JP5719849B2 - 薄膜製造方法 - Google Patents
薄膜製造方法 Download PDFInfo
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- JP5719849B2 JP5719849B2 JP2012534919A JP2012534919A JP5719849B2 JP 5719849 B2 JP5719849 B2 JP 5719849B2 JP 2012534919 A JP2012534919 A JP 2012534919A JP 2012534919 A JP2012534919 A JP 2012534919A JP 5719849 B2 JP5719849 B2 JP 5719849B2
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- 239000010409 thin film Substances 0.000 title claims description 131
- 238000004519 manufacturing process Methods 0.000 title claims description 64
- 239000007789 gas Substances 0.000 claims description 156
- 239000000758 substrate Substances 0.000 claims description 82
- 229910052751 metal Inorganic materials 0.000 claims description 60
- 239000002184 metal Substances 0.000 claims description 60
- 239000002994 raw material Substances 0.000 claims description 54
- 239000011261 inert gas Substances 0.000 claims description 46
- 230000001590 oxidative effect Effects 0.000 claims description 44
- 239000013078 crystal Substances 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 16
- 229910052719 titanium Inorganic materials 0.000 claims description 9
- 230000004044 response Effects 0.000 claims description 7
- 229910052726 zirconium Inorganic materials 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 6
- 230000009467 reduction Effects 0.000 claims description 4
- 239000010408 film Substances 0.000 description 72
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 55
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 55
- 230000015572 biosynthetic process Effects 0.000 description 45
- 238000012546 transfer Methods 0.000 description 27
- 239000000243 solution Substances 0.000 description 20
- 239000002904 solvent Substances 0.000 description 15
- 239000006200 vaporizer Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 14
- 239000010936 titanium Substances 0.000 description 12
- 230000000052 comparative effect Effects 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 239000002344 surface layer Substances 0.000 description 8
- 230000003746 surface roughness Effects 0.000 description 8
- 230000007246 mechanism Effects 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- DKPFZGUDAPQIHT-UHFFFAOYSA-N butyl acetate Chemical compound CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 6
- 239000012159 carrier gas Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- 238000009834 vaporization Methods 0.000 description 4
- 230000008016 vaporization Effects 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 229910004356 Ti Raw Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- IIEWJVIFRVWJOD-UHFFFAOYSA-N ethylcyclohexane Chemical compound CCC1CCCCC1 IIEWJVIFRVWJOD-UHFFFAOYSA-N 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- UAEPNZWRGJTJPN-UHFFFAOYSA-N methylcyclohexane Chemical compound CC1CCCCC1 UAEPNZWRGJTJPN-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- IVUXZQJWTQMSQN-UHFFFAOYSA-N distrontium;oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[Sr+2].[Sr+2].[Ta+5].[Ta+5] IVUXZQJWTQMSQN-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- GYNNXHKOJHMOHS-UHFFFAOYSA-N methyl-cycloheptane Natural products CC1CCCCCC1 GYNNXHKOJHMOHS-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01G—COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
- C01G25/00—Compounds of zirconium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/409—Oxides of the type ABO3 with A representing alkali, alkaline earth metal or lead and B representing a refractory metal, nickel, scandium or a lanthanide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02197—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides the material having a perovskite structure, e.g. BaTiO3
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/30—Three-dimensional structures
- C01P2002/34—Three-dimensional structures perovskite-type (ABO3)
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/01—Particle morphology depicted by an image
- C01P2004/03—Particle morphology depicted by an image obtained by SEM
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/40—Electric properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
- H01L28/55—Capacitors with a dielectric comprising a perovskite structure material
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Formation Of Insulating Films (AREA)
- Semiconductor Memories (AREA)
- Chemical Vapour Deposition (AREA)
Description
前記基板への前記金属原料ガスの供給が停止される。
前記金属原料ガスの供給の停止後、前記基板への前記酸化ガスの供給が規制される。
前記チャンバには、加熱された基板が配置される。
前記供給機構は、ペロブスカイト型結晶を有する誘電体薄膜の原料となる金属原料のガスと、前記金属原料ガスと反応する酸化ガスとを含む混合ガスを、前記チャンバ内の前記加熱された基板に供給するためのものである。
前記ガス供給制御手段は、前記基板への前記金属原料ガスの供給を停止させ、その後前記基板への前記酸化ガスの供給を規制する。
前記基板への前記金属原料ガスの供給が停止される。
前記金属原料ガスの供給の停止後、前記基板への前記酸化ガスの供給が規制される。
前記チャンバには、加熱された基板が配置される。
前記供給機構は、ペロブスカイト型結晶を有する誘電体薄膜の原料となる金属原料のガスと、前記金属原料ガスと反応する酸化ガスとを含む混合ガスを、前記チャンバ内の前記加熱された基板に供給するためのものである。
前記ガス供給制御手段は、前記基板への前記金属原料ガスの供給を停止させ、その後前記基板への前記酸化ガスの供給を規制する。
図1は、本発明の一実施形態に係る薄膜製造装置の構成例を示す模式的な図である。本実施形態の薄膜製造装置により、MOCVD法を利用した強誘電体PZTの薄膜の製造が可能となる。
図2は、本実施形態に係る薄膜製造装置100を含む多室型成膜装置の構成例を示す模式的な図である。多室型成膜装置200は、基板Sを搬送することが可能な図示しない搬送ロボットが設けられる搬送室201と、1ロット25枚の基板をそれぞれ搭載することができる2つのストッカー室202とを有する。また多室型成膜装置200は2つの上記薄膜製造装置100を有しており、搬送室201の周囲に2つの上記成膜室50がそれぞれ配置される。成膜室50及びストッカー室202は、仕切りバルブ203を介して搬送室201にそれぞれ接続される。なおストッカー室202の数は2つに限られず、より多くのストッカー室あるいは1つのストッカー室が搬送室201の周囲に配置されてもよい。
図1に示すHeの供給ライン11から各タンクA〜DにHeが供給されると、各タンクA〜Dの内部圧力が上昇し、各タンクA〜Dに充填されていた有機金属の原料溶液及び溶媒がキャリアガス(N2)の供給ライン12に押し出される。押し出された金属原料溶液及び溶媒の液滴は、それぞれの流量が液体流量制御器等で制御されて、キャリアガスにより気化器20に運搬される。
10…原料供給部
11、12、33…供給ライン
12…供給ライン
20…気化器
21…Runライン
22…Ventライン
30、330…混合器
31…酸化ガス供給部
32、332…不活性ガス供給部
51、351…チャンバ
100、300…薄膜製造装置
Claims (5)
- ペロブスカイト型結晶を有する誘電体薄膜の原料となる金属原料のガスと、前記金属原料ガスと反応する酸化ガスとを含む混合ガスを、チャンバ内の加熱された基板に供給し、
前記基板への前記金属原料ガスの供給を停止させ、
前記金属原料ガスの供給の停止後、前記基板への前記酸化ガスの供給を停止又は減少させ、
前記酸化ガスの供給の停止又は減少に応じて、不活性ガスを前記チャンバ内に供給する
薄膜製造方法。 - 請求項1に記載の薄膜製造方法であって、
前記混合ガスを供給する工程は、不活性ガスを含む前記混合ガスを供給し、
前記酸化ガスの供給の停止又は減少に応じて不活性ガスを供給する工程は、前記混合ガスに含まれる前記不活性ガスを供給する
薄膜製造方法。 - 請求項2に記載の薄膜製造方法であって、
前記混合ガスを供給する工程は、前記金属原料ガス、前記酸化ガス、及び前記不活性ガスを混合する混合器と前記チャンバとを接続する供給経路を介して、前記混合ガスを供給し、
前記不活性ガスを供給する工程は、前記混合ガスが通った前記供給経路を介して前記不活性ガスを供給する
薄膜製造方法。 - 請求項1〜3のうちいずれか1項に記載の薄膜製造方法であって、
前記誘電体薄膜は、PZT(Pb(Zr,Ti)O3)であり、
前記金属原料は、Pb(dpm)2、Pb(dibm)2、又はこれらのうち少なくとも一方を一部に有する材料を含む
薄膜製造方法。 - 請求項1〜4のうちいずれか1項に記載の薄膜製造方法であって、
前記基板は、600℃以上に加熱されている薄膜製造方法。
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JP2012534919A JP5719849B2 (ja) | 2010-09-21 | 2011-09-13 | 薄膜製造方法 |
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JP2010210752 | 2010-09-21 | ||
JP2010210752 | 2010-09-21 | ||
JP2012534919A JP5719849B2 (ja) | 2010-09-21 | 2011-09-13 | 薄膜製造方法 |
PCT/JP2011/005134 WO2012039107A1 (ja) | 2010-09-21 | 2011-09-13 | 薄膜製造方法及び薄膜製造装置 |
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JPWO2012039107A1 JPWO2012039107A1 (ja) | 2014-02-03 |
JP5719849B2 true JP5719849B2 (ja) | 2015-05-20 |
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US (1) | US20130216710A1 (ja) |
EP (1) | EP2620975A4 (ja) |
JP (1) | JP5719849B2 (ja) |
KR (1) | KR101408431B1 (ja) |
CN (1) | CN103119696A (ja) |
TW (1) | TWI561666B (ja) |
WO (1) | WO2012039107A1 (ja) |
Families Citing this family (190)
Publication number | Priority date | Publication date | Assignee | Title |
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US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
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- 2011-09-13 JP JP2012534919A patent/JP5719849B2/ja active Active
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- 2011-09-13 KR KR1020137005578A patent/KR101408431B1/ko active IP Right Grant
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TWI561666B (en) | 2016-12-11 |
TW201213593A (en) | 2012-04-01 |
EP2620975A1 (en) | 2013-07-31 |
JPWO2012039107A1 (ja) | 2014-02-03 |
CN103119696A (zh) | 2013-05-22 |
KR20130032914A (ko) | 2013-04-02 |
KR101408431B1 (ko) | 2014-06-17 |
WO2012039107A1 (ja) | 2012-03-29 |
US20130216710A1 (en) | 2013-08-22 |
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