CN203721699U - 一种盘状物的夹持装置及盘状物的旋转平台 - Google Patents
一种盘状物的夹持装置及盘状物的旋转平台 Download PDFInfo
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Abstract
本实用新型公开了一种盘状物的夹持装置及盘状物的旋转平台，其中一种盘状物的夹持装置，包括夹持部、升降部、升降执行器；其中，所述夹持部包括环状体的可动基座；所述可动基座可上下运动且圆周方向上分布多个夹紧件，所述夹紧件的下方设有与之相配合用于承载盘状物的支撑件，所述夹紧件与所述支撑件之间可相对垂直运动；所述升降部的下端连接用于驱动所述升降部上下运动的升降执行器；所述升降部的上端控制所述可动基座的上下运动；本实用新型通过升降部的上下运动控制夹紧件与支撑件之间的距离从而实现硅片的打开和闭合。本实用新型在现有电磁悬浮平台的基础上提供了一种新型的夹持装置，其运动方式简便，方便机械手臂取放硅片并夹持硅片使硅片在悬浮平台上保持高速旋转。
Description
技术领域
本实用新型涉及半导体晶片工艺技术领域，特别是涉及一种盘状物夹持装置及盘状物的旋转平台。
背景技术
在集成电路的生产工艺中，盘状物例如半导体晶片或硅片要经受如刻蚀、清洗、抛光、薄膜沉积等多种表面处理工序步骤。而在这些过程中，都需要通过夹持装置来支撑并夹持盘状物，现有的盘状物夹持装置大致分为三大类：第一类为夹持组件通过齿轮啮合对盘状物夹持；第二类为夹持组件通过磁力作用对盘状物夹持；第三类为夹持组件通过其它机械方式对盘状物夹持，例如美国专利US20120018940A1揭露了一种夹持装置，通过齿轮啮合从而实现对盘状物的夹持，由磁力来控制夹持装置的打开和闭合。
目前，市场上研制了一种新型电磁悬浮旋转平台，通入交变电流后，设有磁性装置的硅片平台会产生与环形定子相反的磁场，环形定子控制夹持部悬浮并驱动夹持部旋转。通过利用电磁力使得硅片承载平台稳定地悬浮于空中，提高了硅片承载平台的稳定性。现针对该电磁悬浮旋转平台，需研制一种新型且运动方式简便的夹持装置，方便机械手臂取放硅片并使硅片在悬浮平台上保持高速旋转。
实用新型内容
本实用新型所要解决的技术问题是提供一种盘状物夹持装置及盘状物的旋转平台，方便机械手臂取放硅片。
为了解决上述技术问题，本实用新型提供了一种盘状物的夹持装置，包括夹持部、升降部、升降执行器；其中，所述夹持部包括环状体的可动基座；所述可动基座可上下运动且圆周方向上分布多个夹紧件，所述夹紧件的下方设有与之相配合用于承载盘状物的支撑件，所述夹紧件与所述支撑件之间可相对垂直运动；所述升降部的下端连接用于驱动所述升降部上下运动的升降执行器；所述升降部的上端控制所述可动基座的上下运动；当升降部抵推所述可动基座向上运动时，固定在所述可动基座上的夹紧件远离所述支撑件，用于取放盘状物；当升降部拉动所述可动基座向下运动时，所述夹紧件与所述支撑件相互接近直至夹紧盘状物。
优选的，所述升降部包括可上下运动的中空轴和推动件，所述中空轴下端与所述升降执行器相连，所述中空轴的上端与所述推动件固定连接。
优选的，所述夹持部还包括固定基座、外圈及下端部件；其中，所述可动基座的下方设有环形固定基座，所述固定基座的圆周方向上固定安装多个支撑件；所述固定基座下方设有所述外圈，所述外圈内设有磁性装置；所述下端部件与所述可动基座通过连接件固定连接；所述推动件推动所述下端部件，使所述下端部件进行上下动作。
优选的，所述的支撑件包括承载面和抵挡面，所述抵挡面具有用于限制所述盘状物的横向移动突起部，所述抵挡面抵靠所述盘状物的边缘；所述夹紧件包括用于装载盘状物的装载面和用于夹紧盘状物的夹紧面，所述装载面位于所述夹紧面的下方；所述夹紧件上设有供支撑件上下运动的半圆形凹槽，所述夹紧件的夹紧面与所述支撑件的承载面相配合夹紧盘状物，所述夹紧面与所述承载面之间的距离与盘状物的厚度相适应。
优选的，所述夹持部还包括固定基座、外圈及下端部件；其中，所述支撑件安装在所述可动基座上且所述支撑件相对于所述可动基座可上下活动，所述固定基座上设有与所述支撑件位置相应的顶杆，所述顶杆用于抵推所述支撑件，使所述支撑件与所述夹紧件之间的距离缩小；所述固定基座下方设有所述外圈，所述外圈内设有磁性装置；所述下端部件与所述可动基座通过连接件固定连接；所述推动件推动所述下端部件，使所述下端部件进行上下动作。
优选的，所述顶杆的上端为球形面。
优选的，所述的支撑件的上端包括承载面和抵挡面，所述抵挡面具有用于限制所述盘状物的横向移动的突起部，所述抵挡面抵靠所述盘状物的边缘，所述支撑件的下端设有限制支撑件向上运动的凸起块；所述夹紧件包括用于夹紧盘状物的夹紧面；所述夹紧件的夹紧面与所述支撑件的承载面相配合夹紧盘状物，所述夹紧面与所述承载面之间的距离与盘状物的厚度相适应。
优选的，所述支撑件的承载面为向承载面外表面凸出的圆弧面。
优选的，所述夹紧件的夹紧面设有锥形突起。
优选的，所述凸起块与所述可动基座之间设有弹性件。
优选的，所述推动件和所述下端部件之间设有防止两者相对滑动的吸引装置；或/且所述固定基座和所述可动基座之间设有防止两者相对滑动的吸引装置。
优选的，所述推动件和所述下端部件之间设有至少一组磁铁；或/且所述固定基座和所述可动基座之间设有至少一组磁铁。
优选的，所述支撑件的数量不少于所述夹紧件的数量。
本实用新型还提供一种盘状物的旋转平台，其特征在于，包括环形定子、支撑板、腔体；其中，所述环形定子内设有多个线圈，所述支撑板上端承载所述环形定子，所述支撑板下端连接所述腔体，所述腔体内设有如权利要求1～13任一所述的盘状物的夹持装置。
优选的，所述腔体的下端设有排液口或/和排风口。
与现有的方案相比，本实用新型在现有电磁悬浮平台的基础上提供了一种新型的夹持装置，其运动方式简便，方便机械手臂取放硅片并夹持硅片使硅片在悬浮平台上保持高速旋转。
附图说明
为了更清楚地说明本实用新型实施例中的技术方案，下面将对实施例中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本实用新型的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1为本实用新型盘状物旋转平台的立体示意图；
图2为本实用新型第一实施例盘状物夹持装置位于夹持时的结构示意图；
图3为本实用新型第一实施例盘状物夹持装置位于打开时的结构示意图；
图4为本实用新型第一实施例盘状物夹持装置的局部放大示意图；
图5为本实用新型第一实施例支撑件的结构示意图；
图6为本实用新型第一实施例夹紧件的结构示意图；
图7为本实用新型二实施例盘状物夹持装置的结构示意图；
图8为本实用新型二实施例盘状物夹持装置位于夹持时的结构示意图；
图9为本实用新型第二实施例盘状物夹持装置位于打开时的结构示意图；
图10为本实用新型第二实施例支撑件的结构示意图；
图11为本实用新型第二实施例夹紧件的结构示意图。
主要组件符号说明：
1、夹持部；11、外圈；12、固定基座；13、支撑件；13a承载面；13b抵挡面；13f凸起块；14、可动基座；15、夹紧件；15c装载面；15d夹紧面；15e凹槽；16、下端部件；17、连接件；2、环形定子；3、升降部；31、中空轴；32、推动件；4、支撑板；5、腔体；51、侧壁；52、排液口；6、顶杆；7、弹性件。
具体实施方式
以下将配合图式及实施例来详细说明本实用新型的实施方式，藉此对本实用新型如何应用技术手段来解决技术问题并达成技术功效的实现过程能充分理解并据以实施。
实施例一
参考图1至图6所示，本实用新型提供一种盘状物的旋转平台，包括夹持部1、环形定子2、升降部3、支撑板4和腔体5；本实施例中，盘状物为硅片W，其中：
所述夹持部1包括环状体的可动基座14、环状体的固定基座12、外圈11及下端部件16；所述可动基座14可上下运动且圆周方向上分布多个夹紧件15，所述固定基座12的圆周方向上固定安装多个与夹紧件15相配合的支撑件13，所述夹紧件15上设有供所述支撑件13穿过的凹槽15e；所述固定基座12下方设有所述外圈11，所述外圈11内设有磁性装置；所述下端部件16与所述可动基座14通过连接件17固定连接。
所述环形定子2内设有多个线圈；
所述升降部3包括可上下运动的中空轴31和推动件32，所述中空轴31下端与所述升降执行器(图中未示出)相连，所述中空轴31的上端与所述推动件32固定连接；
所述支撑板13上端承载所述环形定子2，所述支撑板13下端连接所述腔体5；
所述腔体5的下端设有排液口52或/和排风口(图中未示出)。
此外，所述夹持部1的外径小于所述环形定子2的内径，腔体5的侧壁51位于夹持部1和环形定子2之间，所述夹持部1与所述腔体5的侧壁51之间存在一定的间隙。通电后，所述夹持部1内的磁性装置通入交变电流产生交变磁场，从而环形定子2感生出与其相反的磁场，环形定子2可以控制夹持部1悬浮并驱动夹持部1旋转。
本实施例中夹持装置的工作原理为：
当盘状物处于装载状态时，升降执行器驱动所述升降部3向上运动，所述升降部3的推动件32推动下端部件16向上动作，因下端部件16与连接件17固定连接，所述连接件17与可动基座14固定连接，所以升降部3的推动件32推动所述可动基座14向上运动，因所述支撑件13固定在所述固定基座12上，所以固定在可动机基座14上的夹紧件15随着可动基座14的向上运动逐渐远离所述支撑件13，当夹紧件15与所述支撑件13之间的距离适宜时，在夹紧件15与支撑件13之间进行硅片取放动作。本实施例中，所述升降执行器可为电缸或气缸。
首先，机械手将盘状物放置在夹紧件15的装载面15c，所述升降部3向下运动，因此所述升降部3的推动件32随之向下运动，所述支撑件13相对向上运动，当支撑件13的承载面13a高于所述夹紧件15装载面15c时，盘状物承载在所述支撑件13的承载面13a上，夹持部1在自身重力或在推动件32拉力下，所述下端部件16、连接件17和设有夹紧件15的可动基座14同时向下运动，因支撑件13固定在所述固定基座12上，所以支撑件13与所述夹紧件15之间的距离逐渐缩小直至夹紧盘状物。
为了防止所述推动件32和所述下端部件16之间相对滑动，所述推动件32和所述下端部件16之间设有吸引装置，所述的吸引装置为在所述推动件32内或所述下端部件16内各设相互吸引的磁铁；同时，为了防止所述固定基座12和所述可动基座14之间相对滑动，所述固定基座12和所述可动基座14之间设有同样的防止两者相对滑动的吸引装置，所述的吸引装置优先为一组相互吸引的磁铁。
值得说明的是，为了更好的承载盘状物，加强盘状物承载的稳定性，所述支撑件13的数量不少于所述夹紧件15的数量。
请参考图5、图6，所述的支撑件13包括承载面13a和抵挡面13b，所述抵挡面13b具有用于限制所述盘状物的横向移动突起部，所述抵挡面13b抵靠所述盘状物的边缘；所述夹紧件15包括用于装载盘状物的装载面15c和用于夹紧盘状物的夹紧面15d，所述装载面15c位于所述夹紧面15d的下方；所述夹紧件15上设有供支撑件13上下运动的半圆形凹槽15e，所述夹紧件15的夹紧面15d与所述支撑件13的承载面13a相配合夹紧盘状物，所述夹紧面15d与所述承载面13a之间的距离与盘状物的厚度相适应。
为了减少夹紧件15或所述支撑件13与硅片的接触面，所述支撑件13的承载面13a为向承载面外表面凸出的圆弧面；所述夹紧件15的夹紧面15d设有锥尖向下的锥形突起。
实施例二
在实施例一的基础上，与实施例一不同的是：请参考图7至图11，所述夹持部1包括环状体的可动基座14、环状体的固定基座12、外圈11及下端部件16；其中，所述可动基座14上固定设有多个夹紧件15，所述可动基座14上设有多个相对于所述可动基座14可上下活动的支撑件13，所述支撑件13与所述夹紧件15的位置相应，所述固定基座12设在所述可动基座14的下方，所述固定基座12上设有与所述支撑件13位置相应的球形面顶杆6；同样的，所述固定基座12下方设有所述外圈11，所述外圈11内设有磁性装置；所述下端部件16与所述可动基座14通过连接件17固定连接；所述推动件32推动所述下端部件16，使所述下端部件16进行上下动作。
请参考图10、11，所述的支撑件13的上端包括承载面13a和抵挡面13b，所述抵挡面13b具有用于限制所述盘状物的横向移动的突起部，所述抵挡面13b抵靠所述盘状物的边缘，所述支撑件13的下端设有限制支撑件13向上运动的凸起块；所述夹紧件15包括用于夹紧盘状物的夹紧面15d；所述夹紧件15的夹紧面15d与所述支撑件13的承载面13a相配合夹紧盘状物，所述夹紧面15d与所述承载面13a之间的距离与盘状物的厚度相适应。
为了减少夹紧件15或所述支撑件13与硅片的接触面，所述支撑件13的承载面13a为向承载面外表面凸出的圆弧面；所述夹紧件15的夹紧面15d设有锥形突起。
为了更好的使支撑件13上下滑动，所述凸起块与所述可动基座14之间设有弹性件7。
本实施例中夹持装置的工作原理为：
当硅片处于装载状态时，升降执行器（图中未示出）驱动所述升降部3向上运动，所述升降部3的推动件32推动下端部件16向上动作，因下端部件16、连接件17、与可动基座14三者固定连接，所以升降部3的推动件32推动所述可动基座14向上运动，因所述支撑件13相对与所述可动基座14活动连接，所述支撑件13向下运动逐渐远离所述夹紧件15，当夹紧件15与所述支撑件13之间的距离适宜时，在夹紧件15与支撑件13之间进行硅片取放动作。
当硅片处于工艺状态时，所述升降部3向下运动，所述升降部3的推动件32随之向下运动，夹持部1在自身重力或在推动件32拉力下，所述下端部件16、连接件17和设有夹紧件15的可动基座14同时向下运动，所述支撑件13相对于所述顶杆6之间的距离逐渐缩小，当所述可动基座14继续向下运动时，所述顶杆6推压所述支撑件13，直至所述支撑件13与所述夹紧件15两者相互夹紧盘状物。
上述说明示出并描述了本实用新型的若干优选实施例，但如前所述，应当理解本实用新型并非局限于本文所披露的形式，不应看作是对其他实施例的排除，而可用于各种其他组合、修改和环境，并能够在本文所述实用新型构想范围内，通过上述教导或相关领域的技术或知识进行改动。而本领域人员所进行的改动和变化不脱离本实用新型的精神和范围，则都应在本实用新型所附权利要求的保护范围内。
Claims (15)
1.一种盘状物的夹持装置，其特征在于，包括夹持部、升降部、升降执行器；其中，
所述夹持部包括环状体的可动基座；所述可动基座可上下运动且圆周方向上分布多个夹紧件，所述夹紧件的下方设有与之相配合用于承载盘状物的支撑件，所述夹紧件与所述支撑件之间可相对垂直运动；
所述升降部的下端连接用于驱动所述升降部上下运动的升降执行器；所述升降部的上端控制所述可动基座的上下运动；
当升降部抵推所述可动基座向上运动时，固定在所述可动基座上的夹紧件远离所述支撑件，用于取放盘状物；当升降部拉动所述可动基座向下运动时，所述夹紧件与所述支撑件相互接近直至夹紧盘状物。
2.根据权利要求1所述的盘状物的夹持装置，其特征在于，所述升降部包括可上下运动的中空轴和推动件，所述中空轴下端与所述升降执行器相连，所述中空轴的上端与所述推动件固定连接。
3.根据权利要求2所述的盘状物的夹持装置，其特征在于，所述夹持部还包括固定基座、外圈及下端部件；其中，
所述可动基座的下方设有环形固定基座，所述固定基座的圆周方向上固定安装多个支撑件；
所述固定基座下方设有所述外圈，所述外圈内设有磁性装置；
所述下端部件与所述可动基座通过连接件固定连接；所述推动件推动所述下端部件，使所述下端部件进行上下动作。
4.根据权利要求3所述的盘状物的夹持装置，其特征在于，
所述的支撑件包括承载面和抵挡面，所述抵挡面具有用于限制所述盘状物的横向移动突起部，所述抵挡面抵靠所述盘状物的边缘；
所述夹紧件包括用于装载盘状物的装载面和用于夹紧盘状物的夹紧面，所述装载面位于所述夹紧面的下方；
所述夹紧件上设有供支撑件上下运动的半圆形凹槽，所述夹紧件的夹紧面与所述支撑件的承载面相配合夹紧盘状物，所述夹紧面与所述承载面之间的距离与盘状物的厚度相适应。
5.根据权利要求2所述的盘状物的夹持装置，其特征在于，所述夹持部还包括固定基座、外圈及下端部件；其中，
所述支撑件安装在所述可动基座上且所述支撑件相对于所述可动基座可上下活动，所述固定基座上设有与所述支撑件位置相应的顶杆，所述顶杆用于抵推所述支撑件，使所述支撑件与所述夹紧件之间的距离缩小；
所述固定基座下方设有所述外圈，所述外圈内设有磁性装置；
所述下端部件与所述可动基座通过连接件固定连接；所述推动件推动所述下端部件，使所述下端部件进行上下动作。
6.根据权利要求5所述的盘状物的夹持装置，其特征在于，所述顶杆的上端为球形面。
7.根据权利要求5所述的盘状物的夹持装置，其特征在于，
所述的支撑件的上端包括承载面和抵挡面，所述抵挡面具有用于限制所述盘状物的横向移动的突起部，所述抵挡面抵靠所述盘状物的边缘，所述支撑件的下端设有限制支撑件向上运动的凸起块；
所述夹紧件包括用于夹紧盘状物的夹紧面；所述夹紧件的夹紧面与所述支撑件的承载面相配合夹紧盘状物，所述夹紧面与所述承载面之间的距离与盘状物的厚度相适应。
8.根据权利要求7所述的盘状物的夹持装置，其特征在于，所述支撑件的承载面为向承载面外表面凸出的圆弧面。
9.根据权利要求7所述的盘状物的夹持装置，其特征在于，所述夹紧件的夹紧面设有锥形突起。
10.根据权利要求7所述的盘状物的夹持装置，其特征在于，所述凸起块与所述可动基座之间设有弹性件。
11.根据权利要求2所述的盘状物的夹持装置，其特征在于，所述推动件和所述下端部件之间设有防止两者相对滑动的吸引装置；或/且所述固定基座和所述可动基座之间设有防止两者相对滑动的吸引装置。
12.根据权利要求11所述的盘状物的夹持装置，其特征在于，所述推动件和所述下端部件之间设有至少一组磁铁；或/且所述固定基座和所述可动基座之间设有至少一组磁铁。
13.根据权利要求1～12任一所述的盘状物的夹持装置，其特征在于，所述支撑件的数量不少于所述夹紧件的数量。
14.一种盘状物的旋转平台，其特征在于，包括环形定子、支撑板、腔体；其中，所述环形定子内设有多个线圈，所述支撑板上端承载所述环形定子，所述支撑板下端连接所述腔体，还包括如权利要求1～13任一所述的盘状物的夹持装置。
15.根据权利要求14所述的盘状物的旋转平台，其特征在于，所述腔体的下端设有排液口或/和排风口。
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