JP4813737B2 - 窒化ケイ素フィルムを形成するための超薄オキシニトリドのｕｖ前処理法 - Google Patents

窒化ケイ素フィルムを形成するための超薄オキシニトリドのｕｖ前処理法 Download PDF

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JP4813737B2
JP4813737B2 JP2001577596A JP2001577596A JP4813737B2 JP 4813737 B2 JP4813737 B2 JP 4813737B2 JP 2001577596 A JP2001577596 A JP 2001577596A JP 2001577596 A JP2001577596 A JP 2001577596A JP 4813737 B2 JP4813737 B2 JP 4813737B2
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silicon nitride
nitride film
oxynitride layer
semiconductor substrate
oxynitride
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テイ シング−ピン
レヴィ サギ
ツィ フー ヤオ
ジェルピー ジェフリー
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Mattson Technology Inc
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Description

【０００１】
発明の属する技術分野
本発明は、全体として、ＵＬＳＩに使用する超薄絶縁フィルムの表面のざらつきを最小化する方法に関する。本発明は、特に、化学的蒸着（ＣＶＤ）技術でケイ素半導体基板上に窒化ケイ素フィルムを形成するために利用するのが有利である。
【０００２】
発明の背景
酸化金属−半導体−電界効果トランジスター（ＭＯＳＦＥＴ）のチャネル長さが短いので、短いチャネルで得られる効果を維持しかつドレインの電流を最大化するために、ゲートの絶縁厚さを減じなければならない。薄い二酸化ケイ素（ＳｉＯ２）のスケーリングの基本的な限界は、直接トンネル効果による、大きな漏れ電流である。ゲート酸化物層はケイ素半導体基板を大体において純粋な酸素雰囲気下に熱酸化することにより形成されるのが典型的である。しかし、超大規模集積（ＵＬＳＩ）回路では、ＭＯＳＦＥＴ中のこのようなゲート酸化物層が、不所望な特性、例えば比較的高い欠陥密度および電荷トラップおよび比較的低い信頼性およびホットキャリアー効果に対する低い耐性を示すことがある。
【０００３】
ｉｎ ｓｉｔｕでの種々の多層ゲートスタック法は、ゲートの絶縁性を改良するために使用されてきた。１つの例は、半導体基板のｉｎ ｓｉｔｕドライ洗浄とその後の短時間熱処理（ＲＴＰ）を含む。ｉｎ ｓｉｔｕドライ洗浄法は典型的に以下の３つの工程から成る：（１）ＵＶオゾンの適用（１００Ｔｏｒｒ圧力）：（２）ＨＦ−メタノール蒸気の適用（１００Ｔｏｒｒ）；および（３）ＵＶ−塩素の適用（１０Ｔｏｒｒ）。ＵＶ−オゾンおよびＵＶ−Ｃｌ２ドライ洗浄は、それぞれ、基板表面から、有機物の残留および金属汚染を取り除き、その後の所望のゲート絶縁層の付着に適した表面を製造する。ＨＦ−メタノール蒸気はＵＶ−オゾン処理中に形成される任意の表面酸化物を除く。基板表面が清浄になったら、連続したＲＴＰ法を実施し、これは以下の工程から成る：（１）酸化窒素（ＮＯ）を用いたオキシニトリド層の成長；（２）短時間熱化学蒸着（ＲＴＣＶＤ）法による窒化ケイ素（ＳｉＮｘ）層の付着；（３）アンモニア（ＮＨ３）環境での基板とＳｉＮ層との短時間アニール；および（４）Ｎ２Ｏ環境での基板の短時間アニール。
【０００４】
二酸化ケイ素層上に付着させたＣＶＤ窒化ケイ素フィルムの表面ざらつきは、窒化物層の物理的厚さが２５Å以下である場合に、不所望に大きい（すなわち、ざらつきの二乗平均平方根（ＲＭＳ）が約１０Åから更に２０Åまでである）。公の調査書は、窒化ケイ素の物理的厚さが約２０Åを越えないと、窒化物が核成長して島状に合体することはないと記載している。H. ResingerおよびA. Spitzer, "Electrical Breakdown Induced by Silicon Nitride Roughness in Thin Oxide-Nitride-Oxide Films" J. Appl. Phys. V. 79, p. 3028(1996); M. Copel et. al., "Nucleation of Chemical Vapor Deposited Silicon Nitride on Silicon Dioxide" Appl. Phys. Lett., V. 74, p. 1830(1999);およびY. Hu. et. al.,"An In-Situ Real Time Measurement of the Incubation Time for Si Nucleation on SiO２ in a Rapid Thermal Process, "Appl. Phys. Lett., V. 66, p. 700(1995)を参照のこと。従って、核成長部が十分だと酸化層上に窒化ケイ素フィルムの成長が起こるということは、薄い窒化物フィルムでは表面に不所望なざらつきを生じ、不適当なゲート絶縁性を導くということである。
【０００５】
この問題を解決するための１つの好ましい解決法では、低エネルギーイオンビーム（Ｎ＋、Ｈ＋またはＨｅ＋）を用いてオキシニトリド表面を前処理し、核成長部を増加させる。Y. Hu, et al., "In-situ Surface Pretreatment Effect on Nucleation and Film Structure of Polysilicon in a RTCVD System," 4th Int'l Conf. Advanced Thermal Processing of Semiconductors, RTP '96, p. 128(1996)。より最近では、幾つかの実験において、遠隔プラズマ酸化が超薄酸化物インターフェースを改良し得ることが示された。Lucovsky, et. al., Appl. Phys. Lett. V. 74, p. 2005(1999) 参照。残念なことに、遠隔プラズマ酸化は特別なプロセス装置を必要とし、操作が複雑である。より多くの核成長部を作り出して、薄層窒化ケイ素フィルムの表面のざらつきを抑える別の手段が模索されている。
【０００６】
発明の概要
本発明では、ＵＶ−励起ガス（有利には塩素（Ｃｌ２））、窒素（Ｎ２）およびＣｌ２とＮ２との混合物を使用して半導体基板表面に形成された酸化物またはオキシニトリドフィルムを前処理し、ＣＶＤによるフッ化物付着のために、より多くの核成長部を作り出す。この方法において、オキシニトリド層を半導体基板上に形成した後（有利にはケイ素半導体基板）、オキシニトリド層をＵＶ−励起ガスで処理する。次いで、このような前処理の後、処理したオキシニトリド層上に窒化ケイ素フィルムを付着させる。有利には、少なくとも約８００℃の温度で短時間熱処理することによりオキシニトリド層を形成する。有利には、化学蒸着（ＣＶＤ）法により、約７００℃〜約８５０℃、最も有利には７００℃〜８００℃の範囲の温度でかつ約１.５Ｔｏｒｒ〜約３Ｔｏｒｒの範囲、および１：４０：５０のＳｉＨ４：ＮＨ３：Ａｒ気体流率で、オキシニトリド層上に窒化ケイ素フィルムを付着させる。
【０００７】
窒化ケイ素フィルムの表面のざらつきが以下のような前処理で実質的に減少することが見出された。１つの例において、２２.６Å厚さの窒化ケイ素層（物理的厚さ）が未処理の酸化物上に付着される場合、表面のざらつきのＲＭＳは９.２Åであった。これに対して、２２.５Å厚さの窒化ケイ素層（物理的厚さ）を、ＵＶ−励起塩素ガスで前処理した酸化物層上に付着すると、表面のざらつきはＲＭＳ２.１Åに減少した。この方法は従って付着される層の質を高めた。
【０００８】
ＵＶ−励起ガス前処理工程は、窒素酸化物処理を受けてオキシニトリド層を成長するために、半導体表面の製造に使用してもよい。核成長部密度を強化し、窒化ケイ素処理が可能なオキシニトリド表面層を製造するために、窒化ケイ素付着工程に先立って、本発明の前処理工程を実施する。
【０００９】
本発明の有利な形態の詳細
図１は、半導体基板上の酸化物またはオキシニトリド層上に窒化ケイ素層を形成するための公知の従来方法を図解した図である。ケイ素半導体基板１２は、その上にオキシニトリド層１４が付着されており、これは半導体基板１２を酸化窒素（ＮＯ）雰囲気に曝露し、ケイ素表面を酸化することで典型的に実施される。オキシニトリド厚を測定すると、最終ゲートスタックの偏光および電気的データの分析により、たいてい約６Åであった。その後、窒化ケイ素フィルム１６を、短時間熱化学蒸着（ＣＶＤ）法により、オキシニトリド層上に付着する。オキシニトリド層１４を有する半導体基板１２を、密封チャンバー中で、シラン（ＳｉＨ４）、アンモニア（ＮＨ３）およびアルゴン（Ａｒ）から成る混合物へ、約１.５Ｔｏｒｒの圧力で曝露する。この圧力および気体環境で実施すると、基板は約８００℃まで加熱される。ＣＶＤ法は、パルス（１秒）から数分まで継続してよい。典型的な処理時間は５〜６０秒である。オキシニトリド層上に形成された窒化ケイ素フィルム１６は約３６Åより薄く約２０Åまでの物理的厚さを有する。ゲートスタックは、約２６Åより薄く約１６Åまでの同等の酸化ケイ素（ＳｉＯ２）厚さ（ＥＯＴ）を有する。ゲート絶縁技術の先を見据えると、次世代ＵＬＳＩデバイスには、物理的厚さが２０Å以下の非常に薄い窒化ケイ素フィルムが必要とされる。
【００１０】
図２は、本発明の方法を図解した図である。ＵＶ−励起ガス前処理工程を、オキシニトリド層上に窒化ケイ素フィルムを付着する前に実施する。同じ参照番号は図１および２で同じ成分を表す。図２に示されるように、ＵＶ−励起ガス２０を半導体基板１２上のオキシニトリド層１４の表面へ適用する。この前処理工程を介在させることにより、オキシニトリド層の表面条件が、窒化ケイ素フィルムを付着する前に改善される。この方法により、窒化ケイ素フィルム１６’の表面のざらつきが減少し、その後の処理が改善される。この利点が図に示されており、図２の窒化ケイ素フィルム１６’の上表面の凹凸は、図１の窒化ケイ素フィルム１６の凹凸よりも目立たなくなっている。
【００１１】
本発明によれば、オキシニトリド層上に窒化ケイ素を付着する前に、オキシニトリド層表面をＵＶ−励起ガスで変性または調整する。好ましい形態において、前処理はＵＶ−励起Ｃｌ２またはＮ２、またはそれらの気体混合物を用いて実施される。ＵＶ−励起塩素ガスが特に有利である。ＵＶ−励起ガスを得るのに、広い波長（２００〜１１００ｎｍ）出力を示す外部キセノンランプからＵＶ−線を放射する。有利には、キセノンランプからのフォトンエネルギーが６.２〜１.１ｅＶであり、これは半導体基板の最大結合エネルギーよりも大きい、例えば：Ｓｉ−Ｓｉ＝３.１ｅＶ；Ｓｉ−Ｈ＝３.０ｅＶ；Ｓｉ−Ｃｌ＝３.９ｅＶ；Ｓｉ−Ｎ＝４.０ｅＶ；Ｓｉ−Ｏ＝４.６ｅＶ。これらの結合はＵＶ照射下に切断できるが、そのイオン化ポテンシャルが１０ｅＶを大きく上回るのでイオン化されない。
【００１２】
有利な方法は以下の工程を含む：
（１）半導体基板、有利にはケイ素半導体基板の表面を、有機残留物を除くためにＵＶ−励起オゾンで任意にドライ洗浄し、次いで増加した酸化物を除くためにＨＦ−メタノール蒸気処理し、次いで金属汚染を除くためにＵＶ−励起塩素を使用する；
（２）半導体基板表面を酸化窒素雰囲気に約０.５〜１００Ｔｏｒｒ、最も有利には０.５〜１００Ｔｏｒｒの圧力で、８００〜１０００℃の温度で曝露し、オキシニトリド層を熱により成長させる；
（３）オキシニトリド層をＵＶ−励起ガスへ３０秒から２分まで８０〜１６０℃の温度で約５Ｔｏｒｒ〜約２０Ｔｏｒｒの圧力で曝露することにより、オキシニトリド層をＵＶ−励起ガス、例えばＵＶ−励起塩素または窒素または混合物で前処理する；
（４）オキシニトリド層で被覆された半導体基板を１：２０〜５０：４０〜６０、有利には１：４０：５０の比率の量のＳｉＨ４：ＮＨ３：Ａｒの雰囲気中、７００〜８５０℃の範囲の温度および約１.５〜約３Ｔｏｒｒの範囲の圧力で、５〜３５秒、有利には２０秒放置することから成る化学蒸着法を利用して、前処理したオキシニトリド層上に窒化ケイ素フィルムを付着させる。
【００１３】
この窒化ケイ素付着法により、オキシニトリド層上に窒化ケイ素フィルムを付着させる前に前処理工程を実施した場合に、二乗平均平方根（ＲＭＳ）を尺度とする表面のざらつきが減少する。本発明の付加的な利点は、窒化ケイ素層の厚さが増加すれば表面のざらつきも増加するが、本発明の前処理工程なしに付着させた層が示すよりも少ない割合となることである。従って、厚い窒化ケイ素フィルムであっても（３０Åを越える物理的厚さ）、表面条件の改善が期待される。これにより、本発明は超薄窒化物フィルムを形成する際にその使用を制限されない。
【００１４】
図３Ａおよび３Ｂは、本発明のＵＶ−励起塩素ガス前処理を実施した場合としない場合で、窒化ケイ素フィルムをオキシニトリド層上に付着して得られる実際の表面形態を比較した図である。これらの図は、本発明の処理を実施して（図３Ｂ）またはしないで（図３Ａ）、その上に窒化ケイ素を付着させた実際の半導体基板の典型的な原子間力顕微鏡（ＡＦＭ）の図である。全ての処理工程は同一の条件下に実施されるが、図３Ｂのサンプルは、オキシニトリド層上に窒化ケイ素フィルムを成長させるための化学蒸着処理を行う前に、オキシニトリド層をＵＶ−励起塩素ガスで６０秒前処理した。図３Ａにおいて、半導体サンプルには２３.５Åの物理的厚さを有するニトリドフィルムが付着され、表面のざらつきはＲＭＳ２０Åであった。図３Ａから分かるように、多くの高い凸部または不連続性がニトリドフィルム表面上に現れ、表面がざらついていることを示している。これに対して、図３Ｂでは、付着された窒化ケイ素フィルムは２８.７Åの物理的厚さを有し、表面のざらつきはＲＭＳ１０Åであった。ＵＶ−励起塩素ガスによる前処理は、高い凸部および不連続性の少ない一様な窒化物層ならびにより滑らかなフィルム表面を提供する。
【００１５】
本発明の方法と公知の方法とを比較するために実験を行った。これらの実施例の結果を以下の表１に示す。
【００１６】
【表１】
Figure 0004813737
【００１７】
＊＊分光偏光解析法
＊＊＊原子間力顕微鏡法
実施例に示すように、核成長の島状の合体は、より薄い窒化物厚さで起こるべきである。ＲＭＳで表されるざらつきは、低圧（０.５Ｔｏｒｒ）でのＮＯオキシニトリル化およびＵＶ−Ｃｌ２前処理後に付着させた窒化ケイ素（厚さ＝２２.５Å）では２.１０Åであったが、標準圧力（１００Ｔｏｒｒ）でのＮＯオキシニトリル化のみを実施した後に付着させた窒化物（フィルム厚さ２２.６Å）では９.２Åであった。例ＵＶ−１と例Ｓ−１との比較。
【００１８】
図４は、表１の結果を図解したものであり、ＣＶＤで付着されたＳｉＮｘフィルムの総フィルム厚さに対するざらつきをプロットしたものである。オキシニトリド層のＵＶ−処理は、ＣＶＤ−付着窒化物のざらつきを著しく低下させる。
【００１９】
本発明に関する上述の記載は、有利な形態を図解および記述したものである。しかしながら、本発明は様々な別の組合せ、修飾および環境を用いて実施でき、ここに記載した本発明の概要の範囲内であれば変化または修飾することが可能である。記載はここに開示した発明に限定するものではない。当業者に明かな別の態様は請求した請求項の範囲に含まれるものである。
【図面の簡単な説明】
【図１】 図１は、前処理工程なしにオキシニトリド層上に直接窒化ケイ素フィルムを適用する、従来法を示す図である。
【図２】 図２は、窒化ケイ素フィルムを適応する前にＵＶ−励起ガスでオキシニトリドを処理して、より多くの核成長部をもたらし、表面のざらつきを減じさせる、本発明の方法を示す図である。
【図３】 図３Ａおよび図３Ｂは、オキシニトリド層をＵＶ−励起塩素ガスで前処理した（図３Ｂ）およびしない（図３Ａ）ＣＶＤ−付着窒化ケイ素フィルムの表面を形態学的に示す図である。
【図４】 ＵＶ−前処理を実施するおよびしない方法でのフィルムのざらつきを示すグラフである。
【符号の説明】
１２ ケイ素半導体基板
１４ オキシニトリド層
１６ 窒化ケイ素フィルム
１６’ 窒化ケイ素フィルム

Claims (21)

  1. 塩素、窒素およびそれらの混合物から成る群より選択されるＵＶ−励起ガスにより二乗平均平方根で表されるオキシニトリド層の表面のざらつきを減少させて半導体基板上に形成されたオキシニトリドの薄層を処理し、処理したオキシニトリド層の上に窒化ケイ素のフィルムを付着させることを含む、半導体基板の表面に窒化ケイ素フィルムを形成する方法。
  2. オキシニトリドの薄層が６Å〜１０Åの物理的厚さを有することを特徴とする、請求項１に記載の方法。
  3. ＵＶ−励起ガスを５〜２０Ｔｏｒｒの圧力および８０℃を上回る温度で導入することを特徴とする、請求項１に記載の方法。
  4. オキシニトリド層を処理するために、ＵＶ−励起ガスを、少なくとも３０秒適用することを特徴とする、請求項１に記載の方法。
  5. 窒化ケイ素フィルムが３０Å以下の物理的厚さを有することを特徴とする、請求項１に記載の方法。
  6. 窒化ケイ素フィルムが２０Å〜３６Åの範囲の物理的厚さを有することを特徴とする、請求項１に記載の方法。
  7. 少なくとも８００℃の温度での短時間熱処理により、ケイ素半導体基板上にオキシニトリド層を形成することを特徴とする、請求項２に記載の方法。
  8. ７００〜８５０℃の温度範囲で化学蒸着することにより窒化ケイ素フィルムを付着することを特徴とする、請求項５に記載の方法。
  9. 化学蒸着を、１.５〜３.０Ｔｏｒｒの圧力で、１：４０：５０のＳｉＨ４：ＮＨ３：Ａｒ気体流率により実施することを特徴とする、請求項８に記載の方法。
  10. ＵＶ−励起ガスが塩素であることを特徴とする、請求項１に記載の方法。
  11. 処理したオキシニトリド層の上に窒化ケイ素のフィルムを付着する前に、塩素、窒素およびそれらの混合物から成る群より選択されるＵＶ−励起ガスを用いて半導体基板上に形成されたオキシニトリド層を処理することを含む、半導体基板上に形成された窒化ケイ素フィルムの、二乗平均平方根（ＲＭＳ）で表される表面のざらつきを減じる方法。
  12. オキシニトリド層が６Å〜１０Åの物理的厚さを有することを特徴とする、請求項１１に記載の方法。
  13. ＵＶ−励起ガスを５〜２０Ｔｏｒｒの圧力および８０℃を上回る温度で導入することを特徴とする、請求項１１に記載の方法。
  14. オキシニトリド層を処理するためにＵＶ−励起ガスを少なくとも３０秒適用することを特徴とする、請求項１１に記載の方法。
  15. 窒化ケイ素フィルムが３０Å以下の物理的厚さを有することを特徴とする、請求項１１に記載の方法。
  16. 窒化ケイ素フィルムが２０〜３６Åの物理的厚さを有することを特徴とする、請求項１５に記載の方法。
  17. 二乗平均平方根で表される窒化ケイ素フィルムの表面のざらつきが５Åを下回ることを特徴とする、請求項１１に記載の方法。
  18. 少なくとも８００℃の温度で、短時間熱処理により、ケイ素の半導体基板上にオキシニトリド層を形成することを特徴とする、請求項１１に記載の方法。
  19. ７００〜８５０℃の範囲の温度で化学蒸着により、窒化ケイ素フィルムを付着させることを特徴とする、請求項１１に記載の方法。
  20. 化学蒸着を、１.５〜３.０Ｔｏｒｒの圧力で、１：４０：５０のＳｉＨ４：ＮＨ３：Ａｒ気体流率により実施することを特徴とする、請求項１８に記載の方法。
  21. ＵＶ−励起ガスが塩素であることを特徴とする、請求項１１に記載の方法。
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EP1275139A1 (en) 2003-01-15
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