Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
  • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
  • H01L21/3105—After-treatment
  • H01L21/311—Etching the insulating layers by chemical or physical means
  • H01L21/31105—Etching inorganic layers
  • H01L21/31111—Etching inorganic layers by chemical means
  • H01L21/31116—Etching inorganic layers by chemical means by dry-etching

Applications Claiming Priority (1)

Publications (1)

Family

ID=23710695

Family Applications (1)

Country Status (7)

Families Citing this family (220)

Family Cites Families (7)

• 1990
  • 1990-11-02 WO PCT/NL1990/000166 patent/WO1991006975A1/en active IP Right Grant
  • 1990-11-02 AT AT90916827T patent/ATE109924T1/de not_active IP Right Cessation
  • 1990-11-02 DE DE69011529T patent/DE69011529T2/de not_active Expired - Fee Related
  • 1990-11-02 JP JP2515456A patent/JP2941943B2/ja not_active Expired - Fee Related
  • 1990-11-02 KR KR1019920701028A patent/KR0161674B1/ko not_active IP Right Cessation
  • 1990-11-02 EP EP90916827A patent/EP0500670B1/de not_active Expired - Lifetime
• 1991
  • 1991-09-23 US US07/766,171 patent/US5167761A/en not_active Expired - Lifetime

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