GB2064856B - Discharge apparatus having hollow cathode - Google Patents

Discharge apparatus having hollow cathode

Info

Publication number
GB2064856B
GB2064856B GB8034057A GB8034057A GB2064856B GB 2064856 B GB2064856 B GB 2064856B GB 8034057 A GB8034057 A GB 8034057A GB 8034057 A GB8034057 A GB 8034057A GB 2064856 B GB2064856 B GB 2064856B
Authority
GB
United Kingdom
Prior art keywords
discharge apparatus
hollow cathode
cathode
hollow
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8034057A
Other versions
GB2064856A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP54136626A external-priority patent/JPS6011417B2/en
Priority claimed from JP8489880A external-priority patent/JPS5711449A/en
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Publication of GB2064856A publication Critical patent/GB2064856A/en
Application granted granted Critical
Publication of GB2064856B publication Critical patent/GB2064856B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Plasma Technology (AREA)
  • Electron Sources, Ion Sources (AREA)
GB8034057A 1979-10-23 1980-10-22 Discharge apparatus having hollow cathode Expired GB2064856B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP54136626A JPS6011417B2 (en) 1979-10-23 1979-10-23 Hollow cathode discharge device
JP8489880A JPS5711449A (en) 1980-06-23 1980-06-23 Hollow cathode discharge device

Publications (2)

Publication Number Publication Date
GB2064856A GB2064856A (en) 1981-06-17
GB2064856B true GB2064856B (en) 1984-06-13

Family

ID=26425870

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8034057A Expired GB2064856B (en) 1979-10-23 1980-10-22 Discharge apparatus having hollow cathode

Country Status (3)

Country Link
DE (1) DE3039850A1 (en)
FR (1) FR2468203A1 (en)
GB (1) GB2064856B (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238337B (en) * 1990-01-23 1993-07-12 Cons Ric Microelettronica DEVICE FOR THE IONIZATION OF METALS AT HIGH MELTING TEMPERATURE, USABLE ON IONIC PLANTS OF THE TYPE USING SOURCES OF ION TYPE OF FREEMAN OR SIMILAR
RU2131176C1 (en) * 1998-03-31 1999-05-27 Федеральное государственное унитарное предприятие "Исследовательский центр им.М.В.Келдыша" Device for active influencing upon ionosphere of earth
RU2167466C1 (en) * 2000-05-30 2001-05-20 Бугров Глеб Эльмирович Plasma ion source and its operating process
GB0309932D0 (en) 2003-04-30 2003-06-04 Boc Group Plc Apparatus and method for forming a plasma
GB2409928B (en) * 2004-01-09 2007-03-21 Applied Materials Inc Improvements relating to ion implantation
DE102008028166B4 (en) * 2008-06-12 2010-04-08 Maschinenfabrik Reinhausen Gmbh Apparatus for generating a plasma jet
DE102012024340A1 (en) * 2012-12-13 2014-06-18 Oerlikon Trading Ag, Trübbach plasma source
RU2621481C1 (en) * 2016-02-29 2017-06-06 Федеральное государственное бюджетное образовательное учреждение высшего образования "Башкирский государственный университет" Method for determining effective ionization potential and effective electron affinity of multicomponent aromatic condensed media
CN115234458A (en) * 2022-06-15 2022-10-25 北京航空航天大学 Reusable small hollow cathode based on double-spiral heater structure

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3611183A (en) * 1969-01-27 1971-10-05 Rca Corp Double-ended ion laser tube
FR2049663A5 (en) * 1969-06-16 1971-03-26 Cilas
BE759019A (en) * 1969-11-27 1971-05-17 Cilas DISCHARGE TUBE
US3760213A (en) * 1971-04-29 1973-09-18 Coherent Radiation Anode for a discharge tube
FR2161293A5 (en) * 1971-11-19 1973-07-06 Onera (Off Nat Aerospatiale) Plasma generator - with low voltage arc striking device

Also Published As

Publication number Publication date
GB2064856A (en) 1981-06-17
FR2468203A1 (en) 1981-04-30
FR2468203B1 (en) 1984-04-06
DE3039850A1 (en) 1981-05-07

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Legal Events

Date Code Title Description
746 Register noted 'licences of right' (sect. 46/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19921022