AU2003266866A1 - Method and apparatus for generating and maintaining a plasma - Google Patents

Method and apparatus for generating and maintaining a plasma

Info

Publication number
AU2003266866A1
AU2003266866A1 AU2003266866A AU2003266866A AU2003266866A1 AU 2003266866 A1 AU2003266866 A1 AU 2003266866A1 AU 2003266866 A AU2003266866 A AU 2003266866A AU 2003266866 A AU2003266866 A AU 2003266866A AU 2003266866 A1 AU2003266866 A1 AU 2003266866A1
Authority
AU
Australia
Prior art keywords
plasma
maintaining
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003266866A
Inventor
Olivier Goossens
Sabine Paulussen
Dirk Vangeneugden
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vlaamse Instelling Voor Technologish Onderzoek NV VITO
Original Assignee
Vlaamse Instelling Voor Technologish Onderzoek NV VITO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vlaamse Instelling Voor Technologish Onderzoek NV VITO filed Critical Vlaamse Instelling Voor Technologish Onderzoek NV VITO
Publication of AU2003266866A1 publication Critical patent/AU2003266866A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/335—Cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/336—Changing physical properties of treated surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AU2003266866A 2002-09-19 2003-09-19 Method and apparatus for generating and maintaining a plasma Abandoned AU2003266866A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US41224202P 2002-09-19 2002-09-19
US60/412,242 2002-09-19
PCT/BE2003/000156 WO2004028220A1 (en) 2002-09-19 2003-09-19 Method and apparatus for generating and maintaining a plasma

Publications (1)

Publication Number Publication Date
AU2003266866A1 true AU2003266866A1 (en) 2004-04-08

Family

ID=32030837

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003266866A Abandoned AU2003266866A1 (en) 2002-09-19 2003-09-19 Method and apparatus for generating and maintaining a plasma

Country Status (2)

Country Link
AU (1) AU2003266866A1 (en)
WO (1) WO2004028220A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1582270A1 (en) * 2004-03-31 2005-10-05 Vlaamse Instelling voor Technologisch Onderzoek Method and apparatus for coating a substrate using dielectric barrier discharge
WO2005106477A2 (en) * 2004-04-30 2005-11-10 Vlaamse Instelling Voor Technologisch Onderzoek (Vito) Biomolecule immobilisation using atmospheric plasma technology
DE102005006656A1 (en) * 2005-02-14 2006-08-17 Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH Dielectric barrier discharge lamp in double tube configuration
WO2012004175A1 (en) 2010-07-09 2012-01-12 Vito Nv Method and device for atmospheric pressure plasma treatment
DE102014003603B4 (en) 2014-03-17 2016-08-04 Treofan Germany Gmbh & Co. Kg Process for producing a polyolefin film, polyolefin film and their use as electrical insulating film in capacitors
DE102016104852B4 (en) * 2016-03-16 2017-11-09 Leibniz - Institut Für Analytische Wissenschaften - Isas - E.V. Method for ionizing gaseous samples by means of dielectrically impeded discharge and for subsequent analysis of the generated sample ions in an analyzer
CN111441184B (en) * 2020-05-08 2021-12-24 南通大学 Dyeing textile washing method free of auxiliary agent, capable of removing foot water and floating color

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277479A (en) * 1985-09-30 1987-04-09 Shimadzu Corp Formation of thin film by plasma cvd method
CA2197978A1 (en) * 1995-06-19 1996-12-20 Paul D. Spence Discharge methods and electrodes for generating plasmas at one atmosphere of pressure, and materials treated therewith
US6106659A (en) * 1997-07-14 2000-08-22 The University Of Tennessee Research Corporation Treater systems and methods for generating moderate-to-high-pressure plasma discharges for treating materials and related treated materials
WO2001052302A1 (en) * 2000-01-10 2001-07-19 Tokyo Electron Limited Segmented electrode assembly and method for plasma processing

Also Published As

Publication number Publication date
WO2004028220A1 (en) 2004-04-01

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase