JPS62237236A - 恒温清浄作業室 - Google Patents
恒温清浄作業室Info
- Publication number
- JPS62237236A JPS62237236A JP61079980A JP7998086A JPS62237236A JP S62237236 A JPS62237236 A JP S62237236A JP 61079980 A JP61079980 A JP 61079980A JP 7998086 A JP7998086 A JP 7998086A JP S62237236 A JPS62237236 A JP S62237236A
- Authority
- JP
- Japan
- Prior art keywords
- air
- temperature
- work space
- blower
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000003756 stirring Methods 0.000 claims abstract description 13
- 230000005855 radiation Effects 0.000 claims abstract description 4
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 4
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000005192 partition Methods 0.000 claims description 5
- 238000010992 reflux Methods 0.000 claims description 4
- 230000003068 static effect Effects 0.000 abstract description 3
- 238000009826 distribution Methods 0.000 description 6
- 230000003749 cleanliness Effects 0.000 description 5
- 238000007689 inspection Methods 0.000 description 4
- 238000007664 blowing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004080 punching Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000013019 agitation Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 235000009508 confectionery Nutrition 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000008014 freezing Effects 0.000 description 1
- 238000007710 freezing Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
め要約のデータは記録されません。
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は作業全問内の温度精度が要求される清浄作業室
に係り、特に半導体の製造等で要求される高い温度精度
を得るのに好適なへｉ温清浄作業室に関する。
に係り、特に半導体の製造等で要求される高い温度精度
を得るのに好適なへｉ温清浄作業室に関する。
従来の装置は実公昭５７−４３６６１号、特公昭６１−
６２９９号等に記載のように、前面か開放された作業空
間内に機器を設置し、該作業空間の天井面全面から清浄
空気を吹出し、作業空間背面の下方に設けられた空気吸
込口より作業空間内の空気を吸込み、作業空間背面に形
成された還気ダクト中に設けられた温度調整装置で温度
制御した空気を貴び天井面から吹出すよう構成されてい
る。しかし、吹出位置による温度むら発生の解消および
内部に設置される機器からの排熱の影響の解消について
は配慮され１いなかった。
６２９９号等に記載のように、前面か開放された作業空
間内に機器を設置し、該作業空間の天井面全面から清浄
空気を吹出し、作業空間背面の下方に設けられた空気吸
込口より作業空間内の空気を吸込み、作業空間背面に形
成された還気ダクト中に設けられた温度調整装置で温度
制御した空気を貴び天井面から吹出すよう構成されてい
る。しかし、吹出位置による温度むら発生の解消および
内部に設置される機器からの排熱の影響の解消について
は配慮され１いなかった。
上記従来技術には清浄作業室の清浄空気吹出面の吹出位
置による温度むら発生の解消および清浄作業室の内部に
設置される機器からの排熱の影響の解消について配慮さ
れておらす、温牌された空気のミキシングが確実に行な
われず、温度精度の維持か困難であるとともに、清浄作
業室内に設置された機器、例えば半導体央造装置より発
生する熱をその１で清浄作業室内に放出していたため、
清浄作業室内の温度精度に影響を及はすという問題があ
った。
置による温度むら発生の解消および清浄作業室の内部に
設置される機器からの排熱の影響の解消について配慮さ
れておらす、温牌された空気のミキシングが確実に行な
われず、温度精度の維持か困難であるとともに、清浄作
業室内に設置された機器、例えば半導体央造装置より発
生する熱をその１で清浄作業室内に放出していたため、
清浄作業室内の温度精度に影響を及はすという問題があ
った。
本発明の目的は内ｓＶｃ設置された機器からの排熱の影
響を受けることなく、清浄作業室内の温度精度に優れた
恒温清浄作業室を提供することにある。
響を受けることなく、清浄作業室内の温度精度に優れた
恒温清浄作業室を提供することにある。
上記目的は隔壁で包囲された作業空間と、該作業空間に
面し１設けられたフィルタと、該フィルタを介して前記
作業空間に送風する送風機と、前記作業空間と前記送風
機の吸込口とを連通ずる空気還流部と、該空気還流部に
設けられた温度調整装置とを備えて成る恒温清浄作業室
において、前記温度調整装置からＷｕ記フィルタへ至る
空気流路中に空気撹拌手段を設け、かつ、削記作菓空間
内に＠直される＆器の排熱ダクトを設けて、該排熱ダク
トの一端を前記機器に接続し、他端を前記空気還流部内
にし入し１前記空気還流部内に形成された放熱部を介し
て前記温度調整装置の上流側ｊに連通するよう設けるこ
とにより達成感れる。
面し１設けられたフィルタと、該フィルタを介して前記
作業空間に送風する送風機と、前記作業空間と前記送風
機の吸込口とを連通ずる空気還流部と、該空気還流部に
設けられた温度調整装置とを備えて成る恒温清浄作業室
において、前記温度調整装置からＷｕ記フィルタへ至る
空気流路中に空気撹拌手段を設け、かつ、削記作菓空間
内に＠直される＆器の排熱ダクトを設けて、該排熱ダク
トの一端を前記機器に接続し、他端を前記空気還流部内
にし入し１前記空気還流部内に形成された放熱部を介し
て前記温度調整装置の上流側ｊに連通するよう設けるこ
とにより達成感れる。
空気撹拌手段はフィルタに供給される空気を撹拌して温
度を均一にし、フィルタの吹出面間おける温度分布のむ
らの発生を防止する。
度を均一にし、フィルタの吹出面間おける温度分布のむ
らの発生を防止する。
排熱ダクトは空気還流部内に形成された放熱部を介して
空気還流部内の空気と熱交換をした空気を温度調整装置
の止流１１＋に放出するので、空気還流部内の空気と放
出された空気との温度差を小さくすることかでき、空気
還′ｔｉＷ、部内の空気の温度のむらの発生を防止する
。
空気還流部内の空気と熱交換をした空気を温度調整装置
の止流１１＋に放出するので、空気還流部内の空気と放
出された空気との温度差を小さくすることかでき、空気
還′ｔｉＷ、部内の空気の温度のむらの発生を防止する
。
以下本発明の実施例を第１図〜第１３図により説明する
。
。
本発明の第一実施例を第１図〜第８図により説明する。
第１図、第２図は七れぞれ本発明の第一実施例における
・准温清浄作業室の正面図および正面より見た縦断面図
である。作業空間２０は隔壁６で包囲されて周囲の環境
から独立し、正面には内部に設置される機器】１の保守
点検用のＪｆｊ＋６ａと、本実施例における恒温清浄作
業室を運転するための制御盤２２とか設けられ、機械室
２４の内部に形成された空気還流部２６中には温度１１
１１整装置１と送風機２とが格納される。
・准温清浄作業室の正面図および正面より見た縦断面図
である。作業空間２０は隔壁６で包囲されて周囲の環境
から独立し、正面には内部に設置される機器】１の保守
点検用のＪｆｊ＋６ａと、本実施例における恒温清浄作
業室を運転するための制御盤２２とか設けられ、機械室
２４の内部に形成された空気還流部２６中には温度１１
１１整装置１と送風機２とが格納される。
空気還流部２６の天井部には排熱ダクト８が設けられ、
排熱ダクト８はダクトを蛇行させて形成した放熱部８ａ
と温度調整装ｋ】の上流側に設けられた吹出口８ｂとを
有する。本実施例では排熱ダクト８は補助送風機２′お
よびダクトｌｌａを介して機器１１の排熱口に接続され
ている。本実施例では補助送風機２′を介して機器１１
の排気を吸引しているが、機器１１が充分な能力の排熱
用送風機を内蔵している場合には補助送風機２′はなく
てもよい。放熱ダクト８の放熱部８ａは本実施例ではダ
クトを蛇行させて形成したか、これに限ることなく、ダ
クＨＣ放熱フィンを設けたもの等であってもよい。空気
還流部２６は一端がリターンダクト４ｆ介して作業空間
２０の天井部と連通し、他端が送風機２を介して、作業
空間２０の一壁面を形成する形で設けられた圧力室２８
に連通ずる。圧力室２８の作業空間２０に面する側には
フィルタ３が設けられ、圧力室２８内の空気を浄化して
作業空間２０に水平層流の形で清浄空気を供給する。フ
ィルタとしては通常ＨＥＰＡフィルタが用いられ、作業
空間２０内部の清浄度をより高くする場合にはＵＬＰＡ
フィルタか用いられる。
排熱ダクト８はダクトを蛇行させて形成した放熱部８ａ
と温度調整装ｋ】の上流側に設けられた吹出口８ｂとを
有する。本実施例では排熱ダクト８は補助送風機２′お
よびダクトｌｌａを介して機器１１の排熱口に接続され
ている。本実施例では補助送風機２′を介して機器１１
の排気を吸引しているが、機器１１が充分な能力の排熱
用送風機を内蔵している場合には補助送風機２′はなく
てもよい。放熱ダクト８の放熱部８ａは本実施例ではダ
クトを蛇行させて形成したか、これに限ることなく、ダ
クＨＣ放熱フィンを設けたもの等であってもよい。空気
還流部２６は一端がリターンダクト４ｆ介して作業空間
２０の天井部と連通し、他端が送風機２を介して、作業
空間２０の一壁面を形成する形で設けられた圧力室２８
に連通ずる。圧力室２８の作業空間２０に面する側には
フィルタ３が設けられ、圧力室２８内の空気を浄化して
作業空間２０に水平層流の形で清浄空気を供給する。フ
ィルタとしては通常ＨＥＰＡフィルタが用いられ、作業
空間２０内部の清浄度をより高くする場合にはＵＬＰＡ
フィルタか用いられる。
温度調整装置】からフィルタ３へ至る空気流路中には空
気撹拌手段３０が設けられる。本実施例では空気撹拌手
段３０は送風機２と圧力室２８とにより構成される。
気撹拌手段３０が設けられる。本実施例では空気撹拌手
段３０は送風機２と圧力室２８とにより構成される。
い１、空気還流部２６中で温度調整装置ｉ［１を通過後
の空気の温度分布は、−例として第４図のＡ−Ａ′面を
考えると、第５図に示すように巾方向での温度分布のほ
らつきがある。そのため温度調整装置１を通過した空気
を七の１１フイルタに供給すると、温度分布のほらつき
がその１１伝わって清浄空気吹出口の温度が場所によっ
て異なり、温度精度を高くすることができない。本実施
例では温度調整装置１とフィルタ３との間に空気撹拌手
段３０を設けて温度の均一化を図るものである。
の空気の温度分布は、−例として第４図のＡ−Ａ′面を
考えると、第５図に示すように巾方向での温度分布のほ
らつきがある。そのため温度調整装置１を通過した空気
を七の１１フイルタに供給すると、温度分布のほらつき
がその１１伝わって清浄空気吹出口の温度が場所によっ
て異なり、温度精度を高くすることができない。本実施
例では温度調整装置１とフィルタ３との間に空気撹拌手
段３０を設けて温度の均一化を図るものである。
本実施例では吸込口９および吹出口１０がそれぞれ１ケ
所で高静圧の送に＠２と送風＠２の吹出口】０の下流側
に設けられた圧力室２８とＫより空気撹拌手段を構成し
、これにより温度調整装置１を通った空気は、すべて、
送風機２で混合されて１ケ所の吹き出し口１０より吹き
出されるため空気のばキシングを確実に行うことができ
、均一化された温度の空気を作業空間２０に吹き出すこ
とができる。又、送風機２を高静圧のものにすることに
より、圧力室２８内に筒い圧力で吹き出すことかできて
ミキシングを確実に行うことができる。
所で高静圧の送に＠２と送風＠２の吹出口】０の下流側
に設けられた圧力室２８とＫより空気撹拌手段を構成し
、これにより温度調整装置１を通った空気は、すべて、
送風機２で混合されて１ケ所の吹き出し口１０より吹き
出されるため空気のばキシングを確実に行うことができ
、均一化された温度の空気を作業空間２０に吹き出すこ
とができる。又、送風機２を高静圧のものにすることに
より、圧力室２８内に筒い圧力で吹き出すことかできて
ミキシングを確実に行うことができる。
なお、空気撹拌手段は上記のものに限ることなく、別途
に送風機を設けて空気を撹拌してもよく、あるいはルー
バ等によシ空気が混合するよう気流を纒い１もよい。
に送風機を設けて空気を撹拌してもよく、あるいはルー
バ等によシ空気が混合するよう気流を纒い１もよい。
本実施例においては、機器１】に外部よダ輩素ガス等作
業に必要な気体を作業空間外Ｓから配管１１ｂを介して
供給するに当り、リターンダクト４中に設けられた熱交
換器７を介して供給するよう構成し１いる。これにより
、常に一定温度の気体を作業空間内部の機器】１に供給
することができるため、外部より引き込む気体のＩＦＡ
温化を図ることができる。
業に必要な気体を作業空間外Ｓから配管１１ｂを介して
供給するに当り、リターンダクト４中に設けられた熱交
換器７を介して供給するよう構成し１いる。これにより
、常に一定温度の気体を作業空間内部の機器】１に供給
することができるため、外部より引き込む気体のＩＦＡ
温化を図ることができる。
熱交換器の股漁場所は空気流路のどの位置においてもよ
い。
い。
これによシ、外部よシ引き込む気体０凍温化を図るため
の特別な装重かいらないため、省エネルギ化が図れる。
の特別な装重かいらないため、省エネルギ化が図れる。
次に機械室点検Ｊ＋１５の開閉機構について第６図〜第
８図により説明する。機械室点検扉５が閉状態の時、ス
トップ金具１４のビン】５は、金具１６に略り字形に設
けられた開口部１７のＰ、の位置にある。ｎ５がスプリ
ング１８により途中１で開いた時、ビン１５はＰ、の位
置になシ金ＪＬ、１６に当り開かない状態となる。この
状態でストップ金−ｊＬ１４を押してやることにより、
ビン１５は、金ＪＲ，１６ノ開０！１５１７にそつ？Ｐ
、’！で勤（ようになるため、扉５は、完全な開状態１
で、スプリング１８により開くことがａＪ 能となる。
８図により説明する。機械室点検扉５が閉状態の時、ス
トップ金具１４のビン】５は、金具１６に略り字形に設
けられた開口部１７のＰ、の位置にある。ｎ５がスプリ
ング１８により途中１で開いた時、ビン１５はＰ、の位
置になシ金ＪＬ、１６に当り開かない状態となる。この
状態でストップ金−ｊＬ１４を押してやることにより、
ビン１５は、金ＪＲ，１６ノ開０！１５１７にそつ？Ｐ
、’！で勤（ようになるため、扉５は、完全な開状態１
で、スプリング１８により開くことがａＪ 能となる。
本実施例によれば、機械室点検扉は、スプリング１８に
よシスムーズに開き、かつ、ストップ金具によシ一定位
置で止するため、急に開くことがなく安全である。
よシスムーズに開き、かつ、ストップ金具によシ一定位
置で止するため、急に開くことがなく安全である。
本発明の第２実施例を第９図〜第１３図により説明する
。
。
本実施例は清浄空気の吹出口を作業空間２０の天井面の
一部に設け、作業空間２０からのリターン空気を前記吹
出口と略対角位置となる壁面に形成されたリターンダク
ト４から吸引するよう構成したものである。第９図、第
１０図はそれぞれ本実施例における恒温清浄作業室の外
観および気流状態を示す。本実施例においては、天井面
の一部ＩｃＨＫＰＡフィルタ３を配し、ダウンスローの
気流を流す。次に宿浄窒間２０内で便用づれる機器１１
の特に清浄度を要する部分１１ｃに合せ、リターンダク
ト４の作業空間２０に面する側に開口部１３を設けるこ
とｒＣよ九タウン７０−で流れだした清ｆＰ空気をサイ
ドフローの形で作業９間２０内の機器の清浄度が要求さ
れる部分に送り込むことができる。
一部に設け、作業空間２０からのリターン空気を前記吹
出口と略対角位置となる壁面に形成されたリターンダク
ト４から吸引するよう構成したものである。第９図、第
１０図はそれぞれ本実施例における恒温清浄作業室の外
観および気流状態を示す。本実施例においては、天井面
の一部ＩｃＨＫＰＡフィルタ３を配し、ダウンスローの
気流を流す。次に宿浄窒間２０内で便用づれる機器１１
の特に清浄度を要する部分１１ｃに合せ、リターンダク
ト４の作業空間２０に面する側に開口部１３を設けるこ
とｒＣよ九タウン７０−で流れだした清ｆＰ空気をサイ
ドフローの形で作業９間２０内の機器の清浄度が要求さ
れる部分に送り込むことができる。
本実施例によれば、天井の全面にＨＥＰＡフィルタを設
けることなく内部に設置された機器の主要部に必要な清
浄度を確保することができるため、装置の小形化、省エ
ネルギ化を図ることができる。
けることなく内部に設置された機器の主要部に必要な清
浄度を確保することができるため、装置の小形化、省エ
ネルギ化を図ることができる。
本実施例においては機器］１に供給する気体の熱交換器
７を送風機２の吹出口の直下に設けているため、熱又換
器７を介し１供給する気体の温度精度をよυ向上させる
ことができる。
７を送風機２の吹出口の直下に設けているため、熱又換
器７を介し１供給する気体の温度精度をよυ向上させる
ことができる。
本実施例において、内部に設置される機器の大きさが大
きい場合には、作業空間２０の上部に設置！ｌ：される
機械Ｎ２４を複数台連結することにより、機器を設置す
るのに光分な大きさの作業空間を形成し又もよい。この
場合、第１２図、第１３図に示すようにフィルタ３の下
流側の空間を互いに連通させた一つの空間とし、この空
間全面にわたつて吹出パンチング板３２を設けるように
してもよい。これによυ連結部分からも清浄空気を作業
空間内に吹出すことができるので、広い範囲にわた９清
浄度を得ることができる。フた、吹出パンチング板３２
が連続して設けられ天井部の美観を向上させることもで
きる。
きい場合には、作業空間２０の上部に設置！ｌ：される
機械Ｎ２４を複数台連結することにより、機器を設置す
るのに光分な大きさの作業空間を形成し又もよい。この
場合、第１２図、第１３図に示すようにフィルタ３の下
流側の空間を互いに連通させた一つの空間とし、この空
間全面にわたつて吹出パンチング板３２を設けるように
してもよい。これによυ連結部分からも清浄空気を作業
空間内に吹出すことができるので、広い範囲にわた９清
浄度を得ることができる。フた、吹出パンチング板３２
が連続して設けられ天井部の美観を向上させることもで
きる。
本発明によれは清浄空気の吹出口部における温度分布の
むらを解消できるとともに、作業空間内に設置される機
器からの排熱の影響を温度むらの発生を防止することが
でき、温度精度の優れたりｉ温清浄作菓呈を得ることが
できる。
むらを解消できるとともに、作業空間内に設置される機
器からの排熱の影響を温度むらの発生を防止することが
でき、温度精度の優れたりｉ温清浄作菓呈を得ることが
できる。
第１図は本発明の第−実施例例おける樋温清浄作業室の
外観を示す正面図、第２図は本発明の第一実施例におけ
る恒温清浄作条室の構成を示す正面断面図、第３図は本
実施例における空気還流部の水平断面図、第４図は本実
施例処おける送Ｊｕ！Ｘの気流吸込状況を示す平面図、
第５図は第４図のＡＡ’而における温度分布を示す図、
第６図〜第８図は機械室潰検扉の開閉機構の動作を示す
側面図、第９図、第１０図はそれぞれ本発明の第２実施
例における恒温清浄作業の外観を示す正面図および構成
を示す正面断面図、第１１図は本実施例におけるリター
ンダクトを示す仙ｊ面図、第１２１ｇ１゜第１３図はそ
れぞれ本実施例における清浄作業呈を連結等により拡張
した場合における清浄空気吹出口部の構成例を示すｆＲ
ａ図および吹出口部の側断面図である。 】：温度ｖＩ４整装置、２：送風機、３：フィルタ、６
：隔壁、８：排熱ダクト、８ａ：放熱部、９：送ａｍの
吸込口、１１：機器、２０：作業壁間、２６：空気還流
部、３０：空気撹拌手膜／゛＼ 代理人 弁理士 小 川 勝 男 、第 １
図 に ｌ温度ｇＡ堅裟１ ２０ １−￥魔立聞２１爪度
あ、２気１九部 ３ フィ Ｊレタ ３０． 空頁Ｒ拌）
段６ 隔 壁 第２図 ＄ ３ 図 ＄ ４ 凹 ＄ ５ 図 Ａ Ａ・１７
ガ峙 ＄ ｔｏ ｒ＠ ｌｙ ｔｔ 凹
外観を示す正面図、第２図は本発明の第一実施例におけ
る恒温清浄作条室の構成を示す正面断面図、第３図は本
実施例における空気還流部の水平断面図、第４図は本実
施例処おける送Ｊｕ！Ｘの気流吸込状況を示す平面図、
第５図は第４図のＡＡ’而における温度分布を示す図、
第６図〜第８図は機械室潰検扉の開閉機構の動作を示す
側面図、第９図、第１０図はそれぞれ本発明の第２実施
例における恒温清浄作業の外観を示す正面図および構成
を示す正面断面図、第１１図は本実施例におけるリター
ンダクトを示す仙ｊ面図、第１２１ｇ１゜第１３図はそ
れぞれ本実施例における清浄作業呈を連結等により拡張
した場合における清浄空気吹出口部の構成例を示すｆＲ
ａ図および吹出口部の側断面図である。 】：温度ｖＩ４整装置、２：送風機、３：フィルタ、６
：隔壁、８：排熱ダクト、８ａ：放熱部、９：送ａｍの
吸込口、１１：機器、２０：作業壁間、２６：空気還流
部、３０：空気撹拌手膜／゛＼ 代理人 弁理士 小 川 勝 男 、第 １
図 に ｌ温度ｇＡ堅裟１ ２０ １−￥魔立聞２１爪度
あ、２気１九部 ３ フィ Ｊレタ ３０． 空頁Ｒ拌）
段６ 隔 壁 第２図 ＄ ３ 図 ＄ ４ 凹 ＄ ５ 図 Ａ Ａ・１７
ガ峙 ＄ ｔｏ ｒ＠ ｌｙ ｔｔ 凹
Claims (1)
- 隔壁で包囲された作業空間と、該作業空間に面して設け
られたフィルタと、該フィルタを介して前記作業空間に
送風する送風機と、前記作業空間と前記送風機の吸込口
とを連通する空気還流部と、該空気還流部に設けられた
温度調整装置とを備えて成る恒温清浄作業室において、
前記温度調整装置から前記フィルタへ至る空気流路中に
空気撹拌手段を備え、かつ、前記作業空間内に設置され
る機器の排熱ダクトを備え、該排熱ダクトは一端が前記
機器に接続され、他端が前記空気還流部内に嵌入して前
記空気還流部内に形成された放熱部を介して前記温度調
整装置の上流側に連通するよう設けられたことを特徴と
する恒温清浄作業室。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61079980A JPS62237236A (ja) | 1986-04-09 | 1986-04-09 | 恒温清浄作業室 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61079980A JPS62237236A (ja) | 1986-04-09 | 1986-04-09 | 恒温清浄作業室 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62237236A true JPS62237236A (ja) | 1987-10-17 |
| JPH0550661B2 JPH0550661B2 (ja) | 1993-07-29 |
Family
ID=13705470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61079980A Granted JPS62237236A (ja) | 1986-04-09 | 1986-04-09 | 恒温清浄作業室 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62237236A (ja) |
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| CN117968219A (zh) * | 2024-03-29 | 2024-05-03 | 深圳市博安智控科技有限公司 | 一种应用于楼宇的冷源系统的管理方法及设备 |
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|---|---|
| JPH0550661B2 (ja) | 1993-07-29 |
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