KR20030092305A - 고온 언도우프 막 증착 설비의 챔버 외벽에 대한 온도측정장치 - Google Patents
고온 언도우프 막 증착 설비의 챔버 외벽에 대한 온도측정장치 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/04—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples the object to be measured not forming one of the thermoelectric materials
- G01K7/06—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples the object to be measured not forming one of the thermoelectric materials the thermoelectric materials being arranged one within the other with the junction at one end exposed to the object, e.g. sheathed type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/02—Means for indicating or recording specially adapted for thermometers
- G01K1/028—Means for indicating or recording specially adapted for thermometers arrangements for numerical indication
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
Abstract
본 발명은 CVD 방식으로 HTUSG(HIGH TEMPERATURE UNDOPED SILICATE GLASS) 를 증착하는 장비에 대한 온도 측정장치에 관한 것으로서, 상세하게는 HTUSG 공정을 진행하고 있는 증착 장비의 챔버 벽(CHAMBER WALL)이 갖는 온도를 외부에서 측정하고 이를 바탕으로 챔버 벽의 온도를 컨트롤하는 HTUSG 증착 설비의 챔버 외벽에 대한 온도 측정장치를 개시한다.
챔버 벽의 온도를 외부에서 측정하여 온도 관리를 신속하게 할 수 있고 상기 좁쌀 파티클의 발생을 줄여서 후속 공정의 진행에 대한 부담을 줄인다.
Description
본 발명은 CVD(CHEMICAL VAPOR DEPOSITION) 방식으로 HTUSG(HIGH TEMPERAT URE UNDOPED SILICATE GLASS)를 증착하는 장비에 대한 온도 측정장치에 관한 것으로서, 상세하게는 HTUSG 공정을 진행하고 있는 증착 장비의 챔버 벽(CHAMBER WALL)이 갖는 온도를 외부에서 측정하고 이를 바탕으로 챔버 벽의 온도를 컨트롤하는 HTUSG 증착 장비의 챔버 외벽에 대한 온도 측정장치에 관한 것이다.
일반적으로 GIGAFILL 장비를 통한 필름(FILM)의 증착은, 반도체 기판의 온도 균일도를 허용하고 바람직하지 못한 가스상 반응을 최소화하며 보다 높은 증착 압력을 이용한다.
상기 고압 분위기는 낮은 증착 온도를 유도하며 균일한 가스 유동과 높은 필름 증착 속도를 허용한다.
그러나, 상기 공정상의 이점에도 불구하고, 상기 장비가 시간에 따른 노후화 로 인해서, CVD 방식으로 HTUSG 를 증착하는 챔버의 온도(540℃) 이외에 상기 챔버 벽의 온도가 허용치(65±3℃) 이상으로 올라가면 좁쌀 파티클이 발생한다.
상기 과제를 해결하기 위해서, 본 발명은 외부에서 증착 장비의 챔버 벽의 온도를 측정하고 이에 대한 온도 컨트롤을 신속하게 하여 HTUSG 증착 과정에서 생기는 좁쌀 파티클의 발생을 방지하는데 있다.
도 1a 는 본 발명에 따른 증착 장비의 챔버 외벽에 대한 온도 측정 장치를 도시한 개략도.
도 1b 는 본 발명에 따른 열원 감지부를 도시한 개략도.
( 도면의 주요 부분에 대한 부호의 설명 )
A: 챔버 외벽 B: 온도 측정장치
C: 열원 감지부 101: 디지털 미터기
102: 위치 조절기 103: 지지대
105: 챔버 외벽에 접촉되는 소정 부분
107: 측온접점 109: 보호관
111: 열전대 지지대 113: 산화 금속분말
115: 열전대
본 발명은 증착 장비의 외벽에 접촉되는 열전대 보호관과 상기 보호관으로 부터 열원을 감지하는 두 금속선과 상기 두 금속선을 지지하는 열전대 지지대및 상기 보호관 내(內)를 충진시킨 산화 금속분말로 이루어진 열원 감지부와, 상기 두 금속선과 연결된 디지털 미터기와, 상기 감지부와 상기 미터기를 일정 높이가 유지되게 조정 가능한 위치 조절기를 갖는 지지대로 구성된 것을 특징으로 한다.
이하, 첨부한 도면을 참조하여 본 발명을 상세히 설명한다.
도 1a 는 본 발명에 따른 증착 장비의 챔버 외벽에 대한 온도 측정장치를 도시한 개략도이다.
도 1a 와 같이, 상기 증착 장비의 상기 챔버 외벽(A)에 온도 측정장치(B)를 접촉시킨다.
상기 측정 장치(B)는 챔버 외벽(A)에 접촉되고 열 기전력(도면에 미 도시)을 발생하는 열원 감지부(C)와 상기 열 기전력에 해당하는 온도를 디지털 방식으로 디스플레이 해주는 미터기(101)로 구성되어 있다.
상기 미터기(101)의 역활은 기준 온도(0℃)를 형성하는 부분(도면에 미 도시)이 내재되어 상기 챔버 외벽(A)의 열원을 감지하는 열원 감지부(C)에 유도된 열 기전력을 비교하여 온도를 표시해 준다.
또한, 상기 장치(B)는 상기 장비의 주변 상황을 고려하여 상기 챔버 외벽(A)의 온도를 측정할 수 있도록 상/ 하 높이 조절이 가능한 위치 조절기(102)를 갖는 지지대(103)로 받쳐진다.
도 1b 는 본 발명에 따른 열원 감지부를 도시한 개략도이다.
도 1b와 같이, 상기 열원 감지부(C)는 증착 장비의 챔버 외벽(A)에 접촉되는 소정 부분(105)을 갖는 보호관(109)과, 상기 보호관(109)내에 챔버 외벽(A)의 열원을 감지하고 두 금속선(115)의 끝단을 서로 잇는 측온 접점(107)을 갖는 열전대와, 상기 두 금속선(115)이 서로 접촉되지 않도록 이격시키는 열전대 지지대(111)와, 상기 보호관(109)을 충진시킨 산화 금속분말(113)로 형성된다.
상기 보호관(109)은 상기 열전대(115)가 열원을 측정하는 동안에 외부로부터의 물리적 또는 화학적 영향을 받지 않게하기 위해서 Mo, Ni, Cr 원소 첨가된 특수 합금강으로 만든다.
상기 금속 분말(113)은 초 절연성을 갖는 것으로하고 상기 측온 접점(107)의 근처에는 상기 금속 분말(113)은 채우지 않는다.
이는, 상기 챔버 외벽의 열원를 간섭없이 모두 감지하기 위함이다.
상기 구성을 바탕으로, 다음은 본 발명의 동작을 설명한다.
도 1a 내지 도 1b 에서, 증착 장비의 주변 상황을 고려하여 상/ 하 높이 위치 조절기(102)를 통하여 측정 장치(B)의 높이를 조정하고, 온도 측정 장치(B)을 구성하는 열원 감지부(C)의 보호관(109)을 증착 장비의 챔버 외벽(A)에 접촉시킨다.
또한, 상기 외벽(A)으로 부터의 열원을 상기 보호관(109) 내에서 두 금속선(115)을 잇는 측온 접점(107)을 통해서 감지하고, 상기 두 금속선(115)의 저항 차이로 열 기전력을 발생시켜서 상기 열 기전력을 미터기(101)에 내재되어 있는 기준 온도와 비교하여 상기 챔버 외벽(A)의 온도를 상기 미터기(101)에 수치로 디스플레이 해준다.
상기 구성및 동작을 통하여, 본 발명은 온도 측정 장치를 사용하여 노후화 된 증착 장비의 챔버 벽의 온도 수치를 외부에서 파악하여 HTUSG 를 증착하는 과정에서 생기는 좁쌀 파티클의 발생을 방지하고 또한, 상기 장비의 관리를 신속하게 대처할 수 있게한다.
Claims (1)
- 본 발명은 증착 장비의 외벽에 접촉되는 열전대 보호관과 상기 보호관으로 부터 열원을 감지하는 두 금속선과 상기 두 금속선을 지지하는 열전대 지지대, 상기 보호관 내(內)를 충진시킨 산화 금속분말을 포함하는 열원 감지부와;상기 두 금속선과 연결된 디지털 미터기와;상기 열원 감지부와 상기 미터기를 일정 높이가 유지되게 조정 가능한 위치 조절기를 갖는 지지대;로구성된 것을 특징으로 하는 HTUSG 증착 설비의 챔버 외벽에 대한 온도 측정장치.
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