1990-11-13 | Redring Electric Limited | Electric heater element for use in a radiant heater for a glass ceramic hob |
USD312127S (en) * | 1988-02-10 | 1990-11-13 | Redring Electric Limited | Electric heater element for use in a radiant heater for a glass ceramic hob |
USD323385S (en) * | 1990-02-10 | 1992-01-21 | Ceramaspeed Limited | Radiant stove heater |
USD340517S (en) * | 1990-07-15 | 1993-10-19 | E.G.O. Elektro-Gerate Blanc U. Fischer | Heating coil |
US20050072716A1 (en) * | 2001-07-15 | 2005-04-07 | Efrain Quiles | Processing system |
US20030183614A1 (en) * | 2002-03-26 | 2003-10-02 | Hitachi Kokusai Electric Inc. | Heat treatment apparatus and method for processing substrates |
US20040149719A1 (en) * | 2002-12-20 | 2004-08-05 | Kyocera Corporation | Wafer heating apparatus |
US20070095289A1 (en) * | 2003-06-23 | 2007-05-03 | Tokyo Electron Limited | Heat treatment apparatus |
USD517743S1 (en) * | 2003-12-09 | 2006-03-21 | Le Creuset Of America, Inc. | Hotpad |
US20060130763A1 (en) * | 2004-11-15 | 2006-06-22 | Emerson David T | Restricted radiated heating assembly for high temperature processing |
USD541486S1 (en) * | 2005-07-22 | 2007-04-24 | Le Creuset Of America, Inc. | Hotpad |
USD589471S1 (en) * | 2006-09-28 | 2009-03-31 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD601521S1 (en) * | 2006-09-28 | 2009-10-06 | Tokyo Electron Limited | Heater for manufacturing semiconductor |
USD616389S1 (en) * | 2008-10-20 | 2010-05-25 | Ebara Corporation | Vacuum contact pad |
US20120300576A1 (en) * | 2010-01-26 | 2012-11-29 | Board Of Governors For Higher Education, State Of Rhode Island And Providence Plantations | Planar labyrinth micromixer systems and methods |
USD625558S1 (en) * | 2010-02-05 | 2010-10-19 | Chef'n Corporation | Trivet |
US20140021673A1 (en) * | 2012-07-18 | 2014-01-23 | Applied Materials, Inc. | Pedestal with multi-zone temperature control and multiple purge capabilities |
US9719629B2 (en) * | 2014-04-08 | 2017-08-01 | Plansee Se | Supporting system for a heating element and heating system |
USD797690S1 (en) * | 2015-03-16 | 2017-09-19 | Nuflare Technology, Inc. | Heater for semiconductor manufacturing apparatus |
USD798250S1 (en) * | 2015-12-01 | 2017-09-26 | Nuflare Technology, Inc. | Heater |
JP1581406S (en) | 2016-10-14 | 2017-07-18 | ||
USD826185S1 (en) | 2016-10-14 | 2018-08-21 | Hitachi Kokusai Electric Inc. | Ceiling heater for substrate processing apparatus |
US20190284696A1 (en) * | 2016-12-01 | 2019-09-19 | Kokusai Electric Corporation | Substrate processing apparatus and ceiling heater |
USD887358S1 (en) * | 2018-12-06 | 2020-06-16 | Lofelt Gmbh | Motor membrane |
USD921431S1 (en) * | 2019-04-01 | 2021-06-08 | Veeco Instruments, Inc. | Multi-filament heater assembly |
USD918848S1 (en) * | 2019-07-18 | 2021-05-11 | Kokusai Electric Corporation | Retainer of ceiling heater for semiconductor fabrication apparatus |
USD922341S1 (en) * | 2019-11-11 | 2021-06-15 | Asia Vital Components Co., Ltd. | Radiating fin |
USD922340S1 (en) * | 2019-11-11 | 2021-06-15 | Asia Vita Components Co., Ltd. | Radiating fin |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD980177S1 (en) * | 2020-09-24 | 2023-03-07 | Kokusai Electric Corporation | Ceiling heater for substrate processing apparatus |
USD1006768S1 (en) * | 2021-01-07 | 2023-12-05 | Solaero Technologies Corp. | Semiconductor wafer for mosaic solar cell fabrication |
Also Published As
Publication number | Publication date |
---|---|
TWD217778S (en) | 2022-03-21 |
JP1684469S (en) | 2021-05-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |