JP2009295932A - 露光装置及びデバイス製造方法 - Google Patents
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/70—Microphotolithographic exposure; Apparatus therefor
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
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- G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
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- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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Abstract
【解決手段】駆動機構は、基板を保持する基板ステージを、投影光学系の光軸方向と直交する第1方向に走査移動させ、光軸方向及び第1方向に直交する第2方向にステップ移動させる。第1計測器は、駆動機構が基板ステージを第1方向に走査移動させるときに、投影光学系の光軸方向における基板ステージの位置を計測する。第2計測器は、基板の上で第2方向に延びる一つの直線上に位置する複数の計測点で投影光学系の光軸方向における基板の表面位置を計測する。制御器は、基板ステージが第2方向にステップ移動する前と後との双方において、基板の少なくとも1つの同一の領域を第2計測器に複数の計測点7−1〜6の中の互いに異なる計測点で計測させ、第2計測器による計測結果に基づいて基板ステージの第2方向に沿った移動に伴う第1計測器の計測誤差を算出する。
【選択図】図11
Description
前記基板を保持する基板ステージを、前記投影光学系の光軸方向と直交する第1方向に走査移動させ、前記光軸方向及び前記第1方向に直交する第2方向にステップ移動させる駆動機構と、
前記駆動機構が前記基板ステージを前記第1方向に走査移動させるときに、前記投影光学系の光軸方向における前記基板ステージの位置を計測する第1計測器と、
前記基板の上で前記第2方向に延びる一つの直線上に位置する複数の計測点で前記投影光学系の光軸方向における前記基板の表面位置を計測する第2計測器と、
制御器と、
を備え、
前記制御器は、前記基板ステージが前記第2方向にステップ移動する前と後との双方において、基板の少なくとも1つの同一の領域を前記第2計測器に前記複数の計測点の中の互いに異なる計測点で計測させ、当該第2計測器による計測結果に基づいて前記基板ステージの第2方向に沿った移動に伴う前記第1計測器の計測誤差を算出する、ことを特徴とする。
ツインステージ構成の露光装置は、露光領域と、計測領域と、露光領域及び計測領域を移動可能な複数の基板ステージとを有し、計測領域で計測された基板をその計測結果に従って位置決めしながら露光領域で露光する。
次に、隣接する領域9Bを計測する場合、左端の計測点7−1が、先の領域9Aを計測したときに右端の計測点7−6が計測した位置と同じ位置(図11の11)であるようにする。領域9Bを計測するときの計測点7−1の計測値をA(X1)とし、計測点7−6の計測値をB(X1)とする。
B(X0)
B(X1)、 A(X1)
B(X2)、 A(X2)
:
B(Xn―1)、A(Xn―1)
A(Xn)
このとき、X0〜Xnは以下の関係にある。
X1=X0+XF
X2=X1+XF=X0+2XF
:
Xn=Xn−1+XF=X0+nXF
ここで、XFは、フォーカス計測領域の幅であり、隣接する領域を計測するために、基板ステージがステップ移動する幅である。
ΔZ(X0→X1)=A(X1)−B(X0)
ΔZ(X1→X2)=A(X2)−B(X1)
:
ΔZ(Xn−1→Xn)=A(Xn)−B(Xn−1)
上記式は、基板ステージが、XFだけ駆動したときの、誤差の差分を示している。これを、ZXのバーミラーの絶対値Z(X0〜Xn)に変換するためには、上記を累積していけばよい。このとき、絶対値の基準がないため、とりあえず、基板ステージがX0のときにおけるバーミラーの誤差成分を0と仮定する。
Z(X0)=0
Z(X1)=Z(X0)+ΔZ(X0→X1)=0+ΔZ(X0→X1)
Z(X2)=Z(X1)+ΔZ(X1→X2)=0+ΔZ(X0→X1)+ΔZ(X1→X2)
:
Z(Xn)=Z(Xn−1)+ΔZ(Xn−1→Xn)=ΔZ(X0→X1)+・・・+ΔZ(Xn−1→Xn)
ここで、X=X0を、ZXバーミラーの形状を判断する基準としたが、これは、計算の便宜上であり、どこを基準としても問題はない。たとえば、X=Xcを、ZXバーミラーの形状を判断する基準としたい場合、全配列から、Z(Xc)の値を引いてやればよい。その場合には、以下のようになる。
Z(X0)→Z(X0)―Z(Xc)
Z(X1)→Z(X1)―Z(Xc)
:
Z(Xc)→Z(Xc)―Z(Xc)=0
:
Z(Xn)→Z(Xn)―Z(Xc)
ここで得られるZXバーミラーの形状は、あくまで、前回、計測・補正してからの変化量である。つまり、ZXバーミラーが変化していなければ、上記関数Z(X)は、0か、計測誤差程度のごく小さい値となる。
次に、シングルステージ構成の露光装置で用いられる、露光直前にフォーカス計測する場合について、説明する。
B(X0)、 S(X0)
B(X1)、 A(X1)、 S(X1)
B(X2)、 A(X2)、 S(X2)
:
B(Xn−1)、A(Xn−1)、S(Xn−1)
A(Xn)、 S(Xn)
Z誤差ΔZは基板ステージの駆動量を考慮して以下のようになる。
ΔZ(X0→X1)={A(X1)−S(X1)}−{B(X0)−S(X0)}
ΔZ(X1→X2)={A(X2)−S(X2)}−{B(X1)−S(X1)}
:
ΔZ(Xn−1→Xn)={A(Xn)−S(Xn)}−{B(Xn−1)−S(Xn−1)}
シングルステージ構成においても、ツインステージ構成と全く同様に、基板全面におけるZバーミラーの形状を算出することができる。
S(X)=Zs(X)+Tilt−X(X)・Xrot(X)+Tilt−Y(X)・Yrot(X)
各X位置(X0,X1,・・・Xn)において、上記式を適応すればよい。
本発明で適用される例示的なシングルステージ構成の露光装置を説明する。露光装置は図15に示すように、照明装置101、レチクルを搭載したレチクルステージ102、投影光学系103、基板を保持する基板ステージ1とを備える。上述したように基板ステージ1は、不図示の駆動機構によってY方向に操作移動され、X方向にステップ移動される。露光装置は、レチクルに形成された回路パターンを基板に投影して走査露光する。
2A:Xバーミラー
2B:Yバーミラー
3A−1:Xレーザ干渉計
3A−2:チルトレーザ干渉計
3A−3:ヨーレーザ干渉計
3B−1:Yレーザ干渉計
3B−2:チルトレーザ干渉計
3B−3:ヨーレーザ干渉計
4A:45度ミラー
4B:45度バーミラー
4C:ZXバーミラー
4D:ZYバーミラー
4E−1:ZYバーミラー(ZYL)
4E−2:ZYバーミラー(ZYR)
4F−1:ZXバーミラー(ZXL)
4F−2:ZXバーミラー(ZXR)
5:基板ステージ定盤
6A−1〜4:フォーカスセンサ(先読み)の計測点
6B−1〜4:フォーカスセンサ(中心)の計測点
6C−1〜4:フォーカスセンサ(先読み)の計測点
7−1〜6:フォーカスセンサの計測点
8:Y計測用フォーカスセンサ
9A:フォーカス計測領域
9B:隣接したフォーカス計測領域
9C:フォーカス計測領域
9D:隣接したフォーカス計測領域
11:重複して計測される基板上の位置
12−1:露光領域1
12−2:隣接した露光領域2
13:重複して計測される基板上の位置
Claims (10)
- 投影光学系を介してレチクルのパターンを基板に投影して前記基板を走査露光する露光装置であって、
前記基板を保持する基板ステージを、前記投影光学系の光軸方向と直交する第1方向に走査移動させ、前記光軸方向及び前記第1方向に直交する第2方向にステップ移動させる駆動機構と、
前記駆動機構が前記基板ステージを前記第1方向に走査移動させるときに、前記投影光学系の光軸方向における前記基板ステージの位置を計測する第1計測器と、
前記基板の上で前記第2方向に延びる一つの直線上に位置する複数の計測点で前記投影光学系の光軸方向における前記基板の表面位置を計測する第2計測器と、
制御器と、
を備え、
前記制御器は、前記基板ステージが前記第2方向にステップ移動する前と後との双方において、基板の少なくとも1つの同一の領域を前記第2計測器に前記複数の計測点の中の互いに異なる計測点で計測させ、当該第2計測器による計測結果に基づいて前記基板ステージの第2方向に沿った移動に伴う前記第1計測器の計測誤差を算出する、ことを特徴とする露光装置。 - 前記制御器は、前記第1計測器の計測誤差を算出するモードにおいて、前記第2計測器が基板の少なくとも1つの同一の領域を互いに異なる計測点で計測できるように、前記基板ステージが前記第2方向にステップ移動する幅を小さくすることを特徴とする請求項1に記載の露光装置。
- 前記制御器は、前記算出した第1計測器の計測誤差を用いて前記第1計測器の計測結果を補正することを特徴とする請求項1又は請求項2に記載の露光装置。
- 前記第1計測器は、バーミラー及び干渉計を含み、
前記制御器は、前記算出した第1計測器の計測誤差に基づいて前記バーミラーを計測する時期を決定することを特徴とする請求項1乃至請求項3のいずれか1項に記載の露光装置。 - 前記第2計測器は、基板の少なくとも1つの同一の領域における互いに異なる計測点での前記計測を、前記露光装置の電源を投入したとき、前記基板ステージの原点位置を決定するとき、又は、露光処理を行うロットの最初の基板が前記基板ステージに搭載されたときに行うことを特徴とする請求項1乃至請求項4のいずれか1項に記載の露光装置。
- 前記第2計測器は、基板の少なくとも1つの同一の領域における互いに異なる計測点での前記計測を、予め定められた枚数の基板が処理される毎に、又は、予め定められた時間が経過する毎に行うことを特徴とする請求項1乃至請求項4のいずれか1項に記載の露光装置。
- 前記第2計測器は、基板の少なくとも1つの同一の領域におけるする互いに異なる計測点での前記計測を、下地のパターンを有さない基板に対して行うことを特徴とする請求項1乃至請求項4のいずれか1項に記載の露光装置。
- 前記露光装置は、投影光学系を介して基板を露光する露光領域と、基板を計測する計測領域と、前記露光領域及び前記計測領域を移動可能な複数の基板ステージとを有し、前記計測領域で計測された基板をその計測結果に従って位置決めしながら前記露光領域で露光する露光装置であって、
前記第1計測器と前記第2計測器とは前記計測領域に配置されていることを特徴とする請求項1乃至請求項7のいずれか1項に記載の露光装置。 - 前記露光装置は、基板を前記第1計測器の計測結果に基づいて位置決めしながら露光することを特徴とする請求項1乃至請求項7のいずれか1項に記載の露光装置。
- 請求項1乃至請求項9のいずれか1項に記載の露光装置を用いて基板を露光する工程と、
前記工程で露光された基板を現像する工程と、
を含むデバイス製造方法。
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JP2008150836A JP2009295932A (ja) | 2008-06-09 | 2008-06-09 | 露光装置及びデバイス製造方法 |
US12/469,118 US7884918B2 (en) | 2008-06-09 | 2009-05-20 | Exposure apparatus and method of manufacturing device |
TW098118211A TW201007373A (en) | 2008-06-09 | 2009-06-02 | Exposure apparatus and method of manufacturing device |
KR1020090050948A KR101124730B1 (ko) | 2008-06-09 | 2009-06-09 | 노광 장치 및 디바이스 제조 방법 |
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JP7475185B2 (ja) | 2020-04-10 | 2024-04-26 | キヤノン株式会社 | 計測方法、インプリント装置及び物品の製造方法 |
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TW201007373A (en) | 2010-02-16 |
US20090305176A1 (en) | 2009-12-10 |
US7884918B2 (en) | 2011-02-08 |
KR101124730B1 (ko) | 2012-04-13 |
KR20090127832A (ko) | 2009-12-14 |
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