JP5912637B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP5912637B2 JP5912637B2 JP2012033372A JP2012033372A JP5912637B2 JP 5912637 B2 JP5912637 B2 JP 5912637B2 JP 2012033372 A JP2012033372 A JP 2012033372A JP 2012033372 A JP2012033372 A JP 2012033372A JP 5912637 B2 JP5912637 B2 JP 5912637B2
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- 239000004065 semiconductor Substances 0.000 title claims description 37
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 238000005530 etching Methods 0.000 claims description 117
- 238000012545 processing Methods 0.000 claims description 79
- 229920002120 photoresistant polymer Polymers 0.000 claims description 63
- 238000000034 method Methods 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 21
- 230000006870 function Effects 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 7
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 7
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 description 88
- 239000007789 gas Substances 0.000 description 41
- 238000009966 trimming Methods 0.000 description 28
- 230000000052 comparative effect Effects 0.000 description 15
- 238000012546 transfer Methods 0.000 description 13
- 230000001965 increasing effect Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 238000002474 experimental method Methods 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 238000003860 storage Methods 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000004969 ion scattering spectroscopy Methods 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000001737 promoting effect Effects 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005315 distribution function Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
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- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
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- H01J37/32082—Radio frequency generated discharge
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
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- H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
Description
まず、本発明の一実施形態に係る半導体装置の製造方法を用いて製造される三次元積層半導体メモリの一例について、図1及び図2を参照しながら説明する。図1は、3D NANDフラッシュメモリの構造を概念的に示した斜視図である。図2は、図1の3D NANDフラッシュメモリの1−1断面図である。3D NANDフラッシュメモリは、三次元積層半導体メモリの一例である。
次に、本発明の一実施形態に係るプラズマ処理装置の全体構成について、図3を参照しながら説明する。プラズマ処理装置10は、下部2周波数の平行平板型(容量結合型)プラズマエッチング装置として構成されており、例えば表面がアルマイト処理(陽極酸化処理)されたアルミニウムからなる円筒形の真空チャンバ(処理容器)11を有している。チャンバ11は、接地されている。
次に、本発明の一実施形態に係る半導体装置の製造方法により行われるエッチング工程について、図4を参照しながら説明する。図4では、本実施形態にて行われる(a−1)エッチング工程開始前の初期状態、(a−2)第1の工程、(a−3)第2の工程、(a−4)第3の工程、(a−5)エッチング工程完了後の最終状態が示されている。
(a−1)エッチング工程開始前の初期状態
本実施形態では、基板S上に第1の膜110と第2の膜120とが交互に積層された36層の多層膜が形成されている。なお、多層膜は、第1の膜110及び第2の膜120が交互に16層以上積層されてもよい。
第1の工程では、フォトレジスト層PRをマスクとして第1の膜110であるシリコン酸化膜(SiO2)をエッチングする。このときのエッチングは、イオンエネルギーにより鉛直方向のエッチングを促進する、所謂通常のエッチングであり、プロセス条件は以下の通りである。
第1の工程のプロセス条件:
圧力 30mT(=3.99966Pa)
第1高周波電源31及び第2高周波電源32のパワー 1000/400W (141.5W/cm2、56.6W/cm2)
ガス種及びガス流量 O2/Ar/C4F6=30/1000/16sccm
(a−3)第2の工程
第2の工程では、フォトレジスト層PRをエッチングする。第2の工程では、鉛直方向に対する水平方向のエッチングを高め、フォトレジスト層PRがなるべく水平方向にエッチングされるように、プロセス条件が適正化される。フォトレジスト層PRの水平方向のエッチングのプロセス条件等については後程詳述する。
(a−4)第3の工程
第3の工程では、フォトレジスト層PRと第1の膜110とをマスクとして第2の膜120をエッチングする。このときのエッチングは、イオンエネルギーにより鉛直方向のエッチングを促進するエッチングであり、プロセス条件は以下の通りである。
第3の工程のプロセス条件:
圧力 150mT(=19.9983Pa)
第1高周波電源31及び第2高周波電源32のパワー 300/800W(42.5W/cm2、113.2W/cm2)
ガス種及びガス流量 CH2F2/Ar/C2=140/400/70sccm
(a−5)エッチング工程完了後の最終状態
本実施形態では、第1の工程〜第3の工程を繰り返し実行する。これにより、多層膜を階段形状に形成することができる。
以上に説明したように、第1の工程及び第3の工程では、鉛直方向へのエッチングを主に促進する、いわゆる通常のエッチングであった。これに対して、第2の工程では、フォトレジスト層PRを鉛直方向ではなく、水平方向に選択的にエッチングする技術が求められる。
(圧力とイオン角度分布)
イオンエネルギーを下げてエッチングに関与するイオンの比率を下げることにより相対的にエッチングに関与するラジカルの比率を高め、水平方向のエッチングを促進する従来方法では、バイアス用の高周波電力を下部電極に印加し、プラズマ中のイオンを基板側に鉛直方向に引き込むことは行われない。また、圧力を数百mTorrに設定してエッチング処理が行われる。
以上の理論に基づき、実験を行った。まず、イオン角度と圧力との図7の関係に従って、圧力を1Torr(133.322Pa),5Torr(666.61Pa),9Torr(1199.898Pa)と変更した場合の3条件で実験した。マスク材料の水平方向のエッチングがどの程度促進されるかについて、プラズマ生成用の高周波電力とバイアス用の高周波電力の両方を下部電極に印加する下部2周波数電力印加の半導体製造装置(図3:CCPプラズマ処理装置)及びプラズマ生成用の高周波電力を上部電極へ印加し、バイアス用の高周波電力を下部電極に印加する上下部電力印加の半導体製造装置(図示せず)を用いて実験を行った。下部2周波数電力印加の半導体製造装置であって、上部電極と下部電極との電極間隔(以下ギャップGAPと称する)が狭い装置(以下プラズマ処理装置Aと称する)の場合の実験結果を図8に示す。上下部電力印加の半導体製造装置であって、上部電極と下部電極とのギャップGAPが広い装置(以下プラズマ処理装置Bと称する)の場合の実験結果を図9に示す。プラズマ処理装置A及びプラズマ処理装置Bは、容量結合型のプラズマ処理装置である。
(プラズマ処理装置Aの場合の水平方向のエッチング(第2の工程)の実験結果)
まず、初めに図8のプラズマ処理装置Aの場合の実験結果について説明する。水平方向のエッチング(第2の工程)のフォトレジスト層をエッチングする具体的なプロセス条件は次の通りである。なお、本実施形態ではウエハWの直径は300mmである。第1高周波電源の高周波パワーを0W(比較例),200W(実施例1),500W(実施例2)に変更する3条件と、処理室内の圧力を1Torr,5Torr,9Torrに変更する3条件との組み合わせにより、合計9通りの実験を行った。また、高周波パワーの単位W/cm2は単位面積当たり(cm2)に印加されるパワー(W)として換算した値を表示している。
プラズマ処理装置A
ギャップGAP 35mm
高周波の印加方式 下部2周波
第2高周波電源の高周波(HF) 100MHz
第2高周波電源の高周波パワー 1000W(1.415W/cm2)
第1高周波電源の高周波(LF) 3.2MHz
第1高周波電源の高周波パワー 比較例 :0W/cm2
実施例1:200W(0.28W/cm2)
実施例2:500W(0.71W/cm2)
ガス種 O2(処理室密閉)
伝熱ガス He 20Torr
圧力 3条件:1,5,9Torr
なお、処理室密閉とは、酸素ガスO2を処理室内に充填させ、処理室内が所定の圧力に達したらAPC(Auto Pressure Controller:自動圧力制御装置)を閉じ、ガスを密閉状態とする。このようにしてガスを密閉状態とした後、フォトレジスト層のエッチングを行った。
(プラズマ処理装置Bの場合の水平方向のエッチング(第2の工程)の実験結果)
次に、図9のギャップGAPが広い上下部電力印加のプラズマ処理装置Bの場合の実験結果について説明する。水平方向のエッチング(第2の工程)のフォトレジスト層をエッチングする具体的なプロセス条件は次の通りである。第1高周波電源の高周波パワーを0W(比較例),200W(実施例1),500W(実施例2)に変更する3条件と、処理室内の圧力を0.1Torr,0.5Torr,1Torr,5Torrに変更する4条件との組み合わせにより、合計12通りの実験を行った。
プラズマ処理装置B
ギャップGAP 87mm
高周波の印加方式 上下部2周波
第2高周波電源の高周波(HF) 60MHz
第2高周波電源の高周波パワー 1000W(1.415W/cm2)
第1高周波電源の高周波(LF) 13.56MHz
第1高周波電源の高周波パワー 比較例 :0W/cm2
実施例1:200W(0.28W/cm2)
実施例2:500W(0.71W/cm2)
ガス種 O2(処理室密閉)
伝熱ガス He 20Torr
圧力 4条件:0.1,0.5,1,5Torr
以上のプロセス条件において、エッチング処理を行う。比較例では、プラズマ中のイオンを引き込むための第1の高周波パワーLFは印加しない。よって、比較例では、イオンはエッチングに積極的に寄与せず、エッチングは主にラジカルのみによって促進される従来の方法と同じである。
(上部電極と下部電極の電極間隔(ギャップGAP)の大きさ)
プラズマ処理装置Bは、プラズマ処理装置Aよりギャップが広い。また、プラズマ処理装置Bでは、プラズマ生成用の高周波は上部電極に印加されるため、上部電極の近傍にてプラズマが生成される。一方、プラズマ処理装置Aでは、プラズマ生成用の高周波は下部電極に印加されるため、下部電極の近傍にてプラズマが生成される。よって、プラズマ処理装置Bでは、プラズマ中のイオンが基板まで到達するまでの移動距離が長い。よって、プラズマ処理装置Bの場合、プラズマ中のイオンが、基板まで飛来する間に多数のガスとの衝突が生じ、イオンエネルギーのほとんどが失われてしまう。
(ICP(誘導結合型)プラズマ処理装置)
ICPプラズマ処理装置の場合(図示せず)、装置の構造上ギャップが狭いとプラズマの均一性が悪くなる。具体的には、ICPプラズマ処理装置では、チャンバの外部にコイルが配置され、コイルの下方に位置するチャンバ天井面の一部に誘電窓が形成されている。コイルから発せられた電磁波は、誘電窓を透過しチャンバ内に導入される。導入された電磁波の強度分布はコイルの形状とほぼ同じようなパターンを持つ。よって、チャンバ内のプラズマには、強度が高い電磁波のパターンに応じて円形状にプラズマ密度が高くなる部分が生じる。このプラズマの均一性の悪さを抑制するためには、ギャップを広く取ってプラズマを拡散させる必要がある。よって、ICPプラズマ処理装置では、装置の構造上、ギャップを広くとる構造にしなければ微細加工の面内均一性を図れない。
以上に説明したように、本実施形態では、次のプロセス条件(1)〜(5)をすべて満たした状態で、多層膜上に形成されたフォトレジスト層PRをエッチングする。
(1)上部電極と下部電極とのギャップが20mm〜40mmの平行平板型プラズマ処理装置(CCPプラズマ処理装置)を使用してエッチングを行う。
(2)下部電極にプラズマ生成用の高周波電力(HF)を印加する。
(3)プラズマ中のイオンの散乱角度が15度以上75度以下になるように処理室内の圧力を6Torr以上30Torr以下にする。
(4)下部電極にバイアス用の高周波電力(LF)を印加する。0.28(W/cm2)〜0.71(W/cm2)の高周波電力を印加することが好ましい。
11 チャンバ
12 載置台(下部電極)
31 第1高周波電源(バイアス用)
32 第2高周波電源(プラズマ生成用)
38 シャワーヘッド(上部電極)
62 ガス供給源
80 制御装置
110 第1の膜
120 第2の膜
PR フォトレジスト層
Claims (7)
- 上部電極と下部電極とを有する平行平板型プラズマ処理装置において、処理ガスを導入し前記下部電極に高周波電力を印加することによりプラズマを生成し、基板上に比誘電率の異なる第1の膜及び第2の膜が交互に積層された多層膜と、該多層膜の上層に位置しマスクとして機能するフォトレジスト層とを前記プラズマによりエッチングし、前記多層膜を階段形状に形成するための半導体装置の製造方法であって、
前記フォトレジスト層を前記マスクとして前記第1の膜をエッチングする第1の工程と、
処理室内の圧力を6Torr以上30Torr以下に設定し、プラズマ生成用の高周波電力とバイアス用の高周波電力とを前記下部電極に印加することによりプラズマを生成し、生成されたプラズマにより前記フォトレジスト層の水平方向の面積を狭めるように前記フォトレジスト層をエッチングする第2の工程と、
前記フォトレジスト層と前記第1の膜とを前記マスクとして前記第2の膜をエッチングする第3の工程と、を含み、
前記第1の工程、前記第2の工程及び前記第3の工程を、前記第1の工程、前記第2の工程及び前記第3の工程の組において、該第1の工程、該第2の工程、該第3の工程の順に、所定回数繰り返し実行することを特徴とする半導体装置の製造方法。 - 前記第2の工程では、前記処理室内の圧力を10Torr以上26Torr以下に設定することを特徴とする請求項1に記載の半導体装置の製造方法。
- 前記第2の工程では、前記処理室内の圧力を14Torr以上22Torr以下に設定することを特徴とする請求項2に記載の半導体装置の製造方法。
- 前記第2の工程では、0.28W/cm2以上0.71W/cm2以下のバイアス用の高周波電力を前記下部電極に印加することを特徴とする請求項1〜3のいずれか一項に記載の半導体装置の製造方法。
- 前記第2の工程では、処理ガスとしてO2、H2、N2、CO、CO2の中から少なくとも1つ選択されたガスを使用することを特徴とする請求項1〜4のいずれか一項に記載の半導体装置の製造方法。
- 前記第1の膜はシリコン酸化膜からなり、前記第2の膜はシリコン窒化膜からなることを特徴とする請求項1〜5のいずれか一項に記載の半導体装置の製造方法。
- 前記多層膜は、前記第1の膜及び前記第2の膜が交互に16層以上積層されていることを特徴とする請求項1〜6のいずれか一項に記載の半導体装置の製造方法。
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US20140363980A1 (en) | 2014-12-11 |
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CN104081502B (zh) | 2016-06-29 |
TWI563561B (ja) | 2016-12-21 |
JP2013171890A (ja) | 2013-09-02 |
US9202707B2 (en) | 2015-12-01 |
KR102038608B1 (ko) | 2019-10-30 |
WO2013121936A1 (ja) | 2013-08-22 |
TW201351499A (zh) | 2013-12-16 |
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