AU2001224729A1 - Segmented electrode assembly and method for plasma processing - Google Patents

Segmented electrode assembly and method for plasma processing

Info

Publication number
AU2001224729A1
AU2001224729A1 AU2001224729A AU2472901A AU2001224729A1 AU 2001224729 A1 AU2001224729 A1 AU 2001224729A1 AU 2001224729 A AU2001224729 A AU 2001224729A AU 2472901 A AU2472901 A AU 2472901A AU 2001224729 A1 AU2001224729 A1 AU 2001224729A1
Authority
AU
Australia
Prior art keywords
electrode assembly
plasma processing
segmented electrode
segmented
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001224729A
Inventor
Wayne L. Johnson
Andrej S. Mitrovic
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2001224729A1 publication Critical patent/AU2001224729A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32568—Relative arrangement or disposition of electrodes; moving means
AU2001224729A 2000-01-10 2001-01-03 Segmented electrode assembly and method for plasma processing Abandoned AU2001224729A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US17528400P 2000-01-10 2000-01-10
US60175284 2000-01-10
PCT/US2001/000120 WO2001052302A1 (en) 2000-01-10 2001-01-03 Segmented electrode assembly and method for plasma processing

Publications (1)

Publication Number Publication Date
AU2001224729A1 true AU2001224729A1 (en) 2001-07-24

Family

ID=22639688

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001224729A Abandoned AU2001224729A1 (en) 2000-01-10 2001-01-03 Segmented electrode assembly and method for plasma processing

Country Status (5)

Country Link
US (2) US6863020B2 (en)
JP (1) JP5165825B2 (en)
AU (1) AU2001224729A1 (en)
TW (1) TW498706B (en)
WO (1) WO2001052302A1 (en)

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TW498706B (en) 2002-08-11
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