AU2001237845A1 - Plasma ion source and method - Google Patents

Plasma ion source and method

Info

Publication number
AU2001237845A1
AU2001237845A1 AU2001237845A AU3784501A AU2001237845A1 AU 2001237845 A1 AU2001237845 A1 AU 2001237845A1 AU 2001237845 A AU2001237845 A AU 2001237845A AU 3784501 A AU3784501 A AU 3784501A AU 2001237845 A1 AU2001237845 A1 AU 2001237845A1
Authority
AU
Australia
Prior art keywords
ion source
plasma ion
plasma
source
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001237845A
Inventor
Gleb Elmirovich Bugrov
Sergei Gennadievich Kondranin
Elena Alexandrovna Kralkina
Vladimir Borisovich Pavlov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasma Tech Co Ltd
Original Assignee
Plasma Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasma Tech Co Ltd filed Critical Plasma Tech Co Ltd
Publication of AU2001237845A1 publication Critical patent/AU2001237845A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H01J27/024—Extraction optics, e.g. grids
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
AU2001237845A 2000-05-30 2001-02-14 Plasma ion source and method Abandoned AU2001237845A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
RU2000113185 2000-05-30
RU2000113185A RU2167466C1 (en) 2000-05-30 2000-05-30 Plasma ion source and its operating process
PCT/RU2001/000060 WO2001093293A1 (en) 2000-05-30 2001-02-14 Plasma ion source and method

Publications (1)

Publication Number Publication Date
AU2001237845A1 true AU2001237845A1 (en) 2001-12-11

Family

ID=20235170

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001237845A Abandoned AU2001237845A1 (en) 2000-05-30 2001-02-14 Plasma ion source and method

Country Status (3)

Country Link
AU (1) AU2001237845A1 (en)
RU (1) RU2167466C1 (en)
WO (1) WO2001093293A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011037488A1 (en) * 2009-09-22 2011-03-31 Inano Limited Plasma ion source
US9793084B2 (en) * 2009-11-16 2017-10-17 Schlumberger Technology Corporation Floating intermediate electrode configuration for downhole nuclear radiation generator
RU2504040C2 (en) * 2011-09-26 2014-01-10 Открытое акционерное общество "ТВЭЛ" Method and device to modify surface of axisymmetric items
CN103811260B (en) * 2012-11-08 2016-06-08 中微半导体设备(上海)有限公司 A kind of plasma reactor and processing method thereof
EP3066341B1 (en) * 2013-11-04 2021-03-24 Aerojet Rocketdyne, Inc. Ground based systems and methods for testing reaction thrusters
RU2620603C2 (en) * 2015-09-08 2017-05-29 Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Казанский (Приволжский) федеральный университет" (ФГАОУВПО КФУ) Method of plasma ion working source and plasma ion source
RU2621283C2 (en) * 2015-09-08 2017-06-01 Федеральное государственное автономное образовательное учреждение высшего профессионального образования "Казанский (Приволжский) федеральный университет" (ФГАОУВПО КФУ) Method for carrying out glow discharge and device for its implementation
CN109236594B (en) * 2018-09-14 2020-08-25 哈尔滨工业大学 Low-power magnetized electric propulsion hollow cathode thruster

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3243570A (en) * 1963-04-30 1966-03-29 Gen Electric Automatic gas pressure control for electron beam apparatus
GB1145013A (en) * 1965-03-19 1969-03-12 Atomic Energy Authority Uk Improvements in or relating to cold cathode, glow discharge devices
GB2064856B (en) * 1979-10-23 1984-06-13 Tokyo Shibaura Electric Co Discharge apparatus having hollow cathode
RU2139590C1 (en) * 1997-09-12 1999-10-10 Научно-исследовательский институт энергетического машиностроения Московского технического университета им. Н.Э.Баумана Cathode unit

Also Published As

Publication number Publication date
WO2001093293A1 (en) 2001-12-06
RU2167466C1 (en) 2001-05-20

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