USD553104S1 - Absorption board for an electric chuck used in semiconductor manufacture - Google Patents

Absorption board for an electric chuck used in semiconductor manufacture Download PDF

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Publication number
USD553104S1
USD553104S1 US29/215,644 US21564404F USD553104S US D553104 S1 USD553104 S1 US D553104S1 US 21564404 F US21564404 F US 21564404F US D553104 S USD553104 S US D553104S
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United States
Prior art keywords
semiconductor manufacture
absorption board
chuck used
electric chuck
electric
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US29/215,644
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Kaoru Oohashi
Shunsuke Mizukami
Takehiro Ueda
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MIZUKAMI, SHUNSUKE, OOHASHI, KAORU, UEDA, TAKEHIRO
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FIG. 1 is a perspective view of an absorption board for an electric chuck used in semiconductor manufacture.

FIG. 2 is a front elevational view thereof.

FIG. 3 is a rear elevational view thereof.

FIG. 4 is a right side elevational view thereof, the left side elevational view being a mirror image and not shown; and,

FIG. 5 is a top plan view thereof, the bottom plan view being a mirror image and not shown.

Claims (1)

  1. We claim the ornamental design for an absorption board for an electric chuck used in semiconductor manufacture, as shown.
US29/215,644 2004-04-21 2004-10-19 Absorption board for an electric chuck used in semiconductor manufacture Active USD553104S1 (en)

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US8623193B1 (en) 2004-06-16 2014-01-07 Novellus Systems, Inc. Method of electroplating using a high resistance ionic current source
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USD795208S1 (en) * 2015-08-18 2017-08-22 Tokyo Electron Limited Electrostatic chuck for semiconductor manufacturing equipment
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